JPH05330002A - Film sticking device - Google Patents

Abstract

(57) [Summary] [Purpose] Easy switching between wet operation and dry operation.
In addition, it can be carried out in a short time, and it is possible to prevent an increase in operating load, thereby eliminating obstacles to continuous high-speed operation. [Structure] The upper and lower liquid receiving members 90A and 90B are inserted between the wet rollers 48A and 48B and the substrate 6 transport path during dry operation, and the air bubble prevention liquid of the wet rollers 48A and 48B is attached to the substrate 6. To prevent in this case,
The substrate 6 is conveyed between the upper and lower liquid receiving members 90A and 90B, and the wet rollers 48A and 48B do not contact the substrate 6. The liquid receiving members 90A and 90B are the wet rollers 4
The slide base 114 and the pressing plate 116 can freely insert and remove between 8A and 48B and the substrate 6 transfer path. Therefore, the wet operation and the dry operation can be arbitrarily selected.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention has a wet roller for adhering a bubble-preventing liquid such as water to a substrate, and a film is attached to a film sticking surface of the substrate to which the bubble-preventing liquid is adhered by a pressure roller. The present invention relates to a film sticking device.

[0002]

2. Description of the Related Art A printed wiring board used for electronic equipment such as a computer is one in which a predetermined pattern of wiring made of copper or the like is formed on one side or both sides of an insulating substrate.

In the manufacturing process of this type of printed wiring board, first, a photosensitive resin (photoresist) layer and a light-transmitting property for protecting it are formed on a conductive layer (copper thin film) provided on an insulating substrate. A laminate film including a resin film (protective film) is thermocompression bonded (also referred to as thermocompression lamination). This thermocompression bonding is performed in a mass production process using a film sticking device (also called a thin film sticking device), a so-called laminator.

Various techniques have been conventionally proposed for the above-mentioned film sticking apparatus (for example, the applicant has already disclosed JP-A-63-208037 and JP-A-3-7344).
There is one proposed in the issue gazette).

FIG. 18 shows an example of the structure of the conventional film sticking apparatus as described above. In addition, in FIG.
Since the upper and lower constituent devices are substantially the same around the transport path of the insulating substrate (hereinafter simply referred to as the substrate), only the configuration on the upper side of the route is shown.

In the film sticking apparatus, a laminate film (hereinafter referred to as a three-layer laminate film) having a three-layer structure of a transparent resin film, a photosensitive resin layer and a transparent resin film is used as the supply roller 2. It is continuously wound around. The three-layer laminate film 1 is unwound from the supply roller 2, and then the thin film separation roller 3 and the light-transmissive resin film 1A and a photosensitive resin layer having one surface (adhesive surface) exposed. And a laminate film 1B made of a translucent resin film. Separated laminate film 1
B is supplied onto the surface of the main vacuum plate (film supply member) 5 via the tension roller 9. After that, the sub-vacuum plate 13 and the cutter 14 are provided in the supply path of the laminated film 1B, and the vacuum bar 15 and the pressure-bonding roll 16 are provided ahead of them.

The pressure-bonding roll 16 is generally constructed by coating the surface of a metal roll with a rubber sheet.

The main vacuum plate 5 is used for temporarily attaching the laminated film 1B onto the conductive layer of the substrate 6 while adsorbing and holding the laminated film 1B. As shown in FIG. 14, the main vacuum plate 5 is provided so as to be movable back and forth on a support member 7 that is close to and away from the substrate 6 (moves in the direction of arrow B).

The support member 7 is provided on the apparatus main body (frame member of the film sticking apparatus) 9 so as to be slidable on the guide member 8 and movable in the arrow B direction. Further, the supporting members 7 are provided in a pair in the vertical direction centering on the conveyance path of the substrate 6, and the upper supporting member 7 and the lower supporting member 7 operate in conjunction with each other by a rack and pinion mechanism. .. That is, a rack 7A is provided on each of the upper and lower support members 7, and a pinion 7B that meshes with each rack 7A (this pinion 7B is the device main body 9).
(Fixed to) is provided and operates in conjunction with the driving force of a driving source (not shown).

Further, the main vacuum plate 5 is
Independently of the movement of the support member 7, an operation of moving toward and away from the substrate 6 (moving in the direction of arrow C) is performed.
It is provided on the support member 7. That is, the main vacuum plate 5 operates as described above by the rack-and-pinion mechanism including the cylinder and the like provided on the support member 7. This rack and pinion mechanism is used for the support member 7
The first rack 12A and the second drive source 11
The pinion 12B that moves back and forth along the rack 12A and meshes with the rack 12A, and the rack 12A.
And a second rack 12C that moves in parallel with and meshes with the pinion 12B.

A temporary attachment portion 5A is provided at the tip of the main vacuum plate 5. This temporary attachment part 5
A has a heating element 5B provided therein. When the laminated film 1B is temporarily attached to the substrate by the main vacuum plate 5, the temporary attaching portion 5A is the laminated film 1
The B is wound and brought close (or abut) to the substrate 6. At this time, the temporary attachment portion 5A is heated by the heat generated by the heat generating element 5B, whereby the laminate film 1B is heated.
Temporarily attach the tip end of the by thermocompression bonding.

The sub-vacuum plate 13 operates so as to adsorb the tip portion of the laminated body 1B in the supply direction and to adsorb (hold) the tip portion to the temporary attachment portion 5A. The operation of the sub-vacuum plate 13 is performed by moving the sub-vacuum plate 13 toward and away from the supply path of the laminated body 1B (moving in the direction of arrow D) by the drive source 13A attached to the support member 7 and including an air cylinder. Be seen. or,
This operation is also performed when the main vacuum plate 5 temporarily attaches the laminated film 13 to the substrate 6.

The cutter 14 cuts the laminate film 1B into a length corresponding to the size of the substrate 6. The cutters 14 are provided so as to face the sub-vacuum plate 13 with the supply path interposed therebetween.

