JP3978737B2 - Laser level device - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to a laser surveying instrument capable of forming a measurement reference line and a reference plane by laser light, and more particularly, a reference line and a reference inclined at a predetermined angle with respect to a horizontal plane as well as a horizontal reference line and a reference plane. The present invention relates to a laser level device capable of forming a plane.
[0002]
[Prior art]
In conventional rotary laser devices that can be tilted, the laser projector is supported by a gimbal or a spherical surface so that the laser projector can be tilted freely, and the laser projector is supported on the vertical and horizontal axes. There is something.
[0003]
Here, based on FIG. 10, the thing of the structure where a laser projection part is supported by a spherical surface is demonstrated. The laser projector 9100 is supported by a spherical surface, and is configured such that laser light is rotated and irradiated onto a reference plane from a rotation irradiation unit 9200 provided in the laser projection unit 9100. Note that the rotation irradiation unit 9200 is driven by a motor 9250.
[0004]
The laser projector 9100 is configured to be tiltable in one direction or two directions by moving up and down an arm 9300 (one direction is not shown) extending in two orthogonal directions by a vertical mechanism driven by a motor 9350. Yes. The laser projector 9100 is leveled by two inclination sensors 9410 and 9420 formed on the main body. Then, the laser projector 9100 is tilted in a predetermined direction after leveling.
[0005]
This tilt setting is set, for example, by setting the tilt angle directly or by converting the outputs of the two tilt sensors 9410 and 9420 into the number of motor pulses and driving the motor 9350 based on the calculated angle. be able to. An appropriate inclination detector can be employed. If the laser projector 9100 is inclined in only one direction, an inclined surface with respect to a predetermined direction can be formed, and if the laser projector 9100 is inclined in two directions, a compound inclined surface can be formed.
[0006]
Next, a configuration in which the laser projector 9100 is supported on the vertical axis and the horizontal axis will be described with reference to FIG. The frame 9500 rotates around the vertical axis, and the laser projector 9100 rotates around the horizontal axis on the frame 9500.
A rotation irradiation unit 9200 is provided on the laser projection unit 9100, and the laser beam can be rotated and irradiated on a reference plane. Then, similarly to the configuration in which the laser projection unit is supported by the spherical surface, the laser projection unit is leveled by appropriate leveling means.
[0007]
In the configuration in which the laser projector 9100 is supported on the vertical axis and the horizontal axis, the frame is rotated around the horizontal axis so that the rotation direction of the laser projector 9100 coincides with the tilt direction. After the rotation of the gantry, the laser projector 9100 is rotated about the vertical axis and tilted at a predetermined angle to set the tilt.
[0008]
The compound inclined surface can be formed by calculating the compound inclination direction and the inclination angle from the two directions of inclination data and inclining in the direction determined based on the calculation result.
[0009]
[Problems to be solved by the invention]
However, the conventional laser surveying instrument does not cause an error when the rotation axis of the tilt setting device rotates around an ideal arbitrary axis, but in reality, it rotates smoothly. There is a problem that the amount of shaft backlash is necessary, and the converted angle of the shaft backlash results in a tilt error.
[0010]
Accordingly, there has been a strong demand for the appearance of a laser surveying instrument that can reduce the tilt error due to axial backlash and increase the tilt setting accuracy.
[0011]
Furthermore, the rotating laser device supported by a spherical surface has a simple basic structure for setting the inclination, so that it can be set with relatively high accuracy. There was a problem that it was not suitable for setting the gradient.
[0012]
In addition, a rotary laser device supported on the vertical axis and the horizontal axis is relatively easy to set a high gradient. However, as described above, a lot of errors are accumulated on the rotary axis, so that high working accuracy is achieved. There was a problem that it was required and the cost was high.
[0013]
[Means for Solving the Problems]
The present invention has been devised in view of the above problems, and a rack part that rotates around a vertical axis on the main body, and a horizontal axis that is on the rack part and is orthogonal to the vertical axis is a rotary part. A laser apparatus main body comprising a rotating laser projector, the light source being provided in the laser projector and irradiating laser light in a direction coaxial with the horizontal axis, and the laser projector A rotation irradiating unit for rotating to form a laser plane parallel to the horizontal axis, and a laser beam provided on the frame and irradiated from the laser projecting unit again. An optical path forming means for reflecting on the optical section, a liquid surface reflecting compensator for performing a first correction of the optical axis provided on the optical path forming means, and a laser projecting section provided on the laser projection section. Angular magnification reduction means for correcting 2 Then, after the first correction, the laser light irradiated to the optical path forming means is reflected again by the laser projector, and further, the second correction is performed in the laser projector, It is characterized in that an error caused by axial backlash between the frame part and the laser light projecting part of the laser optical axis reflected toward the rotating irradiation part is corrected.
