JPH05508744A - A method for moving a product having a plurality of pores during its wet chemical treatment, for example during electroplating, and an apparatus for carrying out the method - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] A workpiece with multiple pores is moved during its wet chemical process, e.g. during electroplating. method and apparatus for carrying out the method [Technical field] First of all, the present invention is directed to the form described as a generic concept in claim 1 of the claims. It is about law.

[Background technology] Conventionally, processing was performed while the product remained in the processing station (processing bath). The product to be processed is transferred through the product support by a rod guided along the bath. Stroke length perpendicular to the plane from 2x10 to 2x40mm and about 20 per minute The processing was done by making it reciprocate with a double stroke. This product Multiple products to be processed, especially plate-like products such as printed wiring boards, by "motion" cleaning the pores of the residues and, in particular, the residues formed in said pores based on chemical treatment. Efforts have been made to remove air bubbles.

However, the known methodological measures mentioned above are often insufficient and , the ratio of plate thickness (especially printed wiring board thickness) to hole diameter exceeds a value of 8:1. It has been found that this is particularly insufficient when the so-called aspect ratio is greater than 8+1. It was.

A plate coated with a steel layer connected with a DC power source in the direction of its plane It is known from U.S. Pat. No. 4,875,982 to move up and down with Ru. However, the above movement causes the hole in the printed wiring board to to flow the electrolyte through the pores of the product to be treated by a pump. It is only useful. This known measure therefore provides the means of the invention as defined in claim 1. Any points of contact with the steps and other features, in particular the method measures defined in claim 8. Also, U.S. Pat. No. 3,461,045 describes A method of moving a mold made of wax is described, in which the mold is moved every minute in an electrolyte. This vibration is similar to that related to the known product movement mentioned above. Not only is the frequency even lower than that previously discussed as prior art. have. Therefore, the present invention can be easily deduced based on this second known document. According to German Patent Application No. 3195313, it is not possible to do so. , shaking to release air bubbles adhering to the surface of the plate to be electroplated. The shaking motion method is described. However, in this known document, the plate to be processed is The meaning of the present invention, which will be described later, is achieved by making an oscillating movement in the direction of the longitudinal axis of the plurality of holes. No suggestions are disclosed for allowing proper flow of electrolyte through the holes. not present.

[Disclosure of invention] The first problem or set problem to be solved by the present invention is summarized in claim 1. As a precaution, methodological measures of the type described may be modified to remove debris and air bubbles from the pores. In order to ), in particular to ensure that any remaining residue and/or air bubbles are removed. It is to do so. In this case, especially the abbreviation HARB (high aspect ratio board) The processing of printed wiring boards with multiple holes, as is known, is taken into consideration. There is. Another challenge is to improve the exchange of processing liquid inside the pores.

The present invention, starting from the generic concept set forth in claim 1, first solves the above problem in claim 1. This problem is solved by the configuration means described as the characteristic part. The aspect ratio is greater than 8:l Even if there is, it is clear that the above problem can be solved by shaking the product to be processed. . The oscillation frequency must have at least the value stated in claim 1.

In contrast, the oscillation frequency may be significantly higher. The oscillation frequency is 50Hz. The amplitude of this oscillating motion is relatively small; In principle, the maximum size is 2 mm, but in some cases it may be larger, i.e. The maximum diameter may be 3 mm. In this case, the processing liquid is powerful inside the pores of the product A change will take place. Air bubbles resulting from the electro-chemical process are removed from the pore passages. It will be done. The shaking motion acts only on the product to be processed and the members supporting the product, and the device Advantageously, no permanent components of the device are affected.

In order to enhance the effects of the present invention, one or more of the It is possible to combine methodological measures.

By rotating or rotating the product to be treated as described in claim 2, the product to be treated can be The angle between the longitudinal axis of the hole in the product and the direction of the rocking motion is changed. This angle change This facilitates the removal of air bubbles from the pores. Furthermore, this also allows for mutual spacing. The exchange of the processing liquid between the plate-shaped parts of the product to be processed is promoted. As a result, replacement of the processing liquid within the hole is further promoted.

The aforementioned advantages or effects are also obtained by the method measures defined in claim 3.

In this case, the tilt position can be chosen at different angles depending on the desired result. .

