JPH11325891A - Laser level device - Google Patents

Abstract

(57) [Abstract] [Purpose] The present invention relates to a laser surveying instrument capable of forming a measurement reference line and a reference plane by a laser beam, and particularly to a horizontal plane as well as a horizontal reference line and a reference plane. It is an object of the present invention to provide a laser level device capable of forming a reference line or a reference plane inclined at a predetermined angle. [Configuration] The present invention provides a light source unit, wherein a support unit rotates around a vertical axis, a laser projection unit rotates around a horizontal axis, and a rotation irradiation unit forms a laser plane parallel to the horizontal axis. Irradiates a laser beam along the center of rotation of the laser projection unit, and the liquid surface reflection compensator provided on the support unit performs the first correction of the optical axis and is provided on the laser projection unit. The angular magnification reducing unit performs the second correction of the optical axis, and the liquid surface reflection compensator and the angular magnification reducing unit can correct the laser optical axis toward the rotating irradiation unit.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser surveying instrument capable of forming a measurement reference line or a reference plane by a laser beam, and more particularly to a laser surveying instrument not only for a horizontal reference line and a reference plane but also for a predetermined horizontal plane. The present invention relates to a laser level device capable of forming a reference line or a reference plane inclined at an angle.

[0002]

2. Description of the Related Art Conventionally, a rotary laser device whose inclination can be set has a structure supported by a gimbal or a spherical surface so that a laser projecting portion can be freely inclined, or a laser projecting device on a vertical axis and a horizontal axis. Some are supported by the light section.

[0003] Here, based on FIG. 10, a description will be given of a structure in which a laser projection unit is supported by a spherical surface. The laser projecting unit 9100 is supported by a spherical surface, and is configured so that a laser beam is rotationally projected on a reference plane from a rotating projecting unit 9200 provided in the laser projecting unit 9100. Note that the rotating irradiation unit 9200 is driven by a motor 9250.

[0004] The laser projecting section 9100 can be tilted in one or two directions by vertically moving an arm 9300 (one direction not shown) extending in two orthogonal directions by a vertical mechanism driven by a motor 9350. It is configured. The laser projector 9100 is leveled by two tilt sensors 9410 and 9420 formed on the main body. Then, the laser projecting unit 9100 is tilted and set in a predetermined direction after leveling.

[0005] This tilt setting is performed, for example, by directly driving the set tilt angle or by converting the outputs of the two tilt sensors 9410 and 9420 into the number of motor pulses and driving the motor 9350 based on the calculated angle. Can be set. Note that an appropriate tilt detector can be employed. If the laser projection unit 9100 is inclined in only one direction, an inclined surface in a predetermined direction is formed, and if the laser projection unit 9100 is inclined in two directions, a composite inclined surface can be formed.

[0006] Next, based on FIG.
A configuration in which 100 is supported on a vertical axis and a horizontal axis will be described. A mounting portion 9500 that rotates around a vertical axis;
Laser projection unit 910 that rotates around a horizontal axis on 500
0. This laser projector 9100
A rotation irradiation unit 9200 is provided on the upper side, and can rotate and irradiate a laser beam onto a reference plane. Then, similarly to the configuration in which the laser projection unit is supported by a spherical surface, the laser light is leveled by an appropriate leveling unit.

In a configuration in which the laser projecting unit 9100 is supported on the vertical axis and the horizontal axis, the support unit is rotated about the horizontal axis so that the rotation direction of the laser projecting unit 9100 matches the inclination direction. After the rotation of the mounting portion, the laser projector 9100 is rotated about a vertical axis to be tilted at a predetermined angle, thereby performing tilt setting.

The composite inclined surface can be formed by calculating the direction and the inclination angle of the composite inclination from the inclination data in two directions, and inclining the composite inclination surface in the direction determined based on the operation result.

[0009]

However, the above conventional laser surveying instrument does not cause an error when the rotation axis of the inclination setting device rotates around an ideal arbitrary axis. In reality, there is a problem that a shaft play for smooth rotation is required, and a conversion of the angle of the shaft play results in a tilt error.

[0010] Accordingly, there has been a strong demand for a laser surveying instrument capable of reducing the tilt error due to the axial play and improving the tilt setting accuracy.

Further, the rotary laser device supported on a spherical surface has a simple basic structure for setting the inclination, so that the setting can be made with relatively high accuracy, but the set gradient has a structural limit. Therefore, there is a problem that it is not suitable for setting a high gradient.

In the rotary laser device supported on the vertical axis and the horizontal axis, it is relatively easy to set a high gradient. However, as described above, since many errors are accumulated in the rotary axis, a high level is required. There has been a problem that high machining accuracy is required and the cost is high.