[0014]
The present invention may also include an inclination sensor for detecting the inclination of the rack part.
[0015]
Furthermore, the liquid surface reflective compensator of the present invention can also include optical means for performing biaxial correction.
[0016]
The present invention can also be configured such that the laser optical axis is corrected in a direction perpendicular to the horizontal axis toward the rotational irradiation unit by the liquid surface reflection compensator and the angular magnification reduction means.
[0017]
The present invention may also be configured such that the angular magnification reduction means is disposed on the incident and outgoing optical paths of the liquid surface reflecting compensator.
[0018]
Further, the rotation irradiation unit of the present invention may be provided with a rotation angle detector for detecting rotation, and a laser plane for reciprocal scanning may be formed in the rotation direction of the laser projection unit. .
[0019]
The rack portion of the present invention is provided with a first rotation angle detector for detecting the rotation about the vertical axis, and the laser projector is for detecting the rotation about the horizontal axis. It is also possible to adopt a configuration in which the second rotation angle detector is provided.
[0020]
Further, the present invention is configured to irradiate laser light on a tilted surface in a predetermined direction based on tilt setting data, and angle detection of the first rotation angle detection unit and the second rotation angle detection unit. You can also
[0021]
DETAILED DESCRIPTION OF THE INVENTION
In the present invention configured as described above, the rack part rotates on the main body around the vertical axis, and the laser apparatus main body is on the frame part, and the horizontal axis orthogonal to the vertical axis is used as the rotation part. A rotating laser projecting unit is provided, the light source unit provided in the laser projecting unit irradiates laser light in the direction coaxial with the horizontal axis, and the rotating projecting unit provided in the laser projecting unit The laser beam is rotated to form a laser plane parallel to the horizontal axis, and the optical path forming means provided in the frame part reflects the laser beam emitted from the laser projector unit again to the laser projector unit, The liquid surface reflection compensator provided in the optical path forming unit performs the first correction of the optical axis, and the angular magnification reduction unit provided in the laser projection unit performs the second correction of the optical axis, and the optical path forming unit. After the first correction, the laser light applied to the Further, by performing the second correction in the laser projection unit, it is possible to correct an error caused by the backlash of the mounting unit and the laser projection unit of the laser optical axis reflected toward the rotation irradiation unit. .
[0022]
The inclination sensor can also detect the inclination of the rack part.
[0023]
Furthermore, the optical means provided in the liquid surface reflective compensator of the present invention can also perform biaxial correction.
[0024]
And this invention can also correct | amend a laser optical axis to the direction orthogonal to a horizontal axis toward a rotation irradiation part with a liquid surface reflection compensator and an angular magnification reduction means.
[0025]
In the present invention, the angular magnification reduction means can be arranged on the incident and outgoing optical paths of the liquid surface reflecting compensator.
[0026]
Furthermore, the rotation angle detector provided in the rotation irradiation unit of the present invention can detect the rotation and form a laser plane for reciprocal scanning in the rotation direction of the laser projection unit.
[0027]
And the 1st rotation angle detector provided in the rack part of this invention detects rotation around a vertical axis, and the 2nd rotation angle detection part provided in the laser projection part is a horizontal axis rotation. Can also be detected.
[0028]
The present invention can also irradiate the inclined surface in the predetermined direction with the laser beam based on the tilt setting data, and the angle detection of the first rotation angle detection unit and the second rotation angle detection unit.
[0029]
【Example】
[0030]
Embodiments of the present invention will be described with reference to the drawings.
[0031]
(principle)
[0032]
Here, the principle of the present invention will be described.
[0033]
“Rotation axis play of tilt setting device”
[0034]
First, the rotation shaft backlash will be described.