For example, the vertical axis of the hole extends almost vertically, and the oscillating motion occurs approximately in the direction of the vertical axis. In this case, the buoyancy of air bubbles in the processing liquid is utilized to the maximum extent Air bubbles are particularly easily separated from the pore walls.

Similarly, the means described in claim 4 also eliminates air bubbles from the surface or pore walls of the product to be treated. Makes peeling easier. Equivalents apply to the methodological means recited in claims 5 and 6. This also applies. Passing different frequency bands is especially useful for bubble separation. It was found to be advantageous.

The method measures as set forth in claims 8 and 9 are based on the novel oscillating movement of the present invention and the background art. For example, 20 double strokes per minute and and slow reciprocating motion (“product movement”) with suitable amplitude values, e.g. 2XIQ to 2x40mm. ”).

The second problem or set problem to be solved by the present invention is the above-mentioned claim 1. The object of the present invention is to provide an apparatus for carrying out the method described in 9. to 9. In addition to eliminating the drawbacks mentioned in the description of the technique, the oscillating motion of the present invention allows the processing device to remain stationary. The aim is to sufficiently avoid transmission to the equipment, especially the processing bath.

The present invention, starting from the generic concept set forth in claim 1O, first solves the above problem by solving the problem described in claim 1. This problem is solved by the configuration means described as a characteristic part in 0. Corresponding to the method mentioned above By defining the position of the vibration generator in such a manner that the vibration of the vibration generator is almost exclusively It reaches only the product to be treated, and does not reach the fixed and permanent parts of the treatment equipment, especially the treatment bath. Claims JJ not communicated at all or only a little! ! Corresponding to the idea described in 1. The main direction of the vibrations induced by the vibration generator extends in the direction of the holes in the product to be treated. , in other words, the vibration generator is used to attach the product to be processed to the mechanism or support mechanism. It is arranged to vibrate in the direction of the longitudinal axis of the hole in the product. In this case, for example, By rotating the product to be treated using a screwdriver, etc., as explained above, the holes are By adopting suitable methodological means such as constantly changing the position, the shaking It is also possible that the direction of movement occupies a predetermined angle with respect to the longitudinal axis of the hole. It is Noh. As will become clearer from the description of the embodiments below, the vibration generator is For example, parts of the product to be treated can be accommodated at different locations between the product support and the product to be treated. Support bars for processing cages, support racks, product support rails, and other parts for processed products It can be attached to a holding member or a supporting member. All of the above of vibration generator In the mounting mode, the vibration generator is installed on the component where the product to be treated is located. There are no mechanical contacts that directly transmit vibrations to the product being processed. Existing.

[Brief explanation of the drawing] FIG. 1 is a side view, partially in section, of a first embodiment of the present invention.

FIG. 2 is a partial view taken in the direction of arrow II in FIG.

FIG. 3 is a view taken in the direction of arrow III in FIG.

FIG. 4 is a plan view taken in the direction of arrow Iv in FIG.

Figure 5 is approximately similar to Figure 2 with additional contact elements and shown in the state before lowering of the product support. FIG.

FIG. 6 is a view showing the product support shown in FIG. 5 in a state after being lowered.

FIG. 7 is a side view of a second embodiment of the invention.

Figure 8 shows a support member or support frame member having means for mounting a printed wiring board in an inclined position. It is a figure which shows another Example of this invention comprised.

FIG. 9 is a detailed perspective view of FIG. 8 with the printed wiring board removed.

FIG. 10 is a schematic plan view of another embodiment of the invention.

FIG. 11 is a schematic front view of a further embodiment of the invention.

C Best Mode for Carrying Out the Invention Next, embodiments of the present invention will be explained in detail based on the drawings.

However, the drawings shown in a highly schematic manner do not show the constituent parts necessary for explaining the present invention. These are only shown in the diagram, and are necessary to operate this type of wet chemical processing equipment. Other necessary known components and devices have been omitted from illustration.

FIG. 1 shows a processing bath l of a processing station 2, through which a The product to be processed 3 (in this example, a printed wiring board with a plurality of holes) is transported in the transport direction 4. be allowed to pass. The illustration of the holes has been omitted for drawing reasons. longitudinal axis of the hole extends as indicated by reference numeral 5. The ratio of the wall thickness of the printed wiring board 3 to the hole diameter is Particularly preferably greater than 8:l. As a general rule, multiple processing is possible in 4 transport/processing directions. Stations 2 are arranged one after the other. Processing liquid (the processing liquid is a cleaning liquid) ) is indicated schematically by the reference numeral 6.