[0013]

SUMMARY OF THE INVENTION The present invention has been devised in view of the above-mentioned problems, and has a supporting portion which rotates around a vertical axis, and which is supported by the supporting portion and rotates about a horizontal axis. A laser projecting unit, a rotating irradiation unit provided on the laser projecting unit, for forming a laser plane parallel to a horizontal axis, and irradiating laser light along a rotation center of the laser projecting unit. A liquid surface reflection compensator provided on the mounting portion for performing a first correction of an optical axis; and a light source portion provided on the laser projecting portion for performing a second correction of an optical axis. Wherein the liquid surface reflection compensator and the angular magnification reducing means correct the laser optical axis toward the rotating irradiation unit.

According to the present invention, there is further provided a mounting portion rotating around a vertical axis, a laser light emitting portion supported by the mounting portion and rotating around a horizontal axis, and provided on the laser light emitting portion. A rotation irradiation unit for forming a laser plane parallel to the horizontal axis, a light source unit for irradiating laser light along a rotation center of the laser projection unit, and a light source provided on the mounting unit; A liquid surface reflection compensator for performing a first correction of an axis, an angular magnification reducing unit provided in the laser projector for performing a second correction of an optical axis, and leveling the mounting portion; Leveling means, and an inclination sensor for detecting the inclination of the mounting portion, the liquid surface reflection compensator and the angular magnification reducing means, the laser optical axis toward the rotary irradiation unit Is corrected.

Further, the liquid surface reflection compensator of the present invention can be provided with optical means for performing correction in two axial directions.

In the present invention, the liquid surface reflection compensator and the angular magnification reducing means may be configured to correct the laser optical axis toward the rotating irradiation unit in a direction perpendicular to a horizontal axis. .

Further, the present invention may be arranged such that the angular magnification reducing means is arranged on the optical path of incidence and emission of the liquid surface reflection compensator.

Further, the rotation irradiating section of the present invention is provided with a rotation angle detector for detecting rotation, and forms a laser plane for reciprocal scanning in the rotation direction of the laser projection section. You can also.

The mounting portion of the present invention is provided with a first rotation angle detector for detecting rotation about a vertical axis,
The laser projection unit may be provided with a second rotation angle detection unit for detecting rotation about a horizontal axis.

Further, according to the present invention, an inclined surface in a predetermined direction is irradiated with a laser beam on the basis of inclination setting data, and angle detection between the first rotation angle detection unit and the second rotation angle detection unit. Alternatively, the configuration may be modified.

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention constructed as described above
The mounting portion rotates about a vertical axis, the laser light emitting portion supported by the mounting portion rotates about a horizontal axis, and a rotating irradiation portion provided on the laser light emitting portion rotates on a horizontal axis. The light source irradiates laser light along the center of rotation of the laser projection unit, and the liquid surface reflection compensator provided on the support unit performs the first correction of the optical axis. And the angular magnification reduction means provided in the laser projection unit
Is corrected, and the laser optical axis can be corrected toward the rotating irradiation unit by the liquid surface reflection compensator and the angular magnification reduction unit.

Further, according to the present invention, the mounting portion is rotated about a vertical axis, and the laser projecting portion supported by the mounting portion is rotated about a horizontal axis, and is provided on the laser projecting portion. The rotating irradiation unit forms a laser plane parallel to the horizontal axis, and the light source unit
A laser beam is emitted along the center of rotation of the laser projecting unit, and a liquid surface reflection compensator provided on the support unit performs a first correction of the optical axis, and an angular magnification provided on the laser projecting unit. The reduction means performs a second correction of the optical axis, the leveling means levels the mounting part, the inclination sensor detects the inclination of the mounting part, and the liquid surface reflection compensator and the angular magnification reduction means, The laser optical axis can be corrected toward the rotation irradiation unit.

Further, the optical means provided in the liquid surface reflection compensator of the present invention can also perform biaxial correction.

According to the present invention, the laser optical axis can be corrected in the direction orthogonal to the horizontal axis toward the rotating irradiation unit by the liquid surface reflection compensator and the angular magnification reducing means.

Further, according to the present invention, an angular magnification reducing means can be arranged on the optical path of incidence and emission of the liquid surface reflection compensator.

Further, the rotation angle detector provided in the rotation irradiation unit of the present invention can detect the rotation and form a laser plane for reciprocal scanning in the rotation direction of the laser projection unit.

The first rotation angle detector provided on the mounting portion of the present invention detects the rotation around the vertical axis, and the second rotation angle detection portion provided on the laser projecting portion includes: Rotation around the horizontal axis can also be detected.

