JPH06323714A - Cooling device - Google Patents

Abstract

(57) [Summary] [Purpose] To easily obtain a low-humidity environment of about -60 to -50 ° C, eliminate frost formation, and achieve cost reduction. A cooling box B, a first cooling function section 2 using a Peltier element 3p, which faces a cooling section 2c in an internal space S of the cooling box B, and a second cooling function section using a refrigerant circulation refrigeration cycle. 5, the heat radiating portion 2r in the first cooling function portion 2, and the heat exchanging portion 6 that performs heat exchange between the cooling portion 5c in the second cooling function portion 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling device suitable for use in environmental tests of IC parts and the like.

[0002]

2. Description of the Related Art Generally, when an environmental test is performed on IC parts and the like, the environmental temperature needs to be in the range of -50 to 100.degree.

Conventionally, as a cooling device used for such an environmental test, a cooling device mainly utilizing liquid nitrogen has been known. This type of device cools the internal space of a cooling box containing IC parts and the like by the heat of vaporization taken away when liquid nitrogen vaporizes, and has the advantage of requiring a relatively low initial cost, but running cost is low. As the cost increases, there is a problem that the environmental impact cannot be ignored.

On the other hand, a so-called freezer type cooling device using a refrigerant circulation type refrigeration cycle is also used, but the low temperature environment that can be obtained is about -40 ° C., and it is easy to obtain a low temperature environment below this. Not. In addition, there is a problem that a large amount of frost is generated and adhered, which easily adversely affects the sample to be subjected to the environmental test.

As described above, in the conventional cooling device, in particular, the cooling device using the refrigerant circulation type refrigeration cycle, a low temperature environment of -40 ° C. or less cannot be easily obtained, and a large amount of frost is generated and adhered. An additional device such as a defrosting device is required, which eventually leads to a cost increase.

The present invention solves the problems existing in the above-mentioned prior art, and it is possible to easily obtain a low temperature environment of about -60 to -50 ° C, no frost is generated, and the cost is reduced. The object is to provide a cooling device that can be achieved.

[0007]

A cooling device 1 according to the present invention
Is a cooling box B and an internal space S of this cooling box B
The first cooling function unit 2 using the Peltier element 3p, which the cooling unit 2c desires, the second cooling function unit 5 using the refrigerant circulation refrigeration cycle, the heat radiation unit 2r and the second cooling function in the first cooling function unit 2 It is characterized by comprising a heat exchange section (first heat exchange section) 6 for exchanging heat with the cooling section (first cooling section) 5c in the cooling function section 5.

Further, the cooling device 1 is provided with a dry air supply section 7 for supplying the dry air A into the internal space S of the cooling box B, and a second heat exchange for exchanging heat between the first cooling section 5c and the dry air A. It can be configured by providing the section 8. In addition, during the refrigeration cycle of the second cooling function unit 5, a selectable second cooling unit 5s for cooling the accessory portion Bs in the cooling box B is provided, and the first cooling unit 5c and / or the second cooling unit is provided. 5s
It is desirable to provide a selectable refrigerant bypass circuit 9 that switches the heating element to the heating state.

[0009]

According to the cooling device 1 of the present invention, the first cooling section 5c is cooled to, for example, about -40 ° C by the second cooling function section 5 using the refrigerant circulation type refrigeration cycle. On the other hand, the heat radiating part 2r of the first cooling function part 2 using the Peltier elements 3p is heat-exchanged with the first cooling part 5c via the first heat exchanging part 6, so that the heat radiating part 2r is also about -40 ° C. To be cooled. Further, since the Peltier elements 3p ... Have a relative temperature difference of about 30 ° C. between the heat radiating portion 2r and the cooling portion 2c due to its principle characteristic, the cooling portion 2c in the first cooling function portion 2 is obtained.
A low temperature of about −70 ° C. can be obtained. Therefore, the internal space S of the cooling box B is cooled to about −60 to −50 ° C. even if the cooling efficiency (cooling loss) is taken into consideration, and an ultralow temperature environment can be easily obtained.

On the other hand, the dry air A is supplied to the internal space S of the cooling box B by the dry air supply unit 7. At this time, the dry air A passes through the second heat exchange unit 8 and then the first cooling unit 5
Since it is heat-exchanged with c, the dry air A is pre-cooled to about −40 ° C. and then supplied to the cooling box B. Therefore, since the dehumidified dry air A is supplied to the cooling box B, the generation of frost is reliably prevented.

