JPH10290580A - Oscillatory actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve wiring to an oscillator so that it may not cause the drop of driving force of an electrostatic actuator and that a fault does not occur at the junction by the influence of external force, etc. SOLUTION: In an oscillatory actuator, which is equipped with an oscillator 30 being supported by a support member 12 and oscillating, with a drive signal inputted, a relative motion member 20 moving relatively with the oscillator 30, and a signal transmitter for connecting the oscillator 30 with a drive signal to output a drive signal, the signal transmitting part has internal wirings 65-68 whose one end is connected to the oscillator, and external wirings 75-78 whose one end is connected to a drive circuit, and a relay member 60 which is supported by the supporting member and to which the other end of the internal wirings 65-68 and the other end of the external wirings 75-78 are connected.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration actuator, and more particularly to a vibration actuator having an improved structure for inputting a drive signal to a vibrator and a structure for grounding the vibrator.

[0002]

2. Description of the Related Art A conventional vibration actuator of this type is disclosed, for example, in Japanese Utility Model Publication No. Hei 7-46075. FIG. 6 is a sectional view showing the vibration actuator disclosed in Japanese Utility Model Publication No. 7-46075. 7-46
No. 075 discloses a vibration actuator.
09 and a vibrator 108 are attached to a support pin 107 fixed to the vibrator support 101. The piezoelectric body 103 is bonded to the upper surface of the vibrating body 108, and a flexible printed board 104 for inputting a drive signal to the piezoelectric body 103 is soldered near the inner periphery of the piezoelectric body 103. The outer end 104b of the flexible printed circuit board 104 is connected to a pattern formed on the circuit block 106. Further, the intermediate portion 104c of the flexible printed circuit board is bonded to the vibrating body support 101 with an adhesive 105 through an adhesive introduction hole 101a in order to prevent contact with the piezoelectric body 103. In the above-described vibration actuator, the drive signal output from the circuit block 106 is transmitted to the piezoelectric body 103 via the flexible printed circuit board.
Is transmitted to As a result, the piezoelectric body 103 and the vibrating body 108 to which the piezoelectric body 103 is bonded perform predetermined vibration, and the rotor 1
09 is driven to rotate.

[0003]

[0007] However, the actual fairness 7-4
In the vibration actuator disclosed in No. 6075, the piezoelectric body and the circuit block are directly connected by one flexible printed circuit board. For this reason, when the circuit block is adjusted or moved, or when the flexible printed circuit board is pulled, the force is directly transmitted to the joint with the piezoelectric body, and there is a problem that the solder may be removed. .

Further, in a vibration actuator, depending on its structure, a part of an electrode plate for providing a drive signal to the piezoelectric body projects from the vibrator, and a lead wire for transmitting the drive signal is connected to the protrusion. Some are. In the vibration actuator having such a structure, when an excessive external force is applied to the lead wire, the electrode plate may be bent. When the electrode plate is bent, there is a problem that a microcrack is formed in a contact portion between the electrode plate and the piezoelectric body, and the driving force of the vibration actuator may be reduced due to the microcrack.

On the other hand, in a vibration actuator, an elastic body is grounded, and this is used as a ground portion when a voltage is applied to a piezoelectric body. However, when the grounding wire is directly attached to the elastic body, the weight of the wiring changes the vibration characteristics of the elastic body, attenuates the vibration, and the like, resulting in a problem that the driving force of the vibration actuator is reduced. Also, since the joint between the elastic body and the wiring is always affected by the vibration of the elastic body,
There is also a problem that the wiring may fall off depending on the joining state.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has been made in consideration of the problems described above. It is an object to improve the wiring of the above.

[0007]

According to a first aspect of the present invention, there is provided a vibrator which is supported by a support member and vibrates upon receiving a drive signal, and which makes a relative motion with the vibrator. In a vibration actuator including a relative motion member and a signal transmission unit that connects the vibrator and a drive circuit that outputs the drive signal, the signal transmission unit includes an internal wire having one end connected to the vibrator, and one end. External wiring connected to the drive circuit, supported by the support member,
A vibration actuator having a relay member to which the other end of the internal wiring and the other end of the external wiring are connected.

