JPH11248927A - Filter manufacturing apparatus and method for measuring ink weight in filter manufacturing apparatus - Google Patents

Abstract

(57) [Summary] [PROBLEMS] Before ejecting ink droplets to a filter or during ejection, the ink ejection amount from an ink jet head is weighed, and the ink amount from the ink jet head is constantly managed to improve the quality. To provide a filter manufacturing apparatus capable of manufacturing a good filter and an ink weight measuring method in the filter manufacturing apparatus. SOLUTION: An inkjet head 20 having a driving element driven by an applied voltage to eject ink droplets to a substrate 48, and a weight measuring unit 18 for measuring a weight of the ink droplet ejected from the inkjet head 20.
And control means 2000 for changing the voltage applied to the drive element of the inkjet head 20 based on the weight of the ink droplet measured by the weight measuring means 18.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter manufacturing apparatus for manufacturing a filter such as a color filter applied to a display device such as a liquid crystal display device, and a method of measuring ink weight in the filter manufacturing device. is there.

[0002]

2. Description of the Related Art With the development of electronic devices such as computers and portable information devices, the use of liquid crystal display devices, especially color liquid crystal display devices, has been increasing. This type of liquid crystal display device uses a color filter to color a display image.

A color filter has a substrate and may be formed by landing R (red), G (green), and B (blue) inks on the substrate in a predetermined pattern. As a method of landing ink on such a substrate, an ink jet method is employed.

When the ink jet system is adopted, a predetermined amount of ink is ejected from an ink jet head to a filter and landed thereon. This substrate is disclosed, for example, in JP-A-8-271724. And mounted on an XY stage. The XY stage moves the substrate in the X direction and the Y direction so that ink from the ink jet head can land on a predetermined position on the substrate.

[0005]

By the way, when such a color filter is manufactured, R and R are applied to the substrate.
It is necessary to form an appropriate amount of G and B inks.
In this case, if the R, G, and B ink droplets are not properly ejected in an appropriate amount according to the state of the ink droplets, color unevenness occurs in the color filter.

Japanese Patent Application Laid-Open No. 9-101410 discloses that the shape of an ink droplet ejected from a nozzle and landed on a color filter is measured by image processing, the ink density is measured by transmittance measurement, and the ink density is measured by reflectance measurement. In some cases, the flight shape of the ink droplet ejected from the nozzle is measured by laser light.

However, when such an ink droplet shape measurement is performed, there is a problem that the structure around the ink jet head becomes complicated.

In view of the above, the object of the present invention has been solved, and the amount of ink ejected from the ink jet head is weighed before ejecting ink droplets to the filter or during the ejection operation, and the amount of ink ejected from the ink jet head is constantly managed. It is another object of the present invention to provide a filter manufacturing apparatus capable of manufacturing a high-quality filter and a method of measuring ink weight in the filter manufacturing apparatus.

[0009]

According to the present invention, there is provided a filter manufacturing apparatus for manufacturing a filter by landing ink on a substrate. An inkjet head having a driving element driven by an applied voltage, a weight measuring means for measuring the weight of the ink droplet ejected from the inkjet head, and an ink jet head based on the weight of the ink droplet measured by the weight measuring means. And a control means for changing an applied voltage applied to the driving element.

According to the first aspect of the present invention, when a filter is manufactured by landing ink on a substrate, the ink jet head has a drive element driven by an applied voltage to discharge ink droplets onto the substrate. ing. The weight of the ink droplet discharged from the inkjet head is measured by a weight measuring unit.

The control means changes the voltage applied to the driving element of the ink jet head based on the weight of the ink droplet measured by the weight measuring means.

[0012] Thereby, with respect to the substrate of the filter,
Before or during the work of discharging ink
The weight of the ink droplets from the inkjet head can be managed by weighing the amount of ink ejected from the inkjet head. This stabilizes ink ejection, reduces variations in the amount of applied ink, and as a result, provides a high-quality filter with less color unevenness.

In the filter manufacturing apparatus according to the second aspect of the present invention, the driving element is a piezo element, and the control means controls the distortion speed of the driving element by changing the frequency of the pulsed applied voltage. . Accordingly, if the control means controls the distortion speed of the drive element by changing the frequency of the pulsed applied voltage based on the weight of the ink droplet, it is possible to eject an appropriate amount of the ink droplet.

In the filter manufacturing apparatus according to the third aspect of the invention, the driving element is a piezo element, and the control means controls the amount of distortion of the driving element by changing the voltage of the pulsed applied voltage. Accordingly, the control unit can control the amount of distortion of the driving element by changing the magnitude of the pulsed applied voltage based on the weight of the ink droplet, and can discharge an appropriate amount of the ink droplet. .

According to the fourth aspect of the present invention, the weight measuring means determines a plurality of ink droplets from the ink jet head, and divides the weight of the plurality of ink droplets by the number of ink droplets to reduce the weight of one ink droplet. It is to be calculated. Thus, the weight of one ink droplet can be accurately measured.

In the filter manufacturing apparatus according to the fifth aspect of the present invention, the weight measuring means is provided for measuring the weight of the red and blue discharged from the ink jet head with respect to the substrate when manufacturing the color filter.
The weight is calculated for each of the green and blue ink droplets. Thereby, when manufacturing a color filter, the weights of one ink drop of red, green, and blue can be separately calculated.

