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JPH10245234A - Production of refractive index distribution type optical element - Google Patents

Production of refractive index distribution type optical element

Info

Publication number
JPH10245234A
JPH10245234A JP9046388A JP4638897A JPH10245234A JP H10245234 A JPH10245234 A JP H10245234A JP 9046388 A JP9046388 A JP 9046388A JP 4638897 A JP4638897 A JP 4638897A JP H10245234 A JPH10245234 A JP H10245234A
Authority
JP
Japan
Prior art keywords
gel
sol
metal component
drying
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP9046388A
Other languages
Japanese (ja)
Inventor
Kunihisa Koo
邦寿 小尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP9046388A priority Critical patent/JPH10245234A/en
Publication of JPH10245234A publication Critical patent/JPH10245234A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/12Other methods of shaping glass by liquid-phase reaction processes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/30Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Silicon Compounds (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain a gel in a constant shape without causing the volume contraction, crack generation and deformation of the gel by placing the washed gel and an inactive liquid having a larger specific gravity than that of the gel and not compatible with a solvent, etc., contained in the gel in a vessel for drying the gel on the production of a refractive index distribution type optical element by a sol-gel method. SOLUTION: This method for producing a refractive index distribution type optical element comprises stirring and mixing a metal alkoxide, etc., as a raw material, an alcohol as a solvent, water for hydrolyzing the metal alkoxide, etc., a catalyst for accelerating the hydrolysis reaction, and a specific metal component for imparting a concentration distribution in the following process, pouring the obtained sol into a gelation vessel such as a cylindrical vessel, heating the sol to form the gel, immersing the gel in a distribution-imparting solution for eluting the fine crystals of the added metal component for a constant time to impart the concentration distribution, and subsequently fixing the metal component. The metal alkoxide is selected from tetramethoxysilane, etc., and the alcohol is selected from methanol, ethanol, etc. The catalyst is selected from hydrochloric acid, acetic acid, etc. The specific metal component is selected from lead acetate, etc.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、屈折率分布が付与
された多成分系ガラスからなる光学素子をゾルゲル法に
よって製造する方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing an optical element made of a multi-component glass having a refractive index distribution by a sol-gel method.

【0002】[0002]

【従来の技術】ゾルゲル法によるガラスの合成は、原料
としての金属アルコキシドと、溶媒としてのアルコール
と、加水分解反応のための水および触媒を攪拌して混合
しゾルを調製する工程と、このゾルをゲル化させる工程
と、このゲル中の溶媒を除去してドライゲルとする乾燥
工程と、ドライゲルを無孔化する焼結工程とによってな
されている。また屈折率分布が付与された多成分系ガラ
スからなる光学素子の製造は、上述した乾燥工程の前段
階で、ゲル中の金属成分を選択的に溶出させるこができ
る酸などの分布付与溶液にゲルを一定時間浸漬し、その
後、洗浄して分布付与液を除去する工程を挿入すること
により可能である。
2. Description of the Related Art The synthesis of glass by the sol-gel method involves the steps of mixing a metal alkoxide as a raw material, an alcohol as a solvent, water for a hydrolysis reaction and a catalyst with stirring to prepare a sol, Of the gel, a drying step of removing the solvent in the gel to form a dry gel, and a sintering step of making the dry gel non-porous. In addition, in the production of an optical element made of a multi-component glass to which a refractive index distribution has been imparted, a distribution imparting solution such as an acid capable of selectively eluting a metal component in a gel is provided before the drying step described above. This can be achieved by immersing the gel for a certain period of time and then inserting a step of washing to remove the distribution-imparting liquid.