According to a second aspect of the present invention, in the vibration actuator according to the first aspect, the vibrator has a vibration source for excitation disposed inside the vibrator, and the vibration source is And an electrode protruding outside the vibrator and connected to the internal wiring. The invention according to claim 3 is the invention according to claim 1.
Alternatively, in the vibration actuator according to claim 2, the relay member connects two or more of the internal wires that transmit the same drive signal to one external wire.

According to a fourth aspect of the present invention, in the vibration actuator according to any one of the first to third aspects, the vibration actuator has two or more external wirings, and the other end of each of the external wirings is Regardless of the length of the corresponding internal wiring,
A vibration actuator is connected to the relay member on the same plane. According to a fifth aspect of the present invention, in the vibration actuator according to any one of the first to fourth aspects, the vibrator is mounted on an elastic body and the elastic body, and the elastic body is arranged in accordance with the drive signal. Wherein the elastic body is grounded via the support member and the relay member.

According to a sixth aspect of the present invention, in the vibration actuator according to any one of the first to fifth aspects, the relay member is a plate member having elasticity. Actuator. Claim 7
The invention according to any one of claims 1 to 6
In the vibration actuator described in the paragraph, the connection portion of the external wiring with the relay member is a portion having the weakest mechanical strength of the signal transmission portion.

The invention according to claim 8 is a vibration actuator comprising a vibrator, a relative movement member that moves relative to the vibrator, and a support member that supports the vibrator.
The vibrator has an elastic body, a vibration source installed on the elastic body, and exciting the elastic body according to a drive signal,
The vibration body is characterized in that the elastic body is grounded via the support member.

[0012]

An embodiment according to the present invention will be described below with reference to the drawings. In the following description, an ultrasonic motor using an ultrasonic vibration region will be described as an example of a vibration actuator.

FIG. 1 is a sectional view showing an embodiment of an ultrasonic motor according to the present invention. FIG. 2 is an exploded perspective view showing the vibrator of the ultrasonic motor shown in FIG. As shown in FIG. 1, the ultrasonic motor 10 according to the present embodiment mainly includes a moving element 20 and a vibrator 30. Mover 20
Is a thick annular or cylindrical member that rotates with the fixed shaft 12 as a rotation axis by obtaining a driving force from the vibrator 30.
The moving element 20 includes a moving element base material 22 and a sliding member 26 provided on the lower surface of the moving element base material 22. The moving element base material 22 is a member made of stainless steel, a copper alloy, an aluminum alloy, or the like. In addition, the moving child base material 22
A gear 24 is provided on the outer peripheral surface. The gear 24 is for transmitting the rotation output of the moving element 20 to a gear of a driven body (not shown). The sliding member 26 is a member that comes into contact with the driving surface D of the vibrator 30 and slides. The sliding material 26 contains a polymer material or the like as a main component in order to improve the sliding characteristics.

The moving element 20 is mounted on the fixed shaft 12 via a bearing 18. The bearing 18 allows the movable member 20 to rotate around a fixed axis, and also serves as a positioning member that positions the movable member 20 at a predetermined position on the fixed shaft 12.

The fixed shaft 12 has a screw portion 12a above the position where the mover 20 is attached, and an adjusting member 14 such as a nut is screwed to the screw portion 12a. In addition, between the adjusting member 14 and the moving element 20,
A pressing member 16 such as a disc spring, a coil spring, or a leaf spring is disposed. The pressurizing member 16 connects the moving element 20 to the vibrator 30
Press in the direction of. The moving element 20 receives a pressing force from the pressing member 16 and comes into pressure contact with the driving surface D of the vibrator 30. On the other hand, the adjusting member 14 appropriately compresses the pressing member 16 by changing the screwed position,
The pressure applied to the mover 20 is adjusted.

The vibrator 30 is a member that generates an elliptical motion on the drive surface D by performing primary longitudinal vibration and secondary torsional vibration. The vibrator 30 has a thick cylindrical shape, and is fixed to the fixed shaft 12 by passing the fixed shaft 12 through a hollow portion thereof. As shown in FIG.
Is a method in which a layer composed of the electrode plates (55 to 58) is
The structure sandwiched between the two layers 54) is further sandwiched by elastic bodies 32 and 34. In addition, the piezoelectric element, the electrode plate, and the elastic body are bonded to each other with an adhesive.

