JPH0769243B2 - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPH0769243B2 JPH0769243B2 JP17124888A JP17124888A JPH0769243B2 JP H0769243 B2 JPH0769243 B2 JP H0769243B2 JP 17124888 A JP17124888 A JP 17124888A JP 17124888 A JP17124888 A JP 17124888A JP H0769243 B2 JPH0769243 B2 JP H0769243B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- magnetic alloy
- amorphous magnetic
- sensor
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910001004 magnetic alloy Inorganic materials 0.000 claims description 34
- 230000005291 magnetic effect Effects 0.000 claims description 12
- 230000035699 permeability Effects 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 239000000696 magnetic material Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 229910001069 Ti alloy Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、非晶質磁性合金の応力磁気効果を用いた圧力
センサに関するものである。TECHNICAL FIELD The present invention relates to a pressure sensor using the stress magnetic effect of an amorphous magnetic alloy.
従来の技術 磁歪を有する非晶質磁性合金に応力を外部から印加する
とその透磁率が変化するという性質、いわゆる応力磁気
効果を用いた力学量のセンサが注目されている。たとえ
ばこの原理を用いた圧力センサが特願昭57−190421号、
同58−195239号公報等で提案されている。2. Description of the Related Art A mechanical quantity sensor using the so-called stress-magnetic effect, which has a property that its magnetic permeability changes when stress is applied to an amorphous magnetic alloy having magnetostriction from the outside, has been attracting attention. For example, a pressure sensor using this principle is Japanese Patent Application No. Sho 57-190421,
It is proposed in Japanese Patent Laid-Open No. 58-195239.
第４図は後者の出願における実施例の概略を示す断面図
である。11は円環状の溝が設けられた円柱状の軟磁性体
で、12は磁歪を有する非晶質磁性合金、13は前記軟磁性
体11の溝部に巻装されたコイル、14は一端を溝部底部に
接し他端を軟磁性体開口面と面位置になる非磁性リン
グ、15はこれらを収納する容器、16は非晶質磁性合金に
圧力を伝達する透孔17を有した蓋部である。FIG. 4 is a sectional view showing the outline of an embodiment in the latter application. 11 is a columnar soft magnetic material provided with an annular groove, 12 is an amorphous magnetic alloy having magnetostriction, 13 is a coil wound around the groove of the soft magnetic material 11, and 14 is a groove portion at one end. A non-magnetic ring in contact with the bottom and having the other end in a surface position with the opening surface of the soft magnetic material, 15 is a container for storing these, 16 is a lid having a through hole 17 for transmitting pressure to the amorphous magnetic alloy. .
次に、上記従来技術の作用を説明する。Next, the operation of the above conventional technique will be described.
圧力が油圧導入部18に加わると、透孔17を通して圧力が
非晶質磁性合金円板12に加わり、これを軟磁性体溝部に
おいて押し下げ非晶質磁性合金円板内に応力が発生す
る。この内部応力の発生で応力磁気効果により非晶質磁
性合金の透磁率が減少する。この変化を電気磁気的手段
の一つであるコイル13を用いてインダクタンスの形で検
出し圧力を測定する様になっている。When the pressure is applied to the hydraulic pressure introducing portion 18, the pressure is applied to the amorphous magnetic alloy disk 12 through the through hole 17, and the amorphous magnetic alloy disk 12 is pushed down by the groove portion of the soft magnetic material to generate stress in the amorphous magnetic alloy disk. The generation of this internal stress reduces the magnetic permeability of the amorphous magnetic alloy due to the stress magnetic effect. This change is detected in the form of inductance by using a coil 13 which is one of electromagnetic means to measure the pressure.
発明が解決しようとする課題 上記の様な構成の従来のセンサにおいては、圧力検出材
料である非晶質磁性合金円板12は両側のセンサ構成部材
によって該円板の厚み方向に加圧、固定されている。こ
のような圧力センサにおいては使用条件下で非晶質磁性
合金円板の接触加圧状態を均一に保つことは難しく、特
に温度変化が生じた場合センサ出力が変化し、検出精度
を低下させる。また、このセンサの出力は非直線であ
り、検出圧力領域によって感度が変化する。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention In the conventional sensor having the above-described structure, the amorphous magnetic alloy disk 12 as the pressure detection material is pressed and fixed in the thickness direction of the disk by the sensor constituent members on both sides. Has been done. In such a pressure sensor, it is difficult to keep the contact pressure state of the amorphous magnetic alloy disc uniform under the use condition, and especially when a temperature change occurs, the sensor output changes and the detection accuracy deteriorates. Further, the output of this sensor is non-linear, and the sensitivity changes depending on the detected pressure region.