The pressure-bonding rolls 16 are provided above and below the substrate conveying path. The upper and lower pressure-bonding rolls 16 sandwich the substrate 6 to which the laminate film 1B is temporarily attached with a predetermined pressure, and By applying heat, the laminated film 1
B is thermocompression bonded to the substrate 6.

When the laminate film 1B is pressure-bonded by the film sticking apparatus as described above, fine bubbles (air bubbles) may be generated between the film 1B and the substrate 6 during the pressure bonding. This air bubble impairs the adhesion between the laminated film 1B and the substrate 6, and causes the partial loss of the line in the step of forming a wiring pattern having a fine line width on the insulating substrate. It causes a defect.

Therefore, it is necessary to prevent the generation of the bubbles and improve the adhesion between the laminate film 1B and the substrate 6.

Therefore, in order to prevent the generation of the bubbles, it is effective to attach an air bubble preventing liquid such as water to the substrate 6 before the pressure bonding.
A wet roller 18 to which an air bubble prevention liquid such as water is attached is provided. For example, FIG. 15 shows a state in which a conventional wet roller is provided in the conveyance path of the substrate 6. In FIG. 19, 19 is a side plate that supports a conveyance roller (not shown), and 18A is a water supply block.

As shown in FIG. 19, the conventional wet roller 18 is fixedly provided above and below so as to contact the upper and lower surfaces of the substrate 6 to be conveyed in the entrance side direction of the pressure roll 16. There is. As a conventional configuration example of the wet roller 18, there is the one already disclosed by the applicant in JP-A-3-7344. That is, the wet roller 18 disclosed in the above publication mainly has a water supply pipe and a coating layer. The water supply pipe is configured by providing a plurality of water supply holes in a cylindrical body made of a metal such as stainless steel or the like that is hard to rust or a hard plastic. Also, the coating layer is
A coating layer made of a porous material such as sponge that easily contains water is provided on the surface of the water supply pipe.

When adhering the air bubble prevention liquid to the substrate 6 by the wet roller 18, the prevention liquid is supplied from the axial end of the wet roller 18 (water supply pipe), and the above-mentioned liquid is supplied through the supply hole. Moisten the coating layer. In the upper and lower wet rollers 18, the respective coating layers are brought into contact with the upper and lower surfaces of the substrate 6 to adhere the air bubble prevention liquid to the substrate 6. Hereinafter, the operation of depositing the air bubble prevention liquid on the substrate 6 will be referred to as a wet operation.

On the other hand, as the substrate 6, there is a type in which the air bubble prevention liquid need not be attached. That is, an example is the case of a substrate used when a wiring pattern having a non-fine line width is formed on an insulating substrate. Such a substrate 6 is subjected to a sticking process by a film sticking device which is not provided with the wet roller 18, or the wet roller 18 is detached from the substrate transport path to carry out the sticking process. Hereinafter, an operation in which the air bubble prevention liquid is not attached to the substrate 6 is called a dry operation.

[0021]

When performing a film sticking operation on the substrate 6, the wet operation for the substrate 6 of the type to which the air bubble prevention liquid is adhered and the dry operation for the substrate 6 of the type not adhered are performed. In some cases, it may be necessary to perform the replacement in an appropriate manner.

On the other hand, it is conceivable to install a film sticking device to which the air bubble prevention liquid is adhered and a film sticking device to which the liquid is not adhered, and replace them appropriately to operate. However, when operating in this manner, the processing of each of the sticking devices is intermittent, and one of the sticking devices is always in a dormant state, resulting in poor device usage efficiency.

In the case where one film sticking device switches between wet operation and dry operation, conventionally, the wet roller is removed and the dry roller is arranged as described above to cope with the dry operation. Was. However, in the conventional film sticking apparatus, the work of attaching and detaching the wet roller is very complicated and takes time and labor, and in particular, it takes time to properly position the wet roller in the substrate transport path. .. Therefore, if you frequently switch between wet operation and dry operation,
There is a problem that the work load becomes remarkable and further it becomes a big obstacle to continuous high-speed operation.

The present invention has been made to solve the above-mentioned conventional problems, and it is possible to easily and quickly switch between a wet operation in which the air bubble prevention liquid is adhered to the substrate and a dry operation in which it is not adhered. Therefore, it is an object of the present invention to provide a film sticking apparatus capable of preventing such operation switching from causing an increase in operating load and eliminating obstacles to continuous high-speed operation.

[0025]

The present invention has a wet roller for adhering an air bubble prevention liquid such as water to a substrate,
In a film sticking device that sticks a film to the film sticking surface of the substrate on which the air bubble prevention liquid is adhered by a pressure bonding roller, liquid adhesion prevention for preventing the air bubble prevention liquid of the wet roller from adhering to the substrate A member and an operation selection unit for arbitrarily selecting a wet operation and a dry operation by freely inserting and removing the liquid adhesion preventing member between the wet roller and the substrate transport path. By doing so, the above problems are solved.

[0026]

In the present invention, the film sticking apparatus is provided with the liquid adhesion preventing member, which prevents the air bubble prevention liquid of the wet roller from adhering to the substrate during the dry operation, and optionally the wet operation. And make it possible to select between dry operation.

Therefore, the switching between the wet operation and the dry operation can be easily performed in a short time. or,
When the wet operation and the dry operation are frequently switched, this operation switching can be prevented from causing an increase in the operation load, and does not become an obstacle to continuous high-speed operation.

[0028]

Embodiments of the present invention will now be described in detail with reference to the drawings.

In this embodiment, the laminated film 1B according to the length of the substrate is provided on the film sticking surface of the substrate (insulating substrate) 6.
The present invention is applied to a film sticking device for sticking.

FIG. 1 shows the overall structure of the film sticking apparatus according to the embodiment.

Further, FIG. 2 mainly shows the structure of the pasting device in the upward direction from the substrate transfer path.