The product support 7 provided here (see also Figures 2 to 4) is a product support It consists of a rail 8 and a support arm 9 that holds the product support rail. The support arm At the upper bending part 9' of 9, there is a lifting device lO (only shown as a chain line in the drawing). engaged, the lifting device moves the forked end 9' of the support arm 9 into a so-called guide of the treatment bath. 11, and then the product to be treated is pulled out of the treatment bath and transferred to the next treatment station. It has the function of transporting it to the station and lowering it there. The product to be processed is in a geobath (see Figures 1 to 5 and Figures 8 and 9), the A vibration generator comes into play.

In the embodiment shown in FIGS. 1 to 4, the vibration generator 12 is located in the direction indicated by the double arrow 13. Generates #s vibration motion in the direction.

This oscillation direction is substantially horizontal. The vibration generator 12 is a product support in this embodiment. It is attached to the holding rail 8. In addition, in this embodiment, as can be seen from FIGS. 2 and 4, Several vibration generators, in this example two vibration generators 12, are mounted on each product support at mutual intervals. It is provided on the holding rail 8. This extends the entire length of each product support rail 8. It is possible to obtain a uniform shaking action. If necessary, use more than two Place the dynamic generators on the product support rails, possibly at different distances from each other. Also, keep an appropriate distance from the 1ili end of the product] +-)+-8. The so-called "vibration antinode" and [ It is also possible to avoid the occurrence of "nodes of vibration" and to adjust each product support rail. 8 to m oscillatory motion is applied to a product 3 to be processed, such as a printed wiring board shown schematically. The signal is transmitted to each support frame 14 attached by a pump 15 or the like. Incidentally, vibration occurs Depending on the type of device 12, not only vibrations extending parallel to the direction of the double arrow 13 but also It is possible to generate vibrations that are also transmitted to the processed product.

The oscillating motion generated by the present invention is completely or minimally (but mostly) Appropriate measures have been taken to ensure that transmission is not transmitted to fixed and permanently installed parts of the equipment. There is. This is, for example, extremely elastic in the direction of the oscillating movement indicated by the double arrow 13. For example, the product support rail 8 may have a thin cross-section as can be seen in particular from FIG. obtained by configuring. Therefore, the long side is perpendicular to the direction of the oscillating motion. This thin-walled cross-section extending through can easily be elastically deflected in the direction of the oscillating motion. can. Based on this, together with the elastic modulus of the material used for the product support rail, vibration generation The vibrations of the generator 12 are transmitted exclusively, or almost exclusively, to the product support rail, and thus to the product support rail. from the product support rail to the processed product held by it. Ru. Alternative measures for isolating vibrations as described above from fixed and permanently installed parts of the processing equipment According to the above, the guide part 11 is mounted on a bar 17 with an elastic support part 27, which will be explained in detail below. It is also possible to support it via a

The vibration generator is particularly advantageously driven by an electric motor 16, which is shown schematically. . The transmission of current is carried out by the contacts shown in Figures 5 and 6, which It is closed when the arc-like layer 9' overlies and engages each guide portion 11. this For this purpose, the product support 7 is lowered into the processing station 2 as indicated by the arrow 27 in FIG. It will be lowered. The support of the product support 7 [9 has an upper contact part 28 and also a geostationary The version 2 is provided with a corresponding lower contact portion 29. The above descending operation is completed. This means that the product to be treated is located in the treatment bath 6 as shown in FIG. As soon as the lower end position is reached, the upper and lower contact parts 28, 29 come into contact with each other. chain line In this case, as shown at 30, current is supplied to the electric motor 16 of the vibration generator. ing. In short, the closing of the contacts and, in turn, the starting of the vibration generator 12 is performed when the product to be treated is This is done automatically when the treatment bath 6 is loaded. Also, the product to be treated is removed from the treatment bath. Once released, the contacts are again automatically reopened. Electromagnetic instead of electric motor A similar contact device can also be provided when a vibration generator is employed. deer However, it is also possible to generate vibrations non-electrically2, for example by compressed air.