Further, according to the present invention, the inclination setting data and the first
It is also possible to irradiate the inclined surface in a predetermined direction with laser light based on the angle detection between the rotation angle detection unit and the second rotation angle detection unit.

[0029]

【Example】

An embodiment of the present invention will be described with reference to the drawings.

(Principle)

Here, the principle of the present invention will be described.

"Rotational backlash of tilt setting device"

First, the rotation shaft play will be described.

As shown in FIG. 4, the rotating shaft 700 is moved in the X-axis direction.
Is installed, and is rotatably fixed by the first bearing 710 and the second bearing 720.
Then, in a direction orthogonal to the rotation axis 700 (X axis),
A laser beam is irradiated, and the laser irradiation optical axis is defined as a Z axis.

As shown in FIG. 5, the tilt error of the optical system due to the play of the rotating shaft 700 is represented by the error θ ₁ in the XZ plane and the error θ ₁ in FIG.
XY plane error θ ₂ shown in FIG.

As shown in FIG. 5, the error θ ₁ in the XZ plane is when the rotation axis 700 is rotated by an angle θ ₁ in the XZ plane about the origin. In this case, the irradiated laser light falls from the Z axis.

In the laser apparatus, since the irradiation is performed in a direction perpendicular to the Z axis, the tilt of the Z axis results in the tilt of the rotating irradiation surface. For example, a plane inclined from a horizontal plane is formed.

Next, as shown in FIG. 6, the error θ ₂ in the XY plane
Shows a case where the rotation axis 700 is rotated by an angle θ ₂ about the origin in the XY plane.

The axial play is usually represented by an error in the XZ plane θ ₁ ,
There is an error with the XY plane error θ _2, and it is necessary to eliminate the XY plane error θ ₂ in order to eliminate the XZ plane error θ ₁ . If the structure of correcting only XZ plane error theta ₁ is always the inclination of the rotating irradiation plane.

"Principle of liquid surface reflection compensator"

Next, the liquid surface reflection compensator 800
Will be described with reference to FIG. The liquid surface reflection compensator 800 includes a liquid 810, an anamorphic prism beam expander 820, a mirror 830,
And an angular magnification reduction unit 1400.

Since the surface of the liquid 810 is always horizontal, if the liquid surface is inclined by an angle α about the Y axis,
If the inclination angle of the optical axis after reflection surface of the liquid 810 beta ₁ and,

Β ₁ = 2α (1)

Is as follows.

When the optical axis is tilted by an angle α about the X axis, the angle of inclination of the optical axis after reflecting the surface of the liquid 810 is β ₂ .

Β ₂ = cos ⁻¹ (cos ² θcos2α + sin ² θ) 2

## EQU4 ## and tilt on the ZY plane. Here, θ is a liquid surface incident angle with respect to the surface of the liquid 810.

If the refractive index of the liquid 810 is η, the optical axis that passes through the liquid 810 and is emitted to the air side is:

Β ₁ = 2αη (3)

Β ₂ = η * (cos ⁻¹ (cos ² θcos2)
α + sin ² θ)) ・ ・ ・ Formula 4

It will only tilt.

Therefore, when the incident angle to the liquid 810 is different in two dimensions, the sensitivity differs between the incident angle and the exit angle.

For example, θ = 50 degrees, η = 1.403, α
= 10 minutes and substituting into the third and fourth equations,

Β ₁ = 2 * (10 minutes) * 1.403 = 0.466766

Β ₂ = 1.403 * (cos ⁻¹ (cos
² (50 degrees) cos2 (2 * 10 minutes) + sin ² (50
Degree)) = 0.30061

Becomes

Β ₁ / β ₂ = 1.5557 times (5)

Has the following sensitivity difference.

Further, for the liquid surface incident angle θ, β ₁ is 2.
The magnification becomes 806 times, and β ₂ becomes 1.803 times.

Since the anamorphic prism beam expander 820 has a magnification in only one direction, it is arranged in the direction of the sensitivity magnification of the fifth formula, and finally, β ₁ : β ₂ =
Set to 1: 1. That is, in this case, the angular magnification of the anamorphic prism beam expander 820 is set to 1 / (β ₁ / β ₂ ) = 1 / 1.5557.

If the sensitivity magnification and the like are set as described above, X,
The optical axis after reflection on the two-dimensional plane of the Y plane is always constant. When the optical axis is inclined by an angle α about the Y axis, the optical axis after passing through the anamorphic prism beam expander 820 is ,

2αη * (1 / (β ₁ / β ₂ )) = 2αη * (1 / 1.5557) = 1.803α (6)

Only, it is inclined with respect to the original optical axis.

