JPH04235530A - Liquid crystal display element - Google Patents
Liquid crystal display elementInfo
- Publication number
- JPH04235530A JPH04235530A JP172991A JP172991A JPH04235530A JP H04235530 A JPH04235530 A JP H04235530A JP 172991 A JP172991 A JP 172991A JP 172991 A JP172991 A JP 172991A JP H04235530 A JPH04235530 A JP H04235530A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- common transition
- crystal display
- display element
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 21
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 229910052751 metal Inorganic materials 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 14
- 230000007704 transition Effects 0.000 claims description 38
- 239000011521 glass Substances 0.000 abstract description 15
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 20
- 239000010410 layer Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/36—Assembling printed circuits with other printed circuits
- H05K3/361—Assembling flexible printed circuits with other printed circuits
Landscapes
- Liquid Crystal (AREA)
Abstract
Description
【産業上の利用分野】本発明は、端子を有する基板と、
該基板に対向される対向基板を備え、両基板を導電ペー
ストを挟んだ一対のコモン転移部電極で電気的に導通し
た液液晶表示素子に関する。[Industrial Application Field] The present invention provides a substrate having a terminal,
The present invention relates to a liquid crystal display element comprising a counter substrate facing the above substrate, and in which both substrates are electrically connected to each other by a pair of common transition electrodes with a conductive paste sandwiched therebetween.
【従来の技術】図２及び図３はこの種の液晶表示素子に
おけるコモン転移部の一従来例を示しており、端子６や
ＴＦＴ（薄膜トランジスタ）等を備えたガラス基板４と
対向側ガラス基板５とをコモン転移部Ｃで電気的に導通
した構成になっている。コモン転移部Ｃは、ガラス基板
４側のコモン転移部電極２、対向側ガラス基板５側のコ
モン転移部電極３及び両電極間に介在される導電性ペー
スト１で構成される。ここで、液晶表示素子の一例とし
て、アクティブマトリクスＬＣＤを例にとって説明する
と、コモン転移部電極２は、Ｔａ、Ｔｉ、Ａｌ、Ｍｏ、
Ｃｕ等のメタル単体（単一層）で形成され、またコモン
転移部電極３はＩＴＯ膜（酸化インジウム（Ｉｎ２Ｏ３
）膜や酸化スズを５ｗｔ％程度混入した酸化インジウム
膜の総称）で形成される。2 and 3 show a conventional example of a common transition part in this type of liquid crystal display element, in which a glass substrate 4 having terminals 6, TFTs (thin film transistors), etc. and an opposing glass substrate 5 are shown. The configuration is such that they are electrically connected to each other at the common transition portion C. The common transition section C is composed of a common transition section electrode 2 on the glass substrate 4 side, a common transition section electrode 3 on the opposite glass substrate 5 side, and a conductive paste 1 interposed between the two electrodes. Here, to explain an active matrix LCD as an example of a liquid crystal display element, the common transition part electrode 2 includes Ta, Ti, Al, Mo,
It is formed of a single metal (single layer) such as Cu, and the common transition part electrode 3 is made of an ITO film (indium oxide (In2O3)
) film or a general term for an indium oxide film mixed with about 5 wt % of tin oxide).
【発明が解決しようとする課題】ところで、上記のよう
にコモン転移部電極２をメタル単一層で形成する場合は
、コモン転移部電極２を形成した後〜導電性ペースト１
形成迄の工程において、メタルの表面に絶縁層である酸
化膜が発生するおそれがあるため、メタルと導電性ペー
スト１の電気的な接触状態が悪くなり、端子６とコモン
転移部電極３間の表面抵抗が高くなる不具合を生じる。
このような不具合を生じると、クロストーク等を招来し
、液晶表示素子の表示品位が低下する。本発明はこのよ
うな従来技術の欠点を解消するものであり、端子と対向
基板側のコモン転移部電極間の抵抗を低くすることがで
き、表示品位の向上が図れる液晶表示素子を提供するこ
とを目的とする。[Problems to be Solved by the Invention] By the way, when forming the common transition part electrode 2 with a single layer of metal as described above, after forming the common transition part electrode 2 ~ the conductive paste 1
During the process up to formation, there is a risk that an oxide film, which is an insulating layer, may be formed on the surface of the metal, resulting in poor electrical contact between the metal and the conductive paste 1, which may lead to poor electrical contact between the terminal 6 and the common transition electrode 3. This causes problems such as increased surface resistance. If such a problem occurs, crosstalk or the like will occur, and the display quality of the liquid crystal display element will deteriorate. The present invention eliminates the drawbacks of the prior art, and provides a liquid crystal display element in which the resistance between the terminal and the common transition electrode on the opposing substrate side can be lowered, and the display quality can be improved. With the goal.