本発明は、上記のような従来圧力センサの課題に鑑み、
検出精度が高く直線出力を有し、温度変化が生じても出
力の安定な圧力センサを提供することを目的とする。The present invention, in view of the problems of the conventional pressure sensor as described above,
An object of the present invention is to provide a pressure sensor having high detection accuracy, a linear output, and a stable output even when a temperature change occurs.
課題を解決するための手段 本発明は、圧力の導入口と、少なくとも該圧力によって
歪が生じる変形部分を有し、少なくとも該変形部分に磁
歪を有する非晶質磁性合金を固着し、該非晶質磁性合金
と磁気回路をなすように、非晶質磁性合金の透磁率を計
測する電気磁気的手段を有し、圧力印加にともなう電気
磁気的手段の出力から圧力を検出する圧力センサにおい
て、センサの計測条件下で、少なくとも該変形部分に固
着した非晶質磁性合金が正なる飽和磁歪定数を有する場
合常に面内圧縮応力を受けた状態であり、負なる飽和磁
歪定数を有する場合常に面内引っ張り応力を受けた状態
に維持される構造を有する圧力センサである。Means for Solving the Problems The present invention has a pressure inlet and at least a deformed portion where strain is generated by the pressure, and an amorphous magnetic alloy having magnetostriction is fixed to at least the deformed portion, A pressure sensor that has an electromagnetic means for measuring the magnetic permeability of an amorphous magnetic alloy so as to form a magnetic circuit with a magnetic alloy, and detects pressure from the output of the electromagnetic means accompanying pressure application. Under the measurement conditions, at least when the amorphous magnetic alloy adhered to the deformed part has a positive saturation magnetostriction constant, it is always in the in-plane compressive stress, and when it has a negative saturation magnetostriction constant, it is always in-plane tensile. A pressure sensor having a structure that is maintained in a stressed state.
作用 本発明は、上記のような構成を有するので、計測条件下
でセンサ本体の変形部分から常に非晶質磁性合金に印加
される応力により、非晶質磁性合金内の自発磁化は基本
的に非晶質磁性合金面に対し垂直の方向すなわち厚み方
向を向き、計測磁界と直交することになる。このことに
よって検出精度が高く直線出力を有し、温度変化が生じ
ても出力の安定な圧力センサが実現できる。Action Since the present invention has the above-described configuration, the spontaneous magnetization in the amorphous magnetic alloy is basically caused by the stress constantly applied to the amorphous magnetic alloy from the deformed portion of the sensor body under the measurement condition. The direction is perpendicular to the surface of the amorphous magnetic alloy, that is, the thickness direction, and is orthogonal to the measurement magnetic field. As a result, it is possible to realize a pressure sensor having a high detection accuracy, a linear output, and a stable output even when the temperature changes.
実施例 以下に、本発明をその実施例を示す図面に基づいて、詳
述する。Examples The present invention will be described in detail below with reference to the drawings illustrating the examples.