As shown in FIGS. 1 and 2, the film sticking apparatus is mainly equipped with a carry-in section 20 for advancing and carrying in the substrate 6 to the temporary mounting and crimping positions, and the laminated film 1B. A carry-out section 22 for carrying out the substrate 6 to which the pressure is applied, and a three-layer laminate film 1 having a three-layer structure of a transparent resin film, a photosensitive resin layer, and a transparent resin film.
And a laminated film accumulating section 24 for supplying a laminated film 1B composed of a photosensitive resin layer and a translucent resin film having one surface (adhesive surface) exposed, and the laminated film 1B supplied. A temporary fixing portion 26 for adsorbing and temporarily fixing the front end side of the laminated film 1 to the film sticking surface of the substrate 6, and the film 1B to the substrate 6 to which the film 1B is temporarily fixed are heated by the pressure roller 28. And a pressure bonding portion 30 for pressure bonding (thermocompression lamination).

That is, as shown in FIGS. 1 and 2, in the laminate film accumulating section 24, the three-layer laminate film 1 is continuously wound and accumulated on the supply roller 2. .. The wound laminated film 1 is unwound and reaches the film separation roller (film separation member) 3 via the guide roller 32. The film separating roller 3 is a laminated film including the laminated film, a translucent resin film (protective film) 1A, a photosensitive resin layer having the one surface (adhesive surface) exposed, and a translucent resin film. 1B and 1B. The separated translucent resin film 1A is wound around the guide roller 34, moves on the laminated film 1, and is wound around the winding roller 4. On the side surface side of the laminated film 1 that has been wound, a roll diameter detection sensor that detects the accumulated amount of film from the roll diameter of the film,
That is, a large-diameter film winding diameter detection sensor 36A that detects that the film winding diameter is large and a small-diameter film winding diameter detection sensor 36B that detects that the film winding diameter is small are provided.

The carry-in section 20 is provided with a plurality of drive rollers 38 for applying a driving force to the substrate 6 to carry the substrate 6 along the carry-in path at appropriate intervals. The driving roller 38 is driven by a driving force given by a driving means such as a motor (not shown). Further, a rotatable driven roller 40 is provided at a position opposed to every other drive roller 38 (or an appropriate drive roller 38) with a transport path interposed therebetween. The driven roller 40 is the driving roller 3
The substrate 6 is sandwiched together with 8 to surely apply a driving force to the substrate 6.

A width aligner 42 for adjusting the position of the substrate 6 in the width direction to a predetermined position is provided along the conveying path and at an appropriate position between the drive rollers 38.

Further, of the drive roller 38, the pressure bonding portion 3
A rotatable substrate pressing roller 46 is provided on the side opposite to the one on the 0-side end with the transport path interposed therebetween. For example, the substrate pressing roller 46 is raised and lowered by the substrate pressing member 44 composed of an air cylinder. The substrate pressing roller 46 clamps the substrate 6 together with the drive roller 38 when the substrate pressing member 44 descends, and shakes the substrate 6 in the vertical direction when the laminated film 1B is temporarily attached or thermocompression bonded. It is to stop the movement.

Further, the laminated film 1B and the substrate 6 which are thermocompression bonded are provided on the downstream side in the transport direction of the drive roller 38 at the end.
In order to prevent air bubbles (air bubbles) from being generated between the above and the above, a wet roller 48 for applying an air bubble prevention liquid such as water to the substrate 6 is provided.

In the vicinity of the transfer path of the substrate 6,
Each sensor S1 to S3 that detects the substrate 6 is provided. The sensor S1 provided on the upstream side of the transfer path detects, for example, the tip position of the substrate 6 sent into the carry-in section 20, and a width for operating the width aligner 42 based on the detection signal. The shift start sensor S1. Further, the sensor S2 provided on the downstream side of the width-shift start sensor S1 is a substrate rear end detection sensor S2 for detecting the rear end of the substrate 6.
Is. Further, the sensor S provided on the inlet side of the crimp portion 30
Reference numeral 3 denotes a substrate front end detection sensor S3 for detecting the front end portion of the substrate 6.

The carry-out section 22 is provided with a plurality of output-side drive rollers 50 which are driven by a drive motor (not shown) for giving a drive force to the substrate 6 to convey it. A suitable driven roller 52 is provided with a rotatable driven roller 52 at a position opposed to the drive roller 50 with the transport path interposed therebetween. The driven roller 52 is for sandwiching the substrate 6 together with the drive roller 50 so as to reliably apply a driving force to the substrate 6. In addition, a substrate passage detection sensor S4 for detecting the passage of the substrate 6 is provided near the exit side of the carry-out portion 22 on the pressure bonding portion 30.

The laminate film 1B supplied from the laminate film accumulating portion 24 is conveyed to the temporary attachment portion 26 via a tension roller 54. The tension roller 54 applies appropriate tension to the laminated film 1B between the supply roller 2 and the main vacuum plate (corresponding to a film supply member) 56. Due to this appropriate tension, wrinkles or the like do not occur in the laminate film 1B supplied to the main vacuum plate 56.

A static electricity remover 58 for removing static electricity of the laminated film 1B is provided on the laminated film 1B supply path from the tension roller 54 exit side to the main vacuum plate 56.

Further, on the laminated film transporting path between the main vacuum plate 56 and the pressure-bonding section 30, there are provided a leading end winding film holding member 60, a cutter 62, and a support roller 64.

The main vacuum plate 56 adsorbs the leading end side of the laminated film 1B sent from the supply roller 2 and is close to the leading end of the carried substrate 6 in the carrying direction. The operation is performed so that the front end side of the laminated film 1B is temporarily attached to the front end surface (both upper and lower surfaces). The main vacuum plate 56 is fixed to a mounting member 66 and
And the upper and lower main vacuum plates 56 operate in synchronism with each other so as to approach the substrate 6 at the same time for temporary attachment.

The tip winding film holding member 60
Sucks the tip side of the laminated film 1B by a negative pressure and retracts in the substrate conveying direction (the direction of arrow A in FIG. 1) to cause the tip side film temporary attachment portion 56A of the main vacuum plate 56 to come into contact. The laminated film 1B is adsorbed.