[0035]
As shown in FIG. 4, a rotation shaft 700 is installed in the X-axis direction, and is pivotally supported by a first bearing 710 and a second bearing 720. Then, laser light is irradiated in a direction orthogonal to the rotation axis 700 (X axis), and this laser irradiation optical axis is taken as a Z axis.
[0036]
The tilt error of the optical system due to the backlash of the rotating shaft 700 becomes an XZ in-plane error θ ₁ as shown in FIG. 5 and an XY in-plane error θ ₂ shown in FIG.
[0037]
As shown in FIG. 5, the XZ-plane error θ ₁ is a case where the rotation shaft 700 is rotated by an angle θ ₁ around the origin in the XZ plane. In this case, the irradiated laser beam falls from the Z axis.
[0038]
In the laser apparatus, rotation irradiation is performed in a direction perpendicular to the Z axis, so that the tilting of the Z axis causes the rotation irradiation surface to tilt. For example, a plane inclined from a horizontal plane is formed.
[0039]
Next, as shown in FIG. 6, the XY in-plane error θ ₂ is a case where the rotation shaft 700 is rotated by an angle θ ₂ in the XY plane around the origin.
[0040]
The axial backlash usually has an error of XZ in-plane error θ ₁ and XY in-plane error θ _2. To eliminate XZ in-plane error θ ₁ , it is necessary to eliminate XY in-plane error θ _2. There is. In the case of a structure in which only the XZ in-plane error θ ₁ is corrected, the rotation irradiation surface is always inclined.
[0041]
"Principle of liquid surface reflection compensator"
[0042]
Next, the principle of the liquid surface reflective compensator 800 will be described with reference to FIG. The liquid surface reflection compensator 800 includes a liquid 810, an anamorphic prism beam expander 820, a mirror 830, and an angular magnification reduction unit 1400.
[0043]
Since the surface of the liquid 810 is always horizontal, if the liquid surface is inclined by an angle α about the Y axis, the inclination angle of the optical axis after reflecting the surface of the liquid 810 is β _1. ,
[0044]
β ₁ = 2α ······· 1 formula
It becomes.
[0046]
Further, if the optical axis is inclined by an angle α around the X axis, the inclination angle of the optical axis after reflecting the surface of the liquid 810 is β ₂ .
[0047]
^{_{β 2 = cos -1 (cos 2}} θcos2α + sin 2 θ) ····· second equation [0048]
And tilt on the ZY plane. Here, θ is a liquid surface incident angle with respect to the surface of the liquid 810.
[0049]
If the refractive index of the liquid 810 is η, the optical axis emitted through the liquid 810 to the air side is
[0050]
β ₁ = 2αη (3)
^{_{β 2 = η * (cos -1}} (cos 2 θcos2α + sin 2 θ)) ··· fourth equation [0052]
Will just lean.
[0053]
Therefore, when the incident angle to the liquid 810 is two-dimensionally different, the sensitivity differs between the incident angle and the exit angle.
[0054]
For example, if θ = 50 degrees, η = 1.403, α = 10 minutes, and substituting into the third and fourth equations,
[0055]
β ₁ = 2 * (10 minutes) * 1.43 = 0.46766
[0056]
β ₂ = 1.403 * (cos ⁻¹ (cos ² (50 degrees) cos ² (2 * 10 minutes)
+ Sin ² (50 degrees)) = 0.30061
[0057]
And
[0058]
β ₁ / β ₂ = 1.5557 times .... Formula 5
Sensitivity difference.
[0060]
Furthermore, with respect to the liquid surface incident angle θ, β ₁ has a magnification of 2.806 times, and β ₂ has a magnification of 1.803 times.
[0061]
Since the anamorphic prism beam expander 820 is multiplied only in one direction, the anamorphic prism beam expander 820 is arranged in the direction of the sensitivity magnification of the fifth equation, and finally set so that β ₁ : β ₂ = 1: 1. That is, in this case, the angular magnification of the anamorphic prism beam expander 820 is set to 1 / (β ₁ / β ₂ ) = 1 / 1.5557.
[0062]
If the sensitivity magnification and the like are set as described above, the optical axis after reflection on the two dimensions of the X and Y planes is always constant, and when tilted by an angle α around the Y axis, the anamorphic prism beam expander 820 is used. The optical axis after passing through
[0063]
2αη * (1 / (β ₁ / β ₂ ))
= 2αη * (1 / 1.5557) = 1.803α Expression 6
Only tilted with respect to the original optical axis.