Furthermore, each of them obtains acceleration values of different strengths and acts alternately in various different directions. It is also possible to provide a vibration generator (not shown). For example in one direction The electromagnet attracts the product support rail 8, whereas when the electromagnet is interrupted, The product support rail is moved back again by the spring, then the electromagnet is activated again, and so on. It is. By properly harmonizing both vibration generators, it is possible to place a point in the hole of the product being treated. It is possible to generate a pumping action and force the air bubbles out of the pores to a certain extent.

The size of the unbalanced body of the vibration generator and its frequency will depend on the circumstances or requirements of each case. is adapted to. As already mentioned, the vibration frequency can be changed continuously or discontinuously. It is also possible to change the vibration frequency by repeatedly turning the vibration generator on and off. It is also possible.

Slowness due to the extremely low frequency of approximately 20 double strokes per minute of the product to be treated When attempting to perform a rocking motion in conjunction with a reciprocating motion (see the beginning of the FIA specifications), (See also the explanation of the reciprocating motion of The bar is moved in the direction of the double arrow 13 as described above by a device not shown. It is caused to reciprocate in its longitudinal direction and relative to the barber bath 1.

Since the guide g11 is fixedly connected to the bar 17, its movement is controlled by the processed object. Communicate to product 3.

In the embodiment of FIG. 7, a product support rail 8 with support arms 9 and a support bar 18 are shown. The support bar is suspended from the product support rail 8 and is supported by a support 19. Holds a processing cage 20 for accommodating a plate-shaped processed product 3 that has been folded together. are doing. For plate-shaped processed products such as printed wiring boards, the processing liquid is applied between the plates. They have a predetermined mutual spacing to allow flow through. Vibration generator 1 2 is attached to the support bar 18 together with the exercise device 16. By the way, Figures 1 to 4 It is also possible to appropriately adopt the configuration and variation described in this example. . In short, the structure, application means and processing described in one of the aforementioned embodiments It is in principle possible to provide the means in another embodiment as well.

As described above, the high frequency mm motion of the present invention and the oscillating motion by the bar 17 are When combining low frequency reciprocating motion 1. Appropriate effect can be obtained by superimposing both vibrations. (high leg wave) occurs.

The processing cage 20 has one rotational axis, in this example, a rotational axis 21 extending in the horizontal direction. It is pivotable or pivotable in the direction of one or both arrows 22,23.

In this case, the movement of the plate-shaped buried product 3 obtained by this is double as above. This is superimposed on the oscillating motion by the vibration generator 12 performed in the direction of the arrow 13. this Based on the strong alternating action of the treatment liquid in the interstices between the individual plates, and thus Also, a strong flow-through cleaning of the pores of the plate and separation or release of air bubbles results.

This is especially true if the aforementioned rotation or pivoting causes the holes in the plate to always extend horizontally. Periodically diagonal or perpendicular to the horizon, rather than achieved by.

FIG. 8 shows that the holder 25 of the support frame 14 has a holder 25 that extends obliquely with respect to the perpendicular line. Possible tilting of the processed product 3 (also a plate) held by the lot 24 The location is illustrated. For this purpose, both edges of the plate are inserted into the slot 24. 9, secured by clamp screws etc. as required, as shown in Figure 8, especially Figure 9. As can be seen from the embodiment shown, the struts extend obliquely to the longitudinal axis of the support frame 14. Three holders 2 located one above the other with lots 24.24' and 24' 5, and each of said slots are aligned on the same slope line with each other. Each holder 25 is designed to accommodate the side edge of one plate-shaped product 3. In the nine examples in which the plates are staggered from each other, the plates as the product to be processed 3 are placed vertically. The vertical axis of the hole to be cleaned is also parallel to the horizontal line. and are arranged so as to be inclined accordingly, in which case the plate 3 undergoes an oscillating movement. It is arranged perpendicular to direction 13.

In FIG. 10, unlike the previous embodiment, the plate-shaped processed product 3 is moved in the direction of oscillating motion 1. The principle diagram shows a change mode that occupies an inclined position forming an acute angle α with respect to 3. It is. This configuration means allows the flow of the processing liquid in the gap 26 between the plates. This also makes it easier to replace the processing liquid. Oblique positions shown in Figures 8 and 9 and Figure 10 It is also possible to provide a combination of the oblique positions shown in .

