JPH10314635A - Coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a cost by arranging plural substrates previously cut to a necessary size in parallel in the axial direction of the rotation axis of a bar and simultaneously and parallel applying one kind of coating liquids on these substrates with one unit of coating applicator. SOLUTION: The transparent glass substrates 6 previously cut to the necessary size are used and two sheets of the substrates are arranged in parallel in the axial direction of the rotation of the rod. The bar 1 and the revolving roller 4 are rotated as shown by arrows from such state and the glass substrates 6 are transported by transporting rollers 5. The substrates are held between the bar 1 and the revolving roller 4 and the coating liquids 3a, 3b sticking to the surface of the bar 1 are applied on the glass substrates 6. Since the glass substrates 6 are not large in their size, their deflection is not a problem and since the glass substrates 6 are arranged in parallel and are coated with the coating liquids 3a, 3b, the two sheets of glass substrates 6 may be simultaneously coated by one unit of the coating applicator. In addition, the uniform coating films having no differences in film thicknesses between both sides and central part of the substrates 6 on the coating surface are formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for applying a coating liquid to a discontinuous substrate using a bar,
For example, the present invention relates to a coating apparatus that applies a coating liquid to a glass substrate in a thin and uniform thickness.

[0002]

2. Description of the Related Art In a method of applying a coating liquid thinly and uniformly on a glass substrate, a spin coating method has conventionally been the mainstream. In this spin coating method, a coating solution is applied thinly by dropping a coating solution near the center of rotation of a rotated substrate and scattering the solution using centrifugal force. However, in the spin coating method, not only is it time-consuming to replace the substrate, the work efficiency is deteriorated, but also the coating liquid is scattered due to the rotation, which consumes a larger amount of the coating liquid than the required amount to be coated on the substrate. There was a problem of becoming up.

On the other hand, as disclosed in Japanese Patent Application Laid-Open Nos. 2-258081 and 6-151292, a substrate is applied between a pair of horizontally arranged upper and lower rollers. The device is considered. In this device, the lower part of the micro rod bar, which is the lower roller, is immersed in the coating liquid, and the substrate is sandwiched between the micro rod bar and the nip roller located above the micro rod bar and fed. The liquid is applied to the lower surface of the substrate. The micro rod bar used here is a metal rod in which a fine metal wire is densely wound.

In such a series of coating processes, a coating solution is applied to a relatively large-sized substrate that has been cleaned in advance, and then the substrate is naturally dried, and then the substrate is subjected to a post-processing step of forming a pattern and the like. Is transported, and after all these steps are completed, the substrate is cut to a required size in the final step.

[0005]

However, the following three problems have arisen in the conventional coating apparatus.

First, when a previously cleaned substrate is transported to a coating start position, the substrate is transported on transport rollers on both sides of the substrate. When the substrate reaches the coating position, the central part of the substrate collides with the micro rod bar, making it impossible to apply the coating liquid, or applying the coating liquid without collision. Even if it is possible, there is a problem that the coating film thickness on the substrate is considerably different between the both sides and the center.

Second, only one kind of coating liquid can be applied by one coating apparatus. When applying coating liquids having different physical properties such as color, viscosity, surface tension, etc., the coating liquid container is exchanged for coating. There is only a method, and there is a problem that it is difficult to apply many kinds of coating liquids in parallel with one coating apparatus at the same time.

Third, after the substrate on which the coating liquid is applied is naturally dried, the substrate is transported to a post-processing step for forming a pattern and the like, and after all these steps are completed, the substrate is reduced to a required size in the final step. In the method of cutting the substrate, there is a problem that it is difficult to use a substrate that has been damaged due to an impact during the cutting operation of the substrate, and the above-described coating process is wasted, leading to an increase in cost.

[0009]

In order to solve the above-mentioned problems, according to the present invention, there is provided a container containing a coating solution, a bar near an interface of the coating solution, and a rotating roller disposed above the bar and the bar. In a device for inserting a substrate between the substrates and pulling up the coating liquid by rotating the bar, and applying the coating liquid to the transferred substrate, the substrate previously cut to a required size is rotated by the rotation axis of the bar. Arrange multiple in parallel in the direction,
A coating apparatus is characterized in that one kind of coating liquid is simultaneously applied in parallel by one coating apparatus.

In order to solve the above-mentioned problems, according to the present invention, in the above-mentioned coating apparatus, a plurality of containers containing a coating liquid are arranged in parallel in the direction of the rotation axis of the bar in accordance with the size of the substrate. A plurality of different types of coating liquids are applied in parallel.