[0065]
When this light beam is reflected by the mirror 830 and passes through the angular magnification reduction unit 1400 (magnification 1.803), as shown in FIG. 8, f ₁ : f ₂ = 1.803: 1,
[0066]
1.803α * (1 / 1.803) = α Expression 7
The final optical axis is always parallel to the normal of the liquid surface.
[0068]
Therefore, the optical axis in the vertical direction can always be set regardless of the inclination of the apparatus main body.
[0069]
Furthermore, a certain horizontal plane can be formed by deflecting the optical axis 90 degrees horizontally by a pentaprism and rotating the light.
[0070]
"Example"
[0071]
“First Example”
[0072]
As shown in FIG. 1, the laser apparatus 10000 of the first embodiment includes a laser apparatus main body 1000 that can set an inclination in a predetermined direction, and an automatic adjustment for placing the laser apparatus main body 1000 horizontally. The quasi part 2000 is comprised. The laser apparatus main body 1000 is connected to the automatic leveling unit 2000 and is attached to be rotatable in the horizontal direction.
[0073]
As shown in FIG. 1, the laser apparatus main body 1000 has a rack 1010 that rotates around a vertical axis and is directed in an inclined direction, and is on the rack 1010 and around a horizontal axis that intersects the vertical axis. It is comprised from the laser projection part 1020 for rotating and setting an inclination.
[0074]
The gantry 1010 is configured to be rotatable by a gantry driving unit 8100 configured by appropriate rotating means such as a motor.
[0075]
Further, the laser projector 1020 is also configured to be rotatable by a laser projector drive unit 8200 configured by appropriate rotating means such as a motor.
[0076]
The frame 1010 includes a light source unit 1100, a first reflection mirror unit 1371, a second reflection mirror unit 1372, a third reflection mirror unit 1373, a fourth reflection mirror unit 1374, and a liquid surface. A reflective compensator 1380 and a first rotation angle detector 1700 are provided.
[0077]
The laser projector 1020 includes a light source 1100, an objective lens 1200, a mirror 1360, an angular magnification reduction unit 1400, a rotation irradiation unit 1500, and a second rotation angle detection unit 1800.
[0078]
The light source unit 1100 is a laser light source. In this embodiment, a semiconductor laser is used. However, any element can be used as long as it is an element that can emit laser light.
[0079]
The objective lens 1200 is for making the laser beam from the light source unit 1100 into parallel rays. In this embodiment, the laser apparatus body 1000 is configured to be irradiated with laser light in the horizontal axis direction.
[0080]
Note that the laser projector 1020 is configured to be rotatable about the emission direction of the laser light from the light source unit 1100 as a central axis. Therefore, the laser projector 1020 is attached to be rotatable in a plane orthogonal to the horizontal direction.
[0081]
The laser light emitted from the objective lens 1200 is reflected vertically downward by the first reflecting mirror unit 1371, further reflected by the second reflecting mirror unit 1372 in the horizontal direction, and incident on the liquid surface reflecting compensator 1380. It is configured as follows.
[0082]
Further, the laser light emitted from the liquid surface reflection compensator 1380 is reflected vertically upward by the third reflection mirror unit 1373, further reflected by the fourth reflection mirror unit 1374 in the horizontal direction, and incident on the mirror 1360. It is configured to be.
[0083]
An angular magnification reduction unit 1400 is disposed before and after the mirror 1360. The angular magnification reduction unit 1400 may be arranged after the mirror 1360. In the case of FIG. 1, it is configured via a mirror 1360 to be compact.
[0084]
The laser light incident on the mirror 1360 is corrected by the angular magnification reduction unit 1400 and is reflected vertically upward.
[0085]
The liquid surface reflection compensator 1380 utilizing the fact that the liquid level is horizontal, and the angular magnification reduction unit 1400 are for always forming an optical axis in the vertical direction.
[0086]
The principle of the liquid surface reflection compensator 1380 is as described in the above-mentioned “Principle of the liquid surface reflection compensator”.
[0087]
The liquid surface reflective compensator 1380 of the first embodiment includes a liquid 1381 and anamorphic prisms 1382 and 1382. The liquid 1381 is dimethyl silicone oil, but any liquid may be used. The anamorphic prism 1382 has a magnification of 1 / 1.557 times in the Yz direction and a magnification of 1 in the Yx direction.