Next, a sixth aspect of the present invention is an ink weight measuring method used in a filter manufacturing apparatus for manufacturing a filter by landing ink on a substrate. The control unit measures the weight of the ink droplet ejected from the inkjet head having the driving element driven by the applied voltage, and the control unit applies the voltage applied to the driving element of the inkjet head based on the weight of the ink droplet measured by the weight measuring unit. A method for measuring the weight of ink in a filter manufacturing apparatus, characterized by changing a voltage.

According to the present invention, when a filter is manufactured by landing ink on a substrate, ink droplets ejected from an inkjet head having a driving element driven by an applied voltage to eject ink droplets onto the substrate are manufactured. After that, the control means changes the voltage applied to the drive element of the ink jet head based on the weight of the ink droplet measured by the weight measurement means.

Thus, the filter substrate is
Before or during the operation of discharging ink, the weight of the ink discharged from the inkjet head can be measured to control the weight of the ink droplets from the inkjet head. This stabilizes ink ejection, reduces variations in the amount of applied ink, and as a result, provides a high-quality filter with less color unevenness.

In the filter manufacturing apparatus of the present invention, the driving element is a piezo element, and the control means controls the distortion speed of the driving element by changing the frequency of the pulsed applied voltage. . Accordingly, if the control means controls the distortion speed of the drive element by changing the frequency of the pulsed applied voltage based on the weight of the ink droplet, it is possible to eject an appropriate amount of the ink droplet.

In the filter manufacturing apparatus according to the invention, the driving element is a piezo element, and the control means controls the amount of distortion of the driving element by changing the voltage of the pulsed applied voltage. Accordingly, the control unit can control the amount of distortion of the driving element by changing the magnitude of the pulsed applied voltage based on the weight of the ink droplet, and can discharge an appropriate amount of the ink droplet. .

In the ninth aspect of the present invention, the weight measuring means determines a plurality of ink droplets from the ink jet head, and divides the weight of the plurality of ink droplets by the number of ink droplets to reduce the weight of one ink droplet. It is to be calculated. Thus, the weight of one ink droplet can be accurately measured.

In the filter manufacturing apparatus according to the tenth aspect of the present invention, the weight measuring means is provided for measuring the weight of the red and blue emitted from the ink jet head with respect to the substrate when manufacturing the color filter.
The weight is calculated for each of the green and blue ink droplets. Thereby, when manufacturing a color filter, the weights of one ink drop of red, green, and blue can be separately calculated.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a part of a preferred embodiment of the filter manufacturing apparatus of the present invention, and FIG. 2 shows a simplified part of the filter manufacturing apparatus of FIG.

As shown in FIGS. 1 and 2, the first coloring means 210, the second coloring means 220,
The third coloring unit 230 has substantially the same structure as the base 12, the first moving unit 14, and the second moving unit 1.
6, an electronic balance (weight measuring means) 18, an inkjet head 20, a capping unit 22, a cleaning unit (cleaning means) 24, a controller 26, and the like.

The base (also referred to as a gantry) 12 includes the first moving means 14, the second moving means 16, the electronic balance 18,
Capping unit 22, cleaning unit 24
The cover is provided with a safety cover 28 for accommodating the safety cover 28 and the like, and a worker can open a door of a predetermined portion of the safety cover 28.

The controller 26 includes a monitor 30, a keyboard 32, a computer 34, and the like.

On the base 12, the first moving means 14,
The electronic balance 18, the capping unit 22, the cleaning unit 24, and the second moving unit 16 are set. A robot 74 and a substrate accommodation unit 70 are arranged around the base 12.

The first moving means 14 is preferably a base 1
2, and the first moving means 14 is positioned along the Y-axis direction.

On the other hand, the second moving means 16 is
6A, 16A, and is attached to the base 12 upright.
2 at the rear 12A. The X axis direction of the second moving unit 16 is a direction orthogonal to the Y axis direction of the first moving unit 14. Y axis is front part 12 of base 12
B and the axis along the rear 12A direction. X
The axes are axes along the left-right direction of the base 12, and are each horizontal.

First, the first moving means 14 shown in FIGS.
The second moving means 16 will be described with reference to FIG.

FIG. 3 shows the first moving means 14, the second moving means 16, the ink jet head 20 and the like.
As already described, the support 16A of the second moving means 16,
16A is located on the rear 12A side of the base 12.

The first moving means 14 in FIG. 3 has a guide rail 40, and the first moving means 14 can employ, for example, a linear motor. The slider 42 of the first moving means 14 of the linear motor type can be positioned by moving in the Y-axis direction along the guide rail 40.

The slider 42 has a motor 44 for the θ axis. The motor 44 is, for example, a direct drive motor.
6 fixed. Thus, when the motor 44 is energized, the rotor and the table 46 can rotate along the θ direction to index the rotation of the table 46.

The table 46 shown in FIG. 3 positions and holds the substrate 48. Table 46
It has the suction holding means 50, and when the suction holding means 50 operates, through the hole 46 A of the table 46,
The substrate 48 can be sucked and held on the table 46. The substrate 48 is provided with positioning pins 46 of the table 46.
B enables accurate positioning on the table 46.

The table 46 includes the ink jet head 2
No. 0 has a discard area 52 for discarding or test-pushing ink. This discard area 52 is X
It is provided on the rear end side of the table 46 in parallel with the axial direction.

