JPH1127016A - Production of dielectric cylindrical resonator - Google Patents
Production of dielectric cylindrical resonatorInfo
- Publication number
- JPH1127016A JPH1127016A JP17397397A JP17397397A JPH1127016A JP H1127016 A JPH1127016 A JP H1127016A JP 17397397 A JP17397397 A JP 17397397A JP 17397397 A JP17397397 A JP 17397397A JP H1127016 A JPH1127016 A JP H1127016A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- grinding
- conductor pattern
- resonator
- peripheral surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は円筒形状の誘電体共
振器(誘電体円筒共振器)の製造方法に関し、特に所要
の共振周波数f0やQ値を得るために製造工程の最終段
階で行う研削加工に関するものである。BACKGROUND OF THE INVENTION The present invention is carried out it relates to a manufacturing method of a cylindrical dielectric resonator (dielectric cylindrical resonator), especially at the final stage of the manufacturing process in order to obtain the required resonant frequency f 0 and Q values It is related to grinding.
【0002】[0002]
【従来の技術】誘電体と導体で構成される同軸線路は言
うまでもなく分布定数回路であるが、これをある寸法で
切断したとき、高周波のエネルギーはこの線路に閉じ込
められ、材料特性を反映した共振器となる。2. Description of the Related Art Needless to say, a coaxial line composed of a dielectric and a conductor is a distributed constant circuit. However, when this is cut to a certain size, high-frequency energy is confined in this line and a resonance reflecting material characteristics is caused. Container.
【0003】これが円筒ないし円柱形状の誘電体共振器
(高周波誘電体共振器、マイクロ波誘電体セラミックス
とも称する)であり、使用する共振モードによりTEモ
ード、TMモード、TEMモード等種々の共振タイプが
あるが、このうちTEMモードの共振器は最も小型化に
適したものであり、携帯電話等の高周波ブロックにおけ
るアンテナ共用器、バンドパスフィルタ、VCOの共振
器等に用いられている。This is a cylindrical or columnar dielectric resonator (also referred to as a high-frequency dielectric resonator or a microwave dielectric ceramic). Various resonance types such as a TE mode, a TM mode, and a TEM mode are used depending on the resonance mode to be used. Among them, the TEM mode resonator is most suitable for miniaturization, and is used for an antenna duplexer, a bandpass filter, a VCO resonator, and the like in a high-frequency block of a mobile phone or the like.
【0004】TEMモード共振器として一般に用いられ
ている同軸線路型は図3に示されているように共振器長
Lが1/4波長である円筒形状の誘電体素体1の外周面
2と内周面3及び一方端面4(短絡端面となる)を銀や
銅でメタライズして導体パターン5、6、7を形成した
誘電体円筒共振器10が基本形であるが、共振器の長さ
方向を短縮するため乃至共振器のQや共振周波数f0の
調整のために、図4に示されるように円筒形状の誘電体
素体1の外周面2と内周面3及び一方端面4に電極層を
形成して、開放端面8側の周縁の導体パターン及び誘電
体素体を軸に対して平行、垂直な研削ブレードの研削盤
11を使用して段付き状に研削して異なるインピーダン
スの線路を接続した形状と成した誘電体円筒共振器20
も広く採用されて一般的となっている(例えば特開昭5
8−194406号公報の明細書の図面第4図を参
照)。A coaxial line type generally used as a TEM mode resonator has an outer peripheral surface 2 of a cylindrical dielectric element 1 having a resonator length L of 1/4 wavelength, as shown in FIG. The dielectric cylindrical resonator 10 in which the conductor patterns 5, 6, and 7 are formed by metallizing the inner peripheral surface 3 and the one end surface 4 (to be a short-circuit end surface) with silver or copper is a basic shape, but in the longitudinal direction of the resonator. As shown in FIG. 4, the outer peripheral surface 2 and the inner peripheral surface 3 of the cylindrical dielectric element body 1 and the electrodes on the one end surface 4 are used to shorten the length of the resonator and to adjust the Q of the resonator and the resonance frequency f 0 . A layer having different impedances is formed by forming a layer and grinding the conductor pattern and the dielectric element body on the peripheral edge on the side of the open end face 8 stepwise using a grinding machine 11 of a grinding blade parallel or perpendicular to the axis. Dielectric cylindrical resonator 20 having a shape connected to
Have also been widely adopted and become common (for example,
(See FIG. 4 in the specification of JP-A-8-194406).