[0088]
The entire liquid surface reflective compensator 1380 has a magnification of 2.806 times in the Yz direction and a magnification of 1.803 times in the Yx direction.
[0089]
Further, an angular magnification reduction unit 1400 is disposed between the fourth reflection mirror unit 1374 and the mirror 1360 and vertically above the mirror 1360.
[0090]
The angular magnification reduction unit 1400 of the first embodiment has f ₁ : f ₂ = 1.803: 1 and sets the XZ in-plane error θ ₁ to 1 / 1.803. In addition, it can be set to 1 / X according to the magnification of the liquid surface reflective compensator 1380.
[0091]
The rotation irradiation unit 1500 is provided in the laser projection unit 1020 and is used for rotating and irradiating laser light on a reference plane that is set to be inclined. A pentaprism 1510 is fixed to the rotation irradiation unit 1500 and is configured to be rotatable by a rotation irradiation unit driving unit 8300. The laser light reflected vertically upward by the laser light deflection unit 1300 passes through the angular magnification reduction unit 1400 and then enters the pentaprism 1510.
[0092]
The laser light incident on the pentaprism 1510 is reflected and deflected by 90 degrees, and is rotated and irradiated in the plane direction as the rotary head 1500 rotates. Therefore, a laser reference plane can be formed by irradiating laser light in a plane inclined in an arbitrary direction.
[0093]
The tilt sensor 1600 includes a first tilt sensor 1610 and a second tilt sensor 1620, and can detect the tilt of the laser apparatus main body 1000. Any sensor can be used as the tilt sensor 1600 as long as it can detect the tilt. In this embodiment, a bubble tube is employed, and the first tilt sensor 1610 and the second tilt sensor 1620 can detect the tilt of the laser device main body 1000 with respect to the horizontal.
[0094]
As the inclination sensor 1600 for detecting the inclination, for example, a sensor using a bubble tube as shown in FIG. 2 can be used. This sensor has two electrodes 1651 and 1652 on the upper surface of the bubble tube 1650, and an electrode 1653 on the lower surface. The bubble 1650a moves according to the inclination of the bubble tube, and between the electrode 1651 and the electrode 1653 and between the electrode 1652 and the electrode 1653. The inclination θ of the bubble tube 1650 is obtained by converting the capacitances C ₁ and C ₂ into changes and detecting them.
[0095]
The first rotation angle detection unit 1700 detects the rotation angle around the vertical axis (horizontal direction) of the rack unit 1010 and sets the tilt direction. In this embodiment, the rotor 1710 is attached to the rack portion 1010, and the stator 1720 is disposed at a position facing the rotor 1710, and the rotation angle between the rotor 1710 and the stator 1720 is detected. ing. As long as the first rotation angle detection unit 1700 can detect the rotation angle in the horizontal direction of the rack unit 1010, any sensor can be used.
[0096]
The second rotation angle detection unit 1800 is provided in the laser projector 1020 and detects the rotation angle around the horizontal axis. In this embodiment, the rotor 1810 is attached to the laser projector 1020, and the stator 1820 is disposed at a position facing the rotor 1810, and the rotation angle between the rotor 1810 and the stator 1820 is detected. Has been. The second rotation angle detector 1800 can use any sensor as long as it can detect the rotation angle around the horizontal axis of the laser projector 1020.
[0097]
Next, the electrical configuration of the present embodiment will be described with reference to FIG.
[0098]
In the present embodiment, a rack drive unit 8100, a rack drive circuit 8110 for controlling and driving the rack drive unit 8100, a laser projector drive unit 8200, and this laser projector drive unit A laser projection unit driving circuit 8210 for driving the 8200, a rotation irradiation unit driving unit 8300, a rotation irradiation unit driving circuit 8310 for driving the rotation irradiation unit driving unit 8300, and a first rotation angle detection unit; 1700, a first signal processing circuit 1730 for processing a signal from the first rotation angle detector 1700, a second rotation angle detector 1800, and a second rotation angle detector 1800 A second signal processing circuit 1830 for processing a signal, a control unit 6000, a setting unit 8500, and an automatic leveling unit 2000 are included.