【課題を解決するための手段】本発明の液晶表示素子は
、端子を有する基板と、該基板に対向される対向基板を
備え、両基板を導電ペーストを挟んだ一対のコモン転移
部電極で電気的に導通した液晶表示素子において、該端
子を有する基板側のコモン転移部電極をメタル層の表面
に導電性酸化膜を形成した２層構造としてなり、そのこ
とにより上記目的が達成される。[Means for Solving the Problems] The liquid crystal display element of the present invention includes a substrate having a terminal and a counter substrate facing the substrate, and both substrates are electrically connected by a pair of common transition electrodes with a conductive paste sandwiched therebetween. In a liquid crystal display element that is electrically conductive, the common transition electrode on the substrate side having the terminal has a two-layer structure in which a conductive oxide film is formed on the surface of a metal layer, thereby achieving the above object.
【作用】端子を有する基板側のコモン転移部電極を上記
２層構造にすると、導電性酸化膜がメタル層の表面が製
造工程中に酸化されるのを防止するので、端子と対向基
板側コモン転移部電極間の表面抵抗が高くなる不具合を
生じることがない。[Function] When the common transition part electrode on the board side that has the terminal has the above two-layer structure, the conductive oxide film prevents the surface of the metal layer from being oxidized during the manufacturing process, so the terminal and the common transition part electrode on the opposite board side There is no problem of high surface resistance between the transition electrodes.
【実施例】以下本発明の実施例を説明する。図１は本発
明が適用されるＴＦＴ液晶のコモン転移部Ｃを示してお
り、２枚のガラス基板４、５間に液晶が封入される。ガ
ラス基板４には、端子６、ＴＦＴ配線、ＩＴＯからなる
絵素電極等が形成される。一方、対向側ガラス基板５に
はカラーフィルタが形成される。両ガラス基板４、５は
コモン転移部Ｃによって電気的に導通される。コモン転
移部Ｃは、端子６を有するガラス基板４側のコモン転移
部電極２と、対向側ガラス基板５側のコモン転移部電極
３と、両電極間に介在される導電性ペースト１で構成さ
れる。この内、コモン転移部電極２は、材質Ｔａのメタ
ル層２０とＩＴＯ膜２１からなる導電性酸化膜の２層構
造で形成される。具体的な作成は以下のようにして行わ
れる。まず、ガラス基板４上に材質Ｔａからなる厚さ３
００ｎｍのメタル層２０をパターン形成し、次いで、メ
タル層２０の上（表面側）に厚さ７０ｎｍのＩＴＯ膜２
１をスパッタリング法により形成し、メタル層２０と同
じ形にパターン形成する。これにより、コモン転移部電
極２が形成される。一方、対向側ガラス基板５の対向面
には、厚さ７０ｎｍのＩＴＯ膜からなるコモン転移部電
極３がスパッタリング法により形成され、このコモン転
移部電極３の反対側表面には、液晶を封じるためのシー
ル樹脂がスクリーン印刷されており、前記したコモン転
移部電極２の上に、比抵抗６×１０−１Ωｃｍのカーボ
ンペーストを直径５００μｍ、膜厚３０μｍでディスペ
ンサーにより塗布した後、両基板４、５を直径が５μｍ
の球形のプラスチックスペーサを介して貼り合わせ、こ
れでコモン転移部Ｃを含む液晶表示素子が作成される。
このような液晶表示素子によれば、従来３００Ωであっ
たコモン転移部電極２と導電性ペースト１間の抵抗を５
０Ωに低減できることが本発明者等の実験結果により確
かめられた。上記実施例では、導電性酸化膜としてＩＴ
Ｏ膜２１を用いたが、これに限定されるものではなく、
工程中にメタル層２０の表面に絶縁性の酸化膜が発生す
るのを防止できるものであればよい。但し、ＩＴＯ膜２
１を用いると、以下の理由により実施する上で好ましい
ものになる。すなわち、液晶表示素子の表示パターン部
が透明のＩＴＯ膜で形成されているため、導電性酸化膜
をＩＴＯ膜２１で形成すると、両者を同時に形成するこ
とができるので、工程数を増やす必要がなく、液晶表示
素子の製造能率の向上を図る上で好ましいものになるか
らである。[Examples] Examples of the present invention will be described below. FIG. 1 shows a common transition section C of a TFT liquid crystal to which the present invention is applied, and a liquid crystal is sealed between two glass substrates 4 and 5. Terminals 6, TFT wiring, picture element electrodes made of ITO, and the like are formed on the glass substrate 4. On the other hand, a color filter is formed on the opposing glass substrate 5. Both glass substrates 4 and 5 are electrically connected by a common transition portion C. The common transition part C is composed of a common transition part electrode 2 on the glass substrate 4 side having the terminal 6, a common transition part electrode 3 on the opposite glass substrate 5 side, and a conductive paste 1 interposed between the two electrodes. Ru. Among these, the common transition part electrode 2 is formed with a two-layer structure of a metal layer 20 made of material Ta and a conductive oxide film made of an ITO film 21. The specific creation is performed as follows. First, a thickness 3 made of material Ta is placed on a glass substrate 4.