The cutter 62 has a rotary blade 62A provided with a cutting blade so as to draw a spiral on the outer peripheral surface of a cylindrical member, and a fixed blade 62B composed of a linear cutting blade. Laminate film 1B conveyed on fixed blade 62B
The film 1B is cut at a right angle to the conveying direction by the rotation of the rotary blade 62A. When the rotary blade 62A rotates, the cutter 62 brings the rotary blade 62A and the fixed blade 62B close to each other and cuts the laminate film 1B into a predetermined length according to the size of the substrate 6. Since this cutter 62 cuts the laminate film 1B at a right angle to the supply direction, one side of the rotary blade 62A and the fixed blade 62B in the longitudinal direction is moved in the supply direction during the supply of the laminate film 1B. The speed of moving in the feeding direction is synchronized with the feeding speed of the film 1B.

The support roller 64 is a roller provided on the film supply path between the cutter 62 and the pressure roller 28 so as to come into contact with the film supply path on the suction surface of the main vacuum plate 56 in the same plane. is there.

The support roller 64 is the pressure roller 2
The laminate film 1B sent to the roll 8 is cut by the cutter 62 so that wrinkles and the like are not generated on the roll 2
It is a guide to send smoothly to 8.

As shown in FIG. 1, the mounting member 66 to which the main vacuum plate 56 is fixed has the same configuration on the upper side and the lower side. The mounting member 66 is provided with a rack gear 68 and a pinion gear 70 that meshes with both of the rack gears 68.

The mounting member 66 is the guide rail 7
The slide member 2 slides and moves on the upper surface of the main vacuum plate 56, and the moving direction of the mounting member 66 following the guide rail 72 is the moving direction of the main vacuum plate 56.

Since the pinion gear 70 rotates at a fixed position of the body frame of the film sticking apparatus, the upper and lower main vacuum plates 56 are synchronized with the rack gear 68. The pinion gear 70 is driven by a servo motor (main vacuum plate driving servo motor) not shown. A cylinder tube body and a piston rod of a pair of cylinders (not shown) provided in the width direction of the vacuum plate 56 are connected to the upper and lower mounting members 66, respectively, so that the upper and lower mounting members 66 work together. There is. In the embodiment, the servomotor advances the substrate 6 until it reaches a predetermined distance. afterwards,
The servo motor is freed, driven by a cylinder for temporary attachment, and after the temporary attachment, the cylinder is used to separate from the substrate.

The pressure-bonding section 28 is axially supported by the pressure-bonding section 30 together with a pressure-bonding roller 28 for thermally pressure-bonding the laminated film 1B onto the substrate.
Crimping roller holding member 7 for holding 8 so as to move back and forth
4 and a vacuum bar 76 that rotates around the pressure roller 28 while adsorbing the laminated film 1B.
A pressure-bonding roller wiping roller 78 for wiping off air-foam prevention liquid such as water adhering to the pressure-bonding roller 28, a substrate wiping roller 80 for wiping off air-foam prevention liquid on the surface of the substrate 6 after pressure bonding, and upper and lower sides. An air cylinder 82 for vertically moving a pressure-bonding roller for swinging a pressure-bonding roller holding member 78 which is symmetrical with respect to the pressure roller 28 and pressing the laminated film 1B onto the substrate 6 by the pressure-bonding roller 28 is provided.

A substrate wiping roller 80 for wiping the remaining air bubble prevention liquid adhering to the substrate 6 is rotatably provided on the substrate 6 unloading side of the pressure roller holding member 74.

The air cylinders 82 for moving the pressure roller up and down are provided one by one for the pressure roller holding members 74 which are paired vertically on the left and right.

Here, in the film sticking apparatus of the embodiment, the wet operation can be arbitrarily switched between the wet operation and the dry operation with the wet roller 48 attached, so that the operation shown in FIGS.
As shown in FIG. 1, the upper and lower wet rollers 48 are independently raised and lowered, and prevent the air bubble prevention liquid of the wet rollers 48 from adhering to the substrate 6 during the dry operation. A liquid receiving portion (corresponding to a liquid adhesion preventing member) 90 is provided.

Here, the detailed structure of the wet roller 48, the liquid receiving member 90, and the periphery thereof will be described with reference to FIGS. 3 to 11.

FIG. 3 shows the wet roller 48 of the carry-in section 20.
It is the perspective view which looked at the circumference from the pressure bonding roller 28 direction.

FIG. 4 is a perspective view of the lower wet roller 48B centering on the bearing mechanism of the lower wet roller 48B, and the upper wet roller 48A bearing mechanism is removed. Further, FIG. 5 shows the bearing mechanism of the upper wet roller 48A in detail, (A) is a plan view, (B) is a front view, and (C) is a side view.

As shown in detail in FIG. 3, the wet roller 48 is provided at the front end of the carry-in section 20 in the substrate advancing direction, and the upper wet roller 48 (hereinafter, reference numeral 48A).
And a lower wet roller 48 (hereinafter, reference numeral 48).
(Shown by B) face each other so as to apply the air bubble prevention liquid to the upper and lower surfaces of the substrate 6. Each of the wet rollers 48A and 48B has a water supply pipe as an axis and has a coating layer thereof, and the axial length of the coating layer is sufficiently longer than the widthwise length of the substrate 6. The water supply pipe and the coating layer are the same as those disclosed by the applicant in Japanese Patent Application Laid-Open No. 3-7344, and therefore the description thereof will be omitted. However, this is an example, and wet rollers 48A and 48B
Can have other configurations.

In the wet rollers 48A and 48B, the axis of the water supply pipe extends in the width direction of the substrate 6 longer than the coating layer, and water supply blocks 92 are provided at both ends of the location where the coating layer is provided. There is. The water supply block 92 is
The wet rollers 48A and 48B are connected to the water supply pipes, and the air bubble prevention liquid supplied from the outside through the block 92 is supplied to the water supply pipes and further to the coating layer to carry out the wet operation. It

As shown in detail in FIGS. 4 and 5, each water supply block 92 of each of the wet rollers 48A and 48B is provided with a guide pin 92A penetrating in the vertical direction. Each wet roller 48A, 48B is connected by the spring member 92B locked to the guide pin 92A.
Are pressed in directions opposite to each other. The guide pin 9
The configuration of 2A and spring member 92B is shown in detail in FIG.