[0099]
Based on the detection signals of the first rotation angle detection unit 1700 and the second rotation angle detection unit 1800, the control unit 6000 calculates a drive amount for creating a laser reference plane in a predetermined direction, and mount unit drive circuit 8110. In addition, it is configured to drive the rack drive unit 8100, the laser projector drive unit 8200, and the rotary irradiation unit drive unit 8300 via the laser projector drive circuit 8210 and the rotation irradiation unit drive circuit 8310. Has been.
[0100]
Note that the setting means 8500 sets data for obtaining a predetermined laser reference plane. For example, when the setting unit 8500 sets a composite inclination in two directions, the control unit 6000 performs a calculation based on the setting data to form a predetermined laser reference plane.
[0101]
The setting unit 8500 corresponds to a reference data setting unit.
[0102]
Further, the rotation irradiation unit driving unit 8300 corresponds to the first driving unit, the mounting unit driving unit 8100 corresponds to the second driving unit, and the laser projector driving unit 8200 corresponds to the third driving unit. Is.
[0103]
The automatic leveling unit 2000 is configured so that the control unit 6000 matches the rotation center of the rack unit 1010 with the vertical direction based on data of the first tilt sensor 1610 and the second tilt sensor 1620. is there. Details will be described below.
[0104]
The laser device main body 1000 configured as described above scans a laser beam in the horizontal or vertical direction, and can perform leveling, centering, vertical alignment, and the like. In other words, a laser beam scanned in a horizontal plane is detected on the survey target, and leveling or the like is performed from the arrival height, or the laser beam is viewed in the vertical direction, and the ground reference point is set to shift. it can.
[0105]
The automatic leveling unit 2000 includes a leveling table 2100 and a bottom plate 2200. The leveling table 2100 is supported by three leveling screws 2300, 2300, and 2300 so as to be movable up and down.
[0106]
Next, the electric system of the automatic leveling unit 2000 will be described with reference to FIG. 3B. The first inclination sensor 1610, the second inclination sensor 1620, the control means 6000, and the first motor driving means. 7100, second motor driving means 7200, third motor driving means 7300, first motor 4310, second motor 4320, and third motor 4330.
[0107]
The first tilt sensor 1610 and the second tilt sensor 1620 are set so as to detect tilts in two orthogonal axes, and detect the tilt of the laser device main body 1000.
[0108]
By detecting the second tilt sensor 1620 and the first tilt sensor 1610, the rotation center of the rack portion is set to be vertical.
[0109]
Based on the output signals of the first tilt sensor 1610 and the second tilt sensor 1620, the control unit 6000 determines the displacement amount of the leveling screws 2300, 2300, and 2300 necessary for setting the leveling table 2100 to the reference plane. It is to calculate. That is, the movement amounts of the three leveling screws 2300, 2300, and 2300 are calculated so that the inclination angles detected by the first inclination sensor 1610 and the second inclination sensor 1620 are both 0 degrees. It is.
[0110]
The control means 6000 sends control signals corresponding to the movement amounts of the leveling screws 2300, 2300, 2300 to the corresponding first, second, and third motor driving means 7100, 7200, 7300. The first, second, and third motor driving means 7100, 7200, and 7300 use electric power for rotating the motors 4310, 4320, and 4330 based on a control signal from the control means 6000 via a connector (not shown). It is supposed to be generated.
[0111]
The motors 4310, 4320, and 4330 rotate the leveling screws 2300, 2300, and 2300 with the electric power supplied from the motor driving units 7100, 7200, and 7300 to correct the inclination of the leveling table 2100. The first tilt sensor 1610 and the second tilt sensor 1620 detect the tilt of the leveling table 2100 again and perform feedback control, thereby leveling the vertical axis of the laser device body 1000 accurately and vertically ( Can be set to the reference plane). Even if only two arbitrary leveling screws are driven, leveling is possible.
[0112]
In the present embodiment configured as described above, the automatic leveling unit 2000 is adopted, so that the observer manually operates the leveling screws 230, 230, 230 while visually recognizing the flat plate level. In addition, the leveling of the vertical axis of the laser apparatus main body 1000 can be automatically performed.
[0113]
Then, the backlash of the rotation axis of the laser projection unit 1020 supported by the frame unit 1010, the angle θ ₁ in the XZ plane, and θ ₂ in the XY plane are corrected by the liquid surface reflection compensator 1380 and the angular magnification reduction unit 1400. A predetermined reference plane that is offset and error free can be created.