Next, the second moving means 16 in FIG.
It has a column 16B fixed to 6A, 16A,
The column 16B has a second moving means 16 of a linear motor type. The slider 60 is a guide rail 6
It can be moved in the X-axis direction along 2A and positioned.
The slider 60 includes the inkjet head 20 as an ink ejection unit.

The ink jet head 20 has motors 62, 64, 66, 68 as swing positioning means. By operating the motor 62, the ink jet head 20 can be moved up and down along the Z axis and positioned.
The Z axis is a direction (vertical direction) orthogonal to the X axis and the Y axis.

When the motor 64 is actuated, the ink jet head 20 can be positioned by swinging along the β direction. When the motor 66 is operated, the ink jet head 20 can be positioned by swinging in the γ direction. When the motor 68 is operated, the ink-jet head 20 can be positioned by swinging in the α direction.

As described above, the ink jet head 20 shown in FIG. 3 can be positioned by linearly moving the slider 60 in the Z-axis direction, and can be positioned by swinging along α, β, and γ. The position or orientation of the 20 ink ejection surface 20P with respect to the substrate 48 on the table 46 side can be accurately controlled.

Next, with reference to the plan views of FIGS. 2 and 4, the substrate mounting / dismounting operation position P of the first moving means 14 and the substrate mounting / dismounting exchange between the substrate accommodating means 72 accommodating the substrate (load and load). The load) operation will be described.

The loading and loading of the substrate is performed by a robot 74 as a substrate supply / discharge unit. This robot 74
As shown in FIGS. 2 and 4, for example, it is located in front of the base 12 and in front of the substrate housing means 70.

The substrate accommodating means 70 accommodates a plurality of substrates 48, for example, as shown in FIG.
Substrate attaching / detaching operation position P of moving means 14 and substrate accommodating means 70
It is designed to communicate between.

The substrate attaching / detaching operation position P is the second position with respect to the base.
The robot 74 is positioned forward of the moving unit 16 and the robot 74 can freely and freely attach and detach the substrate 48 at the substrate attaching and detaching operation position P without being disturbed by the presence of the second moving unit 16 and the inkjet head. It can be performed efficiently. That is, the second moving means 16 and the ink jet head 20 are positioned above the first moving means 14,
Moreover, more preferably, the second moving means 16 includes the base 12
This is because the substrate attaching / detaching operation position P is located near the table 46 of the first moving means 14, and more preferably, at the front portion 12B of the base 12. .

In this way, the substrate mounting / dismounting operation position P and the second moving means 16 can be separated from each other.

As shown in FIG. 2, for example, the structure of the robot 74 includes a base 74A, a center shaft CL, and a first arm 74.
B, a second arm 74C, and the second arm 74C has, for example, a vacuum suction pad 74D. Robot 74
By sucking the substrate 48 with the vacuum suction pad 74D, rotating the first arm 74B and the second arm 74C along the center axis CL, and moving the center axis CL up and down in the Z-axis direction. The exchange of the substrate 48 between the substrate accommodating means 70 and the substrate attaching / detaching operation position P can be performed smoothly, efficiently and easily.

FIG. 5 shows the first coloring means 2 shown in FIG. 1 and FIG.
10, a second coloring means 220, a third coloring means 230, a control means 2000 and the like are shown.

In FIG. 5, the first coloring means 210, the second coloring means 220, and the third coloring means 230, which have already been described,
They are arranged in order from left to right, and drying means 1000, 1001, and 1002 are arranged between them.

The substrate accommodating means 70 and the robot 74 are arranged near the first coloring means 210, and the second coloring means 220
A robot 74 is arranged near the third coloring means 23.
A robot 74 is arranged near zero.

Another substrate accommodating means 70 is arranged near the drying means 1002.

Three first coloring means to third coloring means 2
Each of the control units 10, 220, and 230 is capable of performing ink management and other management by the control unit 2000.

The control panel 80 of the first coloring means 210 is connected to the computer 34.
It is connected to the ink management controller 98. Similarly, the control panel 80 of the second coloring means 220 is
4 and connected to the ink management controller 98,
The control panel 80 of the third coloring means 230 is
And is connected to the ink management controller 98.

The robot 74 of the first coloring means 210 moves the substrate 48 for the color filter to be manufactured from the substrate accommodating means 70 to the substrate attaching / detaching operation position P side of the first coloring means 210, First coloring means 210
Can eject red ink droplets onto the substrate 48 and land them. The substrate on which the red ink droplets have landed is moved by the robot 74 to the drying unit 1000 side and dried by the drying unit 1000.

The robot 74 of the second coloring means 220 applies the substrate 48 placed on the drying means 1000 to the second coloring means 22.
0 to the substrate attaching / detaching operation position P of the
The coloring unit 220 ejects a green ink droplet to land on the substrate 48. Thereafter, the robot 74 transfers the substrate 48 from the second coloring means 220 to the drying means 1001.

Next, the robot 74 moves the substrate 48 onto the drying means 1001 to the substrate attaching / detaching operation position P of the substrate 48 of the third coloring means 230. The third coloring means 230 discharges blue ink droplets onto the substrate 48 to land them.

As a result, red,
Green and blue inks are formed, thereby creating a color filter. Then, the robot 74 transfers the substrate 48 from the third coloring unit 230 to the drying unit 1002. The dried substrate 48 on the drying unit 1002 is stored in the substrate storage unit 70 by another robot 74.

