JPH09314848A - Ink jet head bonding apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten a production tact and to enhance aligning accuracy by providing an imaging means having a double-focus optical system taking the image of a reference hole for detecting the positions of two members arranged in a spaced apart state and having difference in level and taking the image of the first member at a first focal point and the image of the second member at a second focal point. SOLUTION: When the position of a drive unit 2 and that of a nozzle plate 3 are detected, a transparent member 52 is set to a retracted position and the first focus of a camera is aligned with the reference hole 12 for detecting the position of the nozzle plate 3 to take the image of the reference hole 12 and, next, the transparent member 52 is moved to be inserted in a light path and the second focus of the camera is aligned with the reference hole 11 for detecting the position of the drive unit 2 to take the image thereof to measure the respective positions. On the basis of these measured results, the correction quantity of the drive unit 2 is operated from the quantity of deviation and it is judged whether correction is necessary and, if correction is necessary, the position of the drive unit 2 is corrected based on the correction quantity. By this constitution, the drive unit and the nozzle plate can be bonded with high positional accuracy and an aligning process can be simplified.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head joining device, and more particularly, it detects a position detecting reference hole provided in each of two members forming an ink jet head, and joins the two members based on the detection result. The present invention relates to an inkjet head joining device.

[0002]

2. Description of the Related Art An ink jet recording apparatus, such as a printer, a facsimile, or a copier, which records an image using an ink jet head, includes a plurality of nozzles for discharging ink droplets, and an electromechanical transducer provided for each nozzle. Using an inkjet head equipped with an actuator such as a heater or a heating resistor as a printhead, ink droplets are ejected from nozzles in response to print signals on a print medium (one to which ink drops adhere)
In this way, high-speed, high-density, and high-quality recording is performed by ejecting ink.

Although various types of ink jet heads are known, for example, a plurality of piezoelectric elements are provided on a substrate and a displacement portion of a diaphragm is joined to the piezoelectric elements.
A liquid chamber forming member for forming a liquid chamber corresponding to the displacement portion is provided on the diaphragm, and a nozzle plate (nozzle plate) having a nozzle opposed to the displacement portion of the diaphragm is formed on the liquid chamber forming member. In some cases, the piezoelectric element is driven to pressurize ink in a liquid chamber via a vibration plate, and eject ink droplets from nozzles of a nozzle plate. In addition, a plurality of piezoelectric elements and pillar portions that are liquid chamber partition walls are alternately arranged on the substrate, and a nozzle plate having nozzles facing the piezoelectric elements is joined to the pillar portions so that they are opposed by displacement of the piezoelectric elements. There is also a device in which ink droplets are ejected from a nozzle that does.

[0004]

In the ink jet head as described above, in order to perform high density and high quality recording, the accuracy of each head component must be increased, and the nozzle plate, the vibration plate, the piezoelectric plate, and the like. Assembling accuracy (positional accuracy of parts, that is, bonding accuracy) when joining and assembling each component such as an element must be increased.

In particular, even in the assembly, the positional accuracy of the nozzle of the nozzle plate and the displacement portion of the diaphragm, the positional accuracy of the displacement portion of the diaphragm and the piezoelectric element, and the positional accuracy of the nozzle of the nozzle plate and the piezoelectric element are high. Otherwise, the displacement of the piezoelectric element is not efficiently transmitted from the vibration plate to the liquid chamber and the ink ejection efficiency is reduced, or when a plurality of piezoelectric elements are driven simultaneously, mutual interference occurs and the ejection speed is increased. However, there is a problem such as deterioration of image quality.

Therefore, when an ink jet head joining apparatus for automatically joining the two members constituting the ink jet head as described above is to be constructed, the time required for joining is shortened and the production tact is shortened. At the same time, it is required to improve the alignment accuracy of the two members.

The present invention has been made in view of the above points, and it is an object of the present invention to provide an ink jet head joining apparatus capable of shortening the production tact and improving the alignment accuracy.

[0008]

In order to solve the above problems, an ink jet head joining device according to a first aspect of the present invention detects a reference hole for position detection provided in each of two members forming an ink jet head, and detects this. In the ink jet head joining device for joining the two members based on the result, one image pickup means having a double focus optical system for picking up images of the reference holes for position detection of the two members which are arranged apart from each other and have a step. Is provided, and one of the two members is imaged at the first focus of the imaging means, and the other member is imaged at the second focus.

According to another aspect of the present invention, there is provided an ink jet head joining apparatus for detecting a position detecting reference hole provided in each of two members constituting an ink jet head, and joining the two members based on the detection result. In the apparatus, there is provided one image pickup means having an optical system capable of simultaneously picking up the position detection reference holes of the two members which are arranged apart from each other and have a step.

According to a third aspect of the present invention, there is provided an ink jet head joining device according to the second aspect, wherein the optical system of the image pickup means is an optical system having a deep depth of focus.

According to another aspect of the present invention, there is provided an ink jet head joining apparatus for detecting a position detecting reference hole provided in each of two members constituting an ink jet head and joining the two members based on the detection result. In the apparatus, an image pickup means for picking up an image of the reference hole for position detection of the two members is provided, and a joining error amount of the two members is calculated based on an image pickup result of the image pickup means after joining the two members. Then, an inspection means is provided to judge whether the bonding state is good or bad based on the calculation result.

