JPS4841440B1 - - Google Patents
Info
- Publication number
- JPS4841440B1 JPS4841440B1 JP44055511A JP5551169A JPS4841440B1 JP S4841440 B1 JPS4841440 B1 JP S4841440B1 JP 44055511 A JP44055511 A JP 44055511A JP 5551169 A JP5551169 A JP 5551169A JP S4841440 B1 JPS4841440 B1 JP S4841440B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US74529268A | 1968-07-16 | 1968-07-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4841440B1 true JPS4841440B1 (ja) | 1973-12-06 |
Family
ID=24996075
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP44055511A Pending JPS4841440B1 (ja) | 1968-07-16 | 1969-07-15 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3706612A (ja) |
| JP (1) | JPS4841440B1 (ja) |
| DE (1) | DE1934743B2 (ja) |
| FR (1) | FR2014621A1 (ja) |
| GB (1) | GB1209889A (ja) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1423448A (en) * | 1973-07-18 | 1976-02-04 | Plessey Co Ltd | Method of selectively etching silicon nitride |
| US4075367A (en) * | 1976-03-18 | 1978-02-21 | Ncr Corporation | Semiconductor processing of silicon nitride |
| US5341805A (en) * | 1993-04-06 | 1994-08-30 | Cedars-Sinai Medical Center | Glucose fluorescence monitor and method |
| US5456252A (en) * | 1993-09-30 | 1995-10-10 | Cedars-Sinai Medical Center | Induced fluorescence spectroscopy blood perfusion and pH monitor and method |
| US5503559A (en) * | 1993-09-30 | 1996-04-02 | Cedars-Sinai Medical Center | Fiber-optic endodontic apparatus and method |
| CA2385527A1 (en) * | 2002-05-09 | 2003-11-09 | Neks Recherche & Developpement Inc. | Device and method to detect dental root canal apical foramina and other structures |
| DE102004025000A1 (de) | 2004-05-21 | 2005-12-08 | Bayer Technology Services Gmbh | Verfahren zur Herstellung von chemischen und pharmazeutischen Produkten mit integrierter Mehrsäulen-Chromatographie |
-
1968
- 1968-07-16 US US745292A patent/US3706612A/en not_active Expired - Lifetime
-
1969
- 1969-06-25 FR FR6921607A patent/FR2014621A1/fr not_active Withdrawn
- 1969-07-07 GB GB34104/69A patent/GB1209889A/en not_active Expired
- 1969-07-09 DE DE19691934743 patent/DE1934743B2/de not_active Withdrawn
- 1969-07-15 JP JP44055511A patent/JPS4841440B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE1934743A1 (de) | 1970-01-22 |
| US3706612A (en) | 1972-12-19 |
| GB1209889A (en) | 1970-10-21 |
| DE1934743B2 (de) | 1971-04-29 |
| FR2014621A1 (ja) | 1970-04-17 |