実施例１ 第１図は本発明に係る圧力センサの一実施例の断面図で
ある。１はチタニウム合金からなる外径10mm、内径9.7m
mの円管であり、その円管内部には検出すべき圧力を円
管の一端部より圧力導入口２を通じて円管内に印加でき
るようになっている。また、他の一端は閉じられた構造
になっており、その円管の外側中央部に、長方形状で飽
和磁歪定数20×10-6なる正の磁歪を有する鉄系非晶質磁
性合金３を軸周に巻回、センサ使用温度より高温で固着
してある。この時、鉄系非晶質磁性合金と円筒管１を構
成するチタニウム合金との線熱膨張係数差は１×10-6で
あり、チタニウム合金の方が少し大きい。このため、セ
ンサ使用温度領域では非晶質磁性合金薄帯に常に面内圧
縮応力が印加されている状態にある。４は、金属円管１
の周囲に同心円上に巻回したコイルである。さらに該コ
イルの外側に48％Ni−Feからなる容器５を設けてある。
６はセンサ出力用回路であり、７は出力端子、８はセン
サ取り付け用ネジである。Embodiment 1 FIG. 1 is a sectional view of an embodiment of the pressure sensor according to the present invention. 1 is made of titanium alloy, outer diameter 10 mm, inner diameter 9.7 m
It is a circular pipe of m, and the pressure to be detected can be applied to the inside of the circular pipe through the pressure inlet 2 from one end of the circular pipe. Further, the other end has a closed structure, and an iron-based amorphous magnetic alloy 3 having a rectangular shape and a positive magnetostriction with a saturation magnetostriction constant of 20 × 10 −6 is formed in the outer central portion of the circular tube. It is wound around the shaft and fixed at a temperature higher than the sensor operating temperature. At this time, the linear thermal expansion coefficient difference between the iron-based amorphous magnetic alloy and the titanium alloy forming the cylindrical tube 1 is 1 × 10 −6 , and the titanium alloy is slightly larger. Therefore, the in-plane compressive stress is always applied to the amorphous magnetic alloy ribbon in the sensor operating temperature range. 4 is a metal circular tube 1
It is a coil wound in a concentric circle around. Further, a container 5 made of 48% Ni-Fe is provided outside the coil.
6 is a sensor output circuit, 7 is an output terminal, and 8 is a sensor mounting screw.
印加圧力を変化させた場合、コイル４にインダクタンス
変化が生じる。結果を第２図に示す。計測周波数は30kH
z、印加磁界は160A/mである。縦軸は大気圧を0kgf/cm2
としたときのインダクタンス値L0に対する各圧力でのイ
ンダクタンス値Ｌとの比を示す。横軸の圧力は大気圧と
の差圧、即ち大気圧との相対圧を示す。圧力が10kgf/cm
2までインダクタンスは圧力に対し直線的に変化する。
また、出力が−30〜120℃の範囲でほぼ直線的なセンサ
が得られ、また加圧時と減圧時の圧力ヒステリシスもフ
ルスケールの１％以下と殆ど生じなかった。また雰囲気
の温度変化がある場合にも−30〜120℃の範囲でセンサ
出力はフルスケールの５％以下の変化ときわめて安定で
あった。When the applied pressure is changed, the inductance of the coil 4 changes. Results are shown in FIG. Measuring frequency is 30kH
z, the applied magnetic field is 160 A / m. The vertical axis is atmospheric pressure 0 kgf / cm 2
The ratio of the inductance value L 0 to the inductance value L 0 at each pressure is shown below. The pressure on the horizontal axis indicates the pressure difference from the atmospheric pressure, that is, the relative pressure to the atmospheric pressure. Pressure is 10kgf / cm
Up to 2 , the inductance changes linearly with pressure.
Further, an almost linear sensor was obtained in the output range of −30 to 120 ° C., and the pressure hysteresis during pressurization and depressurization was almost 1% or less of the full scale and hardly occurred. Even when the temperature of the atmosphere changes, the sensor output was extremely stable with a change of 5% or less of the full scale in the range of -30 to 120 ° C.
実施例２ 実施例１と同様な構造を有する圧力センサを試作した。
非晶質磁性合金の固着条件等も実施例１と同様とした。
第１図の１にはニッケル鉄合金からなる外径10mm、内径
9.4mmの円管を用いた。また、３には飽和磁歪定数−４
×10-6なる負の磁歪を有するコバルト系非晶質磁性合金
を用いた。その他の構成材料も実施例１と同様である。
このとき、コバルト系非晶質磁性合金３とニッケル鉄合
金製円筒管１との線熱膨張係数差は1.2×10-6であり、
コバルト系非晶質磁性合金の方が少し大きい。このた
め、センサ使用温度領域では非晶質磁性合金薄帯に常に
面内引っ張り応力が印加されている状態にある。Example 2 A pressure sensor having the same structure as that of Example 1 was manufactured.