According to another aspect of the present invention, there is provided an ink jet head joining apparatus for detecting a position detecting reference hole provided in each of two members constituting an ink jet head and joining the two members based on the detection result. In the apparatus, an image pickup means for picking up an image of the reference hole for position detection of the two members is provided, and a joining error amount of the two members is calculated based on an image pickup result of the image pickup means after joining the two members. Then, there is provided means for correcting the initial offset amount used in the correction amount calculation for correcting the position of the other member of the two members based on the calculation result.

According to another aspect of the present invention, there is provided an ink jet head joining apparatus for detecting a position detecting reference hole provided in each of two members constituting an ink jet head and joining the two members based on the detection result. The apparatus is provided with an image pickup means for picking up an image of the reference hole for position detection of the two members, and based on the image pickup result of the image pickup means, the correction amount of the virtual joint point of the other member with respect to the virtual joint point of the other member is obtained. A means for joining the two members is provided, which is calculated and the virtual joining point corrected by the calculation result is used as a reference.

According to another aspect of the present invention, there is provided an ink jet head joining apparatus for detecting a position detecting reference hole provided in each of two members constituting an ink jet head, and joining the two members based on the detection result. The apparatus is provided with an image pickup means for picking up the position detecting reference holes of the two members, and a light source for illuminating a member to be picked up by the image pickup means, and the light source is the illumination position at the time of position detection and this illumination. It is provided so as to be movable between the retracted position and the retracted position.

According to an eighth aspect of the present invention, there is provided an ink jet head joining device according to any one of the first to seventh aspects, wherein the first, second, third, fourth and fifth stations are sequentially arranged. And a transfer mechanism section that transfers and positions the other member of the two members to each station of the first station,
The other member is suction-held, and the X-axis, Y-axis, Z-axis and θ
A position detection camera that captures an image of the other member held by the support mechanism section; and a second mechanism that includes a support mechanism section that has a movement mechanism section that moves about the axis.
Means for sending to the moving mechanism section of the supporting mechanism section a command necessary for aligning with the screen mask arranged in the third station based on the detection result of the position detecting camera, The third station is provided with an adhesive application device that superimposes the transferred other member and the screen mask and applies an adhesive to a predetermined position of the other member, and the fourth station is provided with the second device. Holding means for attracting and holding one of the members,
The holding mechanism is configured to include a moving mechanism unit that reciprocates between the holding unit and the fifth station that mounts the one member, and the unit according to any one of claims 1 to 7.

An ink jet head joining apparatus according to a ninth aspect is the ink jet head joining apparatus according to any one of the above first to eighth aspects, wherein one of the two members is a nozzle plate having a nozzle formed thereon, and the other is the other. The member is a substrate to which a piezoelectric element is bonded or a vibrating plate that is deformed by the piezoelectric element.

According to a tenth aspect of the invention, there is provided an ink jet head joining device according to any one of the first to eighth aspects, wherein one of the two members is a nozzle plate having a nozzle and a piezoelectric element. It is a member having a vibrating plate to be deformed, and the other member is a substrate to which a piezoelectric element is bonded.

An ink jet head joining apparatus according to an eleventh aspect of the present invention is the ink jet head joining apparatus according to any one of the above first to tenth aspects, in which a dispenser system is provided in an adhesive applying apparatus for applying an adhesive for joining two members. It was a prepared structure.

[0019]

Embodiments of the present invention will be described below with reference to the accompanying drawings. First, an example of an inkjet head that is bonded by the inkjet head bonding apparatus according to the present invention will be described with reference to FIGS. 1 to 4. FIG.
Is a schematic explanatory view of the inkjet head, FIG. 2 is a plan view of a drive unit of the head, FIG. 3 is a front view of the drive unit, and FIG. 4 is a plan view of a nozzle plate of the head.

The ink jet head 1 includes a drive unit 2 and a nozzle plate 3 joined to the drive unit 2. The drive unit 2 is shown in FIGS.
As also shown in FIG. 3, a plurality of piezoelectric elements 5 and supporting columns 6 are alternately arranged on the substrate 4, and these piezoelectric elements 5 and supporting columns 6 are bonded to the substrate 4 with a predetermined interval. There is. Further, as shown in FIG. 4, the nozzle plate 3 is formed with a plurality of nozzles 7 for ejecting ink droplets. Then, the nozzle plate 3 is adhesively bonded to the upper surface of each of the supporting columns 6 of the drive unit 2 via the adhesive 8 with high accuracy. A liquid chamber 9 is formed around the piezoelectric element 5 and the column 6 by a partition member (not shown), and ink droplets are ejected from the nozzle 7 of the nozzle plate 3 by selectively driving the piezoelectric element 5. To be done.

Here, the position detection reference holes 11 are formed in the substrate 4 of the drive unit 2 at three locations excluding the corners of the four corners, while the position detection reference holes 11 of the substrate 4 are also formed in the nozzle plate 3. A reference hole 12 for position detection is formed at a position corresponding to. Reference position 1 for position detection of this nozzle plate 3
2 has a larger diameter than the reference hole 11 for position detection of the substrate 4. Further, the reference hole 1 for position detection of the nozzle plate 3
2 and the position detecting reference hole 11 of the substrate 4 are formed at concentric positions when joined, but for detecting the position of the nozzle plate 3 when an image is taken from above by a camera (imaging means) as described later. It suffices if the reference hole 12 and the reference hole 11 for detecting the position of the substrate 4 are arranged at positions where they can be detected.

Then, the ink jet head joining apparatus according to the present invention will be described with reference to FIG. FIG.
Is a front view showing the entire configuration of the joining apparatus, and FIG. 6 is A of FIG.
-A sectional view taken along the line A, and FIG. 7 is a sectional view taken along the line BB in FIG.

