JPH01185500A - X-ray irradiating device with irradiating area monitor - Google Patents

Abstract

PURPOSE:To secure monitoring by making visible light rays and X-rays coaxial by the use of a mirror and a condenser lens and irradiating X-rays in a desired area of an X-ray irradiating body regardless of a rotable angle of an irradiating surface of an X-ray irradiating body. CONSTITUTION:A laser tube 11 in which a laser LB of a visible area is radiated and an X-ray irradiator 14 which is nearly perpendicular to the tube 11 are prepared, and a mirror 17 is arranged between the irradiator 14 and a condenser lens 19. Next, light axes of the tube 11, a beam expander 12 and a polarizing plate 13 are agreed mutually while the laser beam LB reflected by a mirror 19 is made coaxial with an X-ray irradiating axis J and the laser LB passed in the lens 19 is adjusted in order that a focus is adjusted on an irradiating surface 21A of an irradiating body 21. The position at which X-rays XB are directed onto the surface 21 is agreed with the other position at which the focus of the laser LB is adjusted. Therefore, monitoring of an X-ray irradiating position can surely be performed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an X-ray irradiation device equipped with an irradiation area monitor.

[Conventional technology]

As an X-ray irradiation device equipped with a conventional irradiation area monitor,
For example, there is one shown in Japanese Patent Application Laid-Open No. 133239/1983. As shown in FIG. 2, an X-ray transmitting mirror 3 is placed between an X-ray irradiator 1 and an X-ray irradiated object 2, which transmits X-rays a but reflects visible light such as laser light. is installed so that its reflective surface 3^ is located on the lower side in the direction of X-ray irradiation and is inclined with respect to the irradiation X-ray axis P, and the X-ray transmission position of the reflective surface 3A is Projected to Q,
The visible light projector 4 is arranged so that the reflected optical axis P1 of the visible light beam and the irradiation X-ray axis P are coaxial or substantially coaxial.
I installed it. In addition, in the same figure, 5 is a collimator that narrows down XvAa and visible light to make it into parallel light, and 6
7 is a fluorescent X-ray analyzer for detecting fluorescent X-rays C emitted from the X-ray irradiated object 2, and 7 is a visible light projection area detecting means.

[Problem that the invention seeks to solve]

However, according to the X-ray irradiation device configured as described above, the diameter of the X-ray irradiation area is approximately 1 fi, and in order to make the diameter of the X-ray irradiation area small, for example, about several tens of nanometers, the inner diameter of the collimator 5 must be adjusted. Although it is necessary to make the X-ray irradiation area smaller and to increase its length, it is extremely difficult to configure it in this way, and even with this configuration, it is difficult to obtain an X-ray irradiation area with a desired diameter. It is difficult to narrow down the visible light beam that is the guide light sufficiently, and the irradiation area on the X-ray irradiated object is small, and it is difficult to monitor the range of the X-ray irradiation position. If it is tilted, it is almost impossible to monitor accurately.

The present invention has been made with the above-mentioned considerations in mind, and its purpose is to reliably monitor the X-ray irradiation position and its range on an X-ray irradiated object even if the X-ray irradiation area is small. An object of the present invention is to provide an X-ray irradiation device with an irradiation area monitor that can perform the following.

[Means for solving problems]

In order to achieve the above-mentioned object, an X-ray irradiation device with an irradiation area monitor according to the present invention includes a condenser lens provided at a position separated by a focal length from an object to be irradiated with X-rays, and a an X-ray guide tube that has a narrow passage through which the center of the optical axis is inserted and allows the X-rays from the X-ray irradiator to pass therethrough, and emits the X-rays toward the X-ray irradiated object; and the X-ray guide tube. A mirror is inserted between the X-ray irradiator and the condensing lens with its reflective surface tilted toward the condensing lens, and the axis of the light beam reflected by the reflective surface of this mirror is It is characterized in that it comprises a visible light source that emits visible light to the X''MlMl guide tube or the mirror so as to be substantially parallel to the X''MlMl guide tube.

[Effect]

According to the above characteristic configuration, visible light and X-rays are made coaxial by the mirror and the condensing lens, and the X-ray irradiation area can be monitored regardless of the rotation angle of the irradiated surface of the X-ray irradiated tissue. This can be performed accurately, and a desired region of the object to be exposed to X-rays can be irradiated with X-rays.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG.

FIG. 1 schematically shows an example of an X-ray irradiation device with an irradiation area monitor according to the present invention. In the figure, 11 is a laser tube as a visible light source that emits a laser LB in the visible region, and 12 is a laser LB. 13 is a polarizing plate that adjusts the light intensity of the laser LB, and these members 11 to 13 are provided in the housing 10 with their optical axes aligned with each other. ．． The housing 10 is made of iron or lead, for example, and is designed to prevent X-rays from leaking to the outside.
4 to 21 are also accommodated.

Reference numeral 14 denotes an X-ray irradiator such as an X-ray tube installed substantially perpendicular to the laser tube 11 (laser LB), and 15 an X-ray irradiator for guiding the X-rays XB emitted from the X-ray irradiator 14. The guide tube is provided in a straight line substantially perpendicular to the projection direction of the laser LB and substantially horizontally.

