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JPH06131648A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH06131648A
JPH06131648A JP30467092A JP30467092A JPH06131648A JP H06131648 A JPH06131648 A JP H06131648A JP 30467092 A JP30467092 A JP 30467092A JP 30467092 A JP30467092 A JP 30467092A JP H06131648 A JPH06131648 A JP H06131648A
Authority
JP
Japan
Prior art keywords
magnetic
recording medium
magnetic recording
layer
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30467092A
Other languages
Japanese (ja)
Inventor
Hideyuki Ishiguro
秀之 石黒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Artience Co Ltd
Original Assignee
Toyo Ink Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Ink Mfg Co Ltd filed Critical Toyo Ink Mfg Co Ltd
Priority to JP30467092A priority Critical patent/JPH06131648A/en
Publication of JPH06131648A publication Critical patent/JPH06131648A/en
Pending legal-status Critical Current

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  • Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】 【目的】情報記録機器や、音響あるいは映像機器等に利
用することのできるフレキシブルディスク(以下FDと
略す)やテープとなる高密度の垂直磁気記録に適した二
層膜磁気記録媒体を得ることである。 【構成】非磁性体と、その上にもうけられたFeを主成
分とする第1磁性層と、その上のCo−Crを主成分と
する第2磁性層とを有する磁気記録媒体におけて、第1
磁性層が重量比で1.0重量%から3.0重量%までの
Si及び10重量%から20重量%のNiを同時に含む
ことを特徴とする磁気記録媒体。
(57) [Abstract] [Purpose] A double-layered magnetic film suitable for high density perpendicular magnetic recording such as a flexible disk (hereinafter abbreviated as FD) or tape that can be used for information recording equipment, audio or video equipment, etc. To obtain a recording medium. A magnetic recording medium having a non-magnetic material, a first magnetic layer containing Fe as a main component and a second magnetic layer containing Co—Cr as a main component, which is formed on the non-magnetic body. , First
A magnetic recording medium, wherein the magnetic layer simultaneously contains 1.0 to 3.0% by weight of Si and 10 to 20% by weight of Ni at the same time.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気記録媒体に関す
る。さらに詳しくは、情報記録機器や、音響あるいは映
像機器等に利用することのできるフレキシブルディスク
(以下FDと略す)やテープとなる高密度の垂直磁気記
録に適した二層膜磁気記録媒体に関する。
FIELD OF THE INVENTION The present invention relates to a magnetic recording medium. More specifically, the present invention relates to a double-layer magnetic recording medium suitable for high-density perpendicular magnetic recording, which is a flexible disk (hereinafter abbreviated as FD) or tape that can be used in information recording devices, audio or video devices, and the like.

【0002】[0002]

【従来技術】垂直磁気記録方式は、短波長記録特性の優
れた磁気記録方式である。これは、磁気記録媒体の膜面
に対して垂直方向に媒体を磁化させるものである。従っ
て、本方式では、媒体面の垂直方向に残留磁化が残る垂
直磁化膜を用いる必要がある。垂直磁化膜としては、コ
バルト(以下Coと略す)とクロム(以下Crと略す)
を主成分とするCo−Cr合金膜が優れた特性を持って
いる。一方、主磁極励磁型ヘッドを用いて、高密度記録
を行うためには、Co−Cr合金膜内部で磁束の集中が
必要であり、そのため裏打ち層(以下B.L.と略す)
として軟磁性層を設ける。軟磁性B.L.としてはパー
マロイ(例えば重量比で80Ni+20Feの合金)を
用いる。各々の膜厚は、Co−Cr合金膜が、0.1μ
m、軟磁性B.L.0.5μmである。上記膜厚におい
て最も優れた高密度記録がなされる。従来の垂直磁気記
録媒体は、耐熱性高分子材料(例えばポリイミドフィル
ム)である基板上にB.L.として0.5μm程度のパ
ーマロイ層、その上に、垂直磁化膜としてのCo−Cr
層が0.1μm程度形成されている。
2. Description of the Related Art The perpendicular magnetic recording system is a magnetic recording system having excellent short wavelength recording characteristics. This is to magnetize the medium in the direction perpendicular to the film surface of the magnetic recording medium. Therefore, in this method, it is necessary to use a perpendicular magnetization film in which residual magnetization remains in the direction perpendicular to the medium surface. As the perpendicular magnetization film, cobalt (hereinafter abbreviated as Co) and chromium (hereinafter abbreviated as Cr)
The Co-Cr alloy film containing as a main component has excellent characteristics. On the other hand, in order to perform high-density recording using a main pole excitation type head, it is necessary to concentrate magnetic flux inside the Co—Cr alloy film, and therefore the backing layer (abbreviated as BL below) is required.
As a soft magnetic layer. Soft magnetic B. L. For this, permalloy (for example, an alloy of 80Ni + 20Fe in weight ratio) is used. Co-Cr alloy film has a thickness of 0.1 μm
m, soft magnetic B. L. It is 0.5 μm. Highest density recording is achieved with the above film thickness. A conventional perpendicular magnetic recording medium is a B.P.O. film on a substrate which is a heat resistant polymer material (for example, a polyimide film). L. As a permalloy layer having a thickness of about 0.5 μm, and Co--Cr as a perpendicular magnetization film formed on the permalloy layer.
The layer is formed to have a thickness of about 0.1 μm.