Thus, the drying means 1000, 10
01 and 1002 can dry the red, green, and blue ink droplets colored by the first coloring unit 210, the second coloring unit 220, and the third coloring unit 230, respectively, while the substrate 48 is moving. By performing such a drying process, the production efficiency of the color filter can be increased, and inconveniences such as scattering of ink in the color filter can be avoided.

FIG. 6 shows a more detailed example of the internal structure of the control means 2000 shown in FIG. 5, and FIG.
This is a system provided separately for each of the coloring means 210, the second coloring means 220, and the third coloring means 230. The individual systems of the control means 2000 in FIG. 6 can be assembled so as to be applicable to the first coloring means 210, the second coloring means 220, and the third coloring means 230 as shown in FIG.

Referring to FIG. 6 and FIG.
Are connected to the control panel 80 on the base 12 side. The control panel 80 is disposed in the base 12. The first moving unit 14 (linear motor), the second moving unit 16 (linear motor), and the motor 4
4 are connected. In addition, the inkjet head 20
The motors 62, 64, 66, 68 shown in FIG. The first moving means 14 and θ
The axis motor 44 operates in response to a command from the control panel 80 to move the table 46 on which the substrate 48 for manufacturing a color filter is mounted in the Y-axis direction and to index in the θ-direction.

The four motors 62, 6 of the second moving means 16
4, 66 and 68 operate according to a command from the control panel 80 to control the attitude of the inkjet head 20 with respect to the substrate 48 on the table 46.

The robot 74 serving as the substrate supply / discharge means shown in FIG.
The operation can be controlled by the command of No. 4.

Next, an example of the structure of the ink jet head 20 will be described with reference to FIGS.

The ink jet head 20 is, for example,
FIG. 8 shows a head using a piezo element (piezoelectric element).
As shown in (A), a plurality of nozzles 91 are formed on the ink ejection surface 20P of the main body 90. A piezo element 92 is provided for each of the nozzles 91.

As shown in FIG. 8B, the piezo element 92
Are arranged corresponding to the nozzles 91 and the ink chambers 93. Then, an applied voltage Vh is applied to the piezo element 92 as shown in FIG.
As shown in (F) and (E), by expanding and contracting the piezo element 92 in the direction of arrow Q, the ink is pressurized and a predetermined amount of ink droplet 99 is ejected from the nozzle 91.

The ink jet head 20 shown in FIG. 6 is connected to an ink supply section 97.
Is supplied to the ink chamber 93 of FIG. A thermometer 96 and a viscometer 95 are connected to the ink supply unit 97. The thermometer 96 and the viscometer 95 measure the temperature and viscosity of the ink stored in the ink supply unit 97,
The ink state is supplied to the ink management controller 98 as feedback signals S1 and S2.

The ink management controller 98 gives the temperature and viscosity of the ink to the computer 34 as control information based on the feedback signals S1 and S2 of the ink state. The computer 34 controls the control panel 8
A piezo element drive signal S3 is sent to the piezo element drive circuit 101 through “0”. Piezo element drive circuit 101
Supplies an applied voltage Vh corresponding to the temperature and viscosity of the ink at that time to the piezo element 92 in FIG. 8 based on the piezo element drive signal S3. Can be ejected.

Next, an example of manufacturing a color filter by supplying ink to a substrate will be described with reference to FIGS.

The substrate 48 shown in FIG. 9 is a transparent substrate having a high mechanical strength and a high light transmittance. Substrate 4
For example, a transparent glass substrate, an acrylic glass, a plastic substrate, a plastic film, a surface-treated product thereof, or the like can be used as 8.

For example, as shown in FIG. 10, a plurality of color filter regions 105 are formed in a matrix on a rectangular substrate 48 from the viewpoint of increasing productivity.
These color filter areas 105 will be
By cutting 8, it can be used as a color filter suitable for a liquid crystal display device.

In the color filter area 105, for example, as shown in FIG. 10, R ink, G ink and B ink are formed and arranged in a predetermined pattern.
As the formation pattern, there are a mosaic type, a delta type, a square type and the like in addition to a conventionally known stripe type as shown in FIG.

FIG. 9 shows an example of a process for forming the color filter region 105 of FIG.

In FIG. 9A, a black matrix 110 is formed on one surface of a transparent substrate 48. A resin having no light transmission property (preferably black) is applied to a predetermined thickness (for example, about 2 μm) on a substrate 48 serving as a base of the color filter by a method such as spin coating, and is subjected to a photolithography method. The black matrix 110 is provided in the form of a matrix by the method described above.
The smallest display element surrounded by the lattice of the black matrix 110 is called a filter element, and is, for example, a window having a width of about 30 μm in the X-axis direction and a length of about 100 μm in the Y-axis direction.

After the black matrix 110 has been formed, the substrate 4
8. Bake the resin on top.

As shown in FIG. 9B, the ink drop 99
Land on the filter element 112. The amount of the ink droplet 99 is a sufficient amount in consideration of a decrease in the volume of the ink in the heating step.

In the heating step shown in FIG. 9C, when all the filter elements 112 on the color filter are filled with the ink droplets 99, a heating process is performed using a heater. The substrate 48 has a predetermined temperature (for example, about 70 ° C.).
Heat to As the solvent in the ink evaporates, the volume of the ink decreases. When the volume decreases sharply, the ink discharging step and the heating step are repeated until a sufficient ink film thickness as a color filter is obtained. By this processing, the solvent of the ink evaporates, and finally, only the solid content of the ink remains to form a film.