The X-ray guide tube 15 has a diameter of 1
A narrow passageway is formed inside so that the diameter is narrowed to about 0μ, and it is made of, for example, glass or metal. Note that reference numeral 16 denotes a holding member provided as appropriate to hold the X-ray guide tube 15.

Reference numeral 17 denotes a mirror provided between the X-ray irradiator 14 and a condensing lens 19, which will be described later, and its reflective surface 17^ is aligned in the installation direction of the X-ray guide tube 15 (hereinafter referred to as the X-ray irradiation axis, indicated by the symbol J). ) and a predetermined angle (for example, angle α in the figure is 45
The laser LB, which is incident from a direction approximately 90 degrees to the X-ray irradiation axis J, is arranged so that the laser beam LB' is parallel to the X-ray irradiation axis J. 90
It bends and reflects. And this mirror 17
There is a hole 1 approximately in the center of which the X-ray guide tube 15 is inserted.
8 is the formation.

Reference numeral 19 denotes a condensing lens made of, for example, a convex lens, provided near the tip side of the X-ray guide tube 15, and its optical axis is parallel to the X-ray guide tube 15.
The beam is parallel to the irradiation axis J, and the X
A hole 20 is formed through which the wire guide tube 15 is inserted.

Incidentally, the mirror 17 and the condensing lens 19 are each independently provided with an alignment mechanism (not shown).

Reference numeral 21 denotes an X-ray irradiation object, which is provided at the focal point of the condensing lens 19 and can be moved in any direction, front and back, up and down, and left and right by a holder not shown, and is capable of irradiating the X-ray guide tube 15. It is maintained so that the angle of the surface can be set arbitrarily.

In the X-ray irradiation apparatus with an irradiation area monitor configured as described above, first, the laser tube 11. beam expander 1
2. The optical axes of the polarizing plates 13 are made to coincide with each other, and the mirrors 17. By each alignment mechanism of the condensing lens 19, the laser LB' reflected by the mirror 17 becomes parallel (coaxial) with the X-ray irradiation axis J, and the laser LB' that has passed through the condensing lens 19 is aligned with the X-ray irradiation axis J. Adjustment is made so as to focus on the irradiated surface 21A of the irradiator 21.

In the state adjusted in this way, the position where the X-ray XB is irradiated onto the irradiated surface 21A and the position where the laser LB' is focused are completely (coincident), and moreover, the irradiated surface 21AOX
Even if the angle with respect to the ray irradiation axis J changes, it will match regardless of this, so by checking the position where the laser LB' is irradiated on the irradiated surface 21A visually or with a telescope, the position on the irradiated surface 21A can be determined. Xi! Since the XB irradiation area can be monitored, a desired area of the X-ray irradiated object 21 can be accurately irradiated with the X-rays XB.

The present invention is not limited to the above embodiments, but for example, the laser tube 11. Beam expander 12. The polarizing plates 13 may be housed in a housing tube with their optical axes aligned with each other, and this housing tube may be housed within the housing 10.

Also, the angle α formed by the mirror 17 and the X-ray irradiation axis J does not necessarily have to be 45 degrees (it may be set to any angle, and the laser LB' reflected by the mirror 17 is aligned with the X-ray irradiation axis J).
It is sufficient if it is coaxial with the

Furthermore, it goes without saying that a visible light source that emits visible light may be used instead of the laser tube 11 that emits the laser LB in the visible region.

〔Effect of the invention〕

As explained above, in the X-ray irradiation device with an irradiation area monitor according to the present invention, since the laser and the X-rays are coaxial with each other by the mirror and the condenser lens, the irradiated surface of the XvA irradiated object is The X-ray irradiation area can be accurately monitored regardless of the rotation angle, and the X-ray can be accurately irradiated to a desired area of the X-ray irradiated object.

The heather invention is particularly effective when the X-ray irradiation area on the irradiated surface is minute (for example, about 10x in diameter), which was difficult with the conventional techniques.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram showing an example of an X-ray irradiation device with an irradiation area monitor according to the present invention. FIG. 2 is an explanatory diagram showing the prior art. 11... Laser tube (visible light a>, 14... X-ray irradiator, 15... X-ray guide tube, 17... Mirror, 17A... Reflective surface, 19... Condensing lens , 21・
...X-ray irradiated object, LB...Laser (visible light), X
B...X-ray, J...X-ray irradiation axis. Applicant: Horiba Ltd. Agent
Patent Attorney Hideo Fujimoto Figure 2

Claims (1)

[Claims] A condensing lens is provided at a position a focal distance away from the object to be irradiated with X-rays, and a narrow passage is inserted through the center of the optical axis of this condensing lens to allow the X-rays from the X-ray irradiator to pass through. The X-ray irradiation is performed by inserting an X-ray guide tube that emits X-rays toward the object to be irradiated with X-rays, and inserting the X-ray guide tube and tilting the reflective surface toward the condensing lens. A mirror is provided between the device and the condensing lens, and visible light is applied to the mirror so that the axis of the light reflected by the reflective surface of this mirror is parallel or approximately parallel to the X-ray guide tube. An X-ray irradiation device with an irradiation area monitor, comprising: a visible light source that emits visible light;