In this ink jet head joining device, the base 2 is mounted on a frame 21 having a rigid welded structure.
2 is placed, and a slide rail 23 is laid on the base 22. Then, on the base 22, the first station S1, the second station S2, the third station S
The third, fourth station S4, and fifth station S5 are sequentially arranged, and the drive unit 2, which is the other member of the inkjet head 1 to be joined, is connected to the first, second, third, and fourth stations S1 to S1. A transfer mechanism unit (not shown) for sequentially transferring to S4 is provided.

Here, the first station S1 is a station on which the drive unit 2 of the ink jet head 1 to be joined is mounted, and is provided with a table 24 on which the drive unit 2 is mounted. The table 24 is supported on the slide rail 23 via a support mechanism portion 25, and is also connected to a vacuum source (not shown) to suck and hold the mounted drive unit 2. The support mechanism unit 25 has a movable base 26 slidably mounted on the slide rail 23 in one direction (Y direction), and the Z-axis movement mechanism unit 2 is mounted on the movable base 26.
7, an X-axis moving mechanism 28 is supported on the Z-axis moving mechanism 27, and a θ-axis moving mechanism 29 is supported on the X-axis moving mechanism 28. The table 24 is mounted on the portion 29.

The second station S2 has a table 2 supported by a support mechanism 25 by a transfer mechanism (not shown).
4 is a station that performs position detection and position adjustment of the drive unit 2 transferred from the first station S1 together with the position detection camera 31 and includes a position detection camera 31 that images the position detection reference hole 11 formed in the substrate 4 of the drive unit 2. ing.
The position detecting camera 31 is provided on the substrate 4 of the drive unit 2.
An optical system having three fields of view capable of capturing images of the plurality of reference holes 11 for position detection formed in the above is used.

Then, in this second station S2,
Image processing is performed on the image pickup result by the position detection camera 31 to detect and measure the position of the drive unit 2, and the support mechanism unit 25 is driven based on the measurement result and the position information of the screen mask 33 of the third station S3 described later. By controlling, the support 6 of the drive unit 2 and the screen mask 33 of the third station S3 are aligned with each other.

That is, in this joining apparatus, since the adhesive 8 is applied on the support 6 of the drive unit 2 by the screen printing method to join the nozzle plate 3, the adhesive 8 must be applied on the support 6. I have to. Therefore, the third
It is necessary to match the screen mask 33 provided at a predetermined position of the station S3 with the support 6 of the drive unit 2. Here, since the screen mask 33 is set in advance on the mask support plate 34 in a predetermined posture, the position of the drive unit 2 is detected and determined, the shift amount from the screen mask 33 is calculated, and the calculated shift amount is set to the calculated shift amount. Accordingly, the drive unit 2 on the table 24 is matched with the screen mask 33 by drivingly controlling the movable table 26 of the support mechanism unit 25 and the Z-axis, X-axis, and θ-axis moving mechanism units 27, 28, and 29. Accurately adjust to position.

The third station S3 is a station for applying the adhesive 8 to the drive unit 2 as described above. That is, the drive unit 2 and the screen mask 33
Are overlapped with each other, and the adhesive 8 is applied by screen printing to the upper surface of the pillar 6 of the drive unit 2 by the screen-printing adhesive applying device 35 placed on the base 22. The screen printing type adhesive application device 35 is provided with a dispenser system so that the adhesive 8 can be automatically supplied, thereby shortening the operation time.

The fourth station S4 and the fifth station S5 are connected via a slide rail 37 of the nozzle plate moving mechanism 36. The nozzle plate moving mechanism portion 36 is provided on the base 22 and is provided with a holding means 38 made of a transparent member slidably supported on a slide rail 37. The holding means 38 is provided in the fourth station S.
4 and 5th station S5 is reciprocated. The nozzle plate moving mechanism 36 includes a motor 39, a ball screw 40 and a slide rail 37. The holding means 38 holds the nozzle plate 3 by suction and is connected to a vacuum source (not shown).

The fourth station S4 is transferred from the drive unit 2 transferred from the third station S3 and the fifth station S5 which is a station mounting the nozzle plate 3 which is one of the members constituting the ink jet head 1. In the state where the nozzle plate 3 and the nozzle plate 3 are overlapped with each other, a position detection camera 41 that is an image pickup unit that takes an image of the position detection reference hole 11 of the substrate 4 of the drive unit 2 and the position detection reference hole 12 of the nozzle plate 3 is provided. Image processing is performed on the image pickup result of the position detection camera 41 to detect the respective positions of the drive unit 2 and the nozzle plate 3, and the drive unit 2 is accurately adjusted to a position that matches the nozzle plate 3, and the drive unit 2 And the nozzle plate 3 are joined together.

The position detecting camera 41 is provided with an optical system of three fields of view capable of simultaneously picking up a plurality of position detecting reference holes 11 and 12 formed in the substrate 4 of the drive unit 2 and the nozzle plate 3. A bifocal optical system is used as the optical system. Details of the optical system of the position detection camera 41 and the position detection of the object to be imaged will be described later.

The fourth station S4 is provided with a light source 42 which irradiates the image pickup members when the positions of the drive unit 2 and the nozzle plate 3 which are the image pickup members are detected. Illumination support plate 4 on which this light source 42 is placed
3 can be moved by a slide cylinder 44 mounted on an angle 45 supported on the frame 21.