【0003】[0003]

【発明が解決しようとする課題】しかし、上記のよう
に、B.L.としてのパーマロイ層を0.5μm形成す
る場合、次の問題が発生した。第1に、DCマグネトロ
ン式高速スパッタ法により、垂直磁気記録媒体を製造す
る場合、その膜堆積速度が、およそ、20Å/secで
ある。一方、パーマロイを0.5μm形成させるために
は、およそ、250秒間、基板をプラズマにさらす必要
があり、製膜に長い時間を要するという問題があり、高
速で媒体の作製を行うことが困難である。長時間プラズ
マにさらされた基板は温度が高くなり、製膜されたパー
マロイ層の抗磁力は高く、透磁率は小さくなり軟磁気特
性の性質は失ってしまう。
However, as described above, the B. L. When the permalloy layer of 0.5 μm was formed, the following problems occurred. First, when a perpendicular magnetic recording medium is manufactured by the DC magnetron high-speed sputtering method, the film deposition rate is about 20Å / sec. On the other hand, in order to form permalloy of 0.5 μm, it is necessary to expose the substrate to plasma for about 250 seconds, which requires a long time for film formation, which makes it difficult to manufacture a medium at high speed. is there. The temperature of the substrate exposed to plasma for a long time becomes high, the coercive force of the formed permalloy layer becomes high, the magnetic permeability becomes small, and the soft magnetic property is lost.

【0004】第2に、Co−Cr層とパーマロイ層の合
わせた金属の膜厚が0.6μm以上あり、たとえばテー
プ媒体などにした場合、フレキシブル性が落ちる。第3
に、ハイビジョン対応型テープにした場合、記録量が多
いいためテープ量が長くなり、膜厚が厚い媒体ではカセ
ットテープの小型化が難しい。第4に、単にパーマロイ
層の製膜速度を短くするために高電力を投入し堆積速度
を速くした場合、パーマロイ層の抗磁力が大きくなる。
第5に、優れた軟磁気特性を示す第1磁性層としてFe
−Siなどを用いるとその上に製膜されたCo−Cr膜
の結晶が良好なものが得られず、高記録密度媒体として
は適さない。本発明は、上記問題点、すなわち、B.
L.としてのパーマロイやFe−Si層によって発生す
る多くの問題を解決することを目的とするものである。
Secondly, the combined metal thickness of the Co--Cr layer and the permalloy layer is 0.6 μm or more, which reduces flexibility when used as a tape medium, for example. Third
In addition, when a high-definition type tape is used, the amount of recording is large, so the amount of tape is long, and it is difficult to miniaturize the cassette tape when the medium is thick. Fourth, if high power is applied to increase the deposition rate simply to reduce the film forming rate of the permalloy layer, the coercive force of the permalloy layer increases.
Fifth, Fe as the first magnetic layer exhibiting excellent soft magnetic characteristics
If —Si or the like is used, a Co—Cr film formed on it cannot have good crystals, and is not suitable as a high recording density medium. The present invention has the above-mentioned problems, namely, B.
L. The object is to solve many problems caused by the permalloy and the Fe-Si layer.

