JPH0935909A - Manufacture of nonlinear resistor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a nonlinear resistor wherein nonlinear resistance characteristics and service life are not affected by the humidity of storage circumstances, by forming a high resistance layer and improving the component. SOLUTION: In a forming process of a high resistance layer 2, high resistance layer material of a slurry state is spirally sprayed and spread on the side surface of a sintered body 1. The amount of coating per unit area is 0.001-0.1g/cm<2> .

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a non-linear resistor having an improved high resistance layer on the side surface of zinc oxide.

[0002]

2. Description of the Related Art Generally, a lightning arrester is used to suppress an abnormal voltage in a power system and protect the power system. The surge arrester employs a non-linear resistor that exhibits insulation characteristics at a normal voltage, low resistance characteristics when a surge voltage is applied, and discharges a surge current to protect the system. .

This non-linear resistor includes zinc oxide (Zn oxide).
O) as a main component, bismuth oxide (Bi ₂ O ₃ ), antimony oxide (Sb ₂ O ₃ ), cobalt oxide (CoO),
After sufficiently mixed with subcomponent materials such as manganese oxide (MnO) and nickel oxide (NiO), water and an organic binder, they are granulated with a spray dryer or the like, and molded and sintered. After that, a high resistance material is applied to the side surface of the sintered body to prevent creeping flashover and refired to form a high resistance layer.
Then, both ends of the sintered body are polished and electrodes are attached, and a non-linear resistor is manufactured.

The high resistance layer of the conventional non-linear resistor will be described in detail. For example, bismuth oxide (Bi ₂ O ₃ ), silicon oxide (SiO ₂ ), antimony oxide (Sb ₂ O ₃ ) and the like are added to water and an organic binder. After being mixed with and applied to the side surface of the sintered body, the high resistance layer is formed by firing at 1000 ° C to 1200 ° C.

After applying a phosphoric acid-containing liquid containing magnesium, aluminum, silicon, etc. to the side surface of the sintered body,
A non-linear resistor in which a high resistance layer is formed by firing is also known (Japanese Patent Laid-Open No. 2-7401).

[0006]

By the way, as a result of recent research, a new problem has been clarified that the non-linear characteristic deteriorates when the non-linear resistor is left in a high humidity atmosphere. This deterioration of the non-linear characteristics also leads to deterioration of the charging life characteristics, and in order to prevent this deterioration, it was necessary to take measures such as sealing and storing in an inert gas. As described above, in the conventional non-linear resistor, the non-linear resistance characteristic and the voltage application life characteristic may deteriorate depending on the humidity of the storage environment after manufacturing.

The present invention has been proposed in order to solve the problems of the prior art as described above. By improving the formation and composition of the high resistance layer, the nonlinear resistance characteristics and It is an object of the present invention to provide a method for manufacturing a non-linear resistor that does not deteriorate the life characteristics of voltage application.

[0008]

In order to achieve the above object, the present invention provides a varistor element according to the first aspect of the invention, in which a powder containing zinc oxide as a main component is formed into a columnar shape and is fired. A step of forming a high resistance layer material on the side surface of the varistor element to prevent creeping of the varistor element and forming a high resistance layer by firing again, and further forming a high resistance layer of the varistor element. In the method for manufacturing a non-linear resistor, which is manufactured by a step of attaching electrodes to both end surfaces, the step of forming the high resistance layer includes a slurry-like high resistance layer material spray-coated on the side surface of the varistor in a spiral shape. The coating amount per unit area is 0.001 to 0.1g
/ Cm ^{2 A} method for manufacturing a non-linear resistor is provided.

According to a second aspect of the present invention, the high-resistance layer material contains phosphoric acid as a main component and magnesium, and the method for producing a non-linear resistor according to the first aspect of the present invention. provide.

According to a third aspect of the present invention, the method for manufacturing a non-linear resistor according to the first aspect is characterized in that the high resistance layer material contains phosphoric acid as a main component and contains aluminum. provide.

According to a fourth aspect of the present invention, the high resistance layer material contains phosphoric acid as a main component, and contains aluminum and silicon. Provide a way.