In the protective film forming step of FIG. 9D, heating is performed at a predetermined temperature for a predetermined time in order to completely dry the ink droplet 99. When the drying is completed, a protective film 120 is formed to protect the substrate 48 of the color filter on which the ink film is formed and to flatten the filter surface. For forming the protective film 120, for example, a method such as a spin coating method, a roll coating method, and a ripping method can be adopted.

In the transparent electrode forming step shown in FIG. 9E, the transparent electrode 130 is formed by using a prescription such as a sputtering method or a vacuum suction method.
Is formed over the entire surface of the protective film 120.

In the patterning step shown in FIG. 9F, the transparent electrode 130 is further patterned into a pixel electrode corresponding to the opening of the filter element 112.

The TFT (T) is used for driving the liquid crystal display panel.
This patterning is unnecessary when using a thin film transistor or the like.

Next, returning to FIG. 2, the electronic balance 18, the cleaning unit 24, and the capping unit 2 will be described.
2 and the alignment camera 23 will be briefly described.

The electronic balance 18 is provided with the ink jet head 2
In order to measure and manage the weight of one ink droplet 99 (see FIG. 8) ejected from the nozzle 0, for example, the ink droplet 99 receives 2000 ink droplets 99 from the nozzle 91 of the inkjet head 20. The electronic balance 18 uses this 2000
By dividing the weight of the ink drop 99 by a number of 2000, the weight of one ink drop 99 can be accurately measured. Based on the measured amount of the ink droplet 99, the amount of the ink droplet 99 ejected from the inkjet head 20 is optimally controlled.

The cleaning unit 24 can perform cleaning of the nozzles 91 and the like of the ink jet head 20 shown in FIG. The capping unit 22 covers the ink ejection surface 20P of the ink jet head 20 in FIG. 3 during standby for manufacturing no filter in order to prevent the ink ejection surface 20P from drying.

By moving the inkjet head 20 in the X-axis direction by the second moving means 16, the inkjet head 20 can be selectively positioned above the electronic balance 18, the cleaning unit 24 or the capping unit 22. . That is, even during the filter manufacturing operation, the weight of the ink droplet can be measured by moving the inkjet head 20 to, for example, the electronic balance 18 side. In addition, if the inkjet head 20 is moved onto the cleaning unit 24, the inkjet head 20 can be cleaned. When the inkjet head 20 is moved above the capping unit 22, the ink ejection surface 2 of the inkjet head 20 is moved.
Attach a cap to 0P to prevent drying.

The alignment camera 23 detects the position of the substrate 48 by detecting an alignment mark formed on the substrate 48 in advance.

Next, an operation example of the illustrated filter manufacturing apparatus will be described with reference to FIG.

In step ST1 of FIG. 11, the vacuum suction pad 74D of the robot 74 of FIG.
The new substrate 48 is sucked and transported to the attaching / detaching operation position P of the base 12. That is, the substrate 48 is moved to the first moving unit 14.
Is supplied on the table 46 of the table. The board 48 is positioned with respect to the table 46 by being abutted against the positioning pins 46B of FIG. In addition, the motor 44 is operated to set the end faces of the substrate 48 so as to be parallel to the Y-axis direction. The above is the positioning of the substrate and the alignment of the substrate in steps ST2 and ST3 in FIG.

Then, the computer 34 calculates the starting position of the ink ejection operation in step ST4 in FIG. 8 based on the information from the alignment camera 23 and the information from the observation camera 27 in FIG.

On the other hand, in step ST 5 of FIG. 11, the ink jet head 20 moves along the X-axis direction and is positioned above the electronic balance 18. Then, as shown in steps ST6, ST7 and ST8 in FIG. 11, the parameters are loaded, the designated nozzle is selected, and the counter of the electronic balance 18 is cleared. Then, in step ST9, the designated number of drops (the number of designated ink drops) is ejected. This allows
The electronic balance 18 of FIG. 2 measures the weight of, for example, 2,000 ink drops, and calculates the weight per ink drop.

In step ST20 of FIG. 11, it is determined whether or not the weight per ink drop is within a predetermined appropriate range.
Move to T12.

The calculation of the weight of one ink droplet is performed for all nozzles of the inkjet head 20 to be measured.
When the process is completed through steps ST10, ST11, and ST12 in FIG. 11, the inkjet head 20 in FIG. 3 moves along the X-axis direction to the drawing start position in step ST13 in FIG. The inkjet head 20 is appropriately moved and positioned in the X-axis direction by the second moving means 16 while being appropriately moved and positioned in the Y-axis direction.

On the other hand, if it is determined in step ST20 that the weight per ink drop is not within the predetermined appropriate range, the process proceeds to step ST21, where it is determined whether the weight of the ink drop is within the correctable range.

The computer 34 shown in FIG. 7 determines the proper range of the weight of the ink droplet and whether the weight is within the correctable range.

