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JPH11142875A - Liquid crystal display element and its manufacture - Google Patents

Liquid crystal display element and its manufacture

Info

Publication number
JPH11142875A
JPH11142875A JP31205197A JP31205197A JPH11142875A JP H11142875 A JPH11142875 A JP H11142875A JP 31205197 A JP31205197 A JP 31205197A JP 31205197 A JP31205197 A JP 31205197A JP H11142875 A JPH11142875 A JP H11142875A
Authority
JP
Japan
Prior art keywords
thin film
liquid crystal
substrate
electrode
crystal display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31205197A
Other languages
Japanese (ja)
Inventor
Satoru Shinsenji
哲 秦泉寺
Hideki Matsukawa
秀樹 松川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP31205197A priority Critical patent/JPH11142875A/en
Publication of JPH11142875A publication Critical patent/JPH11142875A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

PROBLEM TO BE SOLVED: To attain sure connection to a leading electrode of a counter substrate and to improve display quality in a liquid crystal display element using a transparent electrode of multilayer structure obtained by holding a metallic thin film between oxide thin films for a display electrode to be formed on a color filter substrate. SOLUTION: In a liquid crystal display element, a liquid crystal layer 12 of which periphery is sealed by sealing resin 8 and conductive paste 10 formed on a prescribed position are held between a 1st transparent substrate 2 forming active elements 7 and pixel electrodes 13 on its surface and a 2nd transparent substrate 1 prepared as a counter electrode and forming transparent electrodes on its surface. The electrode 2 has multilayer structre holding a metallic thin film 5 between oxide thin films 4, 6 and conductive particles 11 included in the paste 10 are directly brought into contact with the thin film 5 and a leading electrode 14 and electrically connected to them.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、映像表示機器、パ
ーソナルコンピュータやワードプロセッサなどのOA機
器、産業分野のハンディ端末機器、携帯型情報通信機器
などに用いられる液晶表示素子及びその製造方法に関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device used for a video display device, an OA device such as a personal computer or a word processor, a handy terminal device in the industrial field, a portable information communication device, and a method of manufacturing the same. is there.

【0002】[0002]

【従来の技術】現在フラットパネルディスプレイとし
て、液晶、プラズマ、ELディスプレイが実用化され、
その用途も幅広いものとなってきている。中でも、液晶
表示素子は、重量や体積において携帯性に優れた製品分
野に位置することができ、近年画面サイズ、表示容量の
増加によりCRT代替のモニター用途として注目されて
いる。
2. Description of the Related Art Liquid crystal, plasma, and EL displays are currently in practical use as flat panel displays.
Its applications are becoming widespread. Among them, the liquid crystal display element can be positioned in a product field excellent in portability in terms of weight and volume, and has recently attracted attention as a monitor for CRT replacement due to an increase in screen size and display capacity.

【0003】モニター用途としての課題として、広視野
角化、低クロストーク、高透過率化等が上げられる。2
0型を越えるサイズでは、たとえアクティブタイプの液
晶表示素子でもクロストークが問題となってくる。
[0003] Problems for use in monitors include wide viewing angles, low crosstalk, and high transmittance. 2
If the size exceeds 0, crosstalk becomes a problem even in an active type liquid crystal display device.

【0004】このクロストーク対策の1つとして、カラ
ーフィルタ上の透明電極の低抵抗化というアプローチが
あり、透明電極の成膜条件の検討や特公平6ー3506
号公報に記載されているような銀薄膜を金属酸化物で挟
んだ多層構造の透明電極が考案されている。
As one of the measures against the crosstalk, there is an approach of lowering the resistance of a transparent electrode on a color filter.
A transparent electrode having a multilayer structure in which a silver thin film is sandwiched between metal oxides as described in Japanese Patent Application Laid-Open Publication No. H10-157, has been devised.

【0005】以下に、多層構造の透明電極を用いた従来
の液晶表示素子について説明する。図2は、従来技術に
おける多層構造の透明電極を用いた液晶表示素子の端子
部の断面を示したものである。
A conventional liquid crystal display device using a transparent electrode having a multilayer structure will be described below. FIG. 2 shows a cross section of a terminal portion of a liquid crystal display element using a transparent electrode having a multilayer structure according to the prior art.

