JPS5169678A - - Google Patents
Info
- Publication number
- JPS5169678A JPS5169678A JP50132078A JP13207875A JPS5169678A JP S5169678 A JPS5169678 A JP S5169678A JP 50132078 A JP50132078 A JP 50132078A JP 13207875 A JP13207875 A JP 13207875A JP S5169678 A JPS5169678 A JP S5169678A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N39/00—Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7414459A NL7414459A (en) | 1974-11-06 | 1974-11-06 | PRESSURE TRANSMITTER. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5169678A true JPS5169678A (en) | 1976-06-16 |
Family
ID=19822401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50132078A Pending JPS5169678A (en) | 1974-11-06 | 1975-11-01 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5169678A (en) |
| DE (1) | DE2549001A1 (en) |
| FR (1) | FR2290658A1 (en) |
| IT (1) | IT1048760B (en) |
| NL (1) | NL7414459A (en) |
| SE (1) | SE7512278L (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5664471A (en) * | 1979-10-30 | 1981-06-01 | Toshiba Corp | Detector for pressure of semiconductor |
| JPS5687372A (en) * | 1979-12-19 | 1981-07-15 | Hitachi Ltd | Semiconductor type measuring diaphragm |
| JPS56133877A (en) * | 1980-03-24 | 1981-10-20 | Hitachi Ltd | Semiconductor diaphragm type sensor |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4191057A (en) * | 1978-06-28 | 1980-03-04 | Gould Inc. | Inversion layer sprain gauge |
| JPS5516228A (en) * | 1978-07-21 | 1980-02-04 | Hitachi Ltd | Capacity type sensor |
| DE3004031C2 (en) * | 1980-02-05 | 1990-03-29 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Pressure transducer |
| DE3108300C2 (en) * | 1980-03-06 | 1986-05-28 | Robert Bosch Gmbh, 7000 Stuttgart | Pressure cell and process for its manufacture |
| DE3624240A1 (en) * | 1986-07-18 | 1988-01-28 | Vdo Schindling | MECHANICAL-ELECTRIC CONVERTER |
| JPH0691265B2 (en) * | 1986-08-01 | 1994-11-14 | 株式会社日立製作所 | Semiconductor pressure sensor |
| US6140143A (en) * | 1992-02-10 | 2000-10-31 | Lucas Novasensor Inc. | Method of producing a buried boss diaphragm structure in silicon |
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1974
- 1974-11-06 NL NL7414459A patent/NL7414459A/en unknown
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1975
- 1975-11-01 JP JP50132078A patent/JPS5169678A/ja active Pending
- 1975-11-03 IT IT28979/75A patent/IT1048760B/en active
- 1975-11-03 DE DE19752549001 patent/DE2549001A1/en active Pending
- 1975-11-03 SE SE7512278A patent/SE7512278L/en not_active Application Discontinuation
- 1975-11-05 FR FR7533825A patent/FR2290658A1/en not_active Withdrawn
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5664471A (en) * | 1979-10-30 | 1981-06-01 | Toshiba Corp | Detector for pressure of semiconductor |
| JPS5687372A (en) * | 1979-12-19 | 1981-07-15 | Hitachi Ltd | Semiconductor type measuring diaphragm |
| JPS56133877A (en) * | 1980-03-24 | 1981-10-20 | Hitachi Ltd | Semiconductor diaphragm type sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2549001A1 (en) | 1976-05-13 |
| FR2290658A1 (en) | 1976-06-04 |
| IT1048760B (en) | 1980-12-20 |
| NL7414459A (en) | 1976-05-10 |
| SE7512278L (en) | 1976-05-07 |