The bearing mechanisms of the upper and lower wet rollers 48A and 48B are provided at the ends of the wet rollers 48A and 48B that extend further from the water supply block 92.

As shown in FIGS. 4 and 5, the bearing mechanism of the wet roller 48B includes a bearing block 94A, a bearing block holding member 94B, and a position moving knob 94C.
It mainly consists of and.

The bearing block 94A supports the shaft of the wet roller 48B by a bearing (not shown).
Further, the bearing block holding member 94B surrounds the bearing block 94A from the left and right (along the carrying direction of the substrate 6) and from above and below, and the block 94 is provided between the left and right members 94B.
A is moved up and down, and the vertical movement range is determined by the upper and lower members 94B. Positioning screws 94D are provided on the upper and lower members 94B to determine the vertical movement range of the bearing block 94A. Also, the position moving knob 94C
The male screw on the lower end of the bearing block 94A is screwed into the female screw on the upper end of the bearing block 94A. By rotating the position moving knob 94C, the bearing block 94A is fixed to the holding member 94A.
Slide up and down in B.

Therefore, the user can move the position shift knob 9
By rotating 4C, an arbitrary vertical position can be selected for the lower wet roller 48B. The wet roller 48B
The shaft extends further than the bearing block 94A, and the toothed pulley 96 is fitted to the extended portion. Further, the shaft of the drive roller 38 has one shaft end portion extending from the bearing 38A, and a toothed pulley 96B is provided there, and the driving force of the drive roller 38 is changed by each toothed pulley 96. It is transmitted to the wet roller 48B via 98. In addition, as shown in FIG. 4, the upper and lower wet rollers 4
Gears 100 that mesh with each other are provided inside the side plate 19 on the axes of 8A and 48B, and the gear 100 causes the upper and lower wet rollers 48A and 48B to rotate in synchronization with each other.
Further, as shown in FIGS. 3 and 4, a notch 110 that extends upward and is open is formed at a portion of the side plate 19 through which the axes of the wet rollers 48A and 48B pass.

A pinch roller 102 is provided so as to face the drive roller 38. This pinch roller 102
Presses the upper surface of the substrate 6 by its own weight so that the substrate 6 can pass horizontally through the wet rollers 48A and 48B. Further, the axial length and the mounting position of the pinch roller 102 are such that the pinch roller 102 can press a part of the substrate 6 even if the uneven substrate 6 is conveyed. .. The pinch roller 102
Is formed by winding a coating layer made of urethane resin around the shaft, and the shaft end portion thereof is rotatable and vertically movable on a holding plate 104A hung on the lower surface of the pinch roller holding member 104. Supported. The holding member 104 extends along the width direction of the substrate 6 and is mounted and fixed on the side plate 19.

FIG. 6 is a perspective view mainly showing the bearing mechanism of the upper wet roller 48A, FIG. 7A is a plan view of the wet roller 48A, and FIG. 7B is a front view of the wet roller 48A. FIG. 7C is a cross-sectional view taken along the line AA of FIG. 7B. 6 and 7 show the lower wet roller 4
The bearing mechanism 8B is shown with the bearing block 94A removed.

As shown in FIGS. 6 and 7, the bearing mechanism of the wet roller 48A is the wet roller 4 extending from the water supply block 92 of the wet roller 48A.
The 8A axis is supported by the hook 108 that is released diagonally upward in the transport direction of the substrate 6. The hook 108 is mounted in a hook holding member 108A so as to be vertically movable, and the hook holding member 108A has a second movable knob 108D.
A screw extending downward from is screwed. Therefore, if the user rotates the knob 108D, the upper wet roller 4
Any vertical position can be selected for 8A.

Since the upper wet roller 48A is supported by the hook 108 as described above, the structure of the bearing mechanism is simple. Further, since the wet roller 48A can be removed without removing the hook 108, the handling is easy.

FIG. 8 shows the upper and lower wet rollers 48.
A and 48B (indicated by a chain double-dashed line in the figure) are abbreviated, and the transport roll 20 is shown centering on the liquid receiving member 90 from the substrate output side. Further, FIG. 9 shows the upper and lower wet rollers 48.
It is a top view of the state where the liquid receiving member 90 was provided between A and 48B. 10A is a sectional view taken along line XA-XA in FIG. 9, FIG. 10B is a sectional view taken along line XB-XB in FIG. 9, and FIG. 11 is a sectional view taken along line XI-XI in FIG. 8 to 1
1 shows a dry operation state together with FIG.

As shown in FIGS. 8 to 11, each of the liquid receiving members 90A and 90B has a substantially L-shaped cross section with one side parallel to the transfer path of the substrate 6, and has a longitudinal direction. Form the plate members along the axial direction of the wet rollers 48A and 48B so as to face each other vertically. The liquid receiving members 90A, 90
The length of the facing surface of B in the substrate transport direction is longer than the outer diameter of the wet rollers 48A and 48B so that the air bubble prevention liquid does not drip onto the substrate 6. The upper liquid receiving member 90A is bent obliquely upward on the outlet side of the substrate 6 so that the air bubble prevention liquid does not drip. Also, the upper and lower liquid receiving members 90A, 90B
The ends B in the longitudinal direction are collectively received by the liquid receiving and holding member 11
2 is supported by the width direction edge part. The upper and lower liquid receiving members 90A and 90B are opposed to each other so that the base end 6 can pass through without resistance.

The liquid receiving / holding member 112 is mounted on a slide base 114 fixed inside the side plate 19 and screwed via a holding plate 116.

The bearing holding member 112 is constructed so as to have a long hole on the slide base 114. When the screw is loosened to move back and forth and the position is determined, the pressing plate 116 is screwed. Stop and position.

A handle rod 118 is attached to the liquid receiving / holding member 112 in an upward direction.