[0012]

In the present invention having the above structure,
In the process of forming the high resistance layer, the slurry high resistance layer material is spirally applied to the side surface of the cylindrical sintered body, and the application amount of the high resistance layer material is 0.001 Since 0.1 g / cm ² is used, the formation of pores and cracks in the high resistance layer can be suppressed, so that the adsorption of moisture in the air can be reduced, and as a result, it was left in a high humidity atmosphere. Also in this case, the deterioration of the non-linear characteristic can be prevented.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of the present invention will be described below with reference to the drawings. Zinc oxide (ZnO) includes bismuth oxide (Bi ₂ O ₃ ) and manganese dioxide (MnO).
₂ ) each of 0.5 mol% and cobalt oxide (Co ₂ O
₃ ), antimony oxide (Sb ₂ O ₃ ), and nickel oxide (NiO), each of which is 0.1 mol% as a sub-component, is used as a raw material. This raw material is mixed in a mixing device with water and an organic binder such as a dispersant.

Next, the mixture is spray-granulated to have a predetermined particle size, for example, 100 μm, for example, by a spray dryer. Then, the granulated powder is put into a mold and pressurized, and is molded into a predetermined shape such as a disk to obtain a molded body. The molded body thus obtained is fired in air to remove the added organic binders, for example at 500 ° C., and further fired in air to obtain a sintered body 1 shown in FIG. Such a sintered body 1 has excellent non-linear resistance characteristics as a varistor element.

Then, the high resistance layer material mixed in advance is applied to the side surface of the sintered body 1 by using a spray gun. High resistance layer material, 10 mol% of bismuth oxide (Bi ₂ O _3), antimony oxide and _{(Sb 2 O 3) 20 mol} %, of iron oxide (Fe
₂ O ₃ ) was added in an amount of 70 mol%, water and an organic binder, and the mixture was mixed to form a paste. For spray application, the sintered body 1 is rotated and the spray gun is moved to the sintered body 1.
The material of the high resistance layer was spirally applied to the side surface of the sintered body while moving from top to bottom. The spiral pitch was such that when the sintered body 1 made one revolution, the coating material overlapped approximately 1/3 to 1/2 of the coating width. The coating amount of the high resistance layer material was 0.005 to 0.5 g / cm ² . After applying the high resistance layer material, the sintered body 1 was fired again at 1200 ° C. to form the high resistance layer 2. Then, both end faces of the sintered body 1 are polished, and aluminum is sprayed on the both end faces to form the electrodes 3. With this, the nonlinear resistor shown in FIG. 1 can be obtained. For comparison, a non-linear resistor was also prepared in which the sintered body was placed horizontally and the high resistance layer material was uniformly applied in the horizontal plane to form the high resistance layer.

The electrical characteristics of the non-linear resistor obtained as above will be described below. First, the change in voltage-current characteristics (hereinafter referred to as humidity resistance) after being left for 1000 hours in an atmosphere with a humidity of 85% or more will be described. In the test, a saturated atmosphere of potassium chloride was used in a glass container to create an atmosphere having a humidity of 85% or more, and the nonlinear resistor was left in the atmosphere.
The voltage-current characteristics of the non-linear resistor were measured before and after being left for 1000 hours. The results of the humidity resistance test are shown in FIG. In FIG. 2, the horizontal axis represents the coating amount of the high-resistance layer material, and the vertical axis represents the rate of change of the voltage V _{10 A} generated in the non-linear resistor before and after the humidity resistance test when a current of 10 μA was passed to obtain the humidity resistance. It is the figure which showed the change of the electrical characteristic after a characteristic test. The curve A in FIG. 2 shows the rate of change in the non-linear characteristics of the non-linear resistor manufactured by spirally applying the high resistance layer material to the side surface of the sintered body. Also, curve B
Shows the rate of change of the non-linear characteristics of the non-linear resistor manufactured by placing the sintered body horizontally and uniformly applying the high resistance layer material in the horizontal plane. The coating amount of the high resistance layer material of the non-linear resistor is 0.0005, 0.001, 0.005, 0.01, respectively.
The values are 0.05, 0.1 and 0.5 g / cm ² . As is clear from the figure, the high resistance layer material is spirally applied on the side surface of the sintered body, and the application amount of the high resistance layer material is 0.001 to 0.1 g /
By setting cm ² to 1000 in an atmosphere with a humidity of 85% or more
It can be seen that the change in the electrical characteristics after being left for a long time is extremely smaller than that of the non-linear resistor produced by placing the sintered body horizontally and applying the high resistance layer material in the horizontal plane.