【0003】上述した乾燥工程では、ゲルを乾燥用容器
に移して乾燥を行うが、乾燥途中にゲルが体積収縮して
割れたり、歪む問題がある。このため、ゲルが体積収縮
しても、割れたり歪むことを防止する様々な形状の乾燥
用容器あるいは乾燥方法が提案されている。例えば、収
縮が自由な状態でゲルの上部を保持する懸垂治具を用い
て乾燥する方法、あるいは円筒形の乾燥用容器にゲルを
入れて回転しながら乾燥する方法、表面張力が原因で発
生するゲルのひび割れを防ぐ乾燥制御添加剤を、分布付
与溶液を除去する洗浄液に添加し、この洗浄液で洗浄し
た後に乾燥する方法が開発されている。
In the above-mentioned drying step, the gel is transferred to a drying container and dried. However, there is a problem in that the gel shrinks in volume during drying and is broken or distorted. For this reason, various shapes of drying containers or drying methods have been proposed to prevent the gel from being cracked or distorted even when the gel shrinks in volume. For example, a method of drying using a suspension jig that holds the upper part of the gel in a state of free shrinkage, a method of putting the gel in a cylindrical drying container and drying while rotating, a method caused by surface tension A method has been developed in which a drying control additive for preventing cracking of a gel is added to a cleaning solution for removing a distribution-providing solution, followed by washing with the cleaning solution and drying.

【0004】さらに、特開昭62−70236号公報で
は、ゲルの真円度、反り、歩留まりを改善するため、乾
燥用の円筒形容器の空間部にゾルの成分を含む液体を充
填する方法が示されている。また特開昭57−1065
29号公報では、ゲルの歪みを防ぐために、ゾルと相溶
性がなく、且つ比重が大きい液体中にゾルを投入してゲ
ル化させる方法が示されている。
Further, Japanese Patent Application Laid-Open No. 62-70236 discloses a method of filling a liquid containing a sol component into the space of a cylindrical container for drying in order to improve the roundness, warpage and yield of a gel. It is shown. Japanese Patent Application Laid-Open No. 57-1065
No. 29 discloses a method in which a sol is poured into a liquid that is not compatible with the sol and has a large specific gravity to cause gelation in order to prevent distortion of the gel.

【0005】[0005]

【発明が解決しようとする課題】ゲルが体積収縮しても
割れたり、歪むことを防止する様々な形状の乾燥容器あ
るいは乾燥方法が提案されているが、これらはいずれ
も、その効果が小さかったり、多くの手間が必要であ
り、装置のコストが高いなどの問題がある。
Various types of drying containers or drying methods have been proposed to prevent the gel from being cracked or distorted even if the gel shrinks in volume, but all of them have a small effect. However, there is a problem that much labor is required and the cost of the apparatus is high.

【0006】特開昭62−70236号公報の方法で
は、円筒状容器内に充填した液体が外部からの変動(衝
撃、気温等)に対して緩衝作用を有しているため、ゲル
が柔らかい間の歪を防ぐことが可能である。しかし充填
した液体がゾルの成分を含む液体であるため、この液体
が乾燥工程中にゲルの内部に浸透し、結果として乾燥で
きない問題がある。
In the method disclosed in Japanese Patent Application Laid-Open No. 62-70236, the liquid filled in the cylindrical container has a buffering action against external fluctuations (impact, temperature, etc.). It is possible to prevent distortion. However, since the filled liquid is a liquid containing a sol component, there is a problem that this liquid permeates into the gel during the drying process and cannot be dried as a result.

【0007】特開昭57−106529号公報の方法で
は、ゲルと相溶性が無く、且つ比重が大きな液体によっ
て浮遊懸垂状態でゲル化していく際に、ゾルを静置状態
にしても静置面が外部のわずかな振動やゾルの収縮時の
応力によって変形するため、一定形状のゲルを作成する
ことができない。屈折率分布型光学素子はゲル中の金属
成分を選択的に溶出させることにより分布付与を行うと
ころから、分布を付与する前のゲルは常に一定形状であ
ることが必要であり、上述のように一定形状のゲルがで
きない場合には、付与する屈折率分布の形状が一定でな
い光学素子となり、問題点がある。
In the method disclosed in Japanese Patent Application Laid-Open No. 57-106529, when the sol is gelled in a suspended state with a liquid that is not compatible with the gel and has a large specific gravity, the sol is allowed to stand still even if the sol is left standing. Is deformed by a slight external vibration or a stress at the time of contraction of the sol, so that a gel having a constant shape cannot be produced. Since the refractive index distribution type optical element performs distribution imparting by selectively eluting the metal component in the gel, the gel before imparting the distribution must always have a constant shape, as described above. When a gel having a constant shape cannot be formed, an optical element having a non-uniform refractive index distribution to be applied has a problem.