【0005】また、前述の特開昭58−194406号
公報には同軸誘電体共振器として、図5に示されるよう
な円筒形状(ないし円柱形状)の誘電体素体1の開放端
面8側の外周面の導体パターン5及び誘電体素体1の一
部を軸に対して垂直でない傾斜した研削ブレードの研削
盤21によってテーパ状に研削された誘電体円筒(円
柱)共振器30が開示されている。Japanese Patent Application Laid-Open No. 58-194406 mentioned above discloses a coaxial dielectric resonator as shown in FIG. 5 on the open end face 8 side of a cylindrical (or cylindrical) dielectric element 1. A dielectric cylindrical (cylindrical) resonator 30 in which a part of the conductor pattern 5 on the outer peripheral surface and a part of the dielectric element body 1 is tapered by a grinding machine 21 of a grinding blade which is not perpendicular to an axis is disclosed. I have.
【0006】ところで、一般に誘電体共振器のQは小型
化の要請とは相反して外径に相応して高くなるため、実
用上はQと小型化のバランスから寸法が決まる。そして
Qやf0は誘電体素体の研削深さや研削後の外周面の導
体パターン5の長さ(L2)に依存するので所要の共振
周波数f0、Q値等の諸特性を得るために外周面の導体
パターン5の一部を削り取るという前述の誘電体円共振
器の製造における最終段階での研削加工は高い研削加工
精度が要請される。In general, the Q of the dielectric resonator is increased in accordance with the outer diameter, contrary to the demand for miniaturization. Therefore, in practice, the size is determined from the balance between Q and miniaturization. Since Q and f 0 depend on the grinding depth of the dielectric body and the length (L2) of the conductor pattern 5 on the outer peripheral surface after the grinding, various characteristics such as the required resonance frequency f 0 and Q value can be obtained. The grinding at the final stage in the above-described production of the dielectric circular resonator, in which a part of the conductor pattern 5 on the outer peripheral surface is scraped, requires high grinding accuracy.
【0007】この研削加工は例えば図6に示されるよう
に誘電体素体1を左右一対のチャック12、13にて片
側固定として軸支するとともに導体パターンが形成され
た誘電体素体1に研削盤21(または研削盤11)の研
削ブレードを数百〜数千rpmの回転速度で定圧で当て
ることで研削加工がなされ、逐次共振周波数f0等をモ
ニターして所要特性を得る。In this grinding process, for example, as shown in FIG. 6, the dielectric element 1 is supported by a pair of left and right chucks 12 and 13 so as to be fixed on one side, and the dielectric element 1 on which a conductor pattern is formed is ground. Grinding is performed by applying a grinding blade of the disk 21 (or the grinding machine 11) at a constant pressure at a rotation speed of several hundreds to several thousand rpm, and the required characteristics are obtained by sequentially monitoring the resonance frequency f 0 and the like.
【0008】なお、誘電体共振器の誘電体素体1として
使用される材料はセラミックスであり、電極材料の融点
以下で焼成される必要からBi系材料、複合ペロブスカ
イト、(ZrSn)TiO4系、BaO−TiO2系等が
ある。The material used as the dielectric element 1 of the dielectric resonator is ceramics, and must be fired at a temperature lower than the melting point of the electrode material. Therefore, Bi-based materials, composite perovskite, (ZrSn) TiO 4 -based, BaO-TiO 2 and the like.
【0009】また、導体パターンの材料としては銀、銅
が使用され、一般に真空装置により蒸着、スパッタなど
により形成される他、塗布、ディップ、メッキ等様々な
成膜手法を用いることができ、その厚さは2〜40μm
程度である。In addition, silver and copper are used as the material of the conductor pattern. In general, various film forming techniques such as coating, dipping, and plating can be used in addition to being formed by vapor deposition or sputtering by a vacuum device. 2-40μm thick
It is about.