A 00 nm thick metal layer 20 is patterned, and then a 70 nm thick ITO film 2 is formed on the metal layer 20 (on the surface side).
1 is formed by a sputtering method and patterned in the same shape as the metal layer 20. As a result, the common transition portion electrode 2 is formed. On the other hand, on the opposing surface of the opposing glass substrate 5, a common transition electrode 3 made of an ITO film with a thickness of 70 nm is formed by sputtering, and on the opposite surface of the common transition electrode 3, a liquid crystal is sealed. After applying a carbon paste with a specific resistance of 6 x 10-1 Ωcm to a diameter of 500 μm and a film thickness of 30 μm using a dispenser onto the common transition electrode 2 described above, both substrates 4 and 5 were screen printed. The diameter is 5μm
are bonded together via a spherical plastic spacer, thereby creating a liquid crystal display element including a common transition region C. According to such a liquid crystal display element, the resistance between the common transition electrode 2 and the conductive paste 1, which was conventionally 300Ω, has been reduced to 5Ω.
It has been confirmed by the experimental results of the present inventors that the resistance can be reduced to 0Ω. In the above embodiment, IT is used as the conductive oxide film.
Although the O film 21 is used, the present invention is not limited to this.
Any material may be used as long as it can prevent the formation of an insulating oxide film on the surface of the metal layer 20 during the process. However, ITO film 2
1 is preferred in practice for the following reasons. That is, since the display pattern portion of the liquid crystal display element is formed from a transparent ITO film, if the conductive oxide film is formed from the ITO film 21, both can be formed at the same time, so there is no need to increase the number of steps. This is because it is preferable for improving the manufacturing efficiency of liquid crystal display elements.
【発明の効果】以上の本発明によれば、端子を有する基
板側のコモン転移部電極の表面に絶縁性の酸化膜が形成
されることがないので、コモン転移部電極と導電性ペー
スト間の抵抗を低いままの状態に維持できる。従って、
クロストーク等の不具合を発生することがない表示品位
の優れた液晶表示素子を実現できる。[Effects of the Invention] According to the present invention, an insulating oxide film is not formed on the surface of the common transition part electrode on the side of the substrate having the terminal, so that the gap between the common transition part electrode and the conductive paste is eliminated. The resistance can be kept low. Therefore,
A liquid crystal display element with excellent display quality that does not cause defects such as crosstalk can be realized.