As shown in FIG. 1, elastic members 32 and 34 are provided.
Are four large diameter portions 30A, 30B, 30C and 30D
And a semi-cylindrical member obtained by vertically dividing a thick-walled cylinder having three small-diameter portions 30a, 30b, and 30c into two, and having a high resonance sharpness such as steel, stainless steel, phosphor bronze, or enriver material. Made of material. Small diameter parts 30a and 3
0c is a small-diameter portion 3 at a position including a node of the secondary torsional vibration.
0b is formed at a position including a node of the primary longitudinal vibration. As described above, the vibrator 30 is formed into a shape having four large diameter portions and three small diameter portions.
This is because the resonance frequencies of the longitudinal vibration and the torsional vibration that are excited in the vibrator 30 are made substantially equal to each other, so that the vibrator 30 causes so-called degeneration.

The vibrator 30 has through holes 30E and 30F in the large diameter portions 30A and 30D, respectively, which are parallel to the laminating direction of the piezoelectric bodies (51 to 54). Through holes 30E and 3
0F, a bolt 36 is inserted, and a nut 38
It is fixed by. Thereby, the elastic bodies 32 and 3
4 is integrally assembled with the piezoelectric bodies (51 to 54) sandwiched therebetween.

The vibrator 30 has a through hole 30G in the small diameter portion 30a. The through hole 30G is provided with the spring pin 4
It is a hole for passing 0. The spring pin 40 fixes the vibrator 30 to the fixed shaft 12 by penetrating the through hole 30 a of the vibrator 30 and the through hole 12 b provided in the fixed shaft 12. Vibrator 3
0 is a member for positioning. The spring pin 4
The fixed shaft 12 and the fixed shaft 12 are conductive, and have elastic bodies 32 and 3.
4 is electrically connected to the fixed shaft 12 via the spring pin 40.

On the other hand, the fixed shaft 12 has two
Positioning members 42 are arranged at various places. The positioning member 42 is an annular or cylindrical member, and is fitted to the fixed shaft 12 from the end face side. The outer peripheral surface of the positioning member 42 is in contact with the inner peripheral surface of the vibrator 30, whereby the vibrator 30 is positioned in the radial direction. The fixed shaft 12 has a step 12 f below the vibrator 30, and a relay board 60 is attached to the position of the step 12 f and fixed by a relay board fixing member 62.
The relay base 60 has various lead wires (65 to 6 described later).
8, 75 to 78) are connected. Furthermore, fixed shaft 1
A D-cut 12e is provided at the end of 2. The D cut 12e enables the fixed shaft 12 to be prevented from rotating by the set screw when the ultrasonic motor 10 is mounted on another device or the like.

As described above, a layer composed of the electrode plates (55-58) and a layer composed of the piezoelectric bodies (51-54) are arranged between the two elastic members 32 and 34 constituting the vibrator. ing. In FIG. 2, four layers La1, La3, La4 and La6 are layers composed of a piezoelectric material,
The layers La2 and La5 are layers made of an electrode plate. The layer La1 made of a piezoelectric body is composed of four piezoelectric bodies arranged on the same plane. The driving surface D
The torsional vibration detecting piezoelectric body 51, the torsional vibration piezoelectric body 52, the longitudinal vibration piezoelectric body 53, and the longitudinal vibration detecting piezoelectric body 54 are referred to in the order from the one closest to.

[0022] for torsional vibration piezoelectric element 52, utilizing a piezoelectric constant d _15, a piezoelectric element to excite the torsional vibrations in the vibrator 30. Here, the torsional vibration refers to a vibration that is displaced around the central axis A. The torsional vibration piezoelectric body 52 is polarized in a direction parallel to the central axis A, and performs a shear deformation in a direction parallel to the central axis A when a voltage is applied in the thickness direction. The torsional vibration detecting piezoelectric body 51 is a vibrator 3 utilizing the piezoelectric effect.
This is for detecting the torsional vibration excited to zero.

