JPS5340271A - Semiconductor diffusing method - Google Patents
Semiconductor diffusing methodInfo
- Publication number
- JPS5340271A JPS5340271A JP11477376A JP11477376A JPS5340271A JP S5340271 A JPS5340271 A JP S5340271A JP 11477376 A JP11477376 A JP 11477376A JP 11477376 A JP11477376 A JP 11477376A JP S5340271 A JPS5340271 A JP S5340271A
- Authority
- JP
- Japan
- Prior art keywords
- type
- diffusing method
- semiconductor
- diffused
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Landscapes
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: On a N-type region surface to which impurities will be diffused, SiO2 film is selectively formed, and then GaAs and Al2O3 are heated at once in the same container to diffuse Ga and Al into a N-type region; the region which is not covered with a SiO2 film, As is diffused, thereby simultaneously diffusing P-type and N-type impurities.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11477376A JPS5340271A (en) | 1976-09-27 | 1976-09-27 | Semiconductor diffusing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11477376A JPS5340271A (en) | 1976-09-27 | 1976-09-27 | Semiconductor diffusing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5340271A true JPS5340271A (en) | 1978-04-12 |
Family
ID=14646320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11477376A Pending JPS5340271A (en) | 1976-09-27 | 1976-09-27 | Semiconductor diffusing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5340271A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7293317B2 (en) | 2002-07-22 | 2007-11-13 | Uni-Charm Corporation | Holding device and cleaning tool with the holding device |
-
1976
- 1976-09-27 JP JP11477376A patent/JPS5340271A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7293317B2 (en) | 2002-07-22 | 2007-11-13 | Uni-Charm Corporation | Holding device and cleaning tool with the holding device |
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