JPS5240459B2 - - Google Patents
Info
- Publication number
- JPS5240459B2 JPS5240459B2 JP6060673A JP6060673A JPS5240459B2 JP S5240459 B2 JPS5240459 B2 JP S5240459B2 JP 6060673 A JP6060673 A JP 6060673A JP 6060673 A JP6060673 A JP 6060673A JP S5240459 B2 JPS5240459 B2 JP S5240459B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Control Of Combustion (AREA)
- Regulation And Control Of Combustion (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6060673A JPS5240459B2 (en) | 1973-05-30 | 1973-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6060673A JPS5240459B2 (en) | 1973-05-30 | 1973-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS509127A JPS509127A (en) | 1975-01-30 |
| JPS5240459B2 true JPS5240459B2 (en) | 1977-10-12 |
Family
ID=13147067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6060673A Expired JPS5240459B2 (en) | 1973-05-30 | 1973-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5240459B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51118968A (en) * | 1975-04-11 | 1976-10-19 | Toshiba Corp | Electron beam exposure device |
-
1973
- 1973-05-30 JP JP6060673A patent/JPS5240459B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS509127A (en) | 1975-01-30 |