The light source 42 is the third station S.
When the drive unit 2 is transferred from the drive unit 3, the slide unit 44 moves the drive unit 2 to the retracted position retracted from the transfer path, and at the time of imaging for detecting the position of the drive unit 2 and the nozzle plate 3. In addition, it is moved to a predetermined position (position for illuminating the imaged object). Also,
The light source 42 also moves to the retracted position when the nozzle plate 3 is joined to the drive unit 2. By doing so, it is possible to prevent interference between the light source 42 and the driving unit 2 that is transferred.

Here, the joining process by this ink jet head joining apparatus will be described with reference to FIG. First, the drive unit 2 (indicated by "PZT" in the drawing) is suction-held on the table 24 of the first station S1, and then the table 24 is transferred to the second station S2 by a transfer mechanism unit (not shown). Then, the position detection camera 31 images the position detection reference hole 11 of the substrate 4 of the drive unit 2 to detect and measure the position of the drive unit 2, and then the measurement result and the third station S3.
Based on the position information of the screen mask 33, it is determined whether or not the current position of the drive unit 2 (support portion 6) matches the position of the screen mask 33.

At this time, if the position of the drive unit 2 does not match the position of the screen mask 33, the position correction amount of the drive unit 2 is calculated based on the measurement result and the position information of the screen mask 33, In accordance with the result of this calculation, the movable base 26 of the support mechanism unit 25 and the Z-axis, X-axis, and θ-axis moving mechanism units 27, 28, 29 are drive-controlled to adjust the position of the drive unit 2, and the drive unit 2 is again adjusted. Substrate 4 of 2
The position detection reference hole 11 is imaged by the camera 31 and the position of the drive unit 2 is measured.

When the alignment between the drive unit 2 and the screen mask 33 is completed, the drive unit 2
Is transferred to the third station S3, and the adhesive 8 is applied to the upper surface of the pillar portion 6 of the drive unit 2, and then the drive unit 2 is transferred to the fourth station S4.

On the other hand, in the fifth station S5, the nozzle plate 3 is sucked and held by the nozzle plate moving mechanism section 36, and the nozzle plate 3 is transferred to the fourth station S4.

Therefore, in the fourth station S4, the position detecting camera 41 is used to image the position detecting reference hole 11 and the position detecting reference hole 12 of the nozzle plate 3 in the substrate 4 of the drive unit 2 as described later. An image is taken without moving the drive unit 2 and the nozzle plate 3, which are the objects, the positions of the drive unit 2 and the nozzle plate 3 are detected and measured based on the image pickup result, and the amount of deviation (deviation amount) between the two is calculated. Then, it is determined whether the calculated deviation amount between the two is within a predetermined allowable range.

At this time, if the deviation amount between the drive unit 2 and the nozzle plate 3 is not within the allowable range, the calculated deviation amount is used as the position correction amount of the drive unit 2 and the support mechanism portion 25 is moved according to the correction amount. The position of the drive unit 2 is adjusted by driving and controlling the platform 26 and the Z-axis, X-axis, and θ-axis moving mechanism units 27, 28, and 29, and the substrate 4 of the drive unit 2 is again adjusted.
The position detection reference hole 11 and the position detection reference hole 12 of the nozzle plate 3 are imaged by the position detection camera 41, and the positions of the drive unit 2 and the nozzle plate 3 are detected and measured based on the imaging result. The process of calculating the deviation amount of is repeated.

When the deviation amount between the drive unit 2 and the nozzle plate 3 is within the allowable range, the Z-axis moving mechanism 27 is drive-controlled to raise the Z-axis, and the drive unit 2 is raised to drive. Prop 6 of unit 2
And the nozzle plate 3 are joined.

As described above, this joining apparatus transfers and positions the first, second, third, fourth and fifth stations sequentially arranged and the other member of the two members to each of these stations. The first station is provided with a transfer mechanism section, and the first station is provided with a support mechanism section having a moving mechanism section that holds the other member by suction and moves the other member around the X axis, the Y axis, the Z axis, and the θ axis. Necessary for aligning the position detection camera that captures the image of the other member held by the support mechanism unit with the screen mask provided in the third station based on the detection result of the position detection camera. And a means for sending a command to the moving mechanism part of the support mechanism part, and the third station superimposes the transferred other member and the screen mask and applies the adhesive to a predetermined position of the other member. The fourth station is provided with a coating device, and the fourth station is a moving mechanism that reciprocates between a holding unit that sucks and holds one member of the second member and a fifth station that mounts the one member. The inkjet head 1 is configured by including a portion and a means for imaging the position detection reference holes of the two members and adjusting the position of the other member based on the imaging result and joining them. The drive unit 2 and the nozzle plate 3 can be automatically joined with high precision.

Here, joining of the drive unit 2 and the nozzle plate 3 performed in the fourth station S4 will be described. If the pitches of the position detecting reference holes 11 and 12 of the drive unit 2 or the nozzle plate 3 are not equal due to a component processing error or the like, alignment is performed with reference to the position detecting reference hole on one side. Then, the processing error directly becomes the assembly error. Therefore, in addition to the position detection reference hole, a virtual joint point is set from the position measurement result of the position detection reference hole, a correction amount is calculated with the virtual joint point as a reference, and the position of the drive unit 2 is corrected. Go and join.

As described above, the image pickup means for detecting the reference hole for position detection of the two members is provided, and based on the image pickup result of the image pickup means, the virtual joint point of one member is compared with the virtual joint point of the other member. By calculating the correction amount and joining the two members based on the virtual joining point corrected by the calculation result, the processing error can be canceled and the joining can be performed with higher accuracy.