【0006】図2において、アクティブ素子7、画素電
極13及び引出電極14が形成された透明基板2と、カ
ラーフィルタ3及び、金属酸化物薄膜4、金属薄膜5、
金属酸化物薄膜6が順に積層された多層構造の透明電極
が形成された透明基板1との間に、周辺をシール樹脂8
で封止された液晶層12を挾み、かつ透明基板2の引出
電極14と透明基板1の透明電極との間に導電ペースト
10を挾んで液晶表示装置が構成されている。なお、9
は透明基板1,2の間隔を設定するスペーサである。
In FIG. 2, a transparent substrate 2 on which an active element 7, a pixel electrode 13 and an extraction electrode 14 are formed, a color filter 3, a metal oxide thin film 4, a metal thin film 5,
Seal resin 8 is provided between transparent metal substrate 1 on which a transparent electrode having a multilayer structure in which metal oxide thin films 6 are sequentially laminated is formed.
A liquid crystal display device is constructed by sandwiching a liquid crystal layer 12 sealed with a conductive paste 10 between an extraction electrode 14 of the transparent substrate 2 and a transparent electrode of the transparent substrate 1. Note that 9
Is a spacer for setting the distance between the transparent substrates 1 and 2.

【0007】[0007]

【発明が解決しようとする課題】しかしながら、このよ
うな多層構造の透明電極を用いた場合で、金属薄膜を挟
む金属酸化物膜としてITOに代表される低抵抗の透明
電極を用いた場合では電極の接続には何ら問題はない
が、金属酸化物薄膜として比較的抵抗値の高い透明薄膜
を用いた場合には、引出電極との接続抵抗が高くなり、
表示品位が低下するという問題が生じる。
However, when such a transparent electrode having a multilayer structure is used, when a low-resistance transparent electrode typified by ITO is used as a metal oxide film sandwiching a metal thin film, an electrode is not formed. There is no problem in the connection of, but when a transparent thin film having a relatively high resistance value is used as the metal oxide thin film, the connection resistance with the extraction electrode increases,
There is a problem that display quality is deteriorated.

【0008】本発明は、このような問題点を解決するも
のであり、金属薄膜を酸化物薄膜で挟んだ多層構造の透
明電極を用いた場合でも、その低抵抗性能と端子部の良
好な接続性が両立する液晶表示素子及びその製造方法を
提供することを目的とするものである。
The present invention solves such a problem. Even when a transparent electrode having a multilayer structure in which a metal thin film is sandwiched between oxide thin films is used, its low resistance performance and good connection of a terminal portion are achieved. It is an object of the present invention to provide a liquid crystal display element and a method for manufacturing the same, which are compatible with each other.

【0009】[0009]

【課題を解決するための手段】上記目的を達成するため
に、本発明の液晶表示素子は、一主面にアクティブ素子
及び画素電極が形成された第1の基板と、一主面にカラ
ーフィルタ及び対向電極としての透明電極が形成された
第2の基板との間に、周囲をシール剤で封止した液晶層
を挾み、かつ前記第1の基板に形成された引出電極と前
記第2の基板の透明電極間を導電ペーストで電気的に接
続した液晶表示素子において、前記透明電極は金属薄膜
を酸化物薄膜で挾んだ多層構造からなり、かつ前記導電
ペーストは導電性粒子を含み、前記導電性粒子が前記多
層構造の金属薄膜と直接接して電気的に接続されている
ことを特徴とするものである。
In order to achieve the above object, a liquid crystal display device according to the present invention comprises a first substrate having an active element and a pixel electrode formed on one main surface, and a color filter formed on one main surface. A liquid crystal layer whose periphery is sealed with a sealant is sandwiched between a second substrate on which a transparent electrode as a counter electrode is formed, and an extraction electrode formed on the first substrate and the second electrode on the second substrate. A transparent electrode having a multilayer structure in which a metal thin film is sandwiched between oxide thin films, and the conductive paste contains conductive particles; The conductive particles are directly in contact with and electrically connected to the metal thin film having the multilayer structure.

【0010】上記構成によれば、金属薄膜を酸化物薄膜
で挾んだ多層構造の薄膜電極を用いることにより、低抵
抗化が可能になり、また、その金属薄膜と引出電極との
間を導電ペーストに混入した導電性粒子が直接接触して
電気的に接続するので、良好な導通性を得ることができ
る。
According to the above construction, the use of a thin film electrode having a multilayer structure in which a metal thin film is sandwiched between oxide thin films makes it possible to reduce the resistance, and to provide a conductive material between the metal thin film and the extraction electrode. Since the conductive particles mixed into the paste are in direct contact and electrically connected, good conductivity can be obtained.