In step ST22, the computer 34 shown in FIG.
The computer 34 determines the state of the ink based on a signal from the ink management controller 12 obtained based on the signals of S1 and S2, and the computer 34 determines the corresponding first coloring means 210 to 2
By sending separate control signals to any or all of the control panels 80, the control panel 80, to which the control signals have been sent, sends the piezo element drive signal S3 shown in FIG. Supply for As a result, the piezo element driving circuit 101 supplies feedback signals S1 and S2 of the state of the inkjet head 20 to the piezo element 92 of the inkjet head 20 shown in FIG.
Is supplied according to a predetermined voltage. That is, as shown in step ST22 of FIG. 11, the drive waveform of the piezoelectric element, which is a piezoelectric element, is adjusted. FIG. 12 and FIG. 13 show examples of adjustment of an applied voltage which is a driving waveform of a piezoelectric element which is a piezoelectric element.

As shown in FIG. 13A, for example, by changing the voltage of the applied voltage, the amount of distortion of the piezoelectric element, which is a piezoelectric element, can be controlled. Alternatively, by changing the frequency of the applied voltage as shown in FIG. 13B, the strain rate of the piezoelectric element, which is a piezoelectric element, is controlled to balance the load with the viscosity of the ink.

In FIG. 12, the piezo element driving circuit 1 shown in FIG.
13 shows an example of the applied voltage Vh supplied to the piezo element from the initial driving waveform I. When the ink ejection amount is small with respect to the initially set driving waveform I of the applied voltage Vh, the applied voltage Vh is the same as the driving waveform I1 for that. Increase the value. On the other hand, when the ink ejection amount is large, a drive waveform I2 having a smaller voltage value than the initially set drive waveform I is supplied. In this case, the waveform times t are the same. The example of FIG.
This is a case where the applied voltage Vh is changed as shown in FIG. 3A, and the amount of distortion of the piezoelectric element is controlled.

Next, steps ST14 and ST1 in FIG.
In step 5, a plurality of color filter regions 105 are formed on the substrate, for example, in a stripe pattern as shown in FIG.

The filter manufacturing apparatus 10 shown in FIGS.
The ink jet head 20 of the first coloring means 210, the second coloring means 220, and the third coloring means 230 is preferably R
(Red) or one of G (green) and B (blue).

As shown in FIG. 5, the first coloring means 210
The substrate 48 is colored with red ink alone, and the second coloring means 220 colors green ink on the substrate 48 and the third coloring means 230 colors blue ink on the substrate 48. . That is, when the substrate 48 passes through the first coloring unit, the second coloring unit, the third coloring unit, 210, 220, and 230 in order, the substrate 48 is colored with red ink first, Then the green ink can be colored and finally the blue ink can be colored to create a color filter area. During the movement of the substrate 48, the substrate 48 is dried by the drying means 1000,1.
Since the ink passes through 001 and 1002, the colored ink can be dried on the spot. Therefore, the production efficiency of the color filter can be increased while drying, and there is no problem that the colored ink is transferred to another portion and colored when it is not dried.

As shown in FIGS. 11 to 13, in each of the red ink droplet, the green ink droplet, and the blue ink droplet, the control means for supplying the applied voltage is separately provided. An applied voltage can be supplied to the driving elements of the inkjet heads 20 of the first coloring means, the second coloring means, and the third coloring means according to the state of these ink droplets. From such a situation, the respective ink droplets are set in an optimal state, and the first to third coloring units correct the ink amounts of the respective colors.
In addition, it can be formed by efficiently landing on the substrate 48.

When a color filter is manufactured while appropriately monitoring the weight of one ink drop of each color ink, the value of the applied voltage, that is, the voltage value or the frequency is changed to change the color filter. It is possible to maintain a state where an appropriate amount of ink can be output during manufacturing.

The ink jet head 20 can be moved and positioned independently in the X-axis direction by the second moving means 16, so that the ink jet head 20 can be cleaned and maintained by the cleaning unit 24 shown in FIG. The operation of attaching a cap at 22 and measuring the weight of ink droplets with the electronic balance 18 can be appropriately performed during the operation of forming a color filter. That is, the inkjet head 20
Cleaning unit 24, capping unit 22
Alternatively, it can be sent alone in the X-axis direction above the electronic balance 18. Thus, maintenance of the ink jet head 20, measurement of the weight of ink droplets, and the like can be easily, smoothly, and efficiently performed without stopping the operation of manufacturing the color filter.

Further, the substrate attaching / detaching operation position P is located on the front side of the ink jet head 20 and the second moving means 16, and the second moving means 16 is located above and separated from the first moving means 14. The attachment / detachment work of 48 can be easily performed without being disturbed by the second moving means 16 and the ink jet head 20. For this reason, the replacement of the substrate 48 can be performed smoothly, easily and efficiently without being restricted by the position of the ink jet head 20 or the like.

The present invention is not limited to the above embodiment,
Various changes can be made without departing from the scope of the claims.

The filter manufacturing apparatus of the present invention is not limited to the manufacture of a color filter for a liquid crystal display device, for example, and can be applied to, for example, an EL (electroluminescence) display element. EL display element
A thin film containing a fluorescent inorganic or organic compound is sandwiched between a cathode and an anode, and excitons are generated by injecting electrons and holes into the thin film and recombining them. The device emits light using the emission of light (fluorescence / phosphorescence) when the exciton is deactivated. Of the fluorescent materials used in such EL display elements, materials that emit red, green, and blue luminescent colors are subjected to inkjet patterning on an element substrate such as a TFT using the manufacturing apparatus of the present invention, so that self-luminous full-color can be obtained. E
An L display element can be manufactured. The range of the filter in the present invention includes the substrate of such an EL display element.

