JPH05266029A - Process flow preparing device - Google Patents

Abstract

PURPOSE:To easily prepare a process flow of production in a short period with use of the least knowledge of a production line. CONSTITUTION:This device consists of a code control table 5 controls in a hierarchical structure the codes showing the processing sections of each production process, the codes showing the processing types in the processing sections, plural variables related to the proper production of each processing, and the variables showing the purpose of each processing, etc., an attribute control table 9 controls the concrete attributes of the codes and the variables which are controlled by the table 5 for each code or variable, a variable control part 3 maintains the corresponding relation between both tables 5 and 9, a data selecting part 1 selects the codes or the variables of the hierarchical structure controlled by the table 5, a flow description display part 11 shows a flow of the production process based on the selected codes and variables.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing a process flow used in a production line having a plurality of production steps.

[0002]

2. Description of the Related Art FIG. 6 is a conventional process flow sheet for controlling the flow of a product, which is composed of a "process code" consisting of several digit alphanumeric characters, a process name, and its contents. Logistics are generally a series of multiple steps, with each step being processed in sequence to produce a product from a source material.

Conventionally, the flow of such a series of processes has been described on the basis of the several-digit alphanumeric code called "process code".

In this process code, one code corresponds to one process, and a lot of information such as processing conditions and contents is attached to this code. For example, using the code used in the semiconductor production line as an example, this code is explained as follows:
R01 ”is“ buffer-oxidizing gas (oxygen) temperature (9
(00 ° C) time (20 minutes) ".

Such a code is attached to all the processes existing in the production line, and is managed by a table that describes the correspondence between the code and the processing content. Also, the number of codes was thousands.

Using the table in which the codes and the processing contents are associated with each other as described above, the engineer handwrites a process flow sheet according to the flow of the manufacturing process, using a word processor, a screen editor, or the like, one step by one step. I was creating.

[0007]

In the above-mentioned conventional technique, the number of process codes simultaneously increases in the manufacturing process line as the number of types of processes increases. When an engineer describes the process flow in such code management, it becomes difficult to select a code, and it becomes very difficult to describe the flow of the manufacturing process.

Further, in handwriting, a word processor, and a screen editor, spelling mistakes in codes, difference in description format, etc. are caused, and a lot of time is spent to describe the flow of the manufacturing process.

It is an object of the present invention to provide a process flow creating apparatus which enables an engineer to easily create a process flow of a manufacturing process with a minimum of knowledge on a manufacturing line in a short time.

[0010]

In order to achieve the above-mentioned object, the present invention provides a code representing a classification of processing in each manufacturing process, a code representing a kind of processing in the classification of processing, and A code management table that manages a plurality of variables related to manufacturing unique to each process or a variable indicating the purpose of the process in a hierarchical structure, and the codes managed in this code management table and the specific attributes of the variables An attribute management table that manages each code or variable, a variable management unit that maintains the correspondence relationship between the code management table and the attribute management table, and a code or variable having a hierarchical structure managed by the code management table are selected. It comprises a data selection section and a flow description display section for displaying the flow of the manufacturing process from the selected code and variables.

[0011]

In the above structure, the present invention has a hierarchical structure in which a code indicating the type of process in the manufacturing process, a variable associated with each process, and a value to be assigned to the variable are used in advance by using a computer or the like. To manage. Further, each attribute of each code and variable is managed in the attribute management table one by one. And these two management tables always maintain a corresponding relationship.

Under these circumstances, first, of the codes and variables managed in the code management table, the code data managed at the top of the hierarchical structure is displayed in the guide window on the screen. When an applicable code is selected from the data selection section, the code is displayed in the main window. Next, the code group (or variable group) belonging to the lower order of the code selected in the guide window is displayed in the guide window.

In the same manner, the end of the hierarchical structure of codes and variables is selected. Simultaneously with the end of selection, a process flow showing the created processing contents of one step is displayed in the main window. Thus, the process flow of each process is created one after another.

[0014]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a functional block diagram of the present invention.

The present apparatus includes a "data selection section 1", a "variable management section 3", a "code management table 5", an "attribute management table 9", a "flow description display section 11", and a "data storage section 1".
3 ”.

The data selection unit 1 includes a code management table 5
Codes and variables that represent each process of semiconductor manufacturing controlled by
This is a part for selecting a value, and corresponds to, for example, a mouse or a keyboard.