Since the selectable second cooling unit 5s is provided in the refrigerating cycle of the second cooling function unit 5, for example, by cooling the accessory part Bs in parallel when the cooling device 1 is started up. The space Bs alone can rapidly cool the accessory site Bs, where the initial cooling is delayed. Further, since the selectable refrigerant bypass circuit 9 is provided, by placing the first cooling unit 5c and the second cooling unit 5s in the heated state, it is possible to prevent frost from being generated due to a temporary factor such as when the door is opened.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, preferred embodiments according to the present invention will be described in detail with reference to the drawings.

First, the structure of the cooling device 1 according to the present invention will be described with reference to FIGS. 1 and 2.

Reference numeral B denotes a cooling box which is hermetically sealed by a heat insulating material and has an internal space S, and an opening / closing door Bd is provided on the front surface of the cooling box B. The cooling box B is used, for example, for an environmental test of IC parts and the like, and its size is about several tens of centimeters in length and width. In addition, a block-shaped attachment site Bs formed of aluminum or the like for setting the sample is provided inside. This accessory site Bs also includes a sample driving device and the like.

In the rear block Bb forming the rear surface of the cooling box B, as shown in FIG.
The first cooling function part 2, the first heat exchange part 6 and the second heat exchange part 8 are arranged in the accommodation recess 11. That is, the opening of the accommodation recess 11 is closed by the cooling plate 12, and the sealed heat exchange space 13 is provided inside thereof. A cooling medium passage 14 through which a cooling medium for a refrigerating cycle, which will be described later, flows is provided inside the cooling plate 12, and thereby constitutes the first cooling unit 5c. The coolant passage 1 provided in the cooling plate 12
4 is formed in a zigzag manner so as to be as long as possible. Also, the cooling plate 1 desired in the heat exchange space 13
By mounting a large number of fins 15 on the plate surface of No. 2, an air passage 16 through which the dry air A flows is formed inside the heat exchange space 13, and an inlet 17i is made to face the inlet side of this air passage 16. The outlet 17o faces the outlet side of the air passage 16. The outlet 17o and the internal space S are communicated with each other through the pipe 18. As described above, the second heat exchange unit 8 that exchanges heat between the first cooling unit 5c and the dry air A is configured.

On the other hand, the cooling plate 12 facing the internal space S
Is mounted on the plate surface of the first cooling function section 2 using a plurality of Peltier elements 3p ... And a cooling section (cooling surface) located on the opposite side of the first cooling function section 2. A large number of fins 19 ... Are attached to 2c, and the fins 19 ... As a result, the first heat exchange unit 6 that exchanges heat between the heat dissipation unit 2r and the first cooling unit 5c is configured. In addition, 20 is a fan (blower) which agitates the air in the internal space S.

On the other hand, 5 is a second cooling function section using a refrigerant circulation type refrigeration cycle. The second cooling function unit 5 is, as shown in FIG. 1, a main cooling circuit 21 shown by a solid line for cooling the internal space S of the cooling box B, and a dotted line for cooling the attached portion Bs inside the cooling box B. The auxiliary cooling circuit 22 shown in the figure and the refrigerant bypass circuit 9 shown in the alternate long and short dash line for preventing the formation of frost due to a temporary factor such as the opening of the door.

The main cooling circuit 21 constitutes a basic refrigeration cycle in which the refrigerant circulates by the compressor 25, the check valve 26, the first cooling section 5c, the expansion valve 27, the opening / closing valve 28 and the condenser 29. In this case, the connection to the first cooling unit 5c connects the pipe from the check valve 26 to the inlet of the refrigerant passage 14 shown in FIG. 2, and the pipe from the outlet of the refrigerant passage 14 to the expansion valve 27. On the other hand, the auxiliary cooling circuit 22 includes the check valve 31, the second cooling unit 5s, and the expansion valve 3
2, the check valve 31 is connected to the discharge side of the compressor 25, and the check valve 33 is connected between the condenser 29 and the check valve 28. On the other hand, the refrigerant bypass circuit 9 includes an opening / closing valve 35 connected to the return side of the compressor 25. The opening / closing valve 35 is connected between the expansion valve 27 and the first cooling section 5c via a capillary tube 36, and further opened / closed. The valve 35 is connected between the expansion valve 32 and the second cooling unit 5s via the capillary tube 37.

On the other hand, reference numeral 7 is a dry air supply unit, which is an air dryer 4 located in the preceding stage for cooling the supplied compressed air.
1, on-off valve 42, adsorption air dryer 4 located at the rear stage
3, a pressure reducing valve 44, a flow control valve 45, a flow meter 46,
The outflow side of the flow meter 46 is connected to the inflow port 17i of the air passage 16 provided in the cooling box B.

Next, the overall function of the cooling device 1 according to the present invention will be described.