【0008】本発明は、上記問題点を鑑みてなされたも
ので、ゲルが乾燥工程で体積収縮しても割れたり、歪む
ことがなく、常に一定形状のゲルを得ることができる屈
折率分布型光学素子の製造方法を提供することを目的と
する。
[0008] The present invention has been made in view of the above problems, and a refractive index distribution type gel that can always obtain a gel having a constant shape without breaking or distorting even if the gel shrinks in volume during the drying step. An object of the present invention is to provide a method for manufacturing an optical element.

【0009】[0009]

【課題を解決するための手段】上記目的を達成するた
め、本発明は、金属アルコキシドを原料として調整した
ゾルをゲル化させた後、金属成分を溶出する溶液にゲル
を浸漬し、その後、洗浄、乾燥、焼結するゾルゲル法に
よる屈折率分布型光学素子の製造方法において、洗浄が
完了したゲルと、このゲルよりも比重が大きく、かつゲ
ル中に含まれる溶媒等と相溶しない不活性液体とを乾燥
用容器に入れて乾燥することを特徴とする。
In order to achieve the above object, the present invention provides a method for gelling a sol prepared using a metal alkoxide as a raw material, immersing the gel in a solution that elutes a metal component, and then washing the gel. In a method of manufacturing a gradient index optical element by a sol-gel method of drying and sintering, a washed gel and an inert liquid having a higher specific gravity than the gel and incompatible with a solvent contained in the gel. And dried in a drying container.

【0010】すなわち、本発明では、まず原料としての
金属アルコキシド等と、溶媒としてのアルコールと、金
属アルコキシド等を加水分解するための水と、加水分解
反応を促進するための触媒および後工程で濃度分布を付
与するための特定の金属成分とを攪拌混合してゾルを調
製する。金属アルコキシドとしてはテトラメトキシシラ
ン、テトラエトキシシラン、テトラ−n−ブトキシチタ
ンなどを選択でき、アルコールとしてはメタノール、エ
タノール、ブタノールなどを選択でき、触媒しては塩
酸、酢酸、アンモニア、ピペラジンなどを選択でき、特
定の金属成分としては酢酸鉛、酢酸バリウムなどを選択
することができる。
That is, in the present invention, first, a metal alkoxide or the like as a raw material, an alcohol as a solvent, water for hydrolyzing the metal alkoxide or the like, a catalyst for accelerating the hydrolysis reaction, and a concentration in a subsequent step. A sol is prepared by stirring and mixing with a specific metal component for providing a distribution. As the metal alkoxide, tetramethoxysilane, tetraethoxysilane, tetra-n-butoxytitanium, etc. can be selected, as the alcohol, methanol, ethanol, butanol, etc. can be selected, and as the catalyst, hydrochloric acid, acetic acid, ammonia, piperazine, etc. can be selected. The specific metal component can be selected from lead acetate, barium acetate and the like.

【0011】次に、ゾルを円筒等の所望の管状形状のゲ
ル化容器に注入して、室温あるいは50℃前後に加温
し、ゼリー状にゲル化させる。ゲル化容器としては後の
工程で付与する金属成分の濃度分布形状を同心真円状に
するため、円筒度が高く、且つ内面が平滑になっている
(例えば円筒度0.05、内面の表面粗さ5μm)管状
有底容器を使用することが良好である。この管状有底形
状は、多角形等であってもよい。また容器の材質として
は、ポリテトラフルオロエチレン、ポリプロピレン、T
PX(ポリメチルペンテン)あるいは内面をシリコーン
で表面処理したPEEK(ポリエーテルエーテルケト
ン)を選択できる。
Next, the sol is poured into a gelling container having a desired tubular shape such as a cylinder, and heated to room temperature or about 50 ° C. to gel it in a jelly state. The gelling container has a high cylindricity and a smooth inner surface (for example, a cylindricity of 0.05, an inner surface of the inner surface) in order to make the concentration distribution shape of the metal component to be applied in the subsequent step concentrically circular. It is preferred to use a tubular bottomed container (roughness 5 μm). This tubular bottomed shape may be a polygon or the like. The material of the container may be polytetrafluoroethylene, polypropylene, T
PX (polymethylpentene) or PEEK (polyetheretherketone) whose inner surface is treated with silicone can be selected.