The conditions for fixing the amorphous magnetic alloy were the same as in Example 1.
1 in Fig. 1 has an outer diameter of 10 mm and an inner diameter made of nickel-iron alloy.
A 9.4 mm circular tube was used. Further, 3 is a saturation magnetostriction constant -4
A cobalt-based amorphous magnetic alloy having a negative magnetostriction of × 10 -6 was used. The other constituent materials are the same as those in the first embodiment.
At this time, the difference in linear thermal expansion coefficient between the cobalt-based amorphous magnetic alloy 3 and the nickel-iron alloy cylindrical tube 1 is 1.2 × 10 −6 ,
The cobalt-based amorphous magnetic alloy is slightly larger. Therefore, in the sensor operating temperature range, the in-plane tensile stress is always applied to the amorphous magnetic alloy ribbon.
第３図に本センサの出力を示す。計測周波数は50kHz、
印加磁界は約100A/mの設計である。実施例１と同様、圧
力は大気圧との相対圧を示す。圧力が20kgf/cm2まで出
力は圧力に対し直線的に変化する。また、実施例１と同
様、出力が−30〜120℃の範囲でほぼ直線的であり、加
圧時と減圧時の圧力ヒステリシスもフルスケールの１％
以下と殆ど生じなかった。また雰囲気の温度変化がある
場合にも−30〜120℃の範囲でセンサ出力はフルスケー
ルの５％以下の変化ときわめて安定であった。The output of this sensor is shown in FIG. The measurement frequency is 50kHz,
The applied magnetic field is designed to be about 100 A / m. As in Example 1, the pressure indicates relative pressure with respect to atmospheric pressure. The output changes linearly with the pressure up to 20 kgf / cm 2 . Also, as in Example 1, the output is substantially linear in the range of -30 to 120 ° C, and the pressure hysteresis during pressurization and depressurization is 1% of full scale.
The following did not occur. Even when the temperature of the atmosphere changes, the sensor output was extremely stable with a change of 5% or less of the full scale in the range of -30 to 120 ° C.
以上のように、本発明に係る圧力センサは、検出精度が
高く直線出力を有し、温度変化が生じても出力の安定な
圧力センサが供給できる。As described above, the pressure sensor according to the present invention has a high detection accuracy, has a linear output, and can supply a pressure sensor whose output is stable even when a temperature change occurs.
本発明の実施例では固着した非晶質磁性合金と少なくと
も該圧力によって歪が生じる固着される変形部分を形成
する材料の線熱膨張係数差とその固着条件によって非晶
質磁性合金内部に適当な応力状態をつくり出すことを述
べた。特にこの材料の線熱膨張係数差が２×10-6以下の
場合、高精度かつ良好な感度を有する直線出力が得られ
たが、線熱膨張係数差がこの値より大きくなると、圧力
に対する出力感度が大きく低下し、この結果精度も低下
する。In the embodiment of the present invention, the difference between the linear thermal expansion coefficients of the fixed amorphous magnetic alloy and the material forming the fixed deformed portion in which strain is caused by the pressure and the fixing conditions are suitable for the inside of the amorphous magnetic alloy. It is stated that a stress state is created. In particular, when the linear thermal expansion coefficient difference of this material was 2 × 10 -6 or less, a linear output with high precision and good sensitivity was obtained, but when the linear thermal expansion coefficient difference is larger than this value, the output against pressure is output. The sensitivity is greatly reduced, and as a result, the accuracy is also reduced.
発明の効果 本発明による圧力センサは、上述のように固着時に非晶
質磁性合金に内部応力を印加し、計測状態でこれを維持
することにより、検出精度が高く直線出力を有し、温度
変化が生じても出力の安定であるという効果を有する。
またこの圧力センサは構造が簡単なため、安価に供給が
可能でかつ上記の効果を有するため、自動車などの制御
分野に応用が適切である。EFFECTS OF THE INVENTION The pressure sensor according to the present invention has a high detection accuracy and a linear output by applying an internal stress to the amorphous magnetic alloy at the time of fixation and maintaining it in the measurement state as described above, and has a temperature change. Even if occurs, the output is stable.