First, the on-off valve 28 is opened and the on-off valves 33 and 3 are opened.
When 5 is closed and the compressor 25 is operated, the refrigerant circulates in the path of the refrigeration cycle, and the first cooling unit 5c in the second cooling function unit 5 is in a cooling state. Thereby, the first cooling unit 5c is cooled to about -40 ° C. On the other hand, when the Peltier elements 3p of the first cooling function unit 2 are energized, the cooling unit 2c enters a cooling state and the heat radiating unit 2r exchanges heat with the first cooling unit 5c via the first heat exchanging unit 6. Because
The heat dissipation part 2r is also cooled to about -40 ° C. Therefore, in the Peltier elements 3p, a relative temperature difference of about 30 ° C. is obtained between the heat radiating portion 2r and the cooling portion 2c, so that the cooling portion 2c of the first cooling function portion 2 can obtain a low temperature of about −70 ° C.

On the other hand, the dry air A is supplied to the internal space S of the cooling box B from the dry air supply unit 7. That is, the compressed air supplied is -10 ° C by the air dryer 41.
In addition to being cooled to a certain degree, the adsorption type air dryer 43 cools to an atmospheric pressure dew point of about −70 to −80 ° C., whereby dehumidified dry air A is obtained. The dry air A is supplied to the inflow port 17i of the air passage 16 provided in the cooling box B via the pressure reducing valve 44, the flow rate adjusting valve 45, and the flow meter 46, and flows out from the outflow port 17o through the air passage 16.
At this time, since the heat is exchanged with the second heat exchange section 8, that is, the first cooling section 5c, the dry air A is pre-cooled to about -40 ° C. Then, the dry air A is supplied to the internal space S of the cooling box B through the pipe 18 and the cooling unit 2c.
Are further cooled by the fins 19 ... In this case, the dry air A in the internal space S is agitated by the air blown by the fan 20. Therefore, since the cooling unit 2c is cooled to about −70 ° C., even if the cooling efficiency (cooling loss) is taken into consideration, the internal space S of the cooling box B is cooled to about −60 to −50 ° C., and the ultra low temperature environment. Can be easily obtained. Moreover, since the dehumidified dry air A is supplied, the generation of frost is reliably prevented.

On the other hand, by opening the on-off valve 33, the auxiliary cooling circuit 22 functions. That is, the second cooling unit 5s is in a cooling state, and the accessory portion Bs inside the cooling box B is directly cooled. Therefore, if the accessory part Bs is cooled in parallel when the cooling device 1 is started up, the accessory part Bs whose initial cooling is delayed only by the space cooling can be rapidly cooled. Also,
The refrigerant bypass circuit 9 functions by opening the opening / closing valve 35. That is, the first cooling unit 5c and the second cooling unit 5s are heated to prevent the generation of frost due to a temporary factor such as when the door is opened or when the dry air is stopped. In this case, the auxiliary cooling circuit 22
It is desirable that the refrigerant bypass circuit 9 be interlocked with another operation (operation) timing, for example, turning on of a power switch or door opening / closing operation so that the refrigerant bypass circuit 9 automatically functions when necessary. Note that the capillary tubes 36 and 37 in the refrigerant bypass circuit 9 may be individually opened / closed and controlled individually.

The embodiment has been described in detail above.
The present invention is not limited to such an embodiment,
The detailed configuration and method may be arbitrarily changed without departing from the scope of the present invention.

[0025]

As described above, the cooling apparatus according to the present invention uses the cooling box, the first cooling function section using the Peltier element desired by the cooling section in the internal space of the cooling box, and the refrigerant circulation refrigeration cycle. The second cooling function unit, the heat radiating unit in the first cooling function unit, and the heat exchanging unit (first heat exchanging unit) for exchanging heat between the cooling unit (first cooling unit) in the second cooling function unit. Therefore, it is possible to easily obtain a low temperature environment of about −60 to −50 ° C., no frost is generated, and it is possible to achieve cost reduction.

[Brief description of drawings]

FIG. 1 is a circuit diagram of a cooling device according to the present invention,

FIG. 2 is a sectional side view showing a part of a cooling box in the cooling device,

[Explanation of symbols]

 1 Cooling Device 2 First Cooling Function Part 2c Cooling Part 2r Radiating Part 3p Peltier Element 5 Second Cooling Function Part 5c Cooling Part (First Cooling Part) 5s Second Cooling Part 6 Heat Exchange Part (First Heat Exchange Part) 7 Dry air supply part 8 Second heat exchange part 9 Refrigerant bypass circuit A Dry air B Cooling box Bs Attached part S Internal space

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[Procedure amendment]

[Submission date] November 27, 1992

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] Claim 1

[Correction method] Change

[Correction content]

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0007

[Correction method] Change

[Correction content]

[0007]

A cooling device 1 according to the present invention
Is a cooling box B and an internal space S of this cooling box B
The first cooling function part 2 using the Peltier element 3p, which faces the cooling part 2c, the second cooling function part 5 using the refrigerant circulation type refrigeration cycle, the heat radiation part 2r and the second cooling function part 2 in the first cooling function part 2. It is characterized by comprising a heat exchange section (first heat exchange section) 6 for exchanging heat with the cooling section (first cooling section) 5c in the cooling function section 5.