In FIG. 11, a vibration generator 1 is placed between two support racks 14 suspended on product support rails 8. 2 are illustrated. The vibration generator 12 is mainly The arrangement is such that the vibrations extend in a direction perpendicular to the drawing plane of FIG. sign 3 indicates a ribbed-like processed product.

All configuration means illustrated above are included in this document unless clearly stated as publicly known. It falls within the scope of the idea of the invention.

Ta L ヱ to( 5 and 1 LL mutual Public Yo L ■ShiU Summary book The present invention firstly provides a method for reciprocating a product having a plurality of pores during its wet chemical process. It is about how to exercise. Especially when the ratio of product wall thickness to hole diameter is unfavorable. However, in order to be able to remove any residue and/or air bubbles that may still remain in the hole, Furthermore, in the present invention, the product to be treated (3) is shaken with vibrations having a frequency of at least 4 to 5 Hz. the direction of vibration is at least partially and/or temporarily aligned with the longitudinal axis (5) of the hole. direction, and the oscillating motion is applied only to the supporting part of the product to be treated, or or at least primarily on the supporting portion. , an apparatus for carrying out the method in the form of a plurality of processing stations arranged one after the other; The problem with this device is to eliminate the shortcomings of known configurations and to The transmission of the above-mentioned oscillating motion to the fixed and permanently installed parts of the control equipment should be sufficiently avoided. That is. For this purpose, in the present invention, a vibration motion with a frequency of at least 4 to 5 Hz is used. The vibration generator 11 (12) to be generated is attached to the conveying member and/or the supporting member. , the member allows the product to be treated to be protected during transportation, during charging into a processing bath, and during is retained during the bath stay and is a fixed and permanent part of said vibration generator and treatment equipment. In between, means are provided for interrupting and at least sufficiently damping vibration transmission.

international search report international search report

Claims (30)