[0114]
Note that the correction system using the combination of the liquid surface reflection compensator 1380 and the angular magnification reduction unit 1400 can also correct the tilt of the laser apparatus main body 1000 by itself. If the inclination is not so large, the automatic leveling unit 2000 may not be used.
[0115]
"Second Example"
[0116]
As shown in FIG. 9, the laser apparatus 20000 of the second embodiment has a laser apparatus main body 1001 that can set an inclination in a predetermined direction and an automatic adjustment for placing the laser apparatus main body 1001 horizontally. The quasi part 2000 is comprised. The laser apparatus main body 1001 is connected to the automatic leveling unit 2000, and is attached to be rotatable in the horizontal direction.
[0117]
The laser device main body 1001 includes a light source unit 1100, an objective lens 1200, a mirror 1360, a first reflection mirror unit 1371, a second reflection mirror unit 1372, a third reflection mirror unit 1373, and a fourth. Reflection mirror unit 1374, liquid surface reflection compensator 1380, first angular magnification conversion unit 1391, second angular magnification conversion unit 1392, angular magnification reduction unit 1400, rotation irradiation unit 1500, and tilt sensor 1600. And a first rotation angle detection unit 1700 and a second rotation angle detection unit 1800.
[0118]
The laser light emitted from the objective lens 1200 is reflected vertically downward by the first reflection mirror unit 1371, passes through the first angular magnification conversion unit 1391, and then is further horizontal by the second reflection mirror unit 1372. And is incident on the liquid surface reflecting compensator 1380.
[0119]
Further, the laser light emitted from the liquid surface reflection compensator 1380 is reflected vertically upward by the third reflection mirror unit 1373, passes through the second angular magnification conversion unit 1392, and then further the fourth reflection mirror unit. 1374 is configured to be reflected in the horizontal direction and incident on the mirror 1360.
[0120]
Both the first angular magnification conversion unit 1391 and the second angular magnification conversion unit 1392 have a magnification ratio of f ₃ : f ₄ = 1.109: 1.
[0121]
An angular magnification reduction unit 1400 is disposed between the fourth reflection mirror unit 1374 and the mirror 1360 and vertically above the mirror 1360. The magnification is the same as the first angular magnification conversion unit 1391 and the first angular magnification conversion unit 1391. Since the second angular magnification conversion unit 1392 is inserted in the optical path, f ₁ : f ₂ = 2: 1.
[0122]
Other configurations, effects, operations, and the like of the second embodiment are the same as those of the first embodiment, and thus description thereof is omitted.
[0123]
【effect】
The present invention configured as described above has a rack part that rotates about the vertical axis on the main body, and rotates on the horizontal part perpendicular to the vertical axis that is on the frame part and that rotates on the vertical part. A laser apparatus main body comprising a laser projection unit, provided in the laser projection unit, provided in the laser projection unit, a light source unit for irradiating laser light in a direction coaxial with the horizontal axis, A rotating irradiation unit for rotating to form a laser plane parallel to the horizontal axis, and a laser beam provided from the laser projection unit to the laser projection unit again. An optical path forming means for reflecting, a liquid surface reflecting compensator for performing a first correction of the optical axis provided in the optical path forming means, and a second correction of the optical axis provided in the laser projector. An angular magnification reduction means for The laser light applied to the path forming means is reflected again by the laser projector after the first correction, and the rotation correction is performed by performing the second correction in the laser projector. The error of the laser beam axis reflected toward the part due to the axial backlash between the stand and the laser projection part is corrected, so a high gradient can be set even with a rotating laser device supported by a spherical surface. Even with a rotary laser device of a type supported on a vertical axis and a horizontal axis, there is an excellent effect that a high-precision laser device can be provided at low cost without accumulating many errors on the rotary shaft.
[0124]
[Brief description of the drawings]
FIG. 1 is a diagram illustrating a laser apparatus 1000 according to a first embodiment of the present invention.
FIG. 2 is a diagram illustrating a tilt sensor 1600. FIG.
FIG. 3A is a diagram illustrating the electrical configuration of the present embodiment.
FIG. 3B is a diagram illustrating an electrical system of the automatic leveling unit 2000.
FIG. 4 is a diagram illustrating a rotation shaft backlash of the tilt setting device.