The longitudinal vibration piezoelectric element 53, utilizing a piezoelectric constant d _31, a piezoelectric element to excite longitudinal vibrations in the vibrator 30. Here, the longitudinal vibration refers to a vibration that is displaced in a direction parallel to the central axis A. The piezoelectric body 53 for longitudinal vibration is polarized in the plate pressure direction, and when a voltage is applied in the plate thickness direction, the piezoelectric body 53 expands and contracts in the plane direction. The longitudinal vibration detecting piezoelectric body 54 is for detecting the longitudinal vibration excited in the vibrator 30 using the piezoelectric effect.

The layer La3 has the same structure as the layer La1. However, the polarization directions of the torsional vibration piezoelectric body 52 and the longitudinal vibration piezoelectric body 53 are opposite to each other in the layer La1 and the layer La3 (see broken arrows in FIG. 4). on the other hand,
The layer La2 arranged between the layers La1 and La3 is 4
Two electrode plates, that is, an electrode plate 55 for torsional vibration detection, an electrode plate 56 for torsional vibration, an electrode plate 57 for longitudinal vibration, and an electrode plate 58 for longitudinal vibration detection are arranged on the same plane. The torsional vibration electrode plate 56 is arranged between the torsional vibration piezoelectric bodies 52 of the layers La1 and La3, and is an electrode plate for simultaneously applying a drive signal (frequency voltage) to these two piezoelectric bodies.

Similarly, the longitudinal vibration electrode plate 57 is disposed between the two longitudinal vibration piezoelectric members 53, and is for applying driving vibration to these piezoelectric members simultaneously. on the other hand,
Electrode plate 55 for detecting torsional vibration and electrode plate 58 for detecting longitudinal vibration
Are disposed between two torsional vibration detecting piezoelectric bodies 51 or two longitudinal vibration detecting piezoelectric bodies 54, respectively, so that voltages generated in the piezoelectric bodies can be detected. The layer La4
La6 are layers La1 to La3 around the central axis A of the vibrator 30.
It is obtained by rotating La3 by 180 degrees,
It has the same configuration as 1 to La3. Therefore,
Here, the description is omitted.

FIG. 3 is a perspective view of the vibrator 30 and the relay board 60. Hereinafter, the connection of the lead wire to the vibrator 30 and the method of grounding will be described with reference to FIG. Each of the electrode plates 55 to 58 has one terminal (a torsional vibration detection terminal 55a, a torsional vibration drive terminal 56a, a longitudinal vibration drive terminal 57a, and a longitudinal vibration detection terminal 58a) that protrude outside the vibrator. An internal lead wire (lead wire 65 for torsional vibration detection, lead wire 66 for torsional vibration drive, lead wire 67 for longitudinal vibration detection, lead wire 68 for longitudinal vibration detection) is connected to each terminal by soldering. I have. Each electrode plate has a layer La2 and a layer La5 as described in FIG.
, Each internal lead wire is two by two.

The relay board 60 includes a central portion 60a having substantially the same shape as the cross section of the vibrator, and a projecting portion 60b which spreads in a fan shape around the central portion 60a. Overhang 60b
Are provided with four land portions 60c to 60f corresponding to the four types of internal lead wires. Two corresponding internal lead wires are joined to each land by soldering. For example, the two torsional vibration driving lead wires 66 are joined to the land portion 60d.

External lands (lead wires 75 for torsional vibration detection, lead wires 76 for torsional vibration drive, lead wires 77 for longitudinal vibration drive,
The longitudinal vibration detection lead wires 78) are joined one by one. These external leads connect the relay board 60 and a drive circuit (not shown) of the vibration actuator 10. Each external lead wire reaches the land on the upper surface from the back side of the relay board 60 through a small hole and is soldered. As a result, conduction between the two internal leads and one external lead is ensured.

In this embodiment, as described above, the relay board 6
Since 0 is provided, even when an external force is applied to the external lead wire by moving a drive circuit (not shown) or the like, the force is absorbed by the elasticity of the relay board 60. Therefore, the external force is not transmitted to the internal lead wires as it is, and the terminals (55a to 58a) of the electrode plate are bent, and accordingly, the bonding surface between the electrode plate (55 to 58) and the piezoelectric body (51 to 54) is formed. No microcracks occur. Further, each of the internal lead wires (65 to 68) is joined to the relay base 60, so that one end thereof is aligned on the same plane. Accordingly, since it is sufficient that each external lead wire is connected to the one plane, the lengths of the external lead wires can be substantially constant regardless of the length of the internal lead wire. Connection becomes extremely easy.