According to another aspect of the present invention, a coating liquid is applied to a substrate cut to a required size in advance by using the coating apparatus, and after the coating liquid on the substrate is dried, The coating apparatus is characterized in that a plurality of substrates are put in an integrated storage case and the subsequent steps are performed.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION

(Embodiment 1) FIG. 1 shows a configuration diagram of an embodiment of a coating apparatus of the present invention. Reference numeral 1 denotes a bar. In the embodiment, a bar made of a metal having corrosion resistance is used, and a metal wire is tightly wound around the bar. Reference numeral 2a denotes a container for holding the coating liquid, which is made of a metal having corrosion resistance like a bar. Reference numeral 3a denotes a coating liquid, which comprises a solid component and a volatile component. 4 is a rotating roller,
Rubber is wound around the surface of the metal roller. This rubber plays a role of absorbing vibration of the substrate. Reference numeral 5 denotes rollers for transporting the substrate to the coating position, and a plurality of rollers are provided on both sides of the substrate. 6 is a transparent glass substrate,
I am using what was cut to the required size in advance,
Two sheets are arranged in parallel in the rod rotation axis direction. From such a state, the bar and the rotating roller are rotated as indicated by the arrow in the figure, the glass substrate is transported by the transport roller, and the coating liquid adhering to the bar surface is sandwiched between the bar and the rotating roller to remove the coating liquid from the glass substrate. Apply to. According to the coating apparatus having the above-described configuration, the glass substrate 6 is not large in size, so that the deflection does not become a problem. In addition, since the glass substrates are arranged and applied in parallel, two glass substrates can be coated with one coating apparatus. Can be applied at the same time, and the coating surface also becomes a uniform coating film with no difference in film thickness between the both sides and the center of the substrate.

(Embodiment 2) FIG. 2 shows a configuration diagram of another embodiment of the coating apparatus of the present invention. The same coating apparatus as that of the first embodiment is used, but two containers 2a and 2b for preparing the coating liquid 3a are prepared, and the coating liquid 3a having different physical properties such as color, viscosity and surface tension is prepared in each container. Insert 3b. Subsequent coating steps are the same as in the first embodiment, and a description thereof will be omitted. According to the coating apparatus having the above configuration, it is possible to arrange two glass substrates in parallel and apply coating liquids having different physical properties simultaneously with a single coating apparatus. A uniform coating film having no difference in film thickness between parts.

(Embodiment 3) FIG. 3 shows a configuration diagram of still another embodiment of the coating apparatus of the present invention. Using the same coating apparatus as in the first or second embodiment, glass substrates cut in advance to a required size are arranged in parallel and simultaneously coated with one coating apparatus. The subsequent working steps are shown in FIG. The substrates 7 applied by the parallel coating device are each naturally dried, and the dried substrates are stored in a multiple substrate integrated storage case 8. The four glass substrates housed in the integrated storage case are housed without any irregularities on the surface, and are processed as an integrated substrate in a subsequent post-processing step such as pattern formation. The manufacturing process can proceed efficiently. According to the coating apparatus having the above-described configuration, two substrates can be simultaneously coated with one coating apparatus because the glass substrates are arranged and applied in parallel, and the coating surfaces are also formed on both sides and the center of the substrate. A uniform coating film with no difference in film thickness is obtained, and the dry substrate is placed in an integrated storage case and the post-processing process is performed, so that the manufacturing process is efficient and the cutting of the glass substrate performed in the final process is eliminated. Therefore, cost can be reduced.

[0015]

As described above in detail, according to the coating apparatus of the present invention, a single coating apparatus can simultaneously apply a plurality of types of coating liquids having different physical properties to a plurality of substrates. A uniform coating film with no difference in film thickness between both sides and the center of the substrate can be obtained, and the post-processing process is performed by putting the dried substrate in an integrated storage case. Since the glass substrate is not cut in the process, the cost is reduced.

[Brief description of the drawings]

FIG. 1 is an apparatus configuration diagram of an embodiment of a coating apparatus according to the present invention.

FIG. 2 is an apparatus configuration diagram of another embodiment of the coating apparatus of the present invention.

FIG. 3 is an apparatus configuration diagram of still another embodiment of the coating apparatus of the present invention.

FIG. 4 is a work process diagram of still another embodiment of the coating apparatus of the present invention.

[Explanation of symbols]

1 ... bar, 2a, 2b ... container, 3a, 3b ... coating liquid, 4
... Rotating roller, 5 ... Roller, 6 ... Glass substrate, 7 ... Substrate,
8 ... Multi-substrate integrated storage case.

Claims (1)

[Claims] A bar-shaped rotating body (hereinafter, referred to as a bar) is provided near an interface of the coating liquid in a container containing the coating liquid, and a substrate is inserted between the bar and a rotating roller disposed above the bar. In an apparatus for pulling up the coating liquid by rotating the bar and applying the coating liquid to the substrate that has been conveyed, a plurality of substrates are arranged in parallel in the rotation axis direction of the bar, and a single coating apparatus simultaneously An application device, wherein one type of application liquid is applied in parallel.