When this light beam is reflected by the mirror 830 and passes through the angular magnification reduction section 1400 (magnification 1.803), f ₁ : f ₂ = 1.803: 1 as shown in FIG.

1.803α * (1 / 1.803) = α (7)

The final optical axis is always parallel to the normal of the liquid surface.

Therefore, the vertical optical axis can always be set regardless of the inclination of the apparatus main body.

Further, this optical axis is moved to 9
A constant horizontal plane can be formed by deflecting the light horizontally by 0 degrees and rotating this light.

[Example]

[First Embodiment]

The laser device 10000 of the first embodiment
As shown in FIG. 1, a laser device main body 1000 capable of setting an inclination in a predetermined direction, and an automatic leveling section 20 for mounting the laser device main body 1000 horizontally.
00. Laser device body 1000
Is connected to the automatic leveling unit 2000, and is attached so as to be rotatable in the horizontal direction.

As shown in FIG. 1, the laser device main body 1000 has a support portion 1010 for turning around a vertical axis and pointing in an inclined direction, and a horizontal portion on the support portion 1010, which intersects the vertical axis. And a laser projecting unit 1020 for setting an inclination by rotating around an axis.

The mounting portion 1010 is configured to be rotatable by mounting portion driving means 8100 including appropriate rotating means such as a motor.

Further, the laser projection unit 1020 is also configured to be rotatable by a laser projection unit driving unit 8200 composed of an appropriate rotating unit such as a motor.

The support unit 1010 is provided with a light source unit 1100
, A first reflection mirror section 1371, a second reflection mirror section 1372, a third reflection mirror section 1373, a fourth reflection mirror section 1374, a liquid surface reflection compensator 1380, and a first rotation angle. And a detection unit 1700.

The laser projecting section 1020 includes a light source section 1100, an objective lens 1200, and a mirror 1360.
An angular magnification reduction unit 1400, a rotation irradiation unit 1500,
A second rotation angle detection unit 1800.

The light source section 1100 is a laser light source. In this embodiment, a semiconductor laser is used. However, any element can be used as long as it can emit laser light.

The objective lens 1200 is for converting the laser light from the light source unit 1100 into a parallel light beam. In the present embodiment, the laser beam is emitted in the horizontal axis direction of the laser device main body 1000.

The laser projecting unit 1020 has a laser beam emitting direction from the light source unit 1100 as a central axis.
It is configured to be rotatable. Therefore, the laser projector 1
020 is attached rotatably in a plane orthogonal to the horizontal direction.

The laser light emitted from the objective lens 1200 is reflected vertically downward by the first reflecting mirror 1371, further horizontally reflected by the second reflecting mirror 1372, and becomes a liquid surface reflection compensator 1380. It is configured to be incident on.

The liquid surface reflection compensator 138
The laser light emitted from the third reflection mirror unit 1
The light is reflected vertically upward at 373, and is further horizontally reflected by the fourth reflection mirror unit 1374 and enters the mirror 1360.

An angular magnification reduction section 1400 is arranged before and after the mirror 1360. The angular magnification reduction unit 1400
A configuration in which the mirror is arranged after the mirror 1360 may be employed. In the case of FIG. 1, it is configured via a mirror 1360 to make it compact.

The laser light incident on the mirror 1360 is corrected by the angular magnification reduction unit 1400, and is reflected vertically upward.

A liquid surface reflection compensator 1380 utilizing the fact that the liquid surface is horizontal, and an angular magnification reduction unit 1400
Is for always forming a vertical optical axis.

This liquid surface reflection compensator 1380
Is as described in “Principle of liquid surface reflection compensator” above.

The liquid surface reflection compensator 1380 of the first embodiment includes a liquid 1381 and anamorphic prisms 1382 and 1382. Liquid 1381
Employs dimethyl silicone oil, but any liquid may be used. Anamorphic prism 13
82 has a magnification of 1 / 1.557 in the Yz direction,
In the Yx direction, the magnification is 1 ×.

Then, the liquid surface reflection compensator 13
80 as a whole has a magnification of 2.806 times in the Yz direction,
It has a magnification of 1.803 times in the Yx direction.

Further, between the fourth reflection mirror portion 1374 and the mirror 1360 and vertically above the mirror 1360,
An angular magnification reduction unit 1400 is provided.

The angular magnification reduction section 1400 of the first embodiment is
f ₁ : f ₂ = 1.803: 1, and the error θ ₁ in the XZ plane is set to 1 / 1.803. In addition, according to the magnification of the liquid surface reflection compensator 1380, 1 /
X.

