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JPS5353975A - Electronic beam exposure device - Google Patents

Electronic beam exposure device

Info

Publication number
JPS5353975A
JPS5353975A JP12892476A JP12892476A JPS5353975A JP S5353975 A JPS5353975 A JP S5353975A JP 12892476 A JP12892476 A JP 12892476A JP 12892476 A JP12892476 A JP 12892476A JP S5353975 A JPS5353975 A JP S5353975A
Authority
JP
Japan
Prior art keywords
exposure device
beam exposure
electronic beam
electron beam
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12892476A
Other languages
Japanese (ja)
Inventor
Hiroshi Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12892476A priority Critical patent/JPS5353975A/en
Publication of JPS5353975A publication Critical patent/JPS5353975A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To make the electron beam incident to a wafer always at a right angle from the center of the wafer to its outside circumferential part by using two deflectors and deflecting the onee deflected electron beam by the same amount in the opposite dorection.
COPYRIGHT: (C)1978,JPO&Japio
JP12892476A 1976-10-27 1976-10-27 Electronic beam exposure device Pending JPS5353975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12892476A JPS5353975A (en) 1976-10-27 1976-10-27 Electronic beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12892476A JPS5353975A (en) 1976-10-27 1976-10-27 Electronic beam exposure device

Publications (1)

Publication Number Publication Date
JPS5353975A true JPS5353975A (en) 1978-05-16

Family

ID=14996737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12892476A Pending JPS5353975A (en) 1976-10-27 1976-10-27 Electronic beam exposure device

Country Status (1)

Country Link
JP (1) JPS5353975A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644003A (en) * 1979-09-17 1981-04-23 Teijin Ltd Gas enriching device
JPS6212041A (en) * 1985-07-09 1987-01-21 Nec Kyushu Ltd Parallel scanner
JPS62213122A (en) * 1986-03-13 1987-09-19 Fujitsu Ltd Electron beam exposure method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644003A (en) * 1979-09-17 1981-04-23 Teijin Ltd Gas enriching device
JPS6212041A (en) * 1985-07-09 1987-01-21 Nec Kyushu Ltd Parallel scanner
JPS62213122A (en) * 1986-03-13 1987-09-19 Fujitsu Ltd Electron beam exposure method

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