Next, after being left in an atmosphere having a humidity of 85% or more for 24 hours, the life characteristics of voltage application were measured. Electricity tests are conducted in the atmosphere,
The test was conducted for 1000 hours under the conditions of a temperature of 100 ° C. and a charge rate of 95% (the voltage when a current of 1 mA was applied at room temperature was 100). The results are shown in FIGS. 3 (a) and 3 (b). 3 (a) and 3 (b) are diagrams showing the relationship between the horizontal axis and the vertical axis representing the voltage application time and the vertical axis representing the ratio of the resistance component leakage current to the initial value. Curves A to G in FIG. 3A indicate 0.0005 (A) and 0.001 of the high resistance layer material on the side surface of the sintered body, respectively.
(B), 0.005 (C), 0.01 (D), 0.05 (E),
The time change of the resistance leakage current of the non-linear resistor produced by applying in a spiral shape with application amounts of 0.1 (F) and 0.5 (G) is shown. Curves a to g in FIG. 3B indicate that the sintered body is placed horizontally and the high resistance layer materials are 0.0005 (a), 0.001 (b) and 0.005 respectively in the horizontal plane.
(C), 0.01 (d), 0.05 (e), 0.1 (f),
The time-dependent change in the resistance leakage current of the non-linear resistor produced by applying a uniform coating amount of 0.5 (g) g / cm ² is shown. As is clear from the figures (a) and (b),
The high-resistance layer material is applied in a spiral sintered body side, further a coating amount of the high-resistance layer material, in the nonlinear resistor in which a 0.001 to 0.1 g / cm ^2, in an atmosphere of 85% humidity 24 As a result of the voltage application life test after leaving for a while, the resistance leakage current characteristic is
In the initial stage, it slightly decreases, and thereafter shows a generally constant tendency, showing stable life characteristics. On the other hand, the amount of non-linear resistor and high resistance layer material produced by placing the sintered body horizontally and uniformly applying the high resistance layer material in the horizontal plane is less than 0.001 g / cm ² or 0.1 g. Although the resistance leakage current characteristics of the non-linear resistor exceeding / cm ² are slightly reduced in the initial stage, the resistance leakage current gradually increases after a long time. Incidentally, when the resistance leakage current increases, Joule heat gradually self-heats, and when it exceeds the amount of heat radiated from the surface, the temperature of the element body 1 rises and finally thermal runaway occurs.

By the way, the direct cause of the improvement in the moisture resistance characteristic and the voltage application life characteristic of the non-linear resistor according to the present embodiment can be considered as follows. In this embodiment, in the step of forming the high resistance layer, the slurry-like high resistance layer material is spirally spray-coated on the side surface of the cylindrical sintered body. The spiral spray coating means that a thin film of the high resistance layer material is applied while shifting the overlapping portion to increase the thickness of the film and form a high resistance layer. When the thickness of the film applied at one time is small, it is difficult to form large pores because pores larger than the film thickness cannot be formed. Further, since the next high resistance layer material is applied before the applied film is dried, the shape of the pores between the films can be suppressed. Also,
By coating while overlapping overlapping parts, multiple phases are formed and the film thickness is formed, so dripping can be avoided, a uniform high resistance layer can be formed, and cracks caused by the difference in film thickness Can be suppressed.

Thus, by spray-applying the high resistance layer material to the side surface of the sintered body in a spiral shape, it is possible to prevent the formation of pores and cracks formed in the high resistance layer.
Therefore, it is possible to prevent adsorption of moisture in the air, and it is possible to prevent a decrease in lateral resistance. As a result, it is possible to prevent the non-linear characteristics from deteriorating when left in a high humidity atmosphere.

Further, in the present invention, good characteristics are obtained by setting the coating amount of the high resistance layer material to 0.001 to 0.1 g / cm ² per side unit area. The reason is as follows. Guessed. The coating amount of the high resistance layer material is 0.0
If it is less than 01 g / cm ² , a sufficient film thickness cannot be formed and good non-linear characteristics cannot be obtained. On the other hand, if the coating amount exceeds 0.1 g / cm ² , cracks are likely to occur in the high resistance layer, and the adsorptivity of moisture in the air increases, making it impossible to obtain good non-linear characteristic line characteristics.

