JPS49111585A - - Google Patents
Info
- Publication number
- JPS49111585A JPS49111585A JP2118173A JP2118173A JPS49111585A JP S49111585 A JPS49111585 A JP S49111585A JP 2118173 A JP2118173 A JP 2118173A JP 2118173 A JP2118173 A JP 2118173A JP S49111585 A JPS49111585 A JP S49111585A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Drying Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2118173A JPS5235596B2 (en) | 1973-02-23 | 1973-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2118173A JPS5235596B2 (en) | 1973-02-23 | 1973-02-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49111585A true JPS49111585A (en) | 1974-10-24 |
| JPS5235596B2 JPS5235596B2 (en) | 1977-09-09 |
Family
ID=12047752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2118173A Expired JPS5235596B2 (en) | 1973-02-23 | 1973-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5235596B2 (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244562A (en) * | 1975-10-07 | 1977-04-07 | Fujitsu Ltd | Epitaxial growth method |
| JPS5272172A (en) * | 1975-12-12 | 1977-06-16 | Mitsubishi Electric Corp | Formation of insulator film on semiconductor crystal |
| JPS5438770A (en) * | 1977-09-01 | 1979-03-23 | Mitsubishi Electric Corp | Etching device |
| JPS5565428A (en) * | 1978-11-10 | 1980-05-16 | Tdk Corp | Direct formation of thin film pattern |
| JPS56142630A (en) * | 1980-04-09 | 1981-11-07 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS57500492A (en) * | 1980-05-12 | 1982-03-18 | ||
| JPS5892216A (en) * | 1981-11-27 | 1983-06-01 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
| JPS58132925A (en) * | 1982-02-02 | 1983-08-08 | Agency Of Ind Science & Technol | Manufacture of device employing pattern projection |
| JPS59140369A (en) * | 1983-12-27 | 1984-08-11 | Agency Of Ind Science & Technol | Method and device for producing thin film |
| JPS61119042A (en) * | 1984-11-15 | 1986-06-06 | Toshiba Corp | Decomposing device of semiconductor thin film |
| JPS61224387A (en) * | 1985-03-28 | 1986-10-06 | Rikagaku Kenkyusho | semiconductor equipment |
-
1973
- 1973-02-23 JP JP2118173A patent/JPS5235596B2/ja not_active Expired
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244562A (en) * | 1975-10-07 | 1977-04-07 | Fujitsu Ltd | Epitaxial growth method |
| JPS5272172A (en) * | 1975-12-12 | 1977-06-16 | Mitsubishi Electric Corp | Formation of insulator film on semiconductor crystal |
| JPS5438770A (en) * | 1977-09-01 | 1979-03-23 | Mitsubishi Electric Corp | Etching device |
| JPS5565428A (en) * | 1978-11-10 | 1980-05-16 | Tdk Corp | Direct formation of thin film pattern |
| JPS56142630A (en) * | 1980-04-09 | 1981-11-07 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS57500492A (en) * | 1980-05-12 | 1982-03-18 | ||
| JPS5892216A (en) * | 1981-11-27 | 1983-06-01 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
| JPS58132925A (en) * | 1982-02-02 | 1983-08-08 | Agency Of Ind Science & Technol | Manufacture of device employing pattern projection |
| JPS59140369A (en) * | 1983-12-27 | 1984-08-11 | Agency Of Ind Science & Technol | Method and device for producing thin film |
| JPS61119042A (en) * | 1984-11-15 | 1986-06-06 | Toshiba Corp | Decomposing device of semiconductor thin film |
| JPS61224387A (en) * | 1985-03-28 | 1986-10-06 | Rikagaku Kenkyusho | semiconductor equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5235596B2 (en) | 1977-09-09 |