JPS5187970A - - Google Patents
Info
- Publication number
- JPS5187970A JPS5187970A JP1257675A JP1257675A JPS5187970A JP S5187970 A JPS5187970 A JP S5187970A JP 1257675 A JP1257675 A JP 1257675A JP 1257675 A JP1257675 A JP 1257675A JP S5187970 A JPS5187970 A JP S5187970A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257675A JPS5322424B2 (en) | 1975-01-31 | 1975-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257675A JPS5322424B2 (en) | 1975-01-31 | 1975-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5187970A true JPS5187970A (en) | 1976-07-31 |
| JPS5322424B2 JPS5322424B2 (en) | 1978-07-08 |
Family
ID=11809176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1257675A Expired JPS5322424B2 (en) | 1975-01-31 | 1975-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5322424B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5638888A (en) * | 1979-09-07 | 1981-04-14 | Hitachi Ltd | Pattern forming method |
| JPS60208832A (en) * | 1984-04-02 | 1985-10-21 | Matsushita Electric Ind Co Ltd | Photomask and manufacture of semiconductor device using the same |
| JPS61289351A (en) * | 1985-06-17 | 1986-12-19 | Fujitsu Ltd | Pattern variable type photomask |
| JPH0643628A (en) * | 1993-03-22 | 1994-02-18 | Hitachi Ltd | Method for marking pattern by laser beam |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050096342A (en) * | 2004-03-30 | 2005-10-06 | 삼성전자주식회사 | Refrigerator |
-
1975
- 1975-01-31 JP JP1257675A patent/JPS5322424B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5638888A (en) * | 1979-09-07 | 1981-04-14 | Hitachi Ltd | Pattern forming method |
| JPS6321887B2 (en) * | 1979-09-07 | 1988-05-10 | Hitachi Ltd | |
| JPS60208832A (en) * | 1984-04-02 | 1985-10-21 | Matsushita Electric Ind Co Ltd | Photomask and manufacture of semiconductor device using the same |
| JPS61289351A (en) * | 1985-06-17 | 1986-12-19 | Fujitsu Ltd | Pattern variable type photomask |
| JPH0643628A (en) * | 1993-03-22 | 1994-02-18 | Hitachi Ltd | Method for marking pattern by laser beam |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5322424B2 (en) | 1978-07-08 |