FIG. 5 is a diagram for explaining an XZ in-plane error θ ₁ ;
6 is a diagram illustrating an XY plane error theta _2.
FIG. 7 is a diagram illustrating the principle.
FIG. 8 is a diagram illustrating the principle.
FIG. 9 is a diagram for explaining a laser apparatus 1001 according to a second embodiment of the present invention.
FIG. 10 is a diagram illustrating a conventional technique.
FIG. 11 is a diagram illustrating a conventional technique.
[Explanation of symbols]
10000 Laser apparatus 20000 of the first embodiment Laser apparatus 1000 of the second embodiment Laser apparatus body 1001 of the first embodiment Laser apparatus body 1010 of the second embodiment Mounting section 1020 Laser projection section 1100 Light source section 1200 Objective lens 1300 Laser beam deflection portion 1360 Mirror 1371 First reflection mirror portion 1372 Second reflection mirror portion 1373 Third reflection mirror portion 1374 Fourth reflection mirror portion 1375 Fifth reflection mirror portion 1376 Sixth reflection mirror portion 1377 Seventh reflection mirror unit 1378 Eighth reflection mirror unit 1380 Liquid surface reflection compensator 1381 Liquid 1382 Anamorphic prism 1391 First angular magnification conversion unit 1392 Second angular magnification conversion unit 1400 Angular magnification reduction unit 1500 Rotating head 1510 Penta prism 160 Tilt sensor 1610 First tilt sensor 1620 Second tilt sensor 1700 First rotation angle detector 1710 Rotor 1720 Stator 1730 First signal processing circuit 1800 Second rotation angle detector 1810 Rotor 1820 Stator 1830 Second signal Processing circuit 2000 Automatic leveling unit 2100 Leveling table 2300 Leveling screw 4000 Driving unit 6000 Control unit 8100 Mounting unit driving unit 8110 Mounting unit driving circuit 8200 Laser projecting unit driving unit 8210 Laser projecting unit driving circuit 8300 Rotation irradiation Unit driving means 8310 Rotating irradiation unit driving circuit 8500 setting means

Claims (8)

A laser device main body comprising: a rack portion that rotates about a vertical axis on the main body; and a laser projector that rotates on the horizontal axis perpendicular to the vertical axis and that rotates on the horizontal axis. A laser light source provided in the laser light projecting unit for irradiating laser light in a direction coaxial with the horizontal axis; and a laser provided in the laser light projecting unit and rotated to be parallel to the horizontal axis. A rotation irradiating unit for forming a plane; an optical path forming means provided on the frame unit for reflecting the laser beam irradiated from the laser projecting unit to the laser projecting unit again; and this optical path A liquid surface reflection compensator for first correction of the optical axis provided in the forming means, and angular magnification reduction means for performing second correction of the optical axis provided in the laser projector. And the laser irradiated to the optical path forming means After the first correction, the light is reflected again by the laser projection unit, and further, the laser beam reflected toward the rotation irradiation unit by performing the second correction in the laser projection unit. A laser level device that corrects an error due to axial backlash between the frame and the laser projector . The laser level apparatus according to claim 1, further comprising an inclination sensor for detecting an inclination of the rack part .   3. The laser level apparatus according to claim 1, wherein the liquid surface reflection compensator has optical means for performing biaxial correction.   The laser level device according to claim 1 or 2, wherein the laser optical axis is corrected in a direction orthogonal to a horizontal axis toward the rotation irradiation unit by the liquid surface reflection compensator and the angular magnification reduction means.   The laser level device according to claim 1 or 2, wherein the angular magnification reduction means is arranged on an incident optical path and an outgoing optical path of the liquid surface reflecting compensator.   The rotation irradiation detector for detecting rotation is provided in the rotation irradiation unit, and a laser plane for reciprocating scanning is formed in the rotation direction of the laser projection unit. Laser level device.   The rack portion is provided with a first rotation angle detector for detecting rotation around the vertical axis, and the laser projector is provided with a second rotation angle detector for detecting rotation around the horizontal axis. The laser level device according to claim 1 or 2, wherein a rotation angle detector is provided.   3. The laser beam is applied to an inclined surface in a predetermined direction based on tilt setting data and angle detection by the first rotation angle detection unit and the second rotation angle detection unit. The laser level device described.

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