A plurality of codes, variables, and values managed by the code management table 5 are assigned to the “code representing the type of processing”, the “variable associated with each processing”, and the “variable” in the manufacturing process. There is a variable value (parameter) ". Further, the “code indicating the type of processing” may be expressed by one type of code, but may be expressed by two types of a header code indicating a major classification and a classification code indicating a middle classification.

For example, CVD (Chemical Vapor Deposit)
The “code representing the type of processing” in the low pressure CVD process of the ion) process is “CVD”. If two types of code are used, the header code may be expressed as “CVD” and the classification code may be expressed as “LPCVD”. Yes (however, it is not limited to two types, it does not matter if more classification is done).

Next, "variables associated with processing" in the CVD process include "FILM" which represents the type of film, "THICK" which represents the thickness of the film, and the like. ) ”Indicates“ SIN ”and“ 100 ”, respectively.
0 "exists.

The information about the plurality of codes is managed in the code management table 5 and the attribute management table 9 in advance.

In the code management table 5, headers, divisions, and membership relationships of variable values (parameters) to variables associated with each process are preset by a hierarchical structure. FIG. 2 shows an example of the code management table 5. The code management table 5 will be described below with reference to FIG. 2 as an example.

As shown in FIG. 2, codes "A1" and "A2" representing classification belong to the hierarchy in the code "A" representing the header. Then, the variable values “AA1”, “AA2” and the like for the “first variable” belong to the category “A1”, and further, the variable value “AA11” for the “second variable”, and the like for “AA1”. "AA12", "AA13", etc. belong to the hierarchy, and the codes are linked by a hierarchical structure. The connection relation of the codes is managed by the variable management unit 3.

Unique attributes are defined for each of these codes and variables. For example, the code “A1” has attributes such as character required input selection input. The attribute management table 9 manages these attributes. By managing with the attribute management table 9 as shown in FIG. 3, it becomes possible to easily deal with change / addition of attributes. The attribute management table 9 will be described below with reference to FIG. 3 as an example.

The attribute management table 9 shown in FIG. 3 defines attributes for all codes, variables and values, and the number of tables is the same as the total number of codes, variables and values.

We will give examples of attributes for certain variables. For example, the variable “THICK” is a guide input numerical value range of continuous numerical values without input restriction: 10Å <THICK <1000.
Å (STEP = 10Å) unit: Å etc. are managed in the attribute management table 9. By managing the table in this way, for example, the numerical value range can be set to “5Å <THICK <2000.
When it is desired to change to “Å”, this can be dealt with by changing “10” to “5” and “1000” to “2000” in the attribute management table 9.

The relationship between the attribute management table 9 and the code management table 5 is managed by the variable management section 3.
It manages which code, variable and value correspond to which attribute management table 9 and what that attribute is.

Next, an example of the flow description display section 11 is shown in FIG.

As shown in FIG. 4, the flow description display section 11 is
"Main window 15" that displays the codes and variables selected in the data selection section 1, "Guide window 17" that selects character codes and numerical values, and other files that store detailed data required for description. It is composed of multiple windows such as an "option window 19" for displaying the contents and a "menu window 21" for selecting a special operation function.

The "main window 15" displays the data selected by the data selection unit 1 among the codes, variables, values, etc. defined in the code management table 5.
The data selected by the data selection unit 1 is selected and input from the "guide window 17". The data in the “guide window 17” are codes, variables, values, etc. managed in a hierarchical structure in the code management table 5.

The input format (for example, selection type or slide type) for selecting a code (character) or numerical value displayed in the "guide window 17" is stored in the attribute management table 9 corresponding to the code or numerical value. It depends on the attribute.

Furthermore, some of the codes, variables, and values are called from other files, and a window called "option window 19" for displaying such other files is also defined. The "option window 19" also has an input window that requires special input. "Menu window 21" is for code input, copying, range specification, link with other systems, etc.
This is a window for selecting many special functions in the flow description.

The data storage unit 13 includes a flow description display unit 11
This is a part that saves the process flow data displayed in step 3 in a format suitable for the purpose of using the data. There are no restrictions on data storage.

