JPH0760200B2 - X-ray irradiation device with irradiation area monitor - Google Patents

Description

TECHNICAL FIELD The present invention relates to an X-ray irradiation apparatus having an irradiation area monitor.

[Conventional technology]

As an X-ray irradiation device equipped with a conventional irradiation area monitor,
For example, there is one disclosed in JP-A-58-133239. As shown in FIG. 2, this is an X-ray transmission mirror 3 which transmits X-ray a but reflects visible light b such as laser light between the X-ray irradiator 1 and the X-ray irradiation target 2. Is installed such that its reflection surface 3A is located on the lower side in the X-ray irradiation direction and is inclined with respect to the irradiation X-ray axis P, and the visible ray b is at the X-ray transmission position Q of the reflection surface 3A. The visible light projector 4 is installed so that the reflected light axis P ₁ of the visible light b and the irradiation X-ray axis P are coaxial or substantially coaxial with each other.
In the figure, 5 is a collimator that narrows X-rays a and visible rays b into parallel rays, and 6 is a fluorescent X-ray analyzer for detecting fluorescent X-rays c emitted from the X-ray irradiation target 2,
Reference numeral 7 is a visible ray projection area detecting means.

[Problems to be solved by the invention]

However, according to the X-ray irradiating device having the above-mentioned configuration, the diameter of the X-ray irradiating region is at most about 1 mm, and the collimator 5 is used to make the diameter of the X-ray irradiating region small, for example, about several tens of μm. It is necessary to reduce the inner diameter of the and increase its length, but it is extremely difficult to construct in this way, and even if it is constructed in this way, an X-ray irradiation region having a desired diameter can be obtained. That is, it is difficult to sufficiently narrow down the visible light b that is the guide light, and it is difficult to monitor the irradiation position and the range of the X-ray that has a small irradiation area on the X-ray irradiation target. If the illuminator is tilted, it is almost impossible to perform accurate monitoring.

The present invention has been made in consideration of the above matters, and an object of the present invention is to reliably monitor an X-ray irradiation position and its range on an X-ray irradiation target even if the X-ray irradiation area is small. It is an object of the present invention to provide an X-ray irradiation device with an irradiation area monitor that can perform

[Means for solving problems]

In order to achieve the above-mentioned object, an X-ray irradiation apparatus with an irradiation area monitor according to the present invention includes a condenser lens provided at a position separated by a focal length from an X-ray irradiation object, and An X-ray guide tube that has a narrow passage through which the X-ray from the X-ray irradiator passes through the center of the optical axis and emits the X-ray toward the X-ray irradiation target, and the X-ray guide tube. A mirror provided between the X-ray irradiator and the condenser lens with the reflecting surface tilted so as to face the condenser lens and the axis of the light beam reflected by the reflection surface of the mirror It is characterized by a visible light source that emits visible light to the mirror so as to be parallel or substantially parallel to the X-ray guide tube.

[Action]

According to the above characteristic configuration, the visible light and the X-ray are coaxial with each other by the mirror and the condenser lens, and the X-ray irradiation area can be monitored regardless of the rotation angle of the irradiation surface of the X-ray irradiation object. This can be performed accurately, and the desired region of the X-ray irradiation target can be accurately irradiated with X-rays.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG.

FIG. 1 schematically shows an example of an X-ray irradiation apparatus with an irradiation area monitor according to the present invention. In FIG. 1, 11 is a laser tube as a visible light source for emitting a laser LB in the visible area,
Reference numeral 12 is a beam expander for expanding and adjusting the laser LB into parallel rays having a predetermined diameter, 13 is a polarizing plate for adjusting the light amount of the laser LB, and these members 11 to 13 are arranged in the housing 10 with their optical axes aligned with each other. It is provided. The housing 10
Is made of, for example, iron or lead to prevent X-rays from leaking to the outside, and also accommodates each member 14 to 21 described later.

Reference numeral 14 is an X-ray irradiator such as an X-ray tube provided so as to be substantially orthogonal to the laser tube 11 (laser LB), and 15 is an X-ray that guides the X-ray XB emitted from the X-ray irradiator 14. The guide tube is provided in a straight line substantially orthogonal to the projection direction of the laser LB and substantially horizontally. The X-ray guide tube 15 has a narrow passage formed therein so as to narrow the diameter of the X-ray XB to about 10 μm, and is made of, for example, glass or metal.
Reference numeral 16 is a holding member that is appropriately provided to hold the X-ray guide tube 15.