Next, the optical system of the position detection camera 41 for detecting the positions of the drive unit 2 and the nozzle plate 3 in the fourth station S4 and the position detection and position adjustment operation will be described with reference to FIGS. Explain. As described above, since the substrate 4 having the position detecting reference holes 11 of the drive unit 2 transferred to the fourth station S4 and the nozzle plate 3 having the position detecting reference holes 12 are arranged apart from each other. The position detection reference hole 11 and the position detection reference hole 12 are located apart from each other and have a step.

Therefore, the position detecting camera 41 is provided with the position detecting reference hole 11 and the position detecting reference hole 12 which are arranged so as to be separated from each other and have a step without moving the object to be imaged. A dual focus optical system is provided for imaging. In order to detect the two reference holes 11 for position detection, which are simply separated from each other, a bidirectional lens is used for one camera or two cameras are used for each. A method of fixing the lens to a common jig and using it is conceivable, but either method may be used.

On the other hand, a double focus optical system used for imaging the position detecting reference holes 11 and 12 which are separated and have a step difference will be described with reference to FIGS. 9 and 10. As shown in FIG. Normally, there is light that has passed through the objective lens 1 1
The point becomes the focus (this is referred to as "focus O1"). If a transparent member 52 (thickness d, refractive index n, see FIG. 10) having a refractive index different from that of air is inserted in the middle of this optical path, the light is refracted by this transparent member 52, so that the focal position shifts by the focal length difference Δχ. To the focal point O2. The refractive index n is as shown in FIG.
When the incident angle is θ1 and the refraction angle is θ2 at 0, sin θ
It is represented by 1 / sin θ2, and the difference in focal length Δχ is d (1
It is calculated as −1 / n).

Therefore, the transparent member 52 is disposed in the optical path between the position detecting camera 41 and the nozzle plate 3 so as to be movable between the position interposed in the optical path by the moving means and the position retracted from the optical path. . At this time, the first focus (the above-mentioned focus O1 of the two focus of the position detection camera 41)
Is equivalent to ) Is aligned with the position detection reference hole 12 of the nozzle plate 3 and the focus of the position detection camera 41 is shifted by Δχ by inserting the transparent member 52.
It moves to a focal point (corresponding to the above-mentioned focal point O2), and this second focal point moves to the reference hole 1 for position detection of the substrate 4 of the drive unit 2.
Matches 2. That is, as the transparent member 52, a member having a thickness d and a refractive index n that can obtain such a focal length difference Δχ is used.

Therefore, when the positions of the drive unit 2 and the nozzle plate 3 are to be detected, as shown in FIG.
The transparent member 52 is set to the retracted position, the first focus of the position detection camera 41 is aligned with the position detection reference hole 12 of the nozzle plate 3, and an image is taken, and the position of the nozzle plate 3 is measured based on this imaging result. To do. Then, the transparent member 52
Is moved and inserted into the optical path, the second focus of the position detection camera 41 is aligned with the reference hole 11 for position detection of the drive unit 2 and an image is taken, and the position of the drive unit 2 is measured based on this imaging result. . Then, based on these measurement results, the correction amount of the drive unit 2 is calculated from the deviation amount, it is determined whether or not the correction is necessary, and if the correction is necessary, the support mechanism section 25 is moved based on the correction amount. Drive control is performed to correct (adjust) the position of the drive unit 2.

One image pickup means having a double focus optical system for picking up an image of the reference hole for position detection of the two members which are arranged apart from each other and have a step is provided, and the first focus of this image pickup means is provided. By picking up one of the two members and picking up the other member at the second focus, it is possible to detect without operating the imaging system and the imaged system. Therefore, highly accurate position detection is possible. Therefore, the drive unit and the nozzle plate can be joined with high positional accuracy. Further, since the position can be detected without performing the Z-axis movement, the alignment process can be simplified and the production tact can be shortened.

That is, when the optical system of the position detecting camera cannot simultaneously image the stepped position detecting reference hole of the drive unit and the nozzle plate, after the image of the nozzle plate is taken, the drive unit of the drive unit is imaged. In order to perform imaging, the drive unit has to be moved to the focal position of the position detection camera by the Z-axis moving mechanism section, so an error is likely to occur. Since there is no movement of, the error is less likely to occur.

Next, one of the optical systems capable of simultaneously detecting the position detecting reference hole 11 of the substrate 4 and the position detecting reference hole 12 of the nozzle plate 3 of the drive unit 2 which are arranged apart from each other and have a step. An optical system having a deep depth of focus will be described. Here, the optical system having a deep depth of focus means that the focus has a certain width centered on the just focus point, and that the focus is wide. That is, the width at which the focus is adjusted is the reference hole 11 for position detection of the drive unit 2 and the reference hole 1 for position detection of the nozzle plate 3.
It is larger than the step difference between the drive unit 2 and the nozzle plate 3 and can detect (measure) the reference holes 11 and 12 for position detection at the same time. At this time, as the setting of the optical system, it is preferable to set the just focus position at the center between the substrate 4 of the drive unit 2 and the position detection reference holes 11 and 12 of the nozzle plate 3.

Therefore, when detecting the positions of the drive unit 2 and the nozzle plate 3, as shown in FIG.
As shown in FIG. 12, the position detection reference hole 12 of the nozzle plate 3 and the position detection reference hole 11 of the substrate 4 of the drive unit 2 are simultaneously imaged by the position detection camera 41, and the drive unit 2 is obtained from the imaging result. And the position of the nozzle plate 3 is detected and measured. Then, based on these measurement results, the correction amount of the drive unit 2 is calculated from the deviation amount, it is determined whether or not the correction is necessary, and if the correction is necessary, the support mechanism section 25 is moved based on the correction amount. Drive control is performed to correct (adjust) the position of the drive unit 2.