【0005】[0005]

【課題を解決するための手段】上記の目的を達成するた
めの本発明の特徴は、非磁性基板体とその上にもうけら
れるFeを主成分とする第1磁性層とその上のCo−C
rを主成分とする第2磁性層とを有する磁気記録媒体に
おいて、前記第1磁性層が重量比で1.0重量%から
3.0重量%までのSiと10重量%から20重量%の
Niを含む磁気記録媒体にある。
The features of the present invention for attaining the above object are that a non-magnetic substrate, a first magnetic layer containing Fe as a main component and a Co--C layer on the non-magnetic substrate.
In a magnetic recording medium having a second magnetic layer containing r as a main component, the first magnetic layer comprises 1.0% by weight to 3.0% by weight of Si and 10% by weight to 20% by weight. In a magnetic recording medium containing Ni.

【0006】磁気記録媒体の基板としては、プラスッチ
クフィルム、ガラス板等をあげることができる。プラス
ッチクフィルムとして具体的には、ポリイミドフィル
ム、ポリエチレンテレフタレート(PET)、ポリアミ
ドフィルムをあげることができる。第1層としてFe以
外を主成分にした場合、飽和磁化密度が小さくなってし
まうためにB.L.の膜厚を厚くする必要があり、薄く
すると記録再生した際に再生出力は小さい。
The substrate of the magnetic recording medium may be a plastic film, a glass plate or the like. Specific examples of the plastic film include a polyimide film, polyethylene terephthalate (PET), and a polyamide film. When a material other than Fe is used as the main component for the first layer, the saturation magnetization density becomes small, and thus the B. L. It is necessary to thicken the film thickness, and if it is thinned, the reproduction output when recording and reproducing is small.

【0007】第1磁性層でNiの重量比が1.0重量%
未満3.0重量%よりも大きい場合軟磁性の性質が失わ
れる欠点がある。Niの含有量が10重量%未満20重
量%よりも多いとその上の第2磁性層のCo−Crの結
晶が乱れ、再生出力が小さくなる欠点を生じる。第1磁
性層の厚みは0.1μm〜0.4μmが望ましく、0.
1μm以下では再生電圧低過ぎ、0.4μm以上におい
ては、特に磁気記録媒体の基板にプラスッチクフィルム
を用いた場合にフレキシビリを損なう。また、第1磁性
層の抗磁力が100Oe以下である場合、再生出力が小
さくなる欠点を生じる。
The weight ratio of Ni in the first magnetic layer is 1.0% by weight.
If it is less than 3.0% by weight, the soft magnetic property may be lost. If the content of Ni is less than 10% by weight and more than 20% by weight, the Co—Cr crystal of the second magnetic layer thereover is disturbed, resulting in a drawback that the reproduction output becomes small. The thickness of the first magnetic layer is preferably 0.1 μm to 0.4 μm,
If it is 1 μm or less, the reproducing voltage is too low, and if it is 0.4 μm or more, the flexibilization is impaired especially when a plastic film is used as the substrate of the magnetic recording medium. In addition, when the coercive force of the first magnetic layer is 100 Oe or less, the reproduction output becomes small.

【0008】[0008]