The filter manufacturing apparatus of the present invention includes a step of performing a surface treatment such as plasma, UV treatment, and coupling on the surfaces of the resin resist, the pixel electrode, and the lower layer so that the EL material is easily attached. You may have.

The EL display element manufactured by using the color filter manufacturing apparatus of the present invention can be applied to a segment display or a still image display with simultaneous simultaneous light emission, for example, a low information field such as a picture, a character, a label, or the like. -It can also be used as a light source having a line / surface shape. In addition to passive drive display elements, TF
By using an active element such as T for driving, a full-color display element having high luminance and excellent responsiveness can be obtained.

Further, if a metal material or an insulating material is provided to the inkjet patterning technique of the present apparatus, direct fine patterning of a metal wiring, an insulating film, or the like can be performed, and the present invention can be applied to the fabrication of a new high-performance device.

The ink jet head 20 of the filter manufacturing apparatus shown in FIG. G. FIG. B can discharge one kind of ink,
Of course, two or three types of ink can be simultaneously discharged.

The first moving means 14 and the second moving means 16 of the filter manufacturing apparatus 10 use linear motors. However, the present invention is not limited to this, and other types of motors and actuators can be used.

In the embodiment of the present invention, the first coloring means, the second coloring means, and the third coloring means are arranged in this order in FIG. 5, and ink is applied to the substrate 48 in the order of red, green, and blue. However, the order is not limited to this, and the order can be changed.

In the embodiment of the present invention, in the apparatus for manufacturing a color filter using an ink jet head, when discharging the ink droplets from the ink jet head, before discharging the ink drops from the ink jet head, or During the discharging operation, the weight of the discharging amount of the ink droplet is measured by the weight measuring means. This makes it possible to control the ejection amount of the ink droplet from the weight of the ink droplet so that the variation in the ejection amount of the ink droplet, that is, the ink application amount is reduced, and to obtain a high-quality color filter with less color unevenness. Can be. There is no need to measure the state of ink droplets by performing conventional image processing, measure ink density by measuring transmittance or reflection, or measure the flight shape of ink droplets using laser light. In the embodiment of the invention, only by measuring the weight of the ink droplet,
Management of the ejection amount (weight) of the ink droplets can be performed constantly or when necessary.

In the embodiment of the present invention, the weight of the ink droplet is measured by the electronic balance. However, the present invention is not limited to this, and the weight can be measured by a method other than the electronic balance.
When measuring the weight of ink droplets, the number of ink droplets received by, for example, an electronic balance is 1 to 10,000.
Of course, it is also possible to measure the droplets by receiving the droplets on a balance tray and divide the measurement by the number of ink droplets. In addition, it is possible to measure the weight of ink droplets in a single nozzle unit of an ink jet head, a normal nozzle unit, or a unit of a red, green, and blue ink jet head.

The time for measuring the weight may be when manufacturing one color filter, one substrate on which one color filter is assembled, or one time when the inkjet head scans. Can also be performed.

The shape of the tray of the electronic balance may be, for example, circular or square. In addition, if the weight can be accurately measured by the electronic balance, the size of the pan having a width corresponding to the width of the color filter may be set.

[0116]

According to the first aspect of the present invention, the amount of ink ejected from the ink jet head is weighed before or during the operation of ejecting ink onto the substrate of the filter, and the ink droplets from the ink jet head are measured. Can manage the weight of This stabilizes ink ejection, reduces variations in the amount of applied ink, and as a result, provides a high-quality filter with less color unevenness.

In the filter manufacturing apparatus according to the second aspect of the invention, the driving element is a piezo element, and the control means controls the distortion speed of the driving element by changing the frequency of the pulsed applied voltage. . Accordingly, if the control means controls the distortion speed of the drive element by changing the frequency of the pulsed applied voltage based on the weight of the ink droplet, it is possible to eject an appropriate amount of the ink droplet.

In the filter manufacturing apparatus according to the third aspect of the present invention, the drive element is a piezo element, and the control means controls the amount of distortion of the drive element by changing the voltage of the pulsed applied voltage. Accordingly, the control unit can control the amount of distortion of the driving element by changing the magnitude of the pulsed applied voltage based on the weight of the ink droplet, and can discharge an appropriate amount of the ink droplet. .

According to the fourth aspect of the present invention, the weight measuring means determines a plurality of ink droplets from the ink jet head and divides the weight of the plurality of ink droplets by the number of ink droplets to reduce the weight of one ink droplet. It is to be calculated. Thus, the weight of one ink droplet can be accurately measured.

In the filter manufacturing apparatus according to the fifth aspect of the present invention, the weight measuring means is provided for removing red, spitted from the ink jet head with respect to the substrate when manufacturing the color filter.
The weight is calculated for each of the green and blue ink droplets. Thereby, when manufacturing a color filter, the weights of one ink drop of red, green, and blue can be separately calculated.

According to a sixth aspect of the present invention, the weight of ink ejected from the ink jet head is measured before or during the operation of ejecting ink to the filter substrate, and the weight of the ink droplet from the ink jet head is measured. Can be managed. This stabilizes ink ejection, reduces variations in the amount of applied ink, and as a result, provides a high-quality filter with less color unevenness.

In the filter manufacturing apparatus of the present invention, the driving element is a piezo element, and the control means controls the distortion speed of the driving element by changing the frequency of the pulsed applied voltage. . Accordingly, if the control means controls the distortion speed of the drive element by changing the frequency of the pulsed applied voltage based on the weight of the ink droplet, it is possible to eject an appropriate amount of the ink droplet.