When switching between the dry operation and the wet operation, the handle rod 118 is moved forward and backward by the user to move the liquid receiving members 90A and 90B back and forth to switch the operation. .. In the embodiment, a switching arrow plate 120 is provided on the handle rod 118 so that this operating state can be seen at a glance, and the switching display plate 12 is provided on the surface of the pinch roller holding member 104.
0A is provided. When the handle rod 118 is operated to switch the operation, the instruction on the arrow plate 120 is changed, and it is possible to check at a glance what kind of operation state is present.

Also, as shown in FIG. 3, as shown in FIGS. 8 and 9, on the output side of the wet rollers 48A and 48B,
Support rollers 122 are provided. The support roller 122 is a roller for preventing a problem from occurring due to the wet rollers 48A, 48B or the substrate 6 passing through the liquid receiving members 90A, 90B being rubbed against the water drop receiving plate 124. The support roller 122 is divided into left and right parts and attached to the water drop receiving plate 124. Water drop receiver plate 12 between the support rollers 122
The substrate tip position detection sensor S3 is provided in the vicinity of 4, and the support roller 122 prevents the substrate 6 from hitting the sensor S3. Further, a drain pan 126 is provided below the water drop receiving plate 124 to prevent the air bubble prevention liquid of the wet rollers 48A and 48B from dripping on the base or floor surface under the machine.

FIG. 12 shows the signal path of the control system of the film sticking apparatus of the above embodiment.

As shown in FIG. 12, this control system includes sensors S1 to S4, detection sensors (not shown) at the front and rear ends of each cylinder, and sensors 36A and 36 for the film winding diameter.
According to the detection signal of B, the central control unit 130 outputs control signals for each cylinder solenoid and each motor. It also has the functions of a counter and a timer. The central control unit 130 controls the film sticking device according to the procedure shown in FIG. This central control unit 13
0 can be configured by, for example, a programmable controller or a relay sequence circuit.

Next, the operation of the embodiment will be described.

The film sticking apparatus according to the embodiment mainly operates according to the procedure shown in FIG. 13. Before this operation, whether the substrate 6 to be processed should be wet-operated or dry-operated. The operating state is set by the information of.

That is, as shown in FIGS. 3 to 11, the operation state is set by loosening the screw of the pressing plate 116 and operating the handle rod 118 to obtain the liquid receiving member 90A,
90B is moved to set a desired operating state. When performing the wet operation, the liquid receiving members 90A and 90B are moved in the direction opposite to the substrate transport direction of FIG. Further, in the dry operation state, the liquid receiving members 90A and 90B are moved in the transport direction of the substrate 6. Whether or not the movement is properly performed can be confirmed by which display on the switching display board 120A the switching arrow board 120 is pointing to. After confirming the display, the pressing plate 116 is screwed to fix the liquid receiving and holding member 112.
As a result, the liquid receiving members 90A and 90B are fixed.

After setting the operating condition, the film sticking device operates according to the procedure of FIG.

First, the laminated film 1B is manually set to a preparation start state for sticking (step 1). That is, the supply roller 2 on which the sufficient three-layer laminate film 1 is wound.
Is installed in this film sticking device. Then, the three-layer laminate film 1 is passed from the guide roller 32 to the film separating member 3 to be separated into the translucent resin film 1A and the laminate film 1B. The laminated film 1B separated by the film separating member 3 is attached to the main vacuum plate 5
6 to the tip of the cutter 62. In this case, the cutter 62
The rotary blade 62A can be manually separated from the fixed blade 62B, and the laminated film 1B is passed therebetween.

Next, the laminated film 1B is cut with the cutter 62.
To cut (step 2). That is, the rotary blade 62A and the fixed blade 62B are not tilted and are manually rotated.
A is rotated to cut the film 1B.

Then, the main vacuum plate 56,
The pressure roller 28 and the like are set to the original position (step 3). In this case, the main vacuum plate 56 is lowered to some extent from the rising end, and the main vacuum plate 56 and the film transporting surface side of the leading end winding film holding member 60 are aligned.

Then, the automatic operation is started (step 4).

That is, when the automatic operation is started, the film holding member 60 moves in the substrate carrying direction while adsorbing the laminated film 1B. Thereby, the laminated film 1
B is wound around the temporary attachment portion 56A at the tip of the main vacuum plate 56.

On the other hand, when the substrate 6 is conveyed in the substrate loading section 20 and the substrate 6 is detected by the width-shift start position sensor S1, the substrate 6 is width-shifted by the width-shift device 42. , A predetermined width direction position.

Then, the width-adjusted substrate 6 is advanced in the carrying direction, and when the front end of the substrate is detected by the substrate front end detection sensor S3, the central control unit 120 starts counting by the counter in accordance with the detection signal. In this counting, a predetermined time set in advance is counted, and the leading end of the substrate 6 in the transport direction is stopped at the temporary mounting position. Further, another counter of the central control unit 120 starts counting in response to the signal from the substrate leading edge detection sensor S3. When the counter counts for a predetermined time, the leading end film-winding holding member 60 retracts to the exit side in the substrate transport direction, and the laminated film 1B is wound around the temporary attaching portion 56A of the main vacuum plate 56.

The main vacuum plate 56
Until the board moves forward and is temporarily attached,
By driving the substrate pressing member 44, the substrate 6 is lowered in the direction of the substrate 6 and clamps the substrate 6 together with the drive roller 38. Further, the air bubble prevention liquid is applied to the advancing substrate 6 by the wet roller 48.

Then, by advancing the main vacuum plate 56, the laminated film 1B is temporarily attached to the substrate 6 (step 7).