The rotation irradiator 1500 is provided with the laser projector 1
020, for rotating and irradiating a laser beam on a reference plane set at an inclination. A pentaprism 1510 is fixed to the rotating irradiation unit 1500, and is configured to be rotatable by a rotating irradiation unit driving unit 8300. The laser beam reflected vertically upward by the laser beam deflection unit 1300 passes through the angular magnification reduction unit 1400, and then enters the pentaprism 1510.

The laser beam incident on the pentaprism 1510 is configured to be reflected and deflected by 90 degrees, and to be irradiated in a plane direction with the rotation of the rotary head 1500. Therefore, a laser reference plane can be formed by irradiating a laser beam onto a plane inclined in an arbitrary direction.

The tilt sensor 1600 includes a first tilt sensor 1610 and a second tilt sensor 1620, and can detect the tilt of the laser device main body 1000. As the tilt sensor 1600, any sensor that can detect a tilt can be used. In this embodiment, a bubble tube is employed,
First tilt sensor 1610 and second tilt sensor 1620
Thereby, the inclination of the laser device main body 1000 with respect to the horizontal can be detected.

As the tilt sensor 1600 for detecting the tilt, for example, a sensor using a bubble tube as shown in FIG. 2 can be used. This sensor has two electrodes 1651 and 1652 on the upper surface of the bubble tube 1650 and an electrode 1653 on the lower surface,
The bubble 1650a moves according to the inclination of the bubble tube, and the electrode 1
651 and the electrode 1653 and between the electrode 1652 and the electrode 165
The inclination θ of the bubble tube 1650 is obtained by converting the change into the change of the capacitances C ₁ and C ₂ between the three and detecting the change.

The first rotation angle detection unit 1700 is
010 is for detecting the rotation angle around the vertical axis (horizontal direction) and setting the tilt direction. In the present embodiment, a rotor 1710 is attached to the support portion 1010, and a stator 1720 is arranged at a position facing the rotor 1710, and the rotation angle between the rotor 1710 and the stator 1720 is detected. ing. The first rotation angle detection unit 1700 can use any sensor as long as it can detect the horizontal rotation angle of the support unit 1010.

The second rotation angle detector 1800 is provided in the laser projector 1020 and detects a rotation angle about a horizontal axis. In this embodiment, the rotor 181 is used.
0 is attached to the laser projector 1020,
The stator 182 is located at a position facing the rotor 1810.
0 is arranged to detect the rotation angle between the rotor 1810 and the stator 1820. The second rotation angle detection unit 1800 can detect the rotation angle of the laser projection unit 1020 around the horizontal axis,
Either sensor can be used.

Next, the electrical configuration of this embodiment will be described with reference to FIG.

In this embodiment, the mounting portion driving means 8100
A mounting part driving circuit 8110 for controlling and driving the mounting part driving means 8100, and a laser light emitting part driving means 820
0, a laser light emitting unit driving circuit 8210 for driving the laser light emitting unit driving means 8200, a rotating light emitting unit driving means 8300, and the rotating light emitting unit driving means 8300
A rotating irradiation unit driving circuit 8310 for driving the
Rotation angle detection unit 1700 and the first rotation angle detection unit 1
A first signal processing circuit 1730 for processing the signal from the second rotation angle detection unit 700, a second rotation angle detection unit 1800,
, A second signal processing circuit 1830 for processing a signal from the rotation angle detecting unit 1800, a control unit 6000, a setting unit 8500, and an automatic leveling unit 2000.

Based on the detection signals of the first rotation angle detection unit 1700 and the second rotation angle detection unit 1800, the control unit 600
0 calculates a driving amount for creating a laser reference plane in a predetermined direction, and mounts the mounting portion via a mounting portion driving circuit 8110, a laser projecting portion driving circuit 8210, and a rotating irradiation portion driving circuit 8310. It is configured to drive a driving unit 8100, a laser projection unit driving unit 8200, and a rotating irradiation unit driving unit 8300.

The setting means 8500 sets data for obtaining a predetermined laser reference plane. For example, if the setting unit 8500 sets a composite inclination in two directions, the control unit 6000 performs an operation based on the setting data to form a predetermined laser reference plane.

The setting means 8500 corresponds to the reference data setting means.

Further, the rotation irradiation unit driving means 8300 is
The drive unit 8100 corresponds to the second driving unit, and the driving unit 8200 corresponds to the third driving unit.

The automatic leveling unit 2000 controls the control means 6000 based on the data of the first tilt sensor 1610 and the second tilt sensor 1620 so that the center of rotation of the support unit 1010 coincides with the vertical direction. Is what you do. Details will be described below.