As described above, by providing one image pickup means, for example, an image pickup means having a deep depth of focus, which has an optical system capable of simultaneously picking up the position detecting reference holes of the two members which are spaced apart and have a step. Since the detection can be performed without operating the imaging system and the imaged system, highly accurate position detection can be performed, and the drive unit and the nozzle plate can be joined with high position accuracy, and Z Since the position can be detected without moving the axis, the alignment process can be simplified and the production tact can be shortened. In particular, when using this optical system with a deep depth of focus, it is not necessary to change the depth of focus, and it is possible to obtain the positional information of the drive unit and the nozzle plate with a single image pickup, and the alignment process is further improved. It becomes easier and the production tact can be shortened.

FIG. 13 shows another embodiment of the present invention.
This will be described with reference to FIG. When the drive unit 2 is moved to align the drive unit 2 and the nozzle plate 3, there is an error or the like due to the displacement of the drive unit 2 due to the Z-axis movement. Therefore, this is preset as the initial offset amount. The initial offset amount is taken into consideration when the correction amount of the position of the drive unit 2 is calculated. However, the error due to the displacement of the drive unit 2 due to this Z-axis movement may vary,
Since the displacement component generated when the nozzle plate 3 and the nozzle plate 3 are joined is not always constant, the alignment accuracy between the drive unit 2 and the nozzle plate 3 may vary even if the initial offset amount is a constant value.

Therefore, in this embodiment, after the initial offset amount is set, the position detection reference holes 11 and 12 of the drive unit 2 and the nozzle plate 3 before joining are imaged by the position detection camera 41. As described above, the positions of the drive unit 2 and the nozzle plate 3 are measured, and a correction amount obtained by adding an initial offset amount as a position correction amount of the drive unit 2 is calculated based on these measurement results. After the position of the drive unit 2 is adjusted based on the correction amount, the Z axis is raised to join the drive unit 2 and the nozzle plate 3 together.

After that, the position detection reference holes 11 and 12 of the drive unit 2 and the nozzle plate 3 after joining are imaged again by the position detection camera 41, and the drive unit 2 and the nozzle plate are imaged based on the imaged results. 3 and the position of the drive unit 2 and the nozzle plate 3 in the state after joining (deviation amount = joining error amount) is calculated based on the measurement result.

Then, it is judged whether or not the calculated bonding error amount (deviation amount) is within a predetermined allowable range, and a judgment inspection is performed as to whether the bonding component is a good product or a defective product, and the bonding error amount is within the allowable range. If not, a process of treating the joined component as a defective product is performed. If the joining error amount of the joining component is within the allowable range, the initial offset amount is automatically changed (corrected) according to the calculation result.

As described above, the joining error amount of the two members is calculated based on the image pickup result of the image pickup means after the two members are joined, and the joining state is determined based on the calculation result. The bonding state can be inspected immediately without using another inspection machine, the cost of the entire bonding apparatus can be reduced, and the production tact can be shortened.

Further, the joining error amount of the two members is calculated based on the image pickup result of the image pickup means after joining the two members, and the initial offset amount of the two members is corrected based on the calculated joining error amount. By (correcting),
This can be reflected in the joining from the next time, and the alignment including the error component due to the Z-axis movement and the displacement component at the joining can be performed, and the two members can be joined with higher accuracy.

In the above embodiment, the two members joined by the ink jet head joining device according to the present invention are the nozzle plate having the nozzles and the driving unit (the substrate to which the piezoelectric element is joined). ,
Since some inkjet heads use a diaphragm that is deformed by a piezoelectric element as described above, the inkjet head can also be applied to joining a nozzle plate and a diaphragm.

Further, as the ink jet head, an actuator unit in which piezoelectric elements and supporting columns are alternately arranged in advance on a substrate, a nozzle plate, a liquid chamber flow path forming member for forming a liquid chamber, and a vibrating plate are integrated. There is also a unit that processes and assembles the liquid chamber unit in a separate process and joins these units, and can be applied to the joining of such an actuator unit and the liquid chamber unit.

[0062]

As described above, according to the ink jet head joining device of the first aspect, the position detecting reference holes provided in each of the two members constituting the ink jet head are detected, and based on this detection result. In an inkjet head joining apparatus for joining two members, one image pickup unit having a double focus optical system for picking up images of position detection reference holes of two members which are arranged apart from each other is provided, and the image pickup unit is provided. Since one of the two members is imaged at the first focus and the other member is imaged at the second focus, the detection can be performed without operating the imaging system and the imaged system. Since the position detection can be performed with high accuracy and the joining accuracy of the two members can be improved, and the position can be detected without performing the Z-axis movement, the alignment process can be simplified. It is possible to shorten the production tact.

According to the ink jet head joining device of the second aspect, the ink jet head that detects the position detecting reference holes respectively provided in the two members constituting the ink jet head and joins the two members based on the detection result. In the joining device, since one image pickup means having an optical system capable of simultaneously picking up the position detection reference holes of two members which are arranged apart from each other and has a step is provided, the image pickup system and the image pickup system are operated. Can be detected without
Since highly accurate position detection can be performed, the joining accuracy of two members can be improved, and the position can be detected without performing Z-axis movement, the alignment process can be simplified and the production tact can be shortened. .