That is, while the other counter is operating,
The upper and lower main vacuum plates 56 are advanced toward the upper and lower surfaces of the substrate 6 by driving a main vacuum plate driving servomotor (not shown) while being synchronized by the rack gear 68 and the pinion gear 70.
In this case, the driving of the main vacuum plate driving servomotor is stopped at a position, for example, 2 cm before the upper and lower surfaces of the substrate 6. After that, the upper and lower main vacuum plates 56 are moved forward by the driving force of the main vacuum plate driving air cylinder (not shown), and the temporary attachment portion 56A is brought close to the upper and lower surfaces of the substrate 6. At this time, a temporary pressing force is applied by a pair of air cylinders provided at both ends in the main vacuum plate width direction (along the laminate film 1B width direction). Therefore, the laminated body film 1B can be temporarily attached to both surfaces of the substrate 6 with the same force. In addition,
At this time, the driving force of the servo motor is not transmitted to the pinion gear 70 because the brake of the servo motor is released and the servo motor is rotatable.

Next, the main vacuum plate 56 is retracted in the direction away from the substrate 6, the pressure bonding roller 28 is advanced so as not to interfere with the temporary fixing portion 56A of the main vacuum plate 56, and the pressure bonding roller 28 is operated. The pressure bonding of the temporarily fixed laminated body film 1B is started (step 8).

Next, when the pressure-bonding roller 28 presses the laminated film 1B, and when the rear end of the laminated film 1B to be attached to the substrate 6 reaches the position of the cutter, the laminated film formed by the main vacuum plate 56. 1B adsorption, and the film 1B by the cutter 62
Is cut (step 9).

That is, the cutting point of the cutter 62 gives the cutter 62 an inclination according to the feeding speed of the laminated film 1B so that the laminated film can be cut directly in the feeding direction.
Start cutting at 2. By this cutting, the laminated film 1B is cut at a right angle to the transport direction.

The laminated film 1B is guided by the support roller 64 during and after cutting. Therefore, even if the pressure roller 28 has a small diameter, the laminated film 1B is sent without sliding on the fixed blade 62B.
Further, suctioning of the vacuum bar 76 is started during and after the pressure bonding, and the vacuum bar 76 slides on the outer peripheral surface of the laminate film 1B while adsorbing the film 1B to perform thermocompression bonding. When it comes close to the rear end of the laminate film 1B to be thermocompression bonded, the vacuum bar 76 pivots around the pressure bonding roller 28 so as to approach the substrate 6, and the suction operation is performed until just before the thermocompression bonding is completed. I do. As a result, a proper tension is applied to the laminated film 1B to prevent wrinkles and the like from occurring in the laminated film 1B (step 9). In addition, the laminated film 1B by the cutter 62
From the start of cutting, the main vacuum plate 56 and the tip winding film holding member 60 perform a suction operation to suck the laminated film 1B and approach the substrate 6 while approaching the substrate 6 at the same speed as the thermocompression bonding speed of the laminated film 1B. Cuts the film, and immediately after the cutting is finished, the operation of approaching the main vacuum plate 56 and the leading end winding film holding member 60 to the substrate 6 is stopped.

Then, it is judged whether or not the thermocompression bonding operation of the laminated film 1B is continued. If continuing, the crimping operation is continued from step 5. If the operation is not continued, the work is finished.

In the above embodiment, the wet roller 48B is rotated by the position moving knob 94C screwed with the bearing block 94A supporting the wet roller 48B.
Further, the wet roller 48A can freely select the vertical position by rotating the second moving knob 108D screwed to the hook holding member 108A, but the present invention is not limited to this. However, other configurations may be used.

For example, as in the second embodiment of the present invention shown in FIGS. 14 to 17, the wet rollers 48A and 48B may be moved up and down by a cam mechanism that is synchronously driven in the left and right directions.

This configuration will be described below in detail with reference to the drawings. The same or corresponding parts as those in the first embodiment will be designated by the same reference numerals and their description will be omitted.

In this embodiment, the wet rollers 48A and 48B are vertically moved in synchronization with each other by the crank 142 via the interlocking shaft 140 arranged above and parallel to each other, that is, both wet rollers 48A, The distance between 48B can be adjusted.

At both ends of the interlocking shaft 140, 180
The eccentric cams 144 and 146 which are out of phase are attached. A pair of eccentric cams 144 on the center side of the interlocking shaft 140,
The hooks 144A vertically move the hook portions 145A corresponding to the hooks 108 in the first embodiment in accordance with the amount of eccentricity, thereby vertically moving the wet roller 48A.

That is, the eccentric cam 144 slidably engages with a square frame-shaped cam follower 145 to constitute a positive cam together with the cam follower 145, and the lower end of the cam follower 145 has
Hook portion 14 for supporting the shaft of the wet roller 48A
5A is integrally formed.

An eccentric cam 146 arranged outside the pair of left and right eccentric cams 144 is slidably engaged with a U-shaped frame-shaped cam follower 147. The cam follower 147 is coupled to the upper end of the bearing block 94A that supports the wet roller 48B, and moves the bearing block 94A and the wet roller 48B supported by the bearing block 94A up and down in accordance with the rotation of the eccentric cam 146. .

A chamfered portion 140A is formed at the end of the interlocking shaft 140, which further projects from the eccentric cam 146, so that the crank 142 is detachably engaged.

Reference numeral 148 in the drawing denotes an intermediate joint of the interlocking shaft 140, and 150 denotes a support block for rotatably supporting the interlocking shaft 140 and a cam follower 145 slidably in the vertical direction. This support block 15
0 is attached and fixed to the side plate 19 so as to straddle the side plate 19.

Here, the cam follower 145 is supported by the vertical groove 150A formed in the support block 150 so as to be slidable in the vertical direction, and does not fall off by the stopper plate 150B attached to the outside of the vertical groove 150A. Is being done.

A click mechanism 152 is provided at a position further outside the outer eccentric cam 146. The click mechanism 152 is disposed on the interlocking shaft 140 at a position outside the eccentric cam 146, and is provided with a click groove ring 154, and is arranged so as to project from the support block 150 so as to face the outer peripheral surface of the click groove ring 154. It is composed of a click ball 158 supported at the tip of the bracket 156.

The click ball 158 is urged in the direction of the click groove ring 154 by the spring 158B in the plunger 158A.