Further, the relay board 60 has a function of joining these two internal leads to one land by joining them to one land. Therefore, it is sufficient to prepare only one external lead wire regardless of the number of corresponding internal lead wires. In this regard, the handling of the external lead wire is also easy. Further, the relay board 60
Plays a role in preventing the weight of the external lead wire from being directly applied to the vibrator 30. In the ultrasonic motor, the wiring from the drive circuit to the vibrator 30 may be long depending on the installation condition of the motor. In this case, if the weight of the wiring is directly applied to the vibrator, the vibration characteristics of the vibrator change, and the performance of the motor may deteriorate. On the other hand, in the present embodiment, as described above, the relay board 60 supports the weight of the external lead wire, and only the weight of the short internal lead wire is added to the vibrator, so that such a problem is avoided.

When the outer diameter of the outer lead wire is made substantially equal to the inner diameter of the small hole of the land, a large frictional force is generated between the small hole and the coating, and the outer lead wire and the land have a large frictional force. Bonding can be prevented. Conversely, if the external diameter of the external lead wire is sufficiently smaller than the internal diameter of the small hole, when external force is applied to the external lead wire, the connection between the external lead wire and the land is released, and the external force is reduced to the internal force. Transmission to the vibrator 30 from the wiring can be prevented. That is, in the latter case, the joint between the external lead wire and the land is the portion having the weakest mechanical strength in the wiring from the drive circuit (not shown) to the vibrator 30. Therefore, when an unexpected external force is applied, it is possible to prevent the weakest portion from being broken, thereby preventing the vibrator from being seriously damaged.

On the other hand, a hole for passing the fixed shaft 12 is provided in the central portion 60a of the relay board, and a ground electrode 60g is provided on the outer peripheral upper surface of the hole. The ground electrode 60g contacts the step 12f of the fixed shaft when the relay base 60 is attached to the fixed shaft 12, and is used to conduct electricity (see FIG. 1). A land portion 60h extends from the ground electrode 60g to the overhang portion 60b. An external lead wire 79 for grounding, which is wired from the back side of the relay board through a small hole, is soldered to the land portion 60h.

That is, in this embodiment, the elastic body is grounded via the spring pin 40, the fixed shaft 12, and the relay base 60 described with reference to FIG. Therefore, in the present embodiment, the conventional problem such as deterioration of the vibration characteristics of the elastic body does not occur by directly connecting the ground lead wire to the elastic body. Also, the ground lead wire 79 is connected to the relay base 60 by another external lead wire (75 to 75).
78), the ground lead 79 is connected to the external lead wires (75 to 7) together with the other external lead wires (75 to 78), for example, as shown in FIG.
8) and the ground lead wire 79 can be combined into one flat cable and easily handled and joined.

FIG. 4 is an explanatory view showing the arrangement of the piezoelectric bodies in the vibrator 30 and the vibration modes excited by the vibrator 30. 4A is a diagram illustrating a side surface and the like of the vibrator 30, FIG. 4B is a cross-sectional view of the FF of the vibrator 30, and FIG. 4C is a diagram illustrating a vibration mode excited by the vibrator 30. FIG.
As shown in (c), the primary longitudinal vibration and the secondary torsional vibration are excited in the vibrator 30. Also, as shown in FIG. 4A, the small diameter portions 30a and 30c of the vibrator 30
Is provided at the position of the node of the torsional vibration,
0b is provided at the position of the node of the longitudinal vibration.

On the other hand, the torsional vibration piezoelectric body 52 is
0a, that is, so as to straddle the one closer to the drive surface D among the two nodes of the torsional vibration. Further, the piezoelectric body 53 for longitudinal vibration is arranged at a position including the small diameter portion 30b, that is, so as to straddle a node part of longitudinal vibration. The reason why the piezoelectric body is disposed so as to straddle the nodes of the vibrations is that each vibration can be efficiently excited by applying a force to the elastic body at the nodes.