Next, another second embodiment of the present invention will be described. Here, instead of the high resistance layer material of the first embodiment, a solution containing phosphoric acid as a main component and containing magnesium is adopted. After applying the high resistance layer material, the high resistance layer was formed by baking at 350 ° C. The other processes of forming the non-linear resistor and the respective test methods are the same as those in the first embodiment.

The electrical characteristics of the non-linear resistor obtained as above will be described below. First, FIG. 4 shows the results of the humidity resistance test. The curve A in FIG. 4 is V _{10 A} of the non-linear resistor produced by spirally applying the high resistance layer material to the side surface of the sintered body.
The change rate of is shown. Curve B shows the rate of change of V _{10 A} of the non-linear resistor produced by placing the sintered body horizontally and uniformly applying the high resistance layer material in the horizontal plane. The coating amount of the high resistance layer material is 0.0005 and 0.0, respectively.
01, 0.005, 0.01, 0.05, 0.1, and with 0.5 g / cm ^2. As is clear from the figure, the high resistance layer material is spirally applied to the side surface of the sintered body, and the application amount of the high resistance layer material is set to 0.001 to 0.1 g / cm ² to obtain a humidity of 85%.
Electrical characteristics (V _{10 A} after leaving for 1000 hours in the above atmosphere
It can be seen that the change in) is extremely smaller than that of the non-linear resistor produced by placing the sintered body horizontally and applying the high resistance layer material in the horizontal plane.

Next, after leaving for 24 hours in an atmosphere having a humidity of 85% or more, the results of the life characteristics of the applied voltage are shown in FIGS. 5 (a) and 5 (b).
Shown in Curves A to G in FIG. 5 (a) indicate that the high resistance layer material is 0.0005 (A), 0.001 (B), and
0.005 (C), 0.01 (D), 0.05 (E), 0.1
(F), 0.5 (G) application amount, and shows the time change of the resistance component leakage current of the non-linear resistor manufactured by applying in a spiral shape. In addition, curves a to g in FIG.
Place the sintered body horizontally and place the high resistance layer materials 0.0005 (a), 0.001 (b) and 0.005 in the horizontal plane, respectively.
(C), 0.01 (d), 0.05 (e), 0.1 (f),
The time-dependent change in the resistance leakage current of the non-linear resistor produced by applying a uniform coating amount of 0.5 (g) g / cm ² is shown. As is clear from the figures (a) and (b),
The high-resistance layer material is applied in a spiral sintered body side, further a coating amount of the high-resistance layer material, in the nonlinear resistor in which a 0.001 to 0.1 g / cm ^2, in an atmosphere of 85% humidity 24 As a result of the voltage application life test after leaving it for a while, it is found that the voltage application life characteristics are stable and good.

It is considered that the reason why the excellent moisture resistance characteristic and the applied voltage life characteristic are obtained in this embodiment is the same as in the first embodiment. The same effect can be obtained even if the structure or the degree of polymerization of magnesium phosphate forming the high resistance layer is changed.

As a modified example, the high resistance layer material may be made of a fire-resistant charging agent such as zirconia oxide (ZrO ₂ ), manganese oxide (MnO), chromium oxide (Cr ₂ O ₃ ), aluminum oxide (Al ₂ O ₃ ). It was confirmed that the same effect can be obtained by adding iron oxide (Fe ₂ O ₃ ).

Next, another third embodiment of the present invention will be described. In the basket, aluminum is used instead of magnesium which is an element forming the high resistance layer of the second embodiment. The process of forming the non-linear resistor and each test method are the same as in the first embodiment.

The electrical characteristics of the non-linear resistor obtained as above will be described below. First, the results of the humidity resistance test are shown in FIG. The curve A in FIG. 6 is V _{10 A} of the non-linear resistor produced by spirally applying the high resistance layer material to the side surface of the sintered body.
The change rate of is shown. Curve B shows the rate of change of V _{10 A} of the non-linear resistor produced by placing the sintered body horizontally and uniformly applying the high resistance layer material in the horizontal plane. The coating amount of the high resistance layer material is 0.0005 and 0.0, respectively.
01, 0.005, 0.01, 0.05, 0.1, and with 0.5 g / cm ^2. As is clear from the figure, the high resistance layer material is spirally applied to the side surface of the sintered body, and the application amount of the high resistance layer material is set to 0.001 to 0.1 g / cm ² to obtain a humidity of 85%.
The change in V _{10 A} after being left in the above atmosphere for 1000 hours is extremely smaller than that of a non-linear resistor produced by placing the sintered body horizontally and applying the high resistance layer material in the horizontal plane. I understand.