[Procedure 3]

[Document name to be amended] Statement

[Name of item to be corrected] 0015

[Correction method] Change

[Correction content]

In the rear block Bb forming the rear surface of the cooling box B, as shown in FIG.
The first cooling function part 2, the first heat exchange part 6 and the second heat exchange part 8 are arranged in the accommodation recess 11. That is, the opening of the accommodation recess 11 is closed by the cooling plate 12, and the sealed heat exchange space 13 is provided inside thereof. A cooling medium passage 14 through which a cooling medium for a refrigerating cycle, which will be described later, flows is provided inside the cooling plate 12, and thereby constitutes the first cooling unit 5c. The coolant passage 1 provided in the cooling plate 12
4 is formed in a zigzag manner so as to be as long as possible. Further, the cooling plate 1 facing the heat exchange space 13
By mounting a large number of fins 15 on the plate surface of No. 2, an air passage 16 through which the dry air A flows is formed inside the heat exchange space 13, and an inlet 17i is made to face the inlet side of this air passage 16. The outlet 17o faces the outlet side of the air passage 16. The outlet 17o and the internal space S are communicated with each other through the pipe 18. As described above, the second heat exchange unit 8 that exchanges heat between the first cooling unit 5c and the dry air A is configured.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0016

[Correction method] Change

[Correction content]

On the other hand, the cooling plate 12 facing the internal space S
Is mounted on the plate surface of the first cooling function section 2 using a plurality of Peltier elements 3p ... And a cooling section (cooling surface) located on the opposite side of the first cooling function section 2. A large number of fins 19 ... Are attached to 2c, and the fins 19 ... Face the internal space S. As a result, the first heat exchange unit 6 that exchanges heat between the heat dissipation unit 2r and the first cooling unit 5c is configured. In addition, 20 is a fan (blower) which agitates the air in the internal space S.

[Procedure Amendment 5]

[Document name to be amended] Statement

[Name of item to be corrected] 0025

[Correction method] Change

[Correction content]

[0025]

As described above, the cooling apparatus according to the present invention uses the cooling box, the first cooling function section using the Peltier element in which the cooling section faces the internal space of the cooling box, and the refrigerant circulation refrigeration cycle. The second cooling function unit, the heat radiating unit in the first cooling function unit, and the heat exchanging unit (first heat exchanging unit) for exchanging heat between the cooling unit (first cooling unit) in the second cooling function unit. Therefore, it is possible to easily obtain a low temperature environment of about −60 to −50 ° C., no frost is generated, and it is possible to achieve cost reduction.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Masato Ito Masato Ito 3967, Nishinamihara, Wada, Matsumoto city, Nagano 29 Shinano Electronics Co., Ltd. (72) Ryoji Sakata 1503-17 Hirashiba, Nagano, Nagano Prefecture (72) ) Inventor Yoshishige Ueki 175 Nishi-Nagano, Nagano-shi, Nagano (72) Inventor Fumitake Nishiyama 2-2-3 Tambajima, Nagano-shi, Nagano

Claims (5)

[Claims] 1. A cooling box, a first cooling function section using a Peltier element desired by the cooling section in an internal space of the cooling box, a second cooling function section using a refrigerant circulation type refrigeration cycle, and a first cooling function. A cooling device comprising a heat exchanging section (first heat exchanging section) for exchanging heat between a heat radiating section in the functional section and a cooling section (first cooling section) in the second cooling functional section. 2. The cooling device according to claim 1, further comprising a dry air supply unit for supplying dry air to the internal space of the cooling box. 3. The cooling device according to claim 2, further comprising a second heat exchanging unit for exchanging heat between the first cooling unit and the dry air. 4. The cooling device according to claim 1, further comprising a selectable second cooling unit that cools an accessory part in the cooling box during the refrigeration cycle of the second cooling function unit. 5. The refrigerating cycle of the second cooling function part is provided with a selectable refrigerant bypass circuit for switching the first cooling part and / or the second cooling part to a heating state. Cooling system.