The laser device main body 1 configured as described above
Reference numeral 000 is for scanning a laser beam in a horizontal or vertical direction, and can perform horizontal alignment, centering, vertical alignment, and the like. That is, it is possible to detect a laser beam scanned in a horizontal plane on a surveying object, perform leveling from the arrival height, or visually observe the laser beam in the vertical direction to shift and set a reference point on the ground. it can.

The automatic leveling unit 2000 includes a leveling table 2100 and a bottom plate 2200.
It is supported by the leveling screws 2300, 2300, and 2300 to be vertically movable.

Next, the electric system of the automatic leveling unit 2000 will be described with reference to FIG.
10, the second tilt sensor 1620, and the control means 600
0, the first motor driving means 7100, the second motor driving means 7200, and the third motor driving means 7300
, A first motor 4310 and a second motor 4320
And a third motor 4330.

The first tilt sensor 1610 and the second tilt sensor 1620 are set so as to detect the tilt in two orthogonal axes, and detect the tilt of the laser device main body 1000.

The center of rotation of the support portion is set vertically by detection of the second tilt sensor 1620 and the first tilt sensor 1610.

The control means 6000 includes the first tilt sensor 1
The displacement amount of the leveling screws 2300, 2300, and 2300 required to set the leveling table 2100 on the reference plane is calculated based on the output signals of the leveling table 610 and the second tilt sensor 1620. That is, the first tilt sensor 1610 and the second
The three leveling screws 2300, 2300, and 2300 such that the inclination angles detected by the
300 are calculated.

The control means 6000 outputs a control signal corresponding to the amount of movement of each leveling screw 2300, 2300, 2300 to the corresponding first, second, and third motor drive means 710.
0, 7200, 7300. The first, second, and third motor driving units 7100, 7200, and 7300 supply electric power for rotating the motors 4310, 4320, and 4330 based on a control signal from the control unit 6000 via a connector (not shown). Is to be generated.

The motors 4310, 4320 and 4330 are
Leveling screws 2300, 2300, 230 using electric power supplied from motor driving means 7100, 7200, 7300
0 is rotated to correct the inclination of the leveling table 2100. Then, the first tilt sensor 1610 and the second tilt sensor 16
20 detects the inclination of the leveling table 2100 again and performs feedback control, thereby detecting the laser apparatus main body 100.
The vertical axis of 0 can be accurately leveled vertically (set on the reference plane). It should be noted that leveling is possible even if the configuration is such that only two arbitrary leveling screws are driven.

Since the automatic leveling unit 2000 is employed in the present embodiment configured as described above, the leveling screws 230, 230, 230 are manually operated while the observer visually recognizes the flat level. Leveling of the vertical axis of the laser device main body 1000 can be automatically performed without operation.

Then, the backlash of the rotation axis of the laser projection unit 1020 supported by the support unit 1010, the angle θ in the XZ plane,
_1. The θ ₂ in the XY plane is corrected and canceled by the liquid surface reflection compensator 1380 and the angular magnification reduction unit 1400, and a predetermined reference plane without error can be created.

The liquid surface reflection compensator 138
The correction system based on the combination of 0 and the angular magnification reduction unit 1400 can also correct the tilt of the laser device main body 1000 by itself. If only a not so large inclination is to be corrected, a configuration without using the automatic leveling unit 2000 may be adopted.

[Second Embodiment]

The laser device 20000 of the second embodiment
As shown in FIG. 9, a laser device main body 1001 capable of setting an inclination in a predetermined direction, and an automatic leveling unit 20 for mounting the laser device main body 1001 horizontally.
00. Laser device body 1001
Is connected to the automatic leveling unit 2000 and is rotatably mounted in the horizontal direction.

The laser device body 1001 includes a light source section 1100, an objective lens 1200, and a mirror 1360.
, A first reflection mirror section 1371, a second reflection mirror section 1372, a third reflection mirror section 1373, a fourth reflection mirror section 1374, a liquid surface reflection compensator 1380, and a first angular magnification. Conversion unit 1391, second angular magnification conversion unit 1392, angular magnification reduction unit 1400, rotation irradiation unit 1500, tilt sensor 1600, first rotation angle detection unit 1700, and second rotation angle detection unit 1800.

The laser light emitted from the objective lens 1200 is reflected vertically downward by the first reflection mirror unit 1371, passes through the first angular magnification conversion unit 1391, and further passes through the second reflection mirror unit 1372. At the liquid surface reflection compensator 1380.