【0012】このようにしてゲル化させた後、添加した
金属成分をゲル中に固定するため、上述した金属成分の
溶解度が低い溶液を容器に収納し、この溶液中にゲルを
浸漬して、濃度分布を付与するための金属成分の微結晶
を析出させる。
After gelation in this way, in order to fix the added metal component in the gel, a solution having a low solubility of the metal component is placed in a container, and the gel is immersed in this solution. Microcrystals of a metal component for providing a concentration distribution are precipitated.

【0013】次に、ゲル中の金属成分の微結晶を溶出す
るための分布付与溶液を容器に収納し、この分布付与溶
液中に一定時間、ゲルを浸漬して、ゲルの外表面から中
心に向かって金属成分が徐々に変化する濃度分布を付与
する。この分布付与溶液としては、アセトン、IPA
(イソプロピルアルコール)、メタノール、硫酸水溶液
などを用いることができる。その後、ゲル中に存在する
金属成分を分布固定液で固定する。
Next, a distribution-providing solution for eluting the microcrystals of the metal component in the gel is stored in a container, and the gel is immersed in the distribution-providing solution for a certain period of time so that the gel moves from the outer surface of the gel to the center. It gives a concentration distribution in which the metal component gradually changes. Examples of the distribution providing solution include acetone and IPA.
(Isopropyl alcohol), methanol, an aqueous solution of sulfuric acid, or the like. Thereafter, the metal component present in the gel is fixed with a distribution fixing solution.

【0014】その後、分布固定液を洗浄して金属成分の
濃度分布が付与されたゲルを乾燥させる。この乾燥は、
ゲルより比重が大きく、かつゲル中に含まれる溶媒と相
溶しない不活性液体を内容積が大きな乾燥用容器に入れ
て、ゲルが自由に浮遊できる状態に保って行う。また、
乾燥では通常、室温から徐々に昇温して、最終的に15
0℃前後まで加熱して、ゲル中に含まれる溶媒および水
を気化させ、ゲルを乾燥させる。この時、ゲルは溶媒お
よび水を放出し、且つ縮重合反応をするため体積収縮す
る。
Thereafter, the distribution fixing solution is washed and the gel provided with the concentration distribution of the metal component is dried. This drying is
An inert liquid having a higher specific gravity than the gel and incompatible with the solvent contained in the gel is placed in a drying container having a large internal volume, and the gel is maintained in a state where the gel can freely float. Also,
In drying, the temperature is usually gradually raised from room temperature and finally raised to 15
The mixture is heated to about 0 ° C. to evaporate the solvent and water contained in the gel, and the gel is dried. At this time, the gel releases the solvent and water and contracts in volume due to the polycondensation reaction.

【0015】この乾燥では、乾燥用容器に入れた不活性
液体によって、例えば円柱状のゲルは見かけ上、重力が
働かない状態であり、ゲルの自重によってゲルの下部側
に作用する力、あるいはゲルの外表面と容器の内壁との
摩擦、さらにはゲル自体の体積収縮によって加わる応力
による割れおよび歪みを防止できる。
In this drying, for example, a columnar gel is apparently in a state where gravity does not work due to the inert liquid put in the drying container, and the force acting on the lower side of the gel due to the weight of the gel, or the gel. The friction between the outer surface of the gel and the inner wall of the container, as well as the cracking and distortion due to the stress applied by the volume shrinkage of the gel itself can be prevented.