Reference numeral 17 is a mirror provided between the X-ray irradiator 14 and a condenser lens 19 described later, and its reflecting surface 17A has an X-ray guide tube 1
It is provided so as to form a predetermined angle (for example, an angle α in the drawing is 45 degrees) with the installation direction of 5 (hereinafter, referred to as an X-ray irradiation axis, indicated by a symbol J), and with respect to the X-ray irradiation axis J. The laser LB incident from a direction of about 90 degrees is bent by 90 degrees so as to be a parallel laser LB 'along the X-ray irradiation axis J and reflected. Then, a hole 18 for inserting the X-ray guide tube 15 is formed at substantially the center of the mirror 17.

Reference numeral 19 is a condenser lens provided near the tip side of the X-ray guide tube 15 and made of, for example, a convex lens, the optical axis of which is parallel to the X-ray irradiation axis J, and the X-ray guide tube 15 is located approximately at the center. There is formed a hole 20 for inserting the.

An alignment mechanism (not shown) is provided independently for each of the mirror 17 and the condenser lens 19.

Reference numeral 21 denotes an X-ray irradiation target, which is provided at the focal position of the condenser lens 19 and can be moved in any of the front-back, up-down and left-right directions by a holder (not shown), and with respect to the X-ray guide tube 15. It is held so that the angle of the irradiation surface can be set arbitrarily.

Thus, in the X-ray irradiating device with the irradiation area monitor having the above-described structure, first, the optical axes of the laser tube 11, the beam expander 12, and the polarizing plate 13 are aligned with each other, and the mirror 17 and the condenser lens 19 are respectively arranged. Laser LB 'reflected by the mirror 17 becomes parallel (coaxial) to the X-ray irradiation axis J by the alignment mechanism of the laser L and passes through the condenser lens 19 to generate the laser L.
It is adjusted so that B'is focused on the irradiation surface 21A of the X-ray irradiation object 21.

In the adjusted state, the position where the X-ray XB is irradiated on the irradiated surface 21A and the position where the laser LB 'is focused are exactly the same, and moreover, the X-ray irradiation axis of the irradiated surface 21A is the same. Even if the angle with respect to J changes, they match regardless of this. Therefore, by visually observing the position irradiated by the laser LB 'on the irradiated surface 21A or by a telescope or the like,
The irradiation area of the X-ray XB on the irradiation surface 21A can be monitored, and the desired area of the X-ray irradiation object 21 can be accurately irradiated with the X-ray XB.

The present invention is not limited to the above embodiment, for example, the laser tube 11, the beam expander 12, the polarizing plate 13 is housed in the storage tube in a state in which the optical axes are aligned, the storage tube in the housing 10. It may be stored.

Further, the angle α formed by the mirror 17 and the X-ray irradiation axis J is not always 45.
It is not necessary to set the angle in degrees, and the angle may be set to any angle as long as the laser LB 'reflected by the mirror 17 is coaxial with the X-ray irradiation axis J.

Further, it goes without saying that a visible light source that emits visible light may be used instead of the laser tube 11 that emits the laser LB in the visible region.

〔The invention's effect〕

As described above, in the X-ray irradiation apparatus with the irradiation area monitor according to the present invention, since the laser and the X-ray are coaxial with each other by the mirror and the condenser lens, the X-ray irradiation target is irradiated. The X-ray irradiation area can be accurately monitored regardless of the rotation angle of the surface, and the X-ray can be accurately irradiated to a desired area of the X-ray irradiation target.

The present invention is particularly effective when the irradiation area of the X-ray on the surface to be irradiated is very small (for example, the diameter is about 10 μm), which is difficult with the prior art.

[Brief description of drawings]

FIG. 1 is an explanatory view showing an example of an X-ray irradiation apparatus with an irradiation area monitor according to the present invention. FIG. 2 is an explanatory view showing a conventional technique. 11 ... Laser tube (visible light source), 14 ... X-ray irradiator, 15 ...
... X-ray guide tube, 17 ... Mirror, 17A ... Reflecting surface, 19 ... Condensing lens, 21 ... X-ray irradiated object, LB ... Laser (visible light), XB ... X-ray, J ... ... X-ray irradiation axis.

Claims (1)

[Claims] 1. A condenser lens provided at a position separated by a focal length from an X-ray irradiation object, and an X-ray from an X-ray irradiator passing through an optical axis center of the condenser lens. The X-ray guide tube which has a narrow passage for emitting the X-ray toward the X-ray irradiation target and the X-ray guide tube are inserted, and the reflection surface is inclined so as to face the condenser lens side. The mirror provided between the X-ray irradiator and the condenser lens, and the mirror so that the axis of the light beam reflected by the reflecting surface of the mirror is parallel or substantially parallel to the X-ray guide tube. X with an irradiation area monitor, characterized by comprising a visible light source that emits visible light
X-ray irradiation device.