Further, since this pressure sensor has a simple structure, it can be supplied at a low cost and has the above-mentioned effects, so that it is suitable for application in the control field of automobiles and the like.
第１図は本発明の圧力センサに係る実施例の断面図、第
２図は同実施例のコイルの圧力によるインダクタンス値
の変化を示す図、第３図は、別の実施例における圧力セ
ンサの出力結果を示す図、第４図は従来の圧力センサの
概略を示す断面図である。 １…チタニウム合金製円筒管、２…圧力導入口、３…磁
歪を有する鉄系非晶質磁性合金、４…コイル、５…容
器、６…センサ出力用回路、７…出力端子、８…センサ
取り付け用ネジ、11…円柱状の軟磁性体、12…磁歪を有
する非晶質磁性合金、13…軟磁性体の溝部に巻装された
コイル、14…非磁性リング、15…容器、16…透孔、17…
蓋部、18…油圧導入部。FIG. 1 is a cross-sectional view of an embodiment according to the pressure sensor of the present invention, FIG. 2 is a view showing a change in inductance value due to pressure of a coil of the embodiment, and FIG. 3 is a view of a pressure sensor in another embodiment. FIG. 4 is a sectional view showing an outline of a conventional pressure sensor, showing the output result. DESCRIPTION OF SYMBOLS 1 ... Cylindrical tube made of titanium alloy, 2 ... Pressure inlet port, 3 ... Iron-based amorphous magnetic alloy having magnetostriction, 4 ... Coil, 5 ... Container, 6 ... Sensor output circuit, 7 ... Output terminal, 8 ... Sensor Mounting screw, 11 ... Cylindrical soft magnetic material, 12 ... Magnetostrictive amorphous magnetic alloy, 13 ... Coil wound in groove of soft magnetic material, 14 ... Non-magnetic ring, 15 ... Container, 16 ... Through hole, 17 ...
Lid, 18 ... Hydraulic pressure introducing part.
Claims (1)
て歪が生じる変形部分を有し、少なくとも該変形部分に
磁歪を有する非晶質磁性合金を固着し、該非晶質磁性合
金と磁気回路をなすように、非晶質磁性合金の透磁率を
計測する電気磁気的手段を有し、圧力印加にともなう電
気磁気的手段の出力から圧力を検出する圧力センサにお
いて、センサの計測条件下で、少なくとも前記変形部分
に固着した非晶質磁性合金が正なる飽和磁歪定数を有す
る場合常に面内圧縮応力を受けた状態であり、負なる飽
和磁歪定数を有する場合常に面内引っ張り応力を受けた
状態に維持されることを特徴とする圧力センサ。1. A pressure introducing port and at least a deformed portion in which strain is generated by the pressure, and an amorphous magnetic alloy having magnetostriction is fixed to at least the deformed portion, and the amorphous magnetic alloy and a magnetic circuit are connected to each other. As described above, in a pressure sensor having an electromagnetic means for measuring the magnetic permeability of the amorphous magnetic alloy and detecting the pressure from the output of the electromagnetic means accompanying the pressure application, at least under the measuring conditions of the sensor, When the amorphous magnetic alloy fixed to the deformed portion has a positive saturation magnetostriction constant, it is always in a state of being subjected to in-plane compressive stress, and when it has a negative saturation magnetostriction constant, it is always in a state of being subjected to in-plane tensile stress. A pressure sensor characterized by being maintained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17124888A JPH0769243B2 (en) | 1988-07-08 | 1988-07-08 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17124888A JPH0769243B2 (en) | 1988-07-08 | 1988-07-08 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0221232A JPH0221232A (en) | 1990-01-24 |
| JPH0769243B2 true JPH0769243B2 (en) | 1995-07-26 |
Family
ID=15919798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17124888A Expired - Lifetime JPH0769243B2 (en) | 1988-07-08 | 1988-07-08 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0769243B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016009596B4 (en) * | 2016-08-06 | 2018-05-30 | Thomas Magnete Gmbh | Pump unit with pressure sensors and method for operating the pump set |
-
1988
- 1988-07-08 JP JP17124888A patent/JPH0769243B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0221232A (en) | 1990-01-24 |
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