JPH07111992B2 - Device storage tray - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an element storage tray for storing various elements such as semiconductor elements and performing various tests of the elements as they are, and more particularly to a universal handler. The present invention relates to a suitable element storage tray.

[Prior Art] Conventionally, when various tests are performed in a semiconductor test process, a variety of packages of elements to be tested have been required, and thus dedicated devices (test handlers) adapted to respective types have been required. However, a universal handler has been developed which can measure many types of elements with one unit by changing the contact unit etc. in response to the production of various kinds of elements in small quantities.

There is a tray system as a device supply mode to such a universal handler. In this tray system, the device 2 is mounted in the device housing portion 11 of the tray 10 as shown in FIG. The element 2 is sequentially brought into contact with the contact of the test head.

[Problems to be Solved by the Invention] By the way, in such a conventional tray for a universal handler, there are variations in the dimensions of the elements to be accommodated, and in addition, in order to facilitate the taking in and out of the elements, Since the size of the portion 11 is formed to be slightly larger than that of the element 2, the alignment of the contact of the test head and the input / output pin of each element must be performed for each element. It was difficult to contact.

The present invention has been made to solve such a conventional problem, and requires only one alignment with the tray,
It is an object of the present invention to provide an element storage tray in which each element and a contactor can be positioned with high accuracy and all or a part of a plurality of elements can be contacted at the same time.

[Means for Solving Problems] An element storage tray of the present invention which achieves such an object stores a plurality of elements set in a handler having contacts arranged to test an element. An element storage tray that has a predetermined shape corresponding to a handler and includes a storage section that detachably stores a plurality of elements, and the storage section is located at a predetermined position corresponding to the arrangement of the contacts of the handler. It has an input / output terminal to which a terminal pin of the element is connected, and this input / output terminal is electrically connected to the contact of the handler when the element storage tray is set in the handler.

[Operation] After mounting each element according to the input / output terminals arranged on the tray with high accuracy, set the tray in the handler and align the input / output terminals of the tray with the contact of the test head. . As a result, all or part of the elements on the tray can be electrically contacted with the contactor at the same time, and measurement can be performed.

[Embodiment] A preferred embodiment of the present invention will be described below with reference to the drawings.

The tray 1 shown in FIG. 1 is set in an element inspection apparatus and is a plate-shaped body made of an insulating material having a predetermined shape and size, and has a concave shape slightly larger than the element 2 corresponding to the element 2 to be mounted. A plurality of storage units 3 are formed at predetermined intervals, and the elements 2 are mounted in the storage units 3. Further, the terminal pins of the element 2 are connected to each of the accommodating portions 3, and the input / output terminals 4 for making contact with the contacts of the test head of the element inspection apparatus are formed. The input / output terminal 4 is formed of, for example, a socket structure that engages with a terminal pin of the element 2, a pin, or a printed pattern,
In any case, it has a structure that enables electrical connection between the terminal pin of the element 2 and the contact of the test head, and at least the portion to which the contact of the test head is connected corresponds to the applied test head, It is assumed that they are arranged at a predetermined position in the tray with high accuracy.

After mounting the element 2 in the storage portion 3 of the tray 1 configured as described above so that the terminal pins of the element 2 and the input / output terminals 4 match, the tray is set in an element inspection device (test device) such as a universal handler. Then, the entire tray is aligned at a predetermined position with respect to the element inspection device (test device). Since the input / output terminals 4 are arranged on the tray with high accuracy, the contactor of the test head and the input / output terminal 4 can be immediately brought into contact by only aligning the tray 1. As a result, the element 2 is electrically connected to the test head and measurement becomes possible.

Incidentally, as the tray, it is necessary to prepare a dedicated tray provided with a storage section and an input / output terminal corresponding to the type of element, but these trays have a certain size regardless of the shape of the corresponding element, Since the device is formed in a shape, various devices can be handled by one device by handling the devices in this tray unit.

[Effects of the Invention] As apparent from the above description, in the present invention,
Since the tray is configured to a certain standard and the input / output terminals for the elements arranged accurately on the tray are formed, the element and the element inspection device (test device) can be individually aligned by aligning only the tray. The connection can be achieved without doing so, and the operation efficiency can be greatly improved. Moreover, by handling the elements on a tray-by-tray basis, it is possible to handle various elements with a single device, eliminating the need for a dedicated device according to the type of the element as in the past.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of an element storage tray of the present invention, and FIG. 2 is a diagram showing a conventional tray. 1 ... Tray 2 ... Element 3 ... Storage section 4 ... Input / output terminals

Claims (2)

[Claims] 1. A device storage tray for storing a plurality of devices set in a handler having contacts arranged for testing devices, the device storage tray having a predetermined shape corresponding to the handler. A storage portion for detachably storing a plurality of elements is provided, and the storage portion has an input / output terminal to which a terminal pin of the element is connected at a predetermined position corresponding to the arrangement of the contacts of the handler. The element storage tray is characterized in that the input / output terminal is electrically connected to a contact of the handler when the element storage tray is set in the handler. 2. The element storage tray according to claim 1, wherein the input / output terminals are terminals of a socket.