According to the ink jet head joining apparatus of the third aspect, in the ink jet head joining apparatus of the second aspect, the optical system of the image pickup means is composed of an optical system having a deep depth of focus. The position can be detected without operating the system, the position can be detected with high accuracy, the joining accuracy of the two members can be improved, and the position can be detected without moving the Z axis. The production process can be shortened by simplifying the process, and in particular, it is not necessary to change the depth of focus and the positional information of the two members can be obtained by one imaging, and the alignment process becomes easier. Therefore, the production takt time can be further shortened.

According to the ink jet head joining apparatus of the fourth aspect, the ink jet head joining the two members based on the detection result of the position detecting reference holes provided in each of the two members constituting the ink jet head is detected. In the joining device, an image pickup means for picking up the position detection reference holes of the two members is provided, and the joining error amount of the two members is calculated based on the image pickup result of the image pickup means after joining the two members. Since the inspection means for judging the good / bad state of the joining state based on the calculation result is provided, the two members can be inspected after the joining without requiring a special inspection machine, and the production tact is improved and the cost is improved. Becomes cheaper.

According to the ink jet head joining device of the fifth aspect, the ink jet head joining the two members, which detects the position detecting reference holes respectively provided in the two members constituting the ink jet head, and joins the two members based on the detection result. In the joining device, an image pickup means for picking up the position detection reference holes of the two members is provided, and the joining error amount of the two members is calculated based on the image pickup result of the image pickup means after joining the two members. Since the means for correcting the initial offset amount used in the correction amount calculation for correcting the position of the other member of the two members based on the calculation result is provided, an error due to the movement of the other member at the time of bonding and the bonding The position adjustment can be performed according to the time shift component, and the joining accuracy is improved.

According to the sixth aspect of the present invention, there is provided an ink jet head which detects the position detecting reference holes respectively provided in the two members constituting the ink jet head and joins the two members based on the detection result. The joining apparatus is provided with an image pickup means for picking up the image of the reference hole for position detection of the two members, and based on the image pickup result of the image pickup means, the correction amount of the virtual joint point of the other member with respect to the virtual joint point of the other member is calculated. Since the means for joining the two members based on the virtual joining point calculated by the calculation result and corrected by the calculation result is provided, it is possible to absorb the machining error of the parts and perform the joining with higher accuracy.

According to the ink-jet head joining apparatus of the seventh aspect, the ink-jet head for joining the two members is detected based on the detection result of the position detecting reference holes provided in each of the two members constituting the ink-jet head. In the joining device, an image pickup means for picking up the position detection reference holes of the two members and a light source for illuminating the imaged member picked up by the image pickup means are provided, and the light source is the illumination position at the time of position detection and this illumination. Since it is provided so as to be movable between the retracted position and the retracted position, the imaging accuracy can be improved while preventing the interference due to the transfer.

According to the eighth aspect of the invention, there is provided the ink jet head joining apparatus according to any one of the first to seventh aspects, wherein the first, second, third, fourth and fifth stations are sequentially arranged. And a transfer mechanism section for transferring and positioning the other member of the two members to each of these stations, and the first station holds the other member by suction and holds the X-axis, Y-axis, Z-axis, and θ-axis. A supporting mechanism section having a moving mechanism section for moving around,
The second station aligns the position detecting camera that captures the image of the other member held by the support mechanism with the screen mask arranged in the third station based on the detection result of the position detecting camera. And a means for sending to the moving mechanism part of the support mechanism part a command necessary to do so, the third station superimposes the transferred other member and the screen mask, and applies the adhesive to a predetermined position of the other member. And a holding means for sucking and holding one of the second members, and a fourth station.
8. A moving mechanism section for reciprocating the holding means between the fifth station mounting one member and the fifth station, and
Since any one of the above means is provided, the two members constituting the inkjet head can be automatically joined with high accuracy, and the production efficiency of the inkjet head is improved.

According to the ink jet head joining apparatus of the ninth aspect, in the ink jet head joining apparatus of any one of the first to eighth aspects, one of the two members is a nozzle plate having a nozzle formed thereon, Since the other member is the substrate to which the piezoelectric element is bonded or the diaphragm that is deformed by the piezoelectric element, the nozzle plate and the drive unit including the substrate to which the piezoelectric element is bonded can be bonded with high accuracy. .

According to the ink jet head joining apparatus of the tenth aspect, in the ink jet head joining apparatus of any one of the first to eighth aspects, one of the two members has a nozzle plate and a piezoelectric element. Since it is a member having a vibrating plate that is deformed in step 1, and the other member is a substrate to which a piezoelectric element is bonded, it is possible to assemble an inkjet head including a drive unit and a liquid chamber unit with high accuracy.

According to the ink jet head joining apparatus of the eleventh aspect, in the ink jet head joining apparatus of any one of the first to tenth aspects, the dispenser is provided in the adhesive agent applying apparatus for applying the adhesive agent for joining the two members. Since the system is configured, adhesive can be automatically applied and the production tact can be shortened.

[Brief description of drawings]

FIG. 1 is a schematic explanatory view of an inkjet head.

FIG. 2 is a plan view of a drive unit of the head.

FIG. 3 is a front view of the drive unit.

FIG. 4 is a plan view of a nozzle plate of the same head.

FIG. 5 is a front view showing the overall configuration of an inkjet head joining device according to the present invention.

FIG. 6 is a sectional view taken along the line AA in FIG.