【0016】また、従来の如く、ゲル化前のゾルを不活
性液体と共に容器に入れてゲル化させるのではなく、本
発明は専用の別のゲル化容器を用いてゲル化して所定の
外形形状が保持された状態で不活性液体に浮遊させるの
で、常に真円度、平滑性、面の平行度などが一定形状の
ゲルを得ることができる。本発明に用いる不活性液体
は、ゲル中に含まれる溶媒、ゲル化するときに生成され
ゲル中に含まれる生成液、さらには金属成分をゲル中で
固定するときに用いることによりゲル中に含まれた分布
固定液(以下、溶媒等と記載する)と相溶しないので、
溶媒等が乾燥されることを阻害することがなく、気化し
た溶媒等が不活性液体中に取り込まれることなくゲルの
外に放出され、良好に乾燥することができる。
In addition, unlike the conventional method, the sol before gelation is not put into a container together with an inert liquid and then gelled, but the present invention uses another dedicated gelling container to gelate the sol into a predetermined outer shape. Is suspended in the inert liquid in a state in which the gel is held, so that a gel having a constant shape of roundness, smoothness, plane parallelism and the like can be always obtained. The inert liquid used in the present invention is contained in the gel by using the solvent contained in the gel, the product liquid produced during gelation and contained in the gel, and further by using the metal component to fix it in the gel. Incompatible with the fixed distribution solution (hereinafter referred to as solvent etc.)
The solvent and the like are not hindered from being dried, and the vaporized solvent and the like are released from the gel without being taken into the inert liquid, and can be dried well.

【0017】本発明に用いる不活性液体としては、パー
フルオロカーボン、パーフルオロポリエーテルあるいは
パーフルオロアミンなどのフッ素系炭化水素、ポリオル
ガノシロキサンなどのシリコーン類、あるいはデカン、
イソドデカンなどの炭化水素類を使用できる。これら不
活性液体の内でも、沸点範囲が100℃〜200℃であ
り、しかも乾燥のし易さから蒸気圧が高いものが良い。
Examples of the inert liquid used in the present invention include fluorocarbons such as perfluorocarbon, perfluoropolyether and perfluoroamine, silicones such as polyorganosiloxane, and decane;
Hydrocarbons such as isododecane can be used. Among these inert liquids, those having a boiling point in the range of 100 ° C. to 200 ° C. and having a high vapor pressure for ease of drying are preferred.

【0018】以上によって乾燥させたゲルを乾燥用容器
から取り出して焼結する。この場合、ゲル中に存在して
いる金属アルコキシドの種類と量、添加した金属成分あ
るいは触媒などの種類などにより、焼結スケジュールは
異なるが、通常600℃〜1300℃程度まで昇温し
て、残ったゲル中の溶媒等および水を気化させるととも
に、縮重合反応を進行させて無孔化し屈折率分布型光学
素子とする。
The gel dried as described above is taken out of the drying vessel and sintered. In this case, the sintering schedule varies depending on the type and amount of the metal alkoxide present in the gel, the type of the added metal component or the type of the catalyst, etc., but the temperature is usually raised to about 600 ° C. to 1300 ° C. A solvent and the like and water in the gel are vaporized, and a condensation polymerization reaction proceeds to make the gel nonporous, thereby obtaining a gradient index optical element.

【0019】[0019]

【発明の実施の形態】テトラメチルシリケート30m
l、テトラエチルシリケート30mlの2種を金属アル
コキシドとして、この金属アルコキシドと溶媒としてト
リエチルボレート12.4mlとを混合し、さらに触媒
として0.01規定の塩酸25mlを加えて室温で1時
間攪拌した。そして金属成分として1.25mol/l
の酢酸鉛水溶液107.63mlと、酢酸15.35m
lとを混合したものを添加した。この添加後、さらに室
温で30分間攪拌してゾルを調製した。
DETAILED DESCRIPTION OF THE INVENTION Tetramethyl silicate 30 m
1, 30 ml of tetraethyl silicate was used as a metal alkoxide, and the metal alkoxide was mixed with 12.4 ml of triethyl borate as a solvent. Further, 25 ml of 0.01 N hydrochloric acid was added as a catalyst, and the mixture was stirred at room temperature for 1 hour. 1.25 mol / l as metal component
107.63 ml of aqueous lead acetate solution and 15.35 m of acetic acid
1 was added. After this addition, the mixture was further stirred at room temperature for 30 minutes to prepare a sol.