【0011】また、本発明の液晶表示素子の製造方法
は、一主面にアクティブ素子及び画素電極が形成された
第1の基板と、一主面にカラーフィルタ及び、金属薄膜
を酸化物薄膜で挾んだ多層構造の透明電極が形成された
第2の基板とを対向させ、その間隙部に液晶層を封入す
るシール剤と、前記第1の基板に形成された引出電極と
前記第2の基板の透明電極間に導電性粒子を含む導電ペ
ーストとを挾んで貼り合わせた後、前記導電性粒子が前
記多層構造の酸化物薄膜を突き破り前記金属薄膜と直接
接するように加圧して前記シール剤を硬化することを特
徴とするものである。
Further, in the method of manufacturing a liquid crystal display element according to the present invention, a first substrate having an active element and a pixel electrode formed on one main surface, a color filter on one main surface, and a metal thin film formed of an oxide thin film. A second substrate having a transparent electrode having a multilayer structure sandwiched therebetween is opposed to the second substrate, and a sealant for sealing a liquid crystal layer in a gap between the second substrate and the extraction electrode formed on the first substrate and the second substrate. After sandwiching a conductive paste containing conductive particles between the transparent electrodes of the substrate and bonding them together, the pressure is applied so that the conductive particles penetrate the oxide thin film of the multilayer structure and come into direct contact with the metal thin film, and the sealing agent is pressed. Is cured.

【0012】このような製造方法を採ることにより、金
属薄膜と引出電極との間を導電性粒子を介して容易かつ
確実に導通させることができる。
By adopting such a manufacturing method, it is possible to easily and surely conduct between the metal thin film and the extraction electrode via the conductive particles.

【0013】なお、多層構造の透明電極における金属薄
膜としては、銀薄膜であることが好ましい。
The metal thin film in the transparent electrode having a multilayer structure is preferably a silver thin film.

【0014】[0014]

【発明の実施の形態】以下、本発明の実施例の形態につ
いて、図面を用いて詳細に説明する。図1は、本発明の
一実施の形態における液晶表示素子の端子部の断面を示
したものである。
Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows a cross section of a terminal portion of a liquid crystal display element according to an embodiment of the present invention.

【0015】まず、透明基板2上に、アクティブ素子7
と画素電極13と引出電極14を形成する。次に、透明
基板1上にカラーフィルタ3を形成し、その上に金属酸
化物薄膜4と金属薄膜5、さらに金属酸化物薄膜6を順
次積層して透明電極を形成する。ここで金属酸化物薄膜
4、6としてSiO2、金属薄膜5として銀薄膜を用
い、膜厚は金属酸化物薄膜4が500Å、金属薄膜5が
150Å、金属酸化物薄膜6が500Åとした。さら
に、この透明基板1上の所定の位置にスペーサ9を含む
シール樹脂8と、導電性粒子11(積水ファインケミカ
ル製:金メッキミクロパール)を混入した導電性ペース
ト10を形成した。
First, the active element 7 is placed on the transparent substrate 2.
And the pixel electrode 13 and the extraction electrode 14 are formed. Next, a color filter 3 is formed on the transparent substrate 1, and a metal oxide thin film 4, a metal thin film 5, and a metal oxide thin film 6 are sequentially laminated thereon to form a transparent electrode. Here, SiO 2 was used as the metal oxide thin films 4 and 6, and a silver thin film was used as the metal thin film 5. The thicknesses of the metal oxide thin film 4 were 500 °, the thickness of the metal thin film 5 was 150 °, and the thickness of the metal oxide thin film 6 was 500 °. Further, a conductive paste 10 containing a sealing resin 8 including a spacer 9 and conductive particles 11 (manufactured by Sekisui Fine Chemical: gold-plated micropearl) was formed at predetermined positions on the transparent substrate 1.

【0016】次に、透明基板1と透明電極2とを貼り合
わせ、導電性粒子11が酸化物薄膜6を突き破り金属薄
膜5と引出電極14とが電気的に接続されるまで加圧
し、その後シール樹脂8を硬化して、液晶セルを作製し
た。最後にその間隙部に液晶層12を充填し、液晶表示
素子が完成する。
Next, the transparent substrate 1 and the transparent electrode 2 are bonded to each other, and the conductive particles 11 press through the oxide thin film 6 until the metal thin film 5 and the extraction electrode 14 are electrically connected. The resin 8 was cured to produce a liquid crystal cell. Finally, the liquid crystal layer 12 is filled in the gap to complete the liquid crystal display element.