【0010】以上詳述した誘電体円筒共振器は外直径2
〜3mm、長さ4〜20mm程度の大きさである。The dielectric cylindrical resonator described in detail above has an outer diameter of 2
33 mm, length about 4-20 mm.
【0011】[0011]
【発明が解決しようとする課題】しかしながら、前記従
来の誘電体円筒共振器20、30の研削工程では、図3
に示されるように研削前の円筒形状の誘電体素体1の周
縁部(エッジ部分)にまで外周面の導体パターン5が形
成されているので、研削加工は誘電体素体1の外周面の
研削とその表面に形成された導体パターン5の研削を伴
う。However, in the grinding process of the conventional dielectric cylindrical resonators 20, 30, FIG.
As shown in (1), since the conductor pattern 5 on the outer peripheral surface is formed up to the peripheral portion (edge portion) of the cylindrical dielectric body 1 before grinding, grinding is performed on the outer peripheral surface of the dielectric body 1. This involves grinding and grinding of the conductor pattern 5 formed on the surface thereof.
【0012】その結果、研削盤11や21の研削ブレー
ドや誘電体素体1の研削部分9に導体パターン5の研削
金属粉Wが付着してしまい、Qの低下が生じる等所望の
諸特性が得られなくなり、ひいては信頼性が劣るという
問題点があった。As a result, the desired characteristics such as the reduction of Q due to the adhesion of the grinding metal powder W of the conductor pattern 5 to the grinding blades of the grinding machines 11 and 21 and the grinding portion 9 of the dielectric body 1 are caused. There is a problem in that it is no longer possible to obtain, and the reliability is poor.
【0013】本発明は、上記事情に鑑みてなされたもの
であり、導体パターンの研削を伴わない誘電体円筒共振
器の新規な製造方法を提供するものである。The present invention has been made in view of the above circumstances, and provides a novel method of manufacturing a dielectric cylindrical resonator without grinding a conductive pattern.
【0014】[0014]
【課題を解決するための手段】本発明は上記課題を解決
するために、円筒形状の誘電体素体の外周面と内周面と
一方端面に連続する導体パターンを形成した後、前記誘
電体素体の開放端面側の周縁を研削加工する工程を有す
る誘電体円筒共振器の製造方法において、前記誘電体素
体の外周面の開放端面側に導体パターンのない領域を開
放端面縁から軸方向に所定幅設定して外周面の導体パタ
ーンを一部分に形成する工程と、前記誘電体素体の開放
端面側の外周面の導体パターンがない領域を外周面の導
体パターンとの境界に未研削部分を残しつつ段付き状乃
至テーパー状に研削する工程と、を有することを特徴と
する誘電体円筒共振器の製造方法を提供する。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention provides a method for forming a conductive pattern which is continuous on one end surface with an outer peripheral surface and an inner peripheral surface of a cylindrical dielectric element. A method of manufacturing a dielectric cylindrical resonator having a step of grinding a peripheral edge on an open end face side of an element body, wherein a region having no conductor pattern on an open end face side of an outer peripheral surface of the dielectric element body is axially moved from the open end face edge. Forming a conductor pattern on the outer peripheral surface in a part by setting a predetermined width to the outer peripheral surface of the dielectric element body. And a step of grinding into a stepped shape or a tapered shape while leaving the step of forming a dielectric cylindrical resonator.
【0015】[0015]
【発明の実施の形態】以下、本発明に係る誘電体円筒共
振器の実施の形態について図面に基づいて詳細に説明す
る。なお、従来例と同等部材、箇所は同符号にて示す。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a dielectric cylindrical resonator according to the present invention will be described in detail with reference to the drawings. The same members and locations as those in the conventional example are indicated by the same reference numerals.
【0016】図1は本発明に係る誘電体円筒共振器の段
付き状研削加工工程時の断面図である。FIG. 1 is a sectional view of a dielectric cylindrical resonator according to the present invention in a stepped grinding step.
