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JPS5341985A - Vertical type field effect transistor and its production - Google Patents

Vertical type field effect transistor and its production

Info

Publication number
JPS5341985A
JPS5341985A JP11643976A JP11643976A JPS5341985A JP S5341985 A JPS5341985 A JP S5341985A JP 11643976 A JP11643976 A JP 11643976A JP 11643976 A JP11643976 A JP 11643976A JP S5341985 A JPS5341985 A JP S5341985A
Authority
JP
Japan
Prior art keywords
vertical type
production
field effect
effect transistor
type field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11643976A
Other languages
Japanese (ja)
Inventor
Takayuki Kadaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Gakki Co Ltd
Original Assignee
Nippon Gakki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Gakki Co Ltd filed Critical Nippon Gakki Co Ltd
Priority to JP11643976A priority Critical patent/JPS5341985A/en
Publication of JPS5341985A publication Critical patent/JPS5341985A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Weting (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: Depletion layer forming means for channel control are arranged at the bottom fo the groove which follows a presceibed gate pattern, and the groove is filled up by an insulating film to smooth a substrate surface, thereby obtaining the vertical type FET of a superior high frequency characteristic.
COPYRIGHT: (C)1978,JPO&Japio
JP11643976A 1976-09-28 1976-09-28 Vertical type field effect transistor and its production Pending JPS5341985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11643976A JPS5341985A (en) 1976-09-28 1976-09-28 Vertical type field effect transistor and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11643976A JPS5341985A (en) 1976-09-28 1976-09-28 Vertical type field effect transistor and its production

Publications (1)

Publication Number Publication Date
JPS5341985A true JPS5341985A (en) 1978-04-15

Family

ID=14687124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11643976A Pending JPS5341985A (en) 1976-09-28 1976-09-28 Vertical type field effect transistor and its production

Country Status (1)

Country Link
JP (1) JPS5341985A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4546375A (en) * 1982-06-24 1985-10-08 Rca Corporation Vertical IGFET with internal gate and method for making same
JP2008305903A (en) 2007-06-06 2008-12-18 Rohm Co Ltd Semiconductor device
JP2008306095A (en) * 2007-06-11 2008-12-18 Rohm Co Ltd Semiconductor device
JP2008311573A (en) * 2007-06-18 2008-12-25 Rohm Co Ltd Semiconductor device
US8766317B2 (en) 2007-06-18 2014-07-01 Rohm Co., Ltd. Semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4546375A (en) * 1982-06-24 1985-10-08 Rca Corporation Vertical IGFET with internal gate and method for making same
JP2008305903A (en) 2007-06-06 2008-12-18 Rohm Co Ltd Semiconductor device
JP2008306095A (en) * 2007-06-11 2008-12-18 Rohm Co Ltd Semiconductor device
JP2008311573A (en) * 2007-06-18 2008-12-25 Rohm Co Ltd Semiconductor device
US8766317B2 (en) 2007-06-18 2014-07-01 Rohm Co., Ltd. Semiconductor device

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