Next, this embodiment will be described by taking one flow process, for example, a CVD process as an example. For example, "Decompression CV
In the process D, the silicon nitride film (SiN) is removed to 1000
Å “Forming” is performed by “CVD, LPCVD: FILM = SIN, THICK
= 1000; ”, a variable, and a value.

The code management table 5 has C shown in FIG.
The hierarchical structure of the VD process is managed. In the attribute management table 9, attributes are managed for all codes, variables and values defined in the code management table 5. For example, the variable "FILM" is a character guide input unit:
The variable "THICK", such as displaying a flow without a flow, is managed such that the unit of continuous input of numerical values: Å Flow display is performed.

Using the data selection unit 1 and the flow description display unit 11, the description of the above-described example of the CVD process is created. First, using the data selection unit 1, for example, a mouse or the like, click on any part of the "main window 15".
As a result, the leftmost code (only "CVD" in this case) in the code management table 5 shown in FIG. 5 is displayed in the "guide window 17".

Next, the code displayed on the "guide window 17" is selected by the data selecting section 1 to display the code on the "main window 15". After entering the first code, the code of the next layer "LPCV
“D” and “PMCVD” are displayed in the “guide window 17” and similarly selected using the data selection unit 1. In this case, when "LPCVD" is selected, CVD, LPCVD: FILM =? Is displayed. At this time, the variable “FILM” coupled under “LPCVD” is also displayed in the “main window 15” at the same time.

Further, the value of "FILM" shown in FIG.
The data is displayed in the “guide window 17” and similarly, the selection input of the data selection unit 1 is performed. Similarly, in the same manner, the code according to the hierarchical structure managed by the code management table 5,
Select and enter a value.

As a result, the process of "forming 1000 liters of silicon nitride film (SiN) in the low pressure CVD process" is "CVD, LPCVD: FILM = SIN, THICK".
= 1000; ”code, variables, and values are displayed in the“ main window 15 ”.

Attributes such as the variable “FILM” being “character” and the variable “THICK” being “continuous numerical value” are managed in the attribute management table 9, and the attribute management table 9 and the code management are performed. The correspondence relationship of the table 5 is maintained by the variable management unit 3.

Finally, when the process flow description display on the flow description display unit 11 is completed, the data storage unit 1
3, the process flow data is saved. As the storage means at this time, a medium such as a magnetic disk device can be considered.

[0042]

As described above, according to the process flow creating apparatus of the present invention, codes, variables and values are managed in a hierarchical structure in the code management table, and their attributes are managed in the attribute management table. Therefore, it is possible to selectively create a process flow without spelling mistakes with only the minimum knowledge necessary for the manufacturing line.

Further, even if the code, the variable, the value, or the attributes for these are increased, they can be easily added, and the labor by this is not spent.

As described above, the labor required for creating the process flow can be reduced and the process flow can be created in a shorter time.

[Brief description of drawings]

FIG. 1 is a functional block diagram of a process flow creation device according to the present invention.

FIG. 2 is a diagram showing an example of a code management table shown in FIG.

FIG. 3 is a diagram showing an example of an attribute management table shown in FIG.

FIG. 4 is a diagram showing an example of a screen configuration of a flow description display unit shown in FIG.

FIG. 5 is a diagram showing a specific example of a code management table.

FIG. 6 is a diagram showing an example of a conventional process flow sheet.

[Explanation of symbols]

 1 data selection section 3 variable management section 5 code management table 9 attribute management table 11 flow description display section 13 data storage section 15 main window 17 guide window 19 option window 21 menu window

Claims (3)

[Claims] 1. A code management table for managing codes and variables indicating various manufacturing conditions in each manufacturing process in a hierarchical structure, an attribute management table for managing respective attributes of the codes and variables, and the code management table. A variable management unit that maintains the correspondence relationship of the attribute management table, a data selection unit that selects the code or variable of the hierarchical structure managed by the code management table, and the flow of the manufacturing process from the selected code and variable are displayed. An apparatus for creating a process flow, comprising: 2. The code management table includes a code that represents a process category in each manufacturing process, a code that further represents a type of process in the process category, and a plurality of codes related to manufacturing unique to each process. 2. The process flow creation device according to claim 1, wherein variables or variables indicating the purpose of processing are managed in a hierarchical structure. 3. The attribute management table manages, for each code or variable, specific attributes of the codes and variables managed by the code management table. Process flow creation device.