In the filter manufacturing apparatus according to the present invention, the driving element is a piezo element, and the control means controls the amount of distortion of the driving element by changing the voltage of the pulsed applied voltage. Accordingly, the control unit can control the amount of distortion of the driving element by changing the magnitude of the pulsed applied voltage based on the weight of the ink droplet, and can discharge an appropriate amount of the ink droplet. .

According to the ninth aspect of the present invention, the weight measuring means determines a plurality of ink droplets from the ink jet head and divides the weight of the plurality of ink droplets by the number of ink droplets to reduce the weight of one ink droplet. It is to be calculated. Thus, the weight of one ink droplet can be accurately measured.

[0125] In the filter manufacturing apparatus according to the tenth aspect, the weight measuring means may be configured to measure red, spitted from the ink jet head with respect to the substrate when the color filter is manufactured.
The weight is calculated for each of the green and blue ink droplets. Thereby, when manufacturing a color filter, the weights of one ink drop of red, green, and blue can be separately calculated.

[Brief description of the drawings]

FIG. 1 is a diagram showing in detail a preferred embodiment of a filter manufacturing apparatus of the present invention.

FIG. 2 is a diagram showing the filter manufacturing apparatus of FIG. 1 more clearly.

FIG. 3 is a perspective view showing a first moving unit and a second moving unit, an inkjet head, a substrate, and the like of the filter manufacturing apparatus of FIG. 2;

FIG. 4 is a plan view showing a first moving unit, a second moving unit, a robot, a substrate housing unit, and the like.

FIG. 5 is a plan view showing an overall configuration diagram of a filter manufacturing apparatus of the present invention.

FIG. 6 is a diagram showing a computer, a control panel, various control objects, and the like.

FIG. 7 is a block diagram showing each element in the control means.

FIG. 8 is a diagram illustrating a structure of an inkjet head.

FIG. 9 illustrates an example of manufacturing a color filter using a substrate.

FIG. 10 is a diagram showing a substrate and a part of a color filter region on the substrate.

FIG. 11 is a diagram showing an operation example of the filter manufacturing apparatus.

FIG. 12 is a diagram illustrating an example in which control is performed by changing a voltage value of an applied voltage applied to a piezo element.

FIG. 13 is a diagram showing an example of a change in applied voltage and a change in frequency.

[Explanation of symbols]

 14 first moving means 16 second moving means 18 electronic balance (weight measuring means) 20 ink jet head 46 table 48 substrate 74 robot (substrate) (Supply / discharge means) 210: first coloring means 220: second coloring means 230: third coloring means 1000, 1001, 1002: drying means 2000: control means

 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akio Mori 3-5-5 Yamato, Suwa City, Nagano Prefecture Seiko Epson Corporation

Claims (10)

[Claims] 1. A filter manufacturing apparatus for manufacturing a filter by landing ink on a substrate, comprising: an inkjet head having a driving element driven by an applied voltage to eject ink droplets to the substrate; Weight measuring means for measuring the weight of the ejected ink droplets, and control means for changing an applied voltage to be applied to a driving element of the ink jet head based on the weight of the ink droplet measured by the weight measuring means. Filter manufacturing equipment. 2. The filter manufacturing apparatus according to claim 1, wherein the driving element is a piezo element, and the control means controls the distortion speed of the driving element by changing the frequency of the pulsed applied voltage. 3. The filter manufacturing apparatus according to claim 1, wherein the drive element is a piezo element, and the control means controls the amount of distortion of the drive element by changing the magnitude of the pulsed applied voltage. 4. The weight measuring means receives a plurality of ink droplets from an ink-jet head, and calculates the weight of one ink droplet by dividing the weight of the plurality of ink droplets by the number of ink droplets. 4. The filter manufacturing apparatus according to any one of claims 3 to 3. 5. The filter manufacturing method according to claim 4, wherein the weight measuring means calculates the weight of one red, green, and blue ink droplet ejected from the ink jet head to the substrate when manufacturing the color filter. apparatus. 6. An ink weight measuring method used in a filter manufacturing apparatus for manufacturing a filter by landing ink on a substrate, wherein a driving element driven by an applied voltage to eject ink droplets to the substrate is provided. Measuring the weight of the ink droplet ejected from the inkjet head having the control unit, changing the applied voltage applied to the driving element of the inkjet head based on the weight of the ink droplet measured by the weight measuring unit, Method for measuring ink weight in a filter manufacturing apparatus. 7. The method according to claim 6, wherein the driving element is a piezo element, and the control means controls the distortion speed of the driving element by changing the frequency of the pulsed applied voltage. . 8. The ink weight measurement in the filter manufacturing apparatus according to claim 6, wherein the driving element is a piezo element, and the control means controls the amount of distortion of the driving element by changing the magnitude of the pulsed applied voltage. Method. 9. The weight measuring means receives a plurality of ink droplets from an ink-jet head and calculates the weight of one ink droplet by dividing the weight of the plurality of ink droplets by the number of ink droplets. 9. The method for measuring ink weight in the filter manufacturing apparatus according to any one of items 1 to 8. 10. The filter manufacturing method according to claim 9, wherein the weight measuring means calculates the weight of one red, green, and blue ink droplet ejected from the ink jet head to the substrate when manufacturing the color filter. Method for measuring ink weight in the device.