When a positive voltage with respect to the potential of the elastic body (32, 34) is applied to the electrode plate 56, the shearing deformation indicated by the arrow in FIG. The direction of the shear deformation is opposite between the piezoelectric bodies of the layers La1 and La3 and the piezoelectric bodies of the layers La4 and La6. Due to the shear deformation of the torsional vibration piezoelectric body 52, the vibrator 30 is twisted in the direction indicated by the arrow m in FIG. When a negative voltage is applied to the electrode plate 56, the direction of the shear deformation of the piezoelectric body 52 and the direction of the torsion of the vibrator 30 are reversed. Therefore, the electrode plate 56
When a frequency voltage is applied to the vibrator 30, torsional vibration is excited in the vibrator 30.

On the other hand, when a positive voltage is applied to the electrode plate 57, the four vertical vibration piezoelectric bodies 53 are all parallel to the central axis A of the vibrator 30, as indicated by arrows in FIG. Elongation and deformation when a negative voltage is applied. Therefore, when a frequency voltage is applied to the electrode plate 57, longitudinal vibration is excited in the vibrator 30.

Next, the operation of the ultrasonic motor according to this embodiment will be described with reference to FIG. FIG.
FIG. 4 is an explanatory diagram schematically showing the operation of FIG. In the figure, ω represents the angular frequency (ω = 2πf) when the drive frequency is f.
When drive signals (frequency voltages) having a phase difference of 90 ° are input to the longitudinal vibration piezoelectric body 53 and the torsional vibration piezoelectric body 52, the phases of the longitudinal vibration and the torsional vibration generated in the vibrator 30 are 90 °. On the driving surface D, an elliptical motion combining these vibrations is generated.

Specifically, first, at time t = 0,
The displacement of the torsional vibration is maximum on the left side, and the displacement of the longitudinal vibration is zero. In this state, the moving element 20 is in contact with the driving surface D of the vibrator 30 by the pressing member 16. From this state, from t = 0 to (4/4) × (π / ω), the torsional vibration is displaced from the maximum on the left to the maximum on the right. On the other hand, the longitudinal vibration is displaced from zero to an upper maximum and returns to zero again. Therefore, the driving surface D of the vibrator 30 rotates rightward while pressing the movable element 20, and the movable element 20 is driven.

Next, t = (4/4) × (π / ω)-(8
/ 4) × (π / ω), the torsional vibration is displaced from the maximum on the right to the maximum on the left. On the other hand, the longitudinal vibration is displaced from zero to a lower maximum and returns to zero again. At this time, the moving element 20
Is the pressing member 1 even if it is pressed by the pressing member 16.
Since the natural frequency of No. 6 is lower than the ultrasonic vibration range, it cannot follow the contraction of the vibrator. Therefore, the drive surface D of the vibrator 30 is not driven by the rotor and the mover 20 to the left while moving away from the mover 20. As described above, in the present embodiment, when a drive signal having a phase difference of 90 ° is input to the piezoelectric body for longitudinal vibration 53 and the piezoelectric body for torsional vibration 52, elliptic motion occurs on the drive surface D, and further, the drive surface D Since a part of the elliptical motion is transmitted to the movable element 20, the movable element 20 performs a rotational movement in a certain direction.

(Other Embodiments) The present invention is not limited to the above embodiment. The above embodiment is an exemplification, and has substantially the same configuration as the technical idea described in the scope of the claims of the present invention. It is included in the technical scope of the invention.

1) In the above embodiment, the case where the first-order longitudinal vibration and the second-order torsional vibration are excited in the elastic body has been described. It may be to excite those. 2) In the above embodiment, the case where the piezoelectric body is used as the vibration source that excites the torsional vibration or the longitudinal vibration in the elastic body has been described as an example. It is not meant to be limiting. The vibration source may be any source that can apply predetermined vibration to the elastic body, and an element (electrostrictive element) that excites the elastic body by converting electric energy, magnetic energy, heat energy, or the like into mechanical displacement. , Magnetostrictive elements, etc.).

[0043]

As described in detail above, according to the first or second aspect of the present invention, since the internal wiring is connected to the driving circuit via the relay member, the internal wiring is connected to the driving circuit or the external wiring. Even when an external force is applied, the external force is interrupted at the relay member and does not directly reach the connection between the internal wiring and the vibrator. According to the invention according to claim 3, since the relay member connects two or more internal wirings transmitting the same drive signal to one external wiring, the number of external wirings is reduced, and the connection between the vibration actuator and the drive circuit is reduced. Connection becomes easy.

