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JPS53108772A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53108772A
JPS53108772A JP2413677A JP2413677A JPS53108772A JP S53108772 A JPS53108772 A JP S53108772A JP 2413677 A JP2413677 A JP 2413677A JP 2413677 A JP2413677 A JP 2413677A JP S53108772 A JPS53108772 A JP S53108772A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
patterns
main patterns
proximity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2413677A
Other languages
Japanese (ja)
Inventor
Yasuo Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2413677A priority Critical patent/JPS53108772A/en
Publication of JPS53108772A publication Critical patent/JPS53108772A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To make possible direct reading of main patterns with accurate dimensional accuracy by simultaneously forming two testing patterns in which each portion is in proximity or connected other than the forming regions of main patterns.
COPYRIGHT: (C)1978,JPO&Japio
JP2413677A 1977-03-04 1977-03-04 Production of semiconductor device Pending JPS53108772A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2413677A JPS53108772A (en) 1977-03-04 1977-03-04 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2413677A JPS53108772A (en) 1977-03-04 1977-03-04 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53108772A true JPS53108772A (en) 1978-09-21

Family

ID=12129891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2413677A Pending JPS53108772A (en) 1977-03-04 1977-03-04 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53108772A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55147304A (en) * 1979-05-04 1980-11-17 Nec Corp Monitoring method of quantity of change in shape
JPH07153802A (en) * 1993-11-30 1995-06-16 Nec Corp Semiconductor device
JPH08162513A (en) * 1991-11-08 1996-06-21 Nec Corp Element dimension check pattern

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55147304A (en) * 1979-05-04 1980-11-17 Nec Corp Monitoring method of quantity of change in shape
JPH08162513A (en) * 1991-11-08 1996-06-21 Nec Corp Element dimension check pattern
JPH07153802A (en) * 1993-11-30 1995-06-16 Nec Corp Semiconductor device

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