Next, FIG. 7 (a) and FIG. 7 show the results of the life characteristics of the applied voltage after being left for 24 hours in an atmosphere having a humidity of 85% or more.
(B). Curves A to G in FIG. 7A are 0.0005 (A) and 0.0, respectively, of the high resistance layer material on the side surface of the sintered body.
01 (B), 0.005 (C), 0.01 (D), 0.05
(E), 0.1 (F), and 0.5 (G) are applied amounts, and the time variation of the resistance component leakage current of the non-linear resistor manufactured by applying in a spiral shape is shown. In addition, the curve a in FIG.
The curve g indicates that the sintered body is placed horizontally and the high resistance layer materials are 0.0005 (a) and 0.001 (b) in the horizontal plane, respectively.
0.005 (c), 0.01 (d), 0.05 (e), 0.1
(F) shows the change over time in the resistance leakage current of the non-linear resistor produced by applying the coating amount of 0.5 (g) g / cm ² and uniformly. As is clear from the figures (a) and (b), the high resistance layer material is spirally applied to the side surface of the sintered body,
Furthermore, the coating amount of the high resistance layer material is 0.001 to 0.1 g / cm ²
The non-linear resistor with
As a result of the voltage application life test after leaving it for a while, it is found that the voltage application life characteristics are stable and good.

It is considered that the reason why the excellent moisture resistance property and the applied voltage life property are obtained in this embodiment is the same as in the first embodiment. The modification is also the same as that of the first embodiment.

Next, another fourth embodiment of the present invention will be described. In the basket, instead of magnesium which is an element forming the high resistance layer 2 in the second embodiment, silicon is used,
Aluminum is used. The process of forming the non-linear resistor and each test method are the same as those in the first and second embodiments. In the present embodiment, the high-resistivity layer forming material is X.
As a result of examination by line diffraction, aluminum silicate (Al ₆ Si ₂ O ₁₃ ) was confirmed in addition to aluminum phosphate, aluminum oxide, and silicon oxide, unlike the third embodiment.

The electrical characteristics of the non-linear resistor obtained as above will be described below. First, FIG. 8 shows the results of the humidity resistance test. The curve A in FIG. 8 is V _{10 A} of the non-linear resistor produced by spirally applying the high resistance layer material to the side surface of the sintered body.
The change rate of is shown. Curve B shows the rate of change of V _{10 A} of the non-linear resistor produced by placing the sintered body horizontally and uniformly applying the high resistance layer material in the horizontal plane. The coating amount of the high resistance layer material is 0.0005 and 0.0, respectively.
01, 0.005, 0.01, 0.05, 0.1, and with 0.5 g / cm ^2. As is clear from the figure, the high resistance layer material is spirally applied to the side surface of the sintered body, and the application amount of the high resistance layer material is set to 0.001 to 0.1 g / cm ² to obtain a humidity of 85%.
The change in voltage-current characteristics after being left in the above atmosphere for 1000 hours is extremely less than that of a non-linear resistor produced by applying a high resistance layer material in the horizontal plane of the sintered body. I understand.

Next, FIG. 9A and FIG. 9 show the results of the life characteristics of the applied voltage after being left in an atmosphere having a humidity of 85% or more for 24 hours.
(B). Curves A to G in FIG. 9A indicate high resistance layer materials of 0.0005 (A) and 0.0, respectively, on the side surfaces of the sintered body.
01 (B), 0.005 (C), 0.01 (D), 0.05
(E), 0.1 (F), and 0.5 (G) are applied amounts, and the time variation of the resistance component leakage current of the non-linear resistor manufactured by applying in a spiral shape is shown. In addition, the curve a in FIG.
The curve g indicates that the sintered body is placed horizontally and the high resistance layer materials are 0.0005 (a) and 0.001 (b) in the horizontal plane, respectively.
0.005 (c), 0.01 (d), 0.05 (e), 0.1
(F) shows the change over time in the resistance leakage current of the non-linear resistor produced by applying the coating amount of 0.5 (g) g / cm ² and uniformly. As is clear from the figures (a) and (b), the high resistance layer material is spirally applied to the side surface of the sintered body,
Furthermore, the coating amount of the high resistance layer material is 0.001 to 0.1 g / cm ²
The non-linear resistor with
As a result of the voltage application life test after leaving it for a while, it is found that the voltage application life characteristics are stable and good.