【0017】図2は本発明に係る誘電体円筒共振器のテ
ーパー状研削加工工程時の断面図である。FIG. 2 is a sectional view of the dielectric cylindrical resonator according to the present invention in a tapered grinding step.
【0018】図1において、誘電体円筒共振器40は円
筒形状の誘電体素体1の外周面2と内周面3と一方端面
4に連続する導体パターン5、6、7が形成されるとと
もに誘電体素体1の開放端面8側の外周面2が段付き状
に研削された構造は図4に示された従来の誘電体円筒共
振器20と同様であるが、顕著な相違点として研削加工
工程前に前記誘電体素体1の外周面2に形成された導体
パターン5が開放端面8側に導体パターンのない領域A
1を開放端面縁から軸方向に所定幅設定して外周面2に
形成する導体パターン5を全面ではなく短絡端面4側寄
りの一部分(全体の70〜95%の領域が適当)に形成
していることである。In FIG. 1, a dielectric cylindrical resonator 40 has conductor patterns 5, 6, 7 which are continuous with an outer peripheral surface 2, an inner peripheral surface 3 and one end surface 4 of a cylindrical dielectric element 1 and are formed. The structure in which the outer peripheral surface 2 on the open end surface 8 side of the dielectric element body 1 is ground in a stepped manner is the same as that of the conventional dielectric cylindrical resonator 20 shown in FIG. The conductor pattern 5 formed on the outer peripheral surface 2 of the dielectric element body 1 before the processing step has a region A on the open end face 8 side where no conductor pattern exists.
1 is set to a predetermined width in the axial direction from the edge of the open end face, and the conductor pattern 5 formed on the outer peripheral face 2 is formed not on the entire surface but on a part near the short-circuit end face 4 side (an area of 70 to 95% of the whole is appropriate). It is that you are.
【0019】そして、研削加工工程では研削盤11は上
記誘電体素体1の開放端面側の外周面の導体パターンの
ない領域A1を外周面の導体パターンとの境界に未研削
部分(幅L3)を残しつつ段付き状に研削することを特
徴とする。Then, in the grinding process, the grinding machine 11 places an unground portion (width L3) on the boundary A between the conductor pattern on the outer peripheral surface and the area A1 on the outer peripheral surface on the open end surface side of the dielectric element body 1 without the conductor pattern. Is characterized in that it is ground in a stepped shape while leaving the surface.
【0020】また、図2において、誘電体円筒共振器5
0は研削加工工程において前述の図5で示された従来の
誘電体円筒共振器30と同様に、誘電体素体1の開放端
面8側の外周面2を軸に対して垂直でない傾斜した研削
ブレードの研削盤21によってテーパ状に研削する点は
共通するが、開放端面8側に導体パターンのない領域A
2を開放端面縁から軸方向に所定幅設定して形成されて
いる。In FIG. 2, the dielectric cylindrical resonator 5
In the grinding process, similar to the conventional dielectric cylindrical resonator 30 shown in FIG. 5 described above, the outer peripheral surface 2 on the open end face 8 side of the dielectric element body 1 is inclined not perpendicular to the axis in the grinding process. Although the point of grinding in a tapered shape by the blade grinder 21 is common, a region A where there is no conductor pattern on the open end face 8 side is used.
2 is formed by setting a predetermined width in the axial direction from the edge of the open end face.
【0021】且つ、研削加工工程では研削ブレードが導
体パターン5の境界縁に触れないような十分な未研削部
分(幅L4)を残しつつテーパー状に研削することを特
徴とする。In the grinding step, the grinding blade is tapered while leaving a sufficient unground portion (width L4) so as not to touch the boundary edge of the conductor pattern 5.