【0017】こうして作製した液晶表示素子は、金属薄
膜5を含む透明電極の低抵抗性により低いクロストーク
表示となることが確認された。また、導電ペースト10
内の導電性粒子11により透明電極から引出電極14へ
の導通も問題のないものであった。
It has been confirmed that the liquid crystal display device thus manufactured has a low crosstalk display due to the low resistance of the transparent electrode including the metal thin film 5. The conductive paste 10
Due to the conductive particles 11 inside, conduction from the transparent electrode to the extraction electrode 14 was also no problem.

【0018】なお、本実施の形態では多層薄膜電極とし
て、SiO2/銀薄膜/SiO2の多層構造としたが、透
明電極の金属酸化物薄膜6には、透明な薄膜であれば他
の材料を使用してもよい。また、金属薄膜5としては、
銀,金または銅、若しくはこれらの合金でも良い。さら
に金属酸化物薄膜4には、透明な薄膜で下地との密着性
がよいものであれば他の材料を使用してもよい。金属酸
化物薄膜として、例えばIn23、TiO2、ZrO2
Ta25,Al23,Bi23またはSiO2等が用い
られる。
In this embodiment, the multilayer thin film electrode has a multilayer structure of SiO 2 / silver thin film / SiO 2 , but the metal oxide thin film 6 of the transparent electrode may be made of another material as long as it is a transparent thin film. May be used. Moreover, as the metal thin film 5,
Silver, gold, copper, or an alloy thereof may be used. Further, another material may be used for the metal oxide thin film 4 as long as it is a transparent thin film and has good adhesion to the base. As a metal oxide thin film, for example, In 2 O 3 , TiO 2 , ZrO 2 ,
Ta 2 O 5 , Al 2 O 3 , Bi 2 O 3 or SiO 2 is used.

【0019】[0019]

【発明の効果】以上説明したように、本発明によれば、
液晶表示素子の表示電極として金属薄膜を酸化物薄膜で
挟んだ多層薄膜電極を用いることができるので、その低
抵抗化の効果により、大画面・高精細画面でも、クロス
トークや輝度傾斜などの表示むらを低減することがで
き、かつ多層電極から引出電極への電気的接続も、導電
性粒子を介しての良好な接触により、確保することが可
能になる。
As described above, according to the present invention,
A multi-layer thin-film electrode in which a metal thin film is sandwiched between oxide thin films can be used as a display electrode of a liquid crystal display element. The unevenness can be reduced, and the electrical connection from the multilayer electrode to the extraction electrode can be secured by good contact via the conductive particles.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施の形態における液晶表示素子の
端子部断面図
FIG. 1 is a sectional view of a terminal portion of a liquid crystal display element according to an embodiment of the present invention.

【図2】従来の液晶表示素子の端子部断面図FIG. 2 is a sectional view of a terminal portion of a conventional liquid crystal display element.

【符号の説明】[Explanation of symbols]

1,2 透明基板 3 カラーフィルタ 4,6 金属酸化物薄膜 5 金属薄膜 7 アクティブ素子 8 シール樹脂 9 スペーサ 10 導電性ペースト 11 導電性粒子 12 液晶層 13 画素電極 14 引出電極 1, transparent substrate 3 color filter 4, 6 metal oxide thin film 5 metal thin film 7 active element 8 sealing resin 9 spacer 10 conductive paste 11 conductive particles 12 liquid crystal layer 13 pixel electrode 14 extraction electrode