【0020】次に、ゾルを直径35mmのポリプロピレ
ン製の容器に分注して室温でゲル化させた。得られたゲ
ルを30℃で5日間放置してゲルの熟成を行った。ゲル
化の際には、メタノール、エタノールおよび水が生成液
として生じた。さらにIPA(イソプロピルアルコー
ル):水=8:2の混合溶媒によって濃度0.61mo
l/lとなるように調整された液温60℃の酢酸鉛溶液
を調整し、この溶液を収容した容器に熟成されたゲルを
浸漬し、ゲル中からの酢酸の除去を行った。
Next, the sol was dispensed into a 35 mm diameter polypropylene container and gelled at room temperature. The obtained gel was left at 30 ° C. for 5 days to ripen the gel. During gelation, methanol, ethanol and water were produced as product liquids. Further, a mixed solvent of IPA (isopropyl alcohol): water = 8: 2 has a concentration of 0.61 mol.
A lead acetate solution having a liquid temperature of 60 ° C. adjusted to 1 / l was prepared, and the aged gel was immersed in a container containing the solution to remove acetic acid from the gel.

【0021】そして、IPAを収納した容器→IPA:
アセトン=8:2の溶液を収納した容器→IPA:アセ
トン=5:5の溶液を収納した容器→アセトンを収納し
た容器の順でゲルを各2日間ずつ浸漬することにより、
ゲル中に酢酸鉛の結晶を析出させて固定した。
Then, a container containing IPA → IPA:
The gel was immersed for 2 days in the order of a container containing a solution of acetone = 8: 2 → a container containing a solution of IPA: acetone = 5: 5 → a container containing acetone.
Lead acetate crystals were precipitated in the gel and fixed.

【0022】この処理の後、酢酸カリウム濃度が0.3
05mol/lでかつ酢酸の濃度が0.15mol/l
に調整されたエタノー溶液150mlを容器に収容し、
この容器内のエタノール溶液に、ゲルを16時間浸漬し
て、酢酸鉛を溶出し、ゲルの外表面から中心に向かって
徐々に変化するように酢酸鉛および酢酸カリウムの濃度
分布を付与させた。そしてIPA:アセトン=5:5を
収納した容器→アセトンを収納した容器→アセトンを収
容した容器の順で、各分布固定液に各2日ずつ浸漬する
ことにより、ゲル中に酢酸鉛および酢酸カリウムの結晶
を析出させて濃度分布形状を固定した。
After this treatment, a potassium acetate concentration of 0.3
05 mol / l and acetic acid concentration of 0.15 mol / l
The ethanol solution adjusted to 150 ml is stored in a container,
The gel was immersed in the ethanol solution in this container for 16 hours to elute lead acetate, and a concentration distribution of lead acetate and potassium acetate was given so as to gradually change from the outer surface of the gel toward the center. Then, IPA: acetone: a container containing 5: 5, a container containing acetone, and a container containing acetone were immersed in each of the distribution fixatives for 2 days, so that lead acetate and potassium acetate were contained in the gel. Was precipitated to fix the concentration distribution shape.

【0023】次に、ゲル中の溶媒のトリエチルボレート
やゲル中の生成液および各分布固定液と相溶しなく且つ
不活性液体である比重1.72の商品名「ガルデンD0
1」(モンテカチーニ社)を、TPXからなる直径37
mmの乾燥用容器に20ml入れると共に、前工程で濃
度分布が付与されているゲルをアセトンで洗浄した後、
乾燥用容器内に移した。この乾燥用容器を30℃から1
50℃まで5日間かけて加温してゲルを乾燥させた。乾
燥中、ゲルは直径35mmから直径18mmまで体積収
縮したが、ガルデンD01に自由に浮遊している状態に
あり、割れたり、歪むことがなく乾燥することがでた。
最後に、ゲルを乾燥用容器から取り出して、570℃ま
で昇温して焼結することにより屈折率分布型光学素子を
得た。
Next, a trade name "Garden D0" having a specific gravity of 1.72, which is incompatible with triethyl borate as a solvent in the gel, a product solution in the gel and each distribution fixing solution, and is an inert liquid.
1 "(Montecatini) with TPX diameter 37
20 ml in a drying container of 20 mm, and the gel to which the concentration distribution was given in the previous step was washed with acetone.
It was transferred into a drying container. The drying container is kept at 30 ° C for 1
The gel was dried by warming to 50 ° C. over 5 days. During drying, the gel contracted in volume from 35 mm in diameter to 18 mm in diameter, but was freely floating in Galden D01 and could be dried without cracking or distortion.
Finally, the gel was taken out of the drying container, heated to 570 ° C. and sintered to obtain a gradient index optical element.

