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JPS53105261A - Shape measuring method of plate form objects - Google Patents

Shape measuring method of plate form objects

Info

Publication number
JPS53105261A
JPS53105261A JP1923077A JP1923077A JPS53105261A JP S53105261 A JPS53105261 A JP S53105261A JP 1923077 A JP1923077 A JP 1923077A JP 1923077 A JP1923077 A JP 1923077A JP S53105261 A JPS53105261 A JP S53105261A
Authority
JP
Japan
Prior art keywords
plate form
measuring method
shape measuring
form objects
vertically movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1923077A
Other languages
Japanese (ja)
Inventor
Hiroshi Nashihara
Hiroshi Maejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1923077A priority Critical patent/JPS53105261A/en
Publication of JPS53105261A publication Critical patent/JPS53105261A/en
Pending legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE: To measure warpage without scoring or damaging plate form objects by providing a vertically movable table which adheres the plate form object through vacuum suction and three vertically movable spherial seat heads on the circumference of said table.
COPYRIGHT: (C)1978,JPO&Japio
JP1923077A 1977-02-25 1977-02-25 Shape measuring method of plate form objects Pending JPS53105261A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1923077A JPS53105261A (en) 1977-02-25 1977-02-25 Shape measuring method of plate form objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1923077A JPS53105261A (en) 1977-02-25 1977-02-25 Shape measuring method of plate form objects

Publications (1)

Publication Number Publication Date
JPS53105261A true JPS53105261A (en) 1978-09-13

Family

ID=11993569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1923077A Pending JPS53105261A (en) 1977-02-25 1977-02-25 Shape measuring method of plate form objects

Country Status (1)

Country Link
JP (1) JPS53105261A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095301A (en) * 1983-10-31 1985-05-28 Toshiba Corp Thickness and warp measuring device of plate-shaped object
JPH0185606U (en) * 1987-11-30 1989-06-07
JPH01104503U (en) * 1987-12-30 1989-07-14
JP2003021513A (en) * 2001-07-09 2003-01-24 Tokyo Seimitsu Co Ltd Device and method for surface shape measurement
JP2008116354A (en) * 2006-11-06 2008-05-22 Nec Electronics Corp Warpage measurement system, film formation system, and warpage measurement method
JP2018008300A (en) * 2016-07-15 2018-01-18 日産自動車株式会社 Self-piercing rivet joining method and self-piercing rivet joining device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095301A (en) * 1983-10-31 1985-05-28 Toshiba Corp Thickness and warp measuring device of plate-shaped object
JPH0185606U (en) * 1987-11-30 1989-06-07
JPH01104503U (en) * 1987-12-30 1989-07-14
JP2003021513A (en) * 2001-07-09 2003-01-24 Tokyo Seimitsu Co Ltd Device and method for surface shape measurement
JP2008116354A (en) * 2006-11-06 2008-05-22 Nec Electronics Corp Warpage measurement system, film formation system, and warpage measurement method
JP2018008300A (en) * 2016-07-15 2018-01-18 日産自動車株式会社 Self-piercing rivet joining method and self-piercing rivet joining device

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