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JPS5324280A - Production of semiconductor integrated circuit - Google Patents

Production of semiconductor integrated circuit

Info

Publication number
JPS5324280A
JPS5324280A JP9902876A JP9902876A JPS5324280A JP S5324280 A JPS5324280 A JP S5324280A JP 9902876 A JP9902876 A JP 9902876A JP 9902876 A JP9902876 A JP 9902876A JP S5324280 A JPS5324280 A JP S5324280A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
mask
thick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9902876A
Other languages
Japanese (ja)
Inventor
Koji Otsu
Hidenobu Mochizuki
Kazuo Suzuki
Takashi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP9902876A priority Critical patent/JPS5324280A/en
Publication of JPS5324280A publication Critical patent/JPS5324280A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Weting (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE:To make an IC of IG type MOSFETs by making insulation layers having thick and thin parts with the same mask, and opening holes through the use of the difference in film thickness thereby forming the diffusion mask.
JP9902876A 1976-08-19 1976-08-19 Production of semiconductor integrated circuit Pending JPS5324280A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9902876A JPS5324280A (en) 1976-08-19 1976-08-19 Production of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9902876A JPS5324280A (en) 1976-08-19 1976-08-19 Production of semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS5324280A true JPS5324280A (en) 1978-03-06

Family

ID=14235844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9902876A Pending JPS5324280A (en) 1976-08-19 1976-08-19 Production of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5324280A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192066A (en) * 1981-05-21 1982-11-26 Nec Corp Manufacture of semiconductor device
JPS59129892A (en) * 1983-01-17 1984-07-26 日本電信電話株式会社 Multifunctional display unit
US5523246A (en) * 1995-06-14 1996-06-04 United Microelectronics Corporation Method of fabricating a high-voltage metal-gate CMOS device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192066A (en) * 1981-05-21 1982-11-26 Nec Corp Manufacture of semiconductor device
JPS6362903B2 (en) * 1981-05-21 1988-12-05
JPS59129892A (en) * 1983-01-17 1984-07-26 日本電信電話株式会社 Multifunctional display unit
US5523246A (en) * 1995-06-14 1996-06-04 United Microelectronics Corporation Method of fabricating a high-voltage metal-gate CMOS device

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