【0024】(実施の形態2)金属アルコキシドとして
テトラメチルシリケート25.8mlに、溶媒としてI
PA248.4mlおよび触媒として2規定酢酸15m
lを加えて室温で30分間攪拌した。次に金属成分とし
てイソプロピオキシチタネート42.6gを添加してさ
らに30分間攪拌した。その後、水50ml、IPA3
5ml、1規定の塩酸7.5mlからなる混合溶液を滴
下し、室温で30分間攪拌してゾルを調製した。このゾ
ルを直径40mmのポリテトラフルオロエチレン製の容
器に分注し、室温でゲル化し、このゲルを60℃で4日
間保持して熟成を行った。
(Embodiment 2) Metal alkoxide in tetramethyl silicate (25.8 ml) and solvent as I
248.4 ml of PA and 15 m of 2N acetic acid as a catalyst
and stirred at room temperature for 30 minutes. Next, 42.6 g of isopropyloxytitanate was added as a metal component, and the mixture was further stirred for 30 minutes. Then, 50 ml of water, IPA3
A mixed solution consisting of 5 ml and 7.5 ml of 1N hydrochloric acid was added dropwise and stirred at room temperature for 30 minutes to prepare a sol. This sol was dispensed into a polytetrafluoroethylene container having a diameter of 40 mm, gelled at room temperature, and this gel was kept at 60 ° C. for 4 days for aging.

【0025】次に、IPAを収納した容器→IPA:ア
セトン=8:2を収納した容器→IPA:アセトン=
5:5を収納した容器→アセトンを収納した容器の順
で、ゲルを各2日間ずつ浸漬することによりゲル中にチ
タニウムの結晶を析出させて固定した。
Next, a container containing IPA → a container containing IPA: acetone = 8: 2 → IPA: acetone =
The gel was immersed for 2 days each in the order of the container containing 5: 5 and the container containing acetone to precipitate and fix titanium crystals in the gel.

【0026】次にクエン酸濃度が1mol/lである3
規定の硫酸溶液を分布付与溶液とし、この硫酸溶液を収
納した容器中に、ゲルを24時間浸漬して、チタニウム
の濃度がゲルの外表面から中心に向かって徐々に変化す
る濃度分布を付与させた。この後、分布固定液としての
エタノールを収納した容器中に1日間さらに浸漬し、チ
タニウムの微結晶を析出させて固定した。
Next, the citric acid concentration is 1 mol / l 3
A prescribed sulfuric acid solution is used as a distribution providing solution, and the gel is immersed in a container containing the sulfuric acid solution for 24 hours to give a concentration distribution in which the concentration of titanium gradually changes from the outer surface of the gel toward the center. Was. Thereafter, it was further immersed in a container containing ethanol as a distribution fixing liquid for one day to precipitate and fix titanium microcrystals.

【0027】そして、溶媒としてのIPAやゲル化する
際の生成液および分布固定液とは相溶しなく且つ不活性
液体である比重1.89の「ペルフロードIL−27
0」(徳山曹達(社)製品)を、TPX製の直径42m
mの乾燥用容器に30ml入れ、この乾燥用容器内に上
述したゲルを移した。この乾燥用容器を30℃から80
℃まで7日間かけて加温してゲルを乾燥させた。乾燥
中、ゲルは体積収縮したが、乾燥用容器内の液体ペルフ
ロードIL−270に自由に浮遊している状態にあり、
割れたり、歪むことがなく乾燥することができた。最後
に、ゲルを乾燥用容器から取り出して、1150℃まで
昇温して焼結することにより屈折率分布型光学素子を得
た。
Then, "Perflod IL-27" having a specific gravity of 1.89, which is incompatible with IPA as a solvent, a product solution at the time of gelation and a distribution fixing solution, and is an inert liquid.
0 ”(product of Tokuyama Soda Co., Ltd.), TPX 42m diameter
30 ml was placed in a drying container of m, and the above-mentioned gel was transferred into the drying container. The drying container is heated from 30 ° C. to 80
The gel was dried by warming to 7 ° C over 7 days. During the drying, the gel contracted in volume, but was in a state of freely floating in the liquid perfluded IL-270 in the drying container,
Drying was possible without cracking or distortion. Finally, the gel was taken out of the drying container, heated to 1150 ° C. and sintered to obtain a gradient index optical element.

