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JPS5354968A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5354968A
JPS5354968A JP13027376A JP13027376A JPS5354968A JP S5354968 A JPS5354968 A JP S5354968A JP 13027376 A JP13027376 A JP 13027376A JP 13027376 A JP13027376 A JP 13027376A JP S5354968 A JPS5354968 A JP S5354968A
Authority
JP
Japan
Prior art keywords
semiconductor device
buried layers
integration
eliminated
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13027376A
Other languages
Japanese (ja)
Inventor
Kazuhiro Shimotori
Yasuharu Nagayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13027376A priority Critical patent/JPS5354968A/en
Publication of JPS5354968A publication Critical patent/JPS5354968A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs
    • H10D30/663—Vertical DMOS [VDMOS] FETs having both source contacts and drain contacts on the same surface, i.e. up-drain VDMOS
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs
    • H10D30/668—Vertical DMOS [VDMOS] FETs having trench gate electrodes, e.g. UMOS transistors

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: The need for drain electrode lead-out regions is eliminated and the improvement in the scale of integration is achieved by forming V-grooves down to buried layers and contacting drain electrodes to the buried layers.
COPYRIGHT: (C)1978,JPO&Japio
JP13027376A 1976-10-28 1976-10-28 Semiconductor device Pending JPS5354968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13027376A JPS5354968A (en) 1976-10-28 1976-10-28 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13027376A JPS5354968A (en) 1976-10-28 1976-10-28 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5354968A true JPS5354968A (en) 1978-05-18

Family

ID=15030346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13027376A Pending JPS5354968A (en) 1976-10-28 1976-10-28 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5354968A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574031U (en) * 1978-11-14 1980-05-21
JPS57200043U (en) * 1981-06-15 1982-12-20

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50134776A (en) * 1974-04-15 1975-10-25
JPS5132075A (en) * 1974-09-11 1976-03-18 Tetsutaro Mori Senkohodenkan no tentokairo

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50134776A (en) * 1974-04-15 1975-10-25
JPS5132075A (en) * 1974-09-11 1976-03-18 Tetsutaro Mori Senkohodenkan no tentokairo

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574031U (en) * 1978-11-14 1980-05-21
JPS5843774Y2 (en) * 1978-11-14 1983-10-04 セイコーインスツルメンツ株式会社 trimmer capacitor
JPS57200043U (en) * 1981-06-15 1982-12-20

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