[Claims] 1. Processed products with multiple holes, especially plate thickness, along multiple processing stations A printed wiring board with a ratio of 8:1 to the hole diameter is transported in a lifted state and placed at each processing station. During your stay at the In the method of backward motion, the product to be treated (3) is moved at a frequency of at least 4 to 5 Hz. the direction of vibration is at least partially and/or temporarily aligned with the longitudinal axis of the hole. line (5), and the shaking motion is applied to the supporting part of the product to be processed. or at least mainly on the supporting portion. , a method of mobilizing the processed product during wet chemical processing. 2. rotating or swirling the multi-processed product (3) during a rocking movement in the processing bath (1); The method according to claim 1. 3. During the oscillating movement, the longitudinal axis (5) of the hole forms an angle with the direction of the oscillating movement (13). 3. The silicon product according to claim 1 or 2, wherein the silicon product (3) is maintained in an inclined position such that it extends. Method. 4. Applying a hit or sudden impact to the product to be processed (3) during the shaking motion, The method described in any one of claims 1 to 3. 5. Claim 1: The frequency of the shaking motion is changed continuously or discontinuously during the same process. The method according to any one of 4 to 4. 6. 6. The method of claim 5, wherein the rocking motion is interrupted and reconnected several times during the same process. . 7. Any of claims 1 to 6, wherein the oscillation frequency is equal to a circuit frequency of 50Hz. or the method described in paragraph 1. 8. In addition to the oscillating motion on the product to be processed, in addition, the oscillating frequency is The workpiece is reciprocated at a low frequency, e.g. 20 double strokes per minute. motion, and furthermore, the low frequency motion is caused to progress in the same direction as the oscillating motion. The method described in any one of Items 1 to 7. 9. The amplitude of high-frequency oscillating motion is in the range of approximately 0.5 to 3.0 mm, and the frequency is low. Claim 8, wherein the amplitude of the reciprocating motion of the wave number is in the range of 2 x 10 to 2 x 40 mm. Method. 10. A plurality of processing baths or processing stations each containing a processing liquid or a cleaning liquid. tion is provided one after the other in the processing conveyance direction (4), and The product (3) is loaded into each treatment bath by the product support (7, 8) and the lid is closed after treatment. Carrying out the method according to claim 1, in which the treatment bath is repeatedly drawn out and transported. In the device, vibration generation that generates an oscillating motion with a frequency of at least 4 to 5 Hz. A container (12) is attached to a conveying member and/or a supporting member, by which The product to be treated is retained during transportation, during charging into the treatment bath, and during treatment solution. and a vibration transmission mechanism is provided between the vibration generator and a fixed and permanently installed part of the processing device. , characterized in that means are provided for blocking and at least sufficiently attenuating the Application equipment. 11. At least one vibration generator is located on the product support, in particular on the product support rail (8). 11. The device of claim 10, wherein the device is mounted. 12. of relatively thin cross-section with a small moment of resistance in the vibration direction (13). 12. The apparatus of claim 11, wherein a product support rail is provided. 13. A support member supporting one or more vibration generators and a fixed permanent part of the processing device Claims 10 to 12, wherein an elastic vibration damper (27) is provided between the The device according to any one of . 14. At least two vibration generators (12) are spaced apart from each other on the product support rail. The device according to any one of claims 11 to 13, which is attached to the tool (8). Place. 15. The vibration generator or vibration generators are supported on the one hand by the product support rail (8). on the other hand, and attached to a support member that supports the product to be processed (3) on the other hand. 15. A device according to any one of claims 10 to 14. 16. One or more vibration generators (12) are connected to one or more support bars (18). 16. The device of claim 15, wherein the device is mounted. 17. one or more vibration generators (12) are mounted on the support rack (14); 16. Apparatus according to claim 15. 18. One or more vibration generators engage the product support rail (8) on the one hand and the other In one case, the claim is attached to a clamp member that engages with the product to be treated (3). 15. The device according to 15. 19. Each vibration generator (12) mainly controls the amplitude of its vibration movement in the vibration movement direction ( 13). The device according to any one of the above. 20. The vibration generator is configured such that its vibration frequency has amplitude in all directions. - A device according to any one of claims 10 to 18, wherein the device is arranged. 21. The amplitude of the oscillating motion is approximately equal over the entire length of the product support rail (12); In the product support rail, the “vibration antinode” and “vibration range” of the vibration amplitude are substantially Claims 10 to 20, wherein a plurality of vibration generators are arranged to avoid The device according to any one of . 22. 22. The method according to claim 10, wherein the vibration generator (12) is electrically driven. The device according to any one of the above. 23. For powering the electrical drive of the vibration generator(s) (12), at or near the stationary guide part (11) for the product support arm (9, 9''); The product support arms (9, 9'') are also provided with contacts (28, 9'') of the respective feeder lines. 29) is provided, and the product support arm (9, 9'') is connected to the stationary guide part. When placed on top, the contacts close and connect the electrical drive (16) of the vibration generator. 23. The device according to claim 22, wherein a power supply (30) is provided. 24. Frequency for changing the vibration frequency of one or more vibration generators (12) 24. Device according to any one of claims 10 to 23, characterized in that it is provided with a transducer. 25. During processing, the longitudinal axis (5) of the hole forms an acute angle to the direction of oscillating movement (13). Means are provided for causing the product to be treated (3) to assume an inclined position so as to extend. 25. The device according to any one of claims 10 to 24. 26. In order to accommodate and hold the side edges of one plate-shaped workpiece (3), have slots (24, 24', 24'') arranged diagonally and offset from each other. 26. Device according to claim 25, characterized in that a plurality of holders (25) are provided. 27. The product to be processed (3) is placed on the product support rail ( 26. The apparatus according to claim 25, located in a processing cage (20) suspended in 7). . 28. The processing cage (20) is centered on one axis, particularly preferably a horizontal axis (21). is rotatably or pivotably supported on the support member (19) as a 20) is provided with means for generating the rotating or pivoting motion, and the processing case is 28. The apparatus of claim 27, wherein the product to be processed is prevented from falling within the cage. 29. A device that generates a hitch or collision against the treated product (3) or its holding member. Claims 10 to 28, wherein a pneumatically actuated ram or hammer is provided. The device according to any one of . 30. A plurality of vibration generators with acceleration values of different strengths are provided, and The vibration generator with one acceleration value acts in the forward direction on the product, and the vibration generator with the other acceleration value acts in the forward direction. Claims 10 to 2, characterized in that the speed-valued vibration generators are arranged to act in opposite directions. 9. The device according to any one of items 9 to 9.