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JPS5310273A - Mesa type semiconductor device - Google Patents

Mesa type semiconductor device

Info

Publication number
JPS5310273A
JPS5310273A JP8473476A JP8473476A JPS5310273A JP S5310273 A JPS5310273 A JP S5310273A JP 8473476 A JP8473476 A JP 8473476A JP 8473476 A JP8473476 A JP 8473476A JP S5310273 A JPS5310273 A JP S5310273A
Authority
JP
Japan
Prior art keywords
semiconductor device
type semiconductor
mesa type
substrate
main surfaces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8473476A
Other languages
Japanese (ja)
Inventor
Toshiyuki Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8473476A priority Critical patent/JPS5310273A/en
Publication of JPS5310273A publication Critical patent/JPS5310273A/en
Pending legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Thyristors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To prevent the cracking of insulation films, substrate chipping and shorting by at least three continuous mesa grooves extending from both main surfaces of a semiconductor substrate to required portions beyond PN junctions, opposedly to each other with respect to both main surfaces, and forming these mesa grooves lower than the substrate surfaces.
COPYRIGHT: (C)1978,JPO&Japio
JP8473476A 1976-07-15 1976-07-15 Mesa type semiconductor device Pending JPS5310273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8473476A JPS5310273A (en) 1976-07-15 1976-07-15 Mesa type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8473476A JPS5310273A (en) 1976-07-15 1976-07-15 Mesa type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5310273A true JPS5310273A (en) 1978-01-30

Family

ID=13838914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8473476A Pending JPS5310273A (en) 1976-07-15 1976-07-15 Mesa type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5310273A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5613736A (en) * 1979-07-16 1981-02-10 Nec Corp Semiconductor device
JPS5640662U (en) * 1979-09-05 1981-04-15
JPS62179128A (en) * 1986-01-31 1987-08-06 Sharp Corp Manufacturing method of semiconductor device
JPH03126245A (en) * 1989-10-12 1991-05-29 Fuji Electric Co Ltd Manufacture of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5613736A (en) * 1979-07-16 1981-02-10 Nec Corp Semiconductor device
JPS5640662U (en) * 1979-09-05 1981-04-15
JPS62179128A (en) * 1986-01-31 1987-08-06 Sharp Corp Manufacturing method of semiconductor device
JPH03126245A (en) * 1989-10-12 1991-05-29 Fuji Electric Co Ltd Manufacture of semiconductor device

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