Further, the liquid surface reflection compensator 138
The laser light emitted from the third reflection mirror unit 1
At 373, the light is reflected vertically upward, and the second angular magnification conversion unit 13
After passing through the second reflecting mirror portion 1374
, So that the light is reflected in the horizontal direction and enters the mirror 1360.

The first angular magnification converter 1391 and the second angular magnification converter 1392 both have f ₃ : f ₄ = 1.10.
It has a magnification of 9: 1.

An angular magnification reduction section 1400 is disposed between the fourth reflection mirror section 1374 and the mirror 1360 and vertically above the mirror 1360, and the magnification is changed by the first angular magnification conversion section. Since 1391 and the second angular magnification converter 1392 are inserted in the optical path, f ₁ : f ₂
= 2: 1.

The other configurations, effects, operations, and the like of the second embodiment are the same as those of the first embodiment, and thus description thereof is omitted.

[0123]

According to the present invention having the above-described structure, a mounting portion that rotates about a vertical axis, a laser light emitting portion that is supported by the mounting portion and that rotates about a horizontal axis, A rotating irradiation unit provided on the light unit, for forming a laser plane parallel to the horizontal axis; a light source unit for irradiating laser light along the center of rotation of the laser projecting unit; A liquid surface reflection compensator provided in the laser projection unit for performing a first correction of the optical axis; and an angular magnification reducing unit provided in the laser projection unit for performing the second correction of the optical axis. ,
With the liquid surface reflection compensator and the angular magnification reducing means, the laser optical axis is corrected toward the rotating irradiation unit, so that even with a rotating laser device of a type supported by a spherical surface, a high gradient can be set. Even with a rotary laser device of a type supported on a vertical axis and a horizontal axis, there is an excellent effect that a high-precision laser device can be provided at low cost without accumulating many errors on the rotary shaft.

[0124]

[Brief description of the drawings]

FIG. 1 shows a laser apparatus 100 according to a first embodiment of the present invention.
FIG.

FIG. 2 is a diagram illustrating an inclination sensor 1600.

FIG. 3A is a diagram illustrating an electrical configuration of the present embodiment.

3A is a diagram illustrating an electric system of an automatic leveling unit 2000. FIG.

FIG. 4 is a diagram illustrating a rotational shaft play of the inclination setting device.

FIG. 5 is a diagram illustrating an error θ ₁ in the XZ plane.

FIG. 6 is a diagram for explaining an error θ ₂ in the XY plane.

FIG. 7 is a diagram illustrating the principle.

FIG. 8 is a diagram illustrating the principle.

FIG. 9 shows a laser apparatus 100 according to a second embodiment of the present invention.
FIG.

FIG. 10 is a diagram illustrating a conventional technique.

FIG. 11 is a diagram illustrating a conventional technique.

[Explanation of symbols]

 10000 Laser device of first embodiment 20000 Laser device of second embodiment 1000 Laser device main body of first embodiment 1001 Laser device main body of second embodiment 1010 Mounting unit 1020 Laser projection unit 1100 Light source unit 1200 Objective lens 1300 Laser beam deflection unit 1360 Mirror 1371 First reflection mirror unit 1372 Second reflection mirror unit 1373 Third reflection mirror unit 1374 Fourth reflection mirror unit 1375 Fifth reflection mirror unit 1376 Sixth reflection mirror unit 1377 Seventh reflection mirror unit 1378 Eighth reflection mirror unit 1380 Liquid surface reflection compensator 1381 Liquid 1382 Anamorphic prism 1391 First angular magnification conversion unit 1392 Second angular magnification conversion unit 1400 Angle magnification reduction unit 1500 Rotating head 1510 pen Prism 1600 Tilt sensor 1610 First tilt sensor 1620 Second tilt sensor 1700 First rotation angle detector 1710 Rotor 1720 Stator 1730 First signal processing circuit 1800 Second rotation angle detector 1810 Rotor 1820 Stator 1830 Second Signal processing circuit 2000 automatic leveling unit 2100 leveling table 2300 leveling screw 4000 driving means 6000 control means 8100 mounting part driving means 8110 mounting part driving circuit 8200 laser light emitting part driving means 8210 laser light emitting part driving circuit 8300 Rotating irradiation unit driving unit 8310 Rotating irradiation unit driving circuit 8500 Setting unit

[Procedure amendment]

[Submission date] September 11, 1998

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Brief description of drawings

[Correction method] Change

[Correction contents]

[Brief description of the drawings]

FIG. 1 shows a laser apparatus 100 according to a first embodiment of the present invention.
FIG.

FIG. 2 is a diagram illustrating an inclination sensor 1600.