【0022】畢竟、誘電体素体1表面への導体パターン
5の形成時に予め開放端面8の周縁から所定幅(共振器
長Lの5〜20%程度)を誘電体素体1が露出する未導
体パターン部分A1、A2として導体パターン5を外周
面2の全面ではなく短絡端面4側の一部分に形成してお
き、研削ブレードが導体パターン5に触れないようにし
て、誘電体素体1の開放端面8側の未導体パターン部分
A1、A2のみを未研削部分(幅L3、L4)を残して
段付き状乃至テーパー状に研削するのである。After all, when the conductor pattern 5 is formed on the surface of the dielectric element 1, the dielectric element 1 is not exposed to a predetermined width (about 5 to 20% of the resonator length L) from the periphery of the open end face 8 in advance. The conductor pattern 5 is formed not as the entire surface of the outer peripheral surface 2 but as a part of the short-circuit end surface 4 side as the conductor pattern portions A1 and A2 so that the grinding blade does not touch the conductor pattern 5 to open the dielectric body 1. Only the non-conductor pattern portions A1 and A2 on the end face 8 are ground into a stepped or tapered shape while leaving the unground portions (widths L3 and L4).
【0023】結果として、誘電体円筒共振器40、50
の製造工程における最終段階の上記研削加工工程では、
従来の研削加工工程のように誘電体素体1の外周面2全
面に形成した導体パターン5を誘電体素体1とともに研
削することがなく金属粉Wが研削ブレードや誘電体素体
1の研削表面等に付着することがない。As a result, the dielectric cylindrical resonators 40 and 50
In the above-mentioned grinding process in the final stage in the manufacturing process of
The metal powder W does not grind the conductor pattern 5 formed on the entire outer peripheral surface 2 of the dielectric body 1 together with the dielectric body 1 as in the conventional grinding process, and the metal powder W is ground by the grinding blade or the dielectric body 1. Does not adhere to the surface.
【0024】而して導体パターンの研削がないことから
導体と誘電体素体との界面の信頼性が向上し、金属粉の
付着に起因するQの低下や信頼性劣化の不具合が防止さ
れることになる。Since there is no grinding of the conductor pattern, the reliability of the interface between the conductor and the dielectric element is improved, and the deterioration of Q and the deterioration of reliability due to the adhesion of metal powder are prevented. Will be.
【0025】なお、本発明の実施の形態における誘電体
共振器40、50の製造方法は導体パターンの形成及び
研削加工工程の研削方法の他は従来の製造方法と同様で
あり、使用する研削盤や研削ブレードの取付方法等に制
限はないことは勿論である。The manufacturing method of the dielectric resonators 40 and 50 in the embodiment of the present invention is the same as the conventional manufacturing method except for the forming method of the conductive pattern and the grinding method of the grinding process. Needless to say, there is no limitation on the method of attaching the grinding blade or the like.
【0026】[0026]
【発明の効果】本発明に係わる誘電体共振器は上記のよ
うに構成されているため、以下に記載する効果を有す
る。Since the dielectric resonator according to the present invention is configured as described above, it has the following effects.
【0027】(1)研削加工工程時に導体パターンの研
削がなく金属粉が研削ブレードや誘電体素体の研削面に
付着することがないので、金属粉の付着に起因するQの
低下や信頼性劣化の不具合が防止される。(1) Since the conductive pattern is not ground during the grinding process and the metal powder does not adhere to the grinding surface of the grinding blade or the dielectric body, the Q is reduced and the reliability is reduced due to the adhesion of the metal powder. Deterioration problems are prevented.
【0028】(2)外周面の導体パターンを研削加工工
程時に傷つけないので、導体と誘電体素体の界面の信頼
性が向上する。(2) Since the conductor pattern on the outer peripheral surface is not damaged during the grinding process, the reliability of the interface between the conductor and the dielectric element is improved.
【図1】本発明に係る誘電体円筒共振器の段付き状研削
加工工程時の断面図である。FIG. 1 is a sectional view of a dielectric cylindrical resonator according to the present invention during a stepped grinding process.
【図2】本発明に係る誘電体円筒共振器のテーパー状研
削加工工程時の断面図である。FIG. 2 is a sectional view of a dielectric cylindrical resonator according to the present invention during a tapered grinding step.
【図3】TEMモード1/4波長の誘電体円筒共振器の
断面図である。FIG. 3 is a cross-sectional view of a TEM mode quarter-wave dielectric cylinder resonator.