【実施例】【Example】

実施例1〜3 バッチ式スパッタリング装置でマグネトロン式直流スパ
ッタ装置を用い、真空槽内を真空に排気し、基板を20
0℃に加熱、脱ガス処理した後、スパッタリング前に、
3×10-7Torr以下に排気し基板温度を150℃に
加熱し、高純度アルゴンガスを導入して、磁気記録媒体
の基板には厚さ40μmのポリイミドフィルムを用いて
表1に示す組成のFe−Ni−Si膜を作成しさらに基
板温度を150℃でCo−Cr層(80:20で0.1
μm)を製膜し、磁気記録媒体を得た。媒体の電磁変換
特性は3.5インチのフロッピーディスクに切り出し、
ディスク評価装置(主磁極励磁極ヘッドであり、主磁
極:CoZrNb(Bs=125000Gauss)、
主磁極膜厚0.3μm、トラック幅100μm、捲線数
50Turns、相対速度2m/Sec)にて測定し
た。
Examples 1 to 3 Using a magnetron type DC sputtering device in a batch type sputtering device, the inside of the vacuum chamber was evacuated to a vacuum and the substrate was set to 20.
After heating to 0 ° C and degassing, before sputtering,
Exhaust to 3 × 10 −7 Torr or less, heat the substrate temperature to 150 ° C., introduce high-purity argon gas, and use a polyimide film having a thickness of 40 μm for the substrate of the magnetic recording medium to obtain the composition shown in Table 1. An Fe-Ni-Si film is formed, and the substrate temperature is 150 ° C.
to form a magnetic recording medium. The electromagnetic conversion characteristics of the medium are cut out to a 3.5 inch floppy disk,
Disk evaluation device (main magnetic pole excitation magnetic pole head, main magnetic pole: CoZrNb (Bs = 125000 Gauss),
The main magnetic pole film thickness was 0.3 μm, the track width was 100 μm, the number of windings was 50 Turns, and the relative speed was 2 m / Sec).

【0009】比較例1〜4 実施例1と同様にして表1に示す磁気記録媒体を得た。
また、同様にして、媒体の電磁変換特性を測定した。
Comparative Examples 1 to 4 Magnetic recording media shown in Table 1 were obtained in the same manner as in Example 1.
Also, the electromagnetic conversion characteristics of the medium were measured in the same manner.

【0010】[0010]

【表1】 [Table 1]

【0011】[0011]

【発明の効果】本発明により、次のような効果が確認さ
れた。(1)B.L.の効果を損なうことなく、B.
L.の膜厚を薄くすることができる。(2)B.L.の
上に製膜したCo−Cr層の結晶性は従来のパーマロイ
層の上に作製するよりも良好な膜になることが判った。
よって、記録再生したときに高い記録密度で高い再生電
圧が得られる。
According to the present invention, the following effects have been confirmed. (1) B. L. Without impairing the effect of B.
L. The film thickness can be reduced. (2) B. L. It was found that the crystallinity of the Co-Cr layer formed on the above film is better than that formed on the conventional permalloy layer.
Therefore, when recording / reproducing, a high reproducing voltage can be obtained with a high recording density.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】非磁性体と、その上にもうけられたFeを
主成分とする第1磁性層と、その上のCo−Crを主成
分とする第2磁性層とを有する磁気記録媒体におけて、
第1磁性層が重量比で1.0重量%から3.0重量%ま
でのSi及び10重量%から20重量%のNiを同時に
含むことを特徴とする磁気記録媒体。
1. A magnetic recording medium having a non-magnetic material, a first magnetic layer containing Fe as a main component, and a second magnetic layer containing Co—Cr as a main component, which is formed on the non-magnetic material. Okay,
A magnetic recording medium, wherein the first magnetic layer simultaneously contains 1.0 wt% to 3.0 wt% Si and 10 wt% to 20 wt% Ni in weight ratio.
【請求項2】第1磁性層の抗磁力が100Oe以下であ
る請求項1記載の磁気記録媒体。
2. The magnetic recording medium according to claim 1, wherein the coercive force of the first magnetic layer is 100 Oe or less.
【請求項3】第1磁性層が0.1から0.4μmである
請求項1ないし2いずれか記載の磁気記録媒体。
3. The magnetic recording medium according to claim 1, wherein the first magnetic layer has a thickness of 0.1 to 0.4 μm.
JP30467092A 1992-10-16 1992-10-16 Magnetic recording medium Pending JPH06131648A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30467092A JPH06131648A (en) 1992-10-16 1992-10-16 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30467092A JPH06131648A (en) 1992-10-16 1992-10-16 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH06131648A true JPH06131648A (en) 1994-05-13

Family

ID=17935815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30467092A Pending JPH06131648A (en) 1992-10-16 1992-10-16 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH06131648A (en)

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