According to the fourth aspect of the present invention, since the other ends of the two or more external wirings are connected to the relay member on the same plane, the length of the external wiring is independent of the length of the corresponding internal wiring. It is possible to make the uniformity and to make the handling easy. According to the fifth aspect of the present invention, since the elastic body is grounded via the support member and the relay member, the grounding wiring can be easily handled like other external wirings.

According to the sixth aspect of the present invention, since the relay member is a plate-like member having elasticity, the external force applied to the external wiring or the like is absorbed by the elasticity of the relay member and the connection between the internal wiring and the vibrator. It does not extend to departments. According to the invention according to claim 7, since the connection portion of the external wiring with the relay member is the weakest portion with respect to the mechanical strength of the signal transmission portion, if an excessive external force is applied to the external wiring, the external wiring will The connection of the wiring to the relay member is released, and external force does not reach the connection between the internal wiring and the vibrator. According to the eighth aspect of the present invention, since the elastic body is grounded via the support member, the vibration characteristic is not deteriorated by separately attaching the grounding wire to the elastic body.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an embodiment of an ultrasonic motor according to the present invention.

FIG. 2 is an exploded perspective view showing a vibrator 30.

FIG. 3 is a perspective view of a vibrator 30 and a relay board 60.

FIG. 4 is an explanatory diagram showing an arrangement of piezoelectric bodies in a vibrator 30 and a vibration mode excited by the vibrator.

FIG. 5 is an explanatory diagram schematically showing an operation of a vibrator 30.

FIG. 6 shows a conventional vibration actuator,
It is sectional drawing which shows the vibration actuator disclosed by -46075.

[Explanation of symbols]

 Reference Signs List 10 ultrasonic motor 12 fixed shaft 20 mover 22 mover base material 26 sliding material 30 vibrator 32, 34 elastic body 51 to 54 piezoelectric body 55 to 58 electrode plate 60 relay base 65 to 68 internal lead wire 75 to 78 external Lead wire 79 Ground lead wire

Claims (8)

[Claims] An oscillator, which is supported by a support member and vibrates upon input of a drive signal, is connected to a relative motion member which moves relative to the oscillator, and a drive circuit for outputting the oscillator and the drive signal. A vibration transmission device including a signal transmission unit, wherein the signal transmission unit has one end connected to the vibrator, one end connected to the drive circuit, an external wiring connected to the drive circuit, and the support member supporting the signal transmission unit. A vibration actuator, comprising: a relay member connected to the other end of the internal wiring and the other end of the external wiring. 2. The vibration actuator according to claim 1, wherein the vibrator has a vibration source for excitation arranged inside the vibrator, and the vibration source is outside the vibrator. A vibrating actuator having an electrode portion protruding to the internal wiring and connected to the internal wiring. 3. The vibration actuator according to claim 1, wherein the relay member connects two or more of the internal wirings that transmit the same drive signal to one external wiring. Vibration actuator. 4. The vibration actuator according to claim 1, further comprising at least two external wirings, wherein the other end of each of the external wirings is connected to a corresponding one of the internal wirings. A vibration actuator which is connected to the relay member on the same plane regardless of the length. 5. The method according to claim 1, wherein:
In the vibration actuator according to the paragraph, the vibrator is provided on the elastic body and the elastic body, and has a vibration source that excites the elastic body according to the drive signal, the elastic body, the support member and the A vibration actuator, which is grounded via a relay member. 6. Any one of claims 1 to 5
The vibration actuator according to claim 1, wherein the relay member is a plate-like member having elasticity. 7. One of claims 1 to 6
3. The vibration actuator according to claim 1, wherein a connection portion of the external wiring with the relay member is a portion having a weakest mechanical strength of the signal transmission portion. 8. A vibration actuator comprising: a vibrator; a relative movement member that moves relative to the vibrator; and a support member that supports the vibrator; wherein the vibrator is installed on the elastic body A vibration generating source for exciting the elastic body according to a drive signal, wherein the elastic body is grounded via the support member.