【図4】従来の段付き状に研削加工された誘電体円筒共
振器の断面図である。FIG. 4 is a cross-sectional view of a conventional dielectric cylindrical resonator ground into a step shape.
【図5】従来のテーパー状に研削加工された誘電体円筒
共振器の断面図である。FIG. 5 is a sectional view of a conventional dielectric cylindrical resonator ground into a tapered shape.
【図6】誘電体円筒共振器の研削加工工程時の切削加工
状態を示す斜視図である。FIG. 6 is a perspective view showing a cutting state in a grinding step of the dielectric cylindrical resonator.
1 誘電体素体 2 外周面 3 内周面 4 一方端面(短絡端面) 5、6、7 導体パターン 8 開放端面 9 研削面 10、20、30、40、50 誘電体円筒共振器 11、21 研削盤 12、13 チャック A1、A2 未導体パターン部分 W 金属粉 L 共振器長 L2 研削後の外周面の導体パターン長 L3、L4 未研削部分の幅 REFERENCE SIGNS LIST 1 dielectric body 2 outer peripheral surface 3 inner peripheral surface 4 one end surface (short-circuit end surface) 5, 6, 7 conductive pattern 8 open end surface 9 ground surface 10, 20, 30, 40, 50 dielectric cylindrical resonator 11, 21 grinding Boards 12, 13 Chuck A1, A2 Unconductor pattern portion W Metal powder L Resonator length L2 Conductor pattern length on outer peripheral surface after grinding L3, L4 Width of unground portion
Claims (1)
と一方端面に連続する導体パターンを形成した後、前記
誘電体素体の開放端面側の周縁を研削加工する工程を有
する誘電体円筒共振器の製造方法において、 前記誘電体素体の外周面の開放端面側に導体パターンの
ない領域を開放端面縁から軸方向に所定幅設定して外周
面の導体パターンを一部分に形成する工程と、前記誘電
体素体の開放端面側の外周面の導体パターンがない領域
を外周面の導体パターンとの境界に未研削部分を残しつ
つ段付き状またはテーパー状に研削する工程と、を有す
ることを特徴とする誘電体円筒共振器の製造方法。1. A step of forming a continuous conductor pattern on an outer peripheral surface, an inner peripheral surface, and one end surface of a cylindrical dielectric element body, and then grinding the peripheral edge of the dielectric element body on an open end surface side. In the method for manufacturing a dielectric cylindrical resonator, a region having no conductor pattern on the open end surface side of the outer peripheral surface of the dielectric element body is set to a predetermined width in the axial direction from the edge of the open end surface to partially form the conductor pattern on the outer peripheral surface. And a step of grinding in a stepped or tapered shape while leaving an ungrounded portion at the boundary between the conductor pattern on the outer peripheral surface and a region having no conductor pattern on the outer peripheral surface on the open end surface side of the dielectric element body, A method for manufacturing a dielectric cylindrical resonator, comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17397397A JPH1127016A (en) | 1997-06-30 | 1997-06-30 | Production of dielectric cylindrical resonator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17397397A JPH1127016A (en) | 1997-06-30 | 1997-06-30 | Production of dielectric cylindrical resonator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH1127016A true JPH1127016A (en) | 1999-01-29 |
Family
ID=15970461
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17397397A Withdrawn JPH1127016A (en) | 1997-06-30 | 1997-06-30 | Production of dielectric cylindrical resonator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH1127016A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19990083562A (en) * | 1998-04-28 | 1999-11-25 | 무라타 야스타카 | Dielectric Resonator, Dielectric Filter, Dielectric Duplexer, Communication Device, and Method of Producing Dielectric Resonator |
-
1997
- 1997-06-30 JP JP17397397A patent/JPH1127016A/en not_active Withdrawn
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19990083562A (en) * | 1998-04-28 | 1999-11-25 | 무라타 야스타카 | Dielectric Resonator, Dielectric Filter, Dielectric Duplexer, Communication Device, and Method of Producing Dielectric Resonator |
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