FIG. 3A is a diagram illustrating an electrical configuration of the present embodiment.

FIG. 3B is a diagram illustrating an electric system of an automatic leveling unit 2000.

FIG. 4 is a diagram illustrating a rotational shaft play of the inclination setting device.

5 is a diagram illustrating an XZ plane error theta _1.

6 is a diagram illustrating an XY plane error theta _2.

FIG. 7 is a diagram illustrating the principle.

FIG. 8 is a diagram illustrating the principle.

FIG. 9 shows a laser apparatus 100 according to a second embodiment of the present invention.
FIG.

FIG. 10 is a diagram illustrating a conventional technique.

FIG. 11 is a diagram illustrating a conventional technique.

[Description of Signs] 10000 Laser device of first embodiment 20000 Laser device of second embodiment 1000 Laser device main body of first embodiment 1001 Laser device main body of second embodiment 1010 Mounting portion 1020 Laser projecting portion 1100 Light source Unit 1200 objective lens 1300 laser beam deflection unit 1360 mirror 1371 first reflection mirror unit 1372 second reflection mirror unit 1373 third reflection mirror unit 1374 fourth reflection mirror unit 1375 fifth reflection mirror unit 1376 sixth Reflection mirror section 1377 seventh reflection mirror section 1378 eighth reflection mirror section 1380 liquid surface reflection compensator 1381 liquid 1382 anamorphic prism 1391 first angular magnification conversion section 1392 second angular magnification conversion section 1400 angular magnification reduction section 1500 Rotating head 1510 Penta prism 1600 Tilt sensor 1610 First tilt sensor 1620 Second tilt sensor 1700 First rotation angle detector 1710 Rotor 1720 Stator 1730 First signal processing circuit 1800 Second rotation angle detector 1810 Rotor 1820 Stator 1830 Second signal processing circuit 2000 Automatic leveling unit 2100 Leveling table 2300 Leveling screw 4000 Driving means 6000 Control means 8100 Mounting unit driving unit 8110 Mounting unit driving circuit 8200 Laser projection unit driving unit 8210 Laser projection unit driving Circuit 8300 Rotating irradiation unit driving means 8310 Rotation irradiation unit driving circuit 8500 Setting means

Claims (8)

[Claims] 1. A mounting part that rotates about a vertical axis, a laser light emitting part that is supported by the mounting part and that rotates about a horizontal axis, A rotation irradiation unit for forming a parallel laser plane, a light source unit for irradiating laser light along a rotation center of the laser projection unit, and a light source unit provided on the mounting unit, 1. A liquid surface reflection compensator for performing the correction of 1. A laser level device for correcting a laser optical axis toward the rotating irradiation unit by means of a magnification reduction unit. 2. A mounting portion that rotates around a vertical axis, a laser light emitting portion that is supported by the mounting portion and that rotates around a horizontal axis, and a laser light emitting portion that is provided on the laser light emitting portion and is mounted on the horizontal axis. A rotation irradiation unit for forming a parallel laser plane, a light source unit for irradiating laser light along a rotation center of the laser projection unit, and a light source unit provided on the mounting unit, 1, a liquid surface reflection compensator for correcting the optical axis, an angular magnification reducing means provided in the laser projection unit for performing a second correction of the optical axis, and a leveling unit for leveling the mounting unit. Quasi-means, and an inclination sensor for detecting the inclination of the mounting portion, and the laser surface axis is corrected toward the rotation irradiation unit by the liquid surface reflection compensator and the angular magnification reduction unit. Laser level device. 3. The liquid surface reflection compensator comprises:
3. The laser level device according to claim 1, further comprising optical means for performing axial correction. 4. The laser surface axis is corrected in a direction orthogonal to a horizontal axis toward the rotating irradiation unit by the liquid surface reflection compensator and the angular magnification reducing unit.
Or the laser level device according to claim 2. 5. The laser level device according to claim 1, wherein said angular magnification reducing means is arranged on an optical path of incidence and emission of said liquid surface reflection compensator. 6. The rotation irradiation unit is provided with a rotation angle detector for detecting rotation, and forms a laser plane for reciprocal scanning in the rotation direction of the laser projection unit. The laser level device according to claim 2. 7. A gantry section is provided with a first rotation angle detector for detecting rotation about a vertical axis, and the laser projecting section detects rotation about a horizontal axis. The laser level device according to claim 1 or 2, further comprising a second rotation angle detection unit for detecting the rotation angle. 8. A laser beam is applied to an inclined surface in a predetermined direction based on inclination setting data and angle detection between the first rotation angle detection unit and the second rotation angle detection unit. A laser level device according to claim 1 or claim 2.