It is considered that the reason why the excellent moisture resistance characteristic and the applied voltage life characteristic are obtained in this embodiment is the same as that in the first embodiment. The modification is also the same as that of the first embodiment.

[0034]

As described in detail above, in the step of forming the high resistance layer on the side surface of the sintered body containing zinc oxide as the main component, the high resistance layer material in the form of slurry or phosphoric acid is the main component,
Magnesium, or aluminum, or a slurry containing aluminum or silicon is spirally spray-coated on the side surface of a cylindrical sintered body, and the coating amount per unit area is
By setting the content to 0.0010 to 0.1 g / cm ² , it becomes possible to provide a non-linear resistor without deterioration of the non-linear characteristics and the life span of the applied voltage even when left in a high humidity atmosphere.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing a non-linear resistor.

FIG. 2 is a characteristic diagram showing a result of a moisture resistance test of the nonlinear resistor according to the first embodiment of the present invention.

FIG. 3 (a) is a characteristic diagram showing a result of a voltage application life test of a nonlinear resistor according to the first embodiment of the present invention. (B) A characteristic diagram showing a result of a voltage application life test of a non-linear resistor according to a comparative example of the first embodiment of the present invention.

FIG. 4 is a characteristic diagram showing a result of a moisture resistance test of a non-linear resistor according to a second embodiment of the present invention.

FIG. 5 (a) is a characteristic diagram showing a result of a voltage application life test of a nonlinear resistor according to a second embodiment of the present invention. (B) A characteristic diagram showing a result of a voltage application life test of a non-linear resistor according to a comparative example of the second embodiment of the present invention.

FIG. 6 is a characteristic diagram showing a result of a moisture resistance test of a non-linear resistor according to a third embodiment of the present invention.

FIG. 7 (a) is a characteristic diagram showing a result of a voltage application life test of a nonlinear resistor according to a third embodiment of the present invention. (B) A characteristic diagram showing a result of a voltage application life test of a non-linear resistor according to a comparative example of the third embodiment of the present invention.

FIG. 8 is a characteristic diagram showing a result of a moisture resistance test of a non-linear resistor according to a fourth embodiment of the present invention.

FIG. 9 (a) is a characteristic diagram showing a result of a voltage application life test of a nonlinear resistor according to a fourth embodiment of the present invention. (B) A characteristic diagram showing a result of a voltage application life test of a non-linear resistor according to a comparative example of the fourth embodiment of the present invention.

[Explanation of symbols]

 1 ... Sintered body, 2 ... High resistance layer 3 ... Electrode.

Claims (4)

[Claims] 1. A step of molding a powder containing zinc oxide as a main component into a columnar shape and baking the powder to form a varistor element, and a side surface of the varistor element for preventing creeping of the varistor element. , Apply the high resistance layer material,
In the method of manufacturing a non-linear resistor manufactured by the step of firing again to form a high resistance layer, and the step of further attaching electrodes to both end surfaces of the varistor element, the step of forming the high resistance layer comprises: A method for producing a non-linear resistor, characterized in that a high resistance layer material in the form of a slurry is spirally spray-coated on the side surface of the varistor and the coating amount per unit area is 0.001 to 0.1 g / cm ² . 2. The method for producing a non-linear resistor according to claim 1, wherein the high resistance layer material contains phosphoric acid as a main component and contains magnesium. 3. The method for manufacturing a non-linear resistor according to claim 1, wherein the high resistance layer material contains phosphoric acid as a main component and contains aluminum. 4. The method for producing a non-linear resistor according to claim 1, wherein the high resistance layer material contains phosphoric acid as a main component and contains aluminum and silicon.