【図面の簡単な説明】[Brief explanation of the drawing]
【図１】本発明の液晶表示素子のコモン転移部を示す断
面図。FIG. 1 is a cross-sectional view showing a common transition part of a liquid crystal display element of the present invention.
【図２】従来の液晶表示素子のコモン転移部を示す正面
図。FIG. 2 is a front view showing a common transition part of a conventional liquid crystal display element.
【図３】従来の液晶表示素子のコモン転移部を示す断面
図。FIG. 3 is a cross-sectional view showing a common transition part of a conventional liquid crystal display element.
２ コモン転移部電極 ２０ メタル層 ２１ ＩＴＯ膜 ３ コモン転移部電極 ４ ガラス基板 ５ 対向側ガラス基板 2 Common transition part electrode 20 Metal layer 21 ITO film 3 Common transition part electrode 4 Glass substrate 5 Opposite glass substrate
Claims (1)
対向基板を備え、両基板を導電ペーストを挟んだ一対の
コモン転移部電極で電気的に導通した液晶表示素子にお
いて、該端子を有する基板側のコモン転移部電極をメタ
ル層の表面に導電性酸化膜を形成した２層構造とした液
晶表示素子。Claims: 1. A liquid crystal display element comprising a substrate having a terminal and a counter substrate facing the substrate, the both substrates being electrically connected to each other by a pair of common transition electrodes with a conductive paste sandwiched therebetween, wherein the terminal is A liquid crystal display element having a two-layer structure in which a common transition part electrode on the substrate side has a conductive oxide film formed on the surface of a metal layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3001729A JP2892510B2 (en) | 1991-01-10 | 1991-01-10 | Liquid crystal display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3001729A JP2892510B2 (en) | 1991-01-10 | 1991-01-10 | Liquid crystal display device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04235530A true JPH04235530A (en) | 1992-08-24 |
| JP2892510B2 JP2892510B2 (en) | 1999-05-17 |
Family
ID=11509653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3001729A Expired - Lifetime JP2892510B2 (en) | 1991-01-10 | 1991-01-10 | Liquid crystal display device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2892510B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6525718B1 (en) | 1997-02-05 | 2003-02-25 | Sharp Kabushiki Kaisha | Flexible circuit board and liquid crystal display device incorporating the same |
| KR100397019B1 (en) * | 2000-03-30 | 2003-09-03 | 인터내셔널 비지네스 머신즈 코포레이션 | Liquid crystal display and inspection method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6365063A (en) * | 1986-09-08 | 1988-03-23 | Ricoh Co Ltd | Formation of transparent electrode with auxiliary metallic electrode |
| JPH02196626A (en) * | 1989-01-26 | 1990-08-03 | Chisso Corp | Production of rolled film or sheet |
| JPH03288133A (en) * | 1990-04-04 | 1991-12-18 | Ricoh Co Ltd | Liquid crystal display element |
-
1991
- 1991-01-10 JP JP3001729A patent/JP2892510B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6365063A (en) * | 1986-09-08 | 1988-03-23 | Ricoh Co Ltd | Formation of transparent electrode with auxiliary metallic electrode |
| JPH02196626A (en) * | 1989-01-26 | 1990-08-03 | Chisso Corp | Production of rolled film or sheet |
| JPH03288133A (en) * | 1990-04-04 | 1991-12-18 | Ricoh Co Ltd | Liquid crystal display element |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6525718B1 (en) | 1997-02-05 | 2003-02-25 | Sharp Kabushiki Kaisha | Flexible circuit board and liquid crystal display device incorporating the same |
| KR100397019B1 (en) * | 2000-03-30 | 2003-09-03 | 인터내셔널 비지네스 머신즈 코포레이션 | Liquid crystal display and inspection method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2892510B2 (en) | 1999-05-17 |
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