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 一主面にアクティブ素子及び画素電極が
形成された第1の基板と、一主面にカラーフィルタ及
び、対向電極としての透明電極が形成された第2の基板
との間に、周囲をシール剤で封止した液晶層を挾み、か
つ前記第1の基板に形成された引出電極と前記第2の基
板の透明電極間を導電ペーストで電気的に接続した液晶
表示素子において、前記透明電極は金属薄膜を酸化物薄
膜で挾んだ多層構造からなり、かつ前記導電ペーストは
導電性粒子を含み、前記導電性粒子が前記多層構造の金
属薄膜と直接接して電気的に接続されていることを特徴
とする液晶表示素子。
1. A semiconductor device comprising: a first substrate having an active element and a pixel electrode formed on one main surface; and a second substrate having a color filter and a transparent electrode serving as a counter electrode formed on one main surface. A liquid crystal display element in which a liquid crystal layer whose periphery is sealed with a sealant is sandwiched and an extraction electrode formed on the first substrate and a transparent electrode of the second substrate are electrically connected by a conductive paste. The transparent electrode has a multilayer structure in which a metal thin film is sandwiched between oxide thin films, and the conductive paste contains conductive particles, and the conductive particles are in direct contact with and electrically connected to the metal thin film having the multilayer structure. A liquid crystal display device characterized in that:
【請求項2】 多層構造の透明電極における金属薄膜は
銀薄膜であり、その銀薄膜を挾む酸化物薄膜は透明な金
属酸化物薄膜であることを特徴とする請求項1記載の液
晶表示素子。
2. The liquid crystal display element according to claim 1, wherein the metal thin film in the transparent electrode having a multilayer structure is a silver thin film, and the oxide thin film sandwiching the silver thin film is a transparent metal oxide thin film. .
【請求項3】 一主面にアクティブ素子及び画素電極が
形成された第1の基板と、一主面にカラーフィルタ及
び、金属薄膜を酸化物薄膜で挾んだ多層構造の透明電極
が形成された第2の基板とを対向させ、その間隙部に液
晶層を封入するシール剤と、前記第1の基板に形成され
た引出電極と前記第2の基板の透明電極間に導電性粒子
を含む導電ペーストとを挾んで貼り合わせた後、前記導
電性粒子が前記多層構造の酸化物薄膜を突き破り前記金
属薄膜と直接接するように加圧して前記シール剤を硬化
することを特徴とする液晶表示素子の製造方法。
3. A first substrate having active elements and pixel electrodes formed on one main surface, a color filter and a transparent electrode having a multilayer structure in which a metal thin film is sandwiched between oxide thin films is formed on one main surface. A sealing agent for sealing a liquid crystal layer in a gap between the second substrate and a conductive electrode between an extraction electrode formed on the first substrate and a transparent electrode of the second substrate. A liquid crystal display element, wherein the sealant is cured by applying pressure so that the conductive particles penetrate the oxide thin film of the multilayer structure and directly contact the metal thin film after bonding with a conductive paste. Manufacturing method.
【請求項4】 多層構造の透明電極における金属薄膜は
銀薄膜であり、その銀薄膜を挾む酸化物薄膜は透明な金
属酸化物薄膜であることを特徴とする請求項3記載の液
晶表示素子の製造方法。
4. The liquid crystal display device according to claim 3, wherein the metal thin film in the transparent electrode having a multilayer structure is a silver thin film, and the oxide thin film sandwiching the silver thin film is a transparent metal oxide thin film. Manufacturing method.
JP31205197A 1997-11-13 1997-11-13 Liquid crystal display element and its manufacture Pending JPH11142875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31205197A JPH11142875A (en) 1997-11-13 1997-11-13 Liquid crystal display element and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31205197A JPH11142875A (en) 1997-11-13 1997-11-13 Liquid crystal display element and its manufacture

Publications (1)

Publication Number Publication Date
JPH11142875A true JPH11142875A (en) 1999-05-28

Family

ID=18024641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31205197A Pending JPH11142875A (en) 1997-11-13 1997-11-13 Liquid crystal display element and its manufacture

Country Status (1)

Country Link
JP (1) JPH11142875A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006039509A (en) * 2004-06-23 2006-02-09 Sharp Corp Active matrix substrate, method for manufacturing the same, and electronic device
KR100556309B1 (en) * 2001-04-16 2006-03-03 세이코 엡슨 가부시키가이샤 Electrooptic apparatus and manufacturing method of the same, and electron equipment
KR100926433B1 (en) * 2002-12-31 2009-11-12 엘지디스플레이 주식회사 Liquid Crystal Display and Manufacturing Method Thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100556309B1 (en) * 2001-04-16 2006-03-03 세이코 엡슨 가부시키가이샤 Electrooptic apparatus and manufacturing method of the same, and electron equipment
KR100926433B1 (en) * 2002-12-31 2009-11-12 엘지디스플레이 주식회사 Liquid Crystal Display and Manufacturing Method Thereof
JP2006039509A (en) * 2004-06-23 2006-02-09 Sharp Corp Active matrix substrate, method for manufacturing the same, and electronic device
US7547918B2 (en) 2004-06-23 2009-06-16 Sharp Kabushiki Kaisha Active matrix substrate and electronic device

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