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JPS53127268A - Size selection method - Google Patents

Size selection method

Info

Publication number
JPS53127268A
JPS53127268A JP4289577A JP4289577A JPS53127268A JP S53127268 A JPS53127268 A JP S53127268A JP 4289577 A JP4289577 A JP 4289577A JP 4289577 A JP4289577 A JP 4289577A JP S53127268 A JPS53127268 A JP S53127268A
Authority
JP
Japan
Prior art keywords
selection method
size selection
formation
monitor pattern
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4289577A
Other languages
Japanese (ja)
Other versions
JPS5846850B2 (en
Inventor
Aiichiro Nara
Hisao Kondo
Masao Sumiyoshi
Hideaki Ikegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4289577A priority Critical patent/JPS5846850B2/en
Publication of JPS53127268A publication Critical patent/JPS53127268A/en
Publication of JPS5846850B2 publication Critical patent/JPS5846850B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To analogize and classify an electrode diameter, by forming a monitor pattern every element simultaneously with the formation of a metallic electrode and by visually inspecting the degree of formation of the monitor pattern as to the element formed.
COPYRIGHT: (C)1978,JPO&Japio
JP4289577A 1977-04-13 1977-04-13 Size selection method Expired JPS5846850B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4289577A JPS5846850B2 (en) 1977-04-13 1977-04-13 Size selection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4289577A JPS5846850B2 (en) 1977-04-13 1977-04-13 Size selection method

Publications (2)

Publication Number Publication Date
JPS53127268A true JPS53127268A (en) 1978-11-07
JPS5846850B2 JPS5846850B2 (en) 1983-10-19

Family

ID=12648758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4289577A Expired JPS5846850B2 (en) 1977-04-13 1977-04-13 Size selection method

Country Status (1)

Country Link
JP (1) JPS5846850B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646534A (en) * 1979-09-25 1981-04-27 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS56165320A (en) * 1980-05-23 1981-12-18 Sanyo Electric Co Ltd Formation of multilayer electrodes of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646534A (en) * 1979-09-25 1981-04-27 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS56165320A (en) * 1980-05-23 1981-12-18 Sanyo Electric Co Ltd Formation of multilayer electrodes of semiconductor device
JPH0117248B2 (en) * 1980-05-23 1989-03-29 Sanyo Electric Co

Also Published As

Publication number Publication date
JPS5846850B2 (en) 1983-10-19

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