【0028】(比較例)実施の形態1と同一のゾル組成
比で、実施の形態1と同様にゲル化から濃度分布付与ま
での工程を行ったゲルを、アセトンで洗浄した後、実施
の形態1と同一の直径37mmのTPX製の乾燥用容器
に移した。この時、不活性液体であるガルデンD01は
投入しなかった。ゲルは乾燥用容器の底の内面に接触し
て傾いた状態で保持された。この状態で実施の形態1と
同一の条件で加温した。その結果、温度が130℃を超
えるとゲル中にひび割れが生じるものがでてきた。さら
に150℃まで加温を続けたところ、ひび割れが生じな
かったゲルであっても弓形に歪んでいる状態であった。
(Comparative Example) A gel which had been subjected to the steps from gelation to concentration distribution provision in the same manner as in Embodiment 1 at the same sol composition ratio as in Embodiment 1 was washed with acetone. The sample was transferred to the same TPX drying container having a diameter of 37 mm as in Example 1. At this time, Galden D01, which is an inert liquid, was not charged. The gel was held in an inclined state in contact with the inner surface of the bottom of the drying container. In this state, heating was performed under the same conditions as in the first embodiment. As a result, when the temperature exceeded 130 ° C., cracks appeared in the gel. When the heating was further continued to 150 ° C., even the gel which did not crack was in a bow-shaped state.

【0029】[0029]

【発明の効果】本発明によれば、ゲルより比重が大きく
かつゲル中に含まれる溶媒等と相溶しない不活性液体を
乾燥用容器に入れて、ゲルが自由に浮遊できる状態に保
って乾燥するため、乾燥途中でゲルが割れたり、歪むこ
とがなくなる。
According to the present invention, an inert liquid having a higher specific gravity than a gel and incompatible with a solvent contained in the gel is placed in a drying container and dried while keeping the gel in a free floating state. Therefore, the gel is not broken or distorted during drying.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 金属アルコキシドを原料として調整した
ゾルをゲル化させた後、金属成分を溶出する溶液にゲル
を浸漬し、その後、洗浄、乾燥、焼結するゾルゲル法に
よる屈折率分布型光学素子の製造方法において、洗浄が
完了したゲルと、このゲルよりも比重が大きくかつゲル
中に含まれる溶媒等と相溶しない不活性液体とを乾燥用
容器に入れて乾燥することを特徴とする屈折率分布型光
学素子の製造方法。
1. A sol gel prepared from a metal alkoxide as a raw material is gelled, the gel is immersed in a solution eluted with a metal component, and then washed, dried, and sintered. The method according to claim 1, wherein the washed gel and an inert liquid having a higher specific gravity than the gel and incompatible with the solvent contained in the gel are placed in a drying container and dried. Manufacturing method of rate distribution type optical element.
JP9046388A 1997-02-28 1997-02-28 Production of refractive index distribution type optical element Withdrawn JPH10245234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9046388A JPH10245234A (en) 1997-02-28 1997-02-28 Production of refractive index distribution type optical element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9046388A JPH10245234A (en) 1997-02-28 1997-02-28 Production of refractive index distribution type optical element

Publications (1)

Publication Number Publication Date
JPH10245234A true JPH10245234A (en) 1998-09-14

Family

ID=12745770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9046388A Withdrawn JPH10245234A (en) 1997-02-28 1997-02-28 Production of refractive index distribution type optical element

Country Status (1)

Country Link
JP (1) JPH10245234A (en)

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