The click groove ring 154 has a pair of click grooves 154 at 180 ° intervals as shown in the figure.
A and 154B are formed, and when the interlocking shaft 140 is rotated, a click feeling is obtained at 180 ° intervals.

Further, on the outer periphery of the click grooved ring 154,
The click grooved ring 154 and the interlocking shaft 140 are
Stopper pin 1 so that it can swing back and forth only at intervals of 0 °
54C and 154D are provided.

The eccentric cams 144 and 146 are
° Because it is attached to the interlocking shaft 140 with a phase shift,
When the interlocking shaft 140 is rotated by the crank 142, as shown in FIG.
That is, from the state where the stopper pin 140C is at the stroke end in the clockwise direction, the stopper pin 154D is rotated counterclockwise until the stopper pin 154D is rotated at the stroke end in the counterclockwise direction.
45 and 147 have the closest position and the separated position in the height direction.

Wet rollers 48A and 48B at this time
Between the two, the eccentric cams 144 and 14
The position is changed in the vertical direction between the states in which the lift is equal to the sum of the six lifts.

In this embodiment, the upper and lower wet rollers 4 are used.
8A and 48B are synchronously moved at both ends in the axial direction, and by driving the interlocking shaft 140 with the crank 142 from one side of the device, the vertical movements are made synchronously from side to side. Therefore, the distance between the wet rollers 48A and 48B can be reduced. It is possible to make them equal in the axial direction, the operation is simple, and moreover, the wet rollers 48A and 48B can be quickly opened and closed.

Further, in this embodiment, the crank 142 is detachably attached to the interlocking shaft 140, so that the crank 142 can be removed when it is unnecessary, and installation in a narrow space is also possible.

In the above embodiment, the eccentric cam 144 is used.
However, the present invention is not limited to this, and the phase difference may be an angle smaller or larger than 180 °.

Further, in this embodiment, the distance between the upper and lower wet rollers 48A and 48B is adjusted by rotating the eccentric cams 144 and 146 by the interlocking shaft 140, but the present invention is not limited to this. Instead of this, for example, the screw mechanism may be driven by the interlocking shaft 140 to adjust the distance between the wet rollers 48A and 48B.

Further, in the above-described embodiment, the wet roller 48A shown in FIGS. 3 to 11 capable of switching the wet / dry operation to the film sticking apparatus shown in FIGS. 1 and 2,
However, the film sticking device that can use the wet rollers 48A and 48B of the present invention is not limited to the structure shown in FIG. 1 and FIG. The wet roller of the present invention can also be used in a film sticking apparatus.

[0118]

As described above, according to the present invention, the operation for adhering the air bubble prevention liquid to the substrate (wet operation),
It is possible to easily and quickly switch to the non-adhesive operation (dry operation). Therefore, it is possible to reliably prevent such switching from causing an increase in operating load, and it is possible to obtain an excellent effect that there is no obstacle when performing continuous high-speed operation.

[Brief description of drawings]

FIG. 1 is a side view showing an overall configuration of a film sticking apparatus according to an embodiment of the present invention.

FIG. 2 is a side view showing in detail a configuration above the substrate transport path of the film sticking apparatus.

FIG. 3 is a perspective view showing a detailed configuration of a wet roller and a liquid receiving member provided in the film sticking device.

FIG. 4 is a perspective view showing a detailed configuration centering on a bearing member under the wet roller.

FIG. 5 is a plan view, a front view and a side view showing in detail the upper and lower wet rollers and the lower wet roller bearing member.

FIG. 6 is a perspective view showing in detail the bearing members of the upper and lower wet rollers and the upper wet roller.

FIG. 7 is a plan view, front view, and side view showing in detail the bearing members of the upper and lower wet rollers and the upper wet roller.

FIG. 8 is a perspective view of an essential part showing the liquid receiving member and its periphery in detail.

FIG. 9 is a plan view showing the liquid receiving member and its periphery in detail.

10 is a sectional view taken along line XA-XA and XB-XB in FIG. 9.

FIG. 11 is a sectional view taken along line XI-XI in FIG.

FIG. 12 is a block diagram showing a signal and control system configuration of the film sticking apparatus.

FIG. 13 is a flowchart showing a control procedure of the film sticking device.

FIG. 14 is a perspective view similar to FIG. 4, showing a second embodiment of the present invention.

FIG. 15 is an enlarged sectional view showing a wet roller position adjusting mechanism of the second embodiment.

FIG. 16 is a front view showing the click mechanism of the interlocking shaft of the embodiment.

FIG. 17 is a perspective view showing the relationship between the eccentric cam, the interlocking shaft and the cam follower of the same embodiment.

FIG. 18 is a side view showing the configuration of a conventional film sticking device.

FIG. 19 is a perspective view showing the structure of a conventional wet roller.

[Explanation of symbols]

 48A, 48B ... Upper and lower wet rollers 90A, 90B Upper and lower ... Liquid receiving member 91 ... Side plate 92 ... Water supply block 92A ... Guide pin 92B ... Spring member 94A ... Bearing block 94B ... Bearing block holding member 94C ... Position movement Knobs 96A, 96B ... Toothed pulley 98 ... Timing belt 100 ... Gear 102 ... Pinch roller 104 ... Pinch roller holding member 104A ... Holding plate 108 ... Hook member 108A ... Hook holding member 108B ... Second position moving knob 112 ... Liquid receiver Holding member 114 ... Slide bases 114A, 114B ... Engaging portion 116 ... Holding plate 118 ... Handle rod 120 ... Switching arrow plate 120A ... Switching display plate 122 ... Support roller 124 ... Water drop receiving plate 130 ... Central control unit

Claims (1)

[Claims] 1. A film sticking method, comprising: a wet roller for adhering an air bubble prevention liquid such as water to a substrate; In the apparatus, a liquid adhesion preventing member for preventing the air bubble prevention liquid of the wet roller from adhering to the substrate, and the liquid adhesion preventing member can be inserted and removed between the wet roller and the substrate transport path. A film sticking apparatus, characterized by comprising operation selecting means for freely selecting a wet operation and a dry operation.