FIG. 7 is a sectional view taken along the line BB of FIG.

FIG. 8 is a flowchart illustrating a joining process by the joining device.

FIG. 9 is an explanatory diagram for explaining a bifocal optical system.

FIG. 10 is an explanatory view of a transparent member which is also used for explaining a bifocal optical system.

FIG. 11 is a flowchart for explaining position detection and position adjustment using a position detection camera also having a bifocal optical system.

FIG. 12 is a flowchart for explaining position detection and position adjustment using a position detection camera having an optical system with a deep depth of focus.

FIG. 13 is a flowchart for explaining another embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Inkjet head, 2 ... Drive unit, 3 ... Nozzle plate, 4 ... Substrate, 11, 12 ... Reference hole for position detection, 24 ... Table, 25 ... Support mechanism part, 26 ... Movable stand, 27 ... X-axis moving mechanism Part, 28 ... Z-axis movement mechanism part, 2
9 ... θ-axis moving mechanism section, 31 ... Position detecting camera, 33 ...
Screen mask, 35 ... Adhesive coating device, 36 ... Nozzle plate moving mechanism section, 41 ... Position detection camera, 51
... objective lens, 52 ... transparent member, S1 ... first station, S2 ... second station, S3 ... third station, S4 ... fourth station, S5 ... fifth station.

Claims (11)

[Claims] 1. An inkjet head joining device for detecting a position detecting reference hole provided in each of two members constituting an inkjet head, and joining the two members based on the detection result, arranged apart from each other. Further, one image pickup means having a double focus optical system for picking up an image of the reference hole for position detection of the two members having steps is provided, and one member of the two members is imaged at the first focus of the image pickup means. Then, the inkjet head joining device is characterized in that the other member is imaged at the second focus. 2. An inkjet head joining apparatus for detecting a reference hole for position detection provided in each of two members constituting an inkjet head, and joining the two members based on the detection result, arranged apart from each other. An ink jet head joining apparatus, wherein one image pickup means having an optical system capable of simultaneously picking up the position detection reference holes of the two members having steps is provided. 3. The ink jet head joining device according to claim 2, wherein the optical system of the image pickup means is an optical system having a deep focal depth. 4. An inkjet head joining apparatus for detecting a position detecting reference hole provided in each of two members constituting an inkjet head, and joining the two members based on the detection result. An image pickup means for picking up an image of the reference hole for position detection is provided, and a joining error amount of the two members is calculated based on an image pickup result of the image pickup means after joining the two members, and based on the calculation result. An inkjet head bonding apparatus comprising an inspection means for judging whether the bonding state is good or bad. 5. An ink jet head joining apparatus for detecting a position detecting reference hole provided in each of two members constituting an ink jet head, and joining the two members based on the detection result. An image pickup means for picking up an image of the reference hole for position detection is provided, and a joining error amount of the two members is calculated based on an image pickup result of the image pickup means after joining the two members, and based on the calculation result. An ink jet head joining apparatus comprising means for correcting an initial offset amount used for a correction amount calculation for correcting the position of the other member of the two members. 6. An ink jet head joining apparatus for detecting a position detecting reference hole provided in each of two members constituting an ink jet head, and joining the two members based on the detection result. An image pickup unit for picking up the reference hole for position detection is provided, and the correction amount of the virtual joint point of the other member with respect to the virtual joint point of one member is calculated based on the image pickup result of this image pickup unit, and is corrected by this calculation result. An ink jet head joining apparatus comprising a means for joining the two members with the virtual joining point as a reference. 7. An inkjet head joining apparatus for detecting a position detecting reference hole provided in each of two members constituting an inkjet head, and joining the two members based on the detection result, An image pickup means for picking up an image of the reference hole for position detection and a light source for illuminating the imaged member picked up by the image pickup means are provided, and the light source has an illumination position at the time of position detection and a retract position retracted from the illumination position. An inkjet head joining device, which is provided so as to be movable between them. 8. The ink jet head joining device according to claim 1, wherein the joining device comprises:
The first station is provided with first, second, third, fourth and fifth stations which are sequentially arranged, and a transfer mechanism section which transfers and positions the other member of the two members to each of these stations. Is provided with a support mechanism section having a moving mechanism section that sucks and holds the other member and moves around the X axis, the Y axis, the Z axis, and the θ axis, and the second station is held by the support mechanism section. In addition, the support mechanism unit issues a command necessary for aligning the position detecting camera that captures the image of the other member with the screen mask disposed in the third station based on the detection result of the position detecting camera. And a means for delivering the adhesive to the predetermined position of the other member by superimposing the transferred other member and the screen mask on each other. The fourth station includes a holding means for sucking and holding one of the second members, and the fifth station for mounting the holding means on the one side of the second station. An inkjet head joining apparatus comprising: a moving mechanism section that reciprocates by means of; and the means according to any one of claims 1 to 7. 9. The inkjet head bonding apparatus according to claim 1, wherein one of the two members is a nozzle plate having a nozzle, and the other member is a piezoelectric element. Inkjet head joining device, which is a vibrating plate which is deformed by the above substrate or piezoelectric element. 10. The inkjet head bonding apparatus according to claim 1, wherein one of the two members has a nozzle plate having nozzles and a vibration plate that is deformed by a piezoelectric element. A member,
An inkjet head joining apparatus, wherein the other member is a substrate to which a piezoelectric element is joined. 11. The ink jet head joining device according to claim 1, further comprising a dispenser system in the adhesive applying device for applying an adhesive for joining the two members. Inkjet head bonding device.