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JPH05263814A - Joining structure for parts - Google Patents

Joining structure for parts

Info

Publication number
JPH05263814A
JPH05263814A JP9359892A JP9359892A JPH05263814A JP H05263814 A JPH05263814 A JP H05263814A JP 9359892 A JP9359892 A JP 9359892A JP 9359892 A JP9359892 A JP 9359892A JP H05263814 A JPH05263814 A JP H05263814A
Authority
JP
Japan
Prior art keywords
press
pin
fitting
fitting portion
abutting surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9359892A
Other languages
Japanese (ja)
Inventor
Yoshihiko Konno
吉彦 今野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP9359892A priority Critical patent/JPH05263814A/en
Publication of JPH05263814A publication Critical patent/JPH05263814A/en
Pending legal-status Critical Current

Links

Landscapes

  • Lens Barrels (AREA)
  • Connection Of Plates (AREA)
  • Insertion Pins And Rivets (AREA)

Abstract

PURPOSE:To provide a joining structure for parts, which is simple in constitution, and is excellent in assembling properties, appearance and mounting accuracy. CONSTITUTION:One part is provided with a first butting face 2d which is perpendicularly intersected with a first coupling section 2c, and with a first pin 2b and a second pin 2a provided on the first butting face or on a face close to the aforesaid butting face in parallel with the first coupling section 2c. And the other part is provided with a second coupling section 3c coupled with the first coupling section 2c, a second butting face 3e perpendicularly intersected with the aforesaid second coupling section, a first press-in hole 3d which forms press-in relation with the first pin 2b while being rattled roughly in the radial direction on the aforesaid second butting face or on a face close to the second butting face at a position corresponding to the first pin 2b, and with a second press-in hole 3a which forms press-in relation with the second pin 3a while being rattled roughly in the radial direction at a position parted from the second butting face 3e by a specified distance L1 capable of absorbing the relative position errors of the first and second pins.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、位置精度の必要とされ
る2部品を圧入結合される部品の結合構造に関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a connecting structure of two parts, which are required to have positional accuracy and are press-fitted together.

【0002】[0002]

【従来の技術】従来、レンズ鏡筒のように、位置精度が
必要とされ、かつ、過大な応力を加えられない部品を別
の部材と固定する時には、この2つの部品をビスによっ
て固定したり、2つの部品にそれぞれ形成した雄雌ネジ
を螺合することで固定したりしていた。
2. Description of the Related Art Conventionally, when fixing a component, such as a lens barrel, which requires positional accuracy and is not subjected to excessive stress, to another member, these two components may be fixed with screws. It was fixed by screwing male and female screws formed on the two parts, respectively.

【0003】また、特公昭63−44204号公報に示
されているような、2枚のレンズの接合方法が実用され
ている。
Also, a method of joining two lenses, as disclosed in Japanese Patent Publication No. 63-44204, has been put into practical use.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記従
来例では、以下に示すような問題点があった。 a 2つの部品をビスにより結合する従来例では、組立
が煩雑になり、なおかつ、ビスの頭が外部に現れ美観上
好ましくない。 b 2つの部品を螺合結合する従来例では、固定時の位
置が決められず、回転対称でない部品や、取付時に回転
すると不具合が生じる場合などには適用できなかった。 c 特公昭63−44204号公報に示された結合方法
では、2つの部品の中心軸の同軸度の相対精度及び中心
軸の相対倒れ精度が、結合時のピン位置の精度で決定さ
れてしまうため、精度が得られ難い。
However, the above-mentioned conventional example has the following problems. a In the conventional example in which two parts are joined with a screw, the assembly becomes complicated, and the head of the screw is exposed to the outside, which is not aesthetically pleasing. b The conventional example in which two parts are screw-coupled cannot be applied to a part that is not rotationally symmetric because the position at the time of fixing cannot be determined, or when a problem occurs when the part is rotated during mounting. c In the joining method disclosed in Japanese Patent Publication No. 63-44204, the relative accuracy of the coaxiality of the central axes of the two parts and the relative tilt accuracy of the central axes are determined by the accuracy of the pin position at the time of coupling. , It is difficult to obtain accuracy.

【0005】本発明は上記のような問題点を解消した部
品の結合構造を提供することを目的とするものである。
It is an object of the present invention to provide a component connecting structure that solves the above problems.

【0006】[0006]

【課題を解決するための手段】本発明によれば、圧入結
合すべき2部品の、一方の部品に、略円形に形成された
第1の嵌合部、第1の嵌合部と直交して形成された第1
の突き当て面、第1の突き当て面上もしくは第1の突き
当て面の近傍面上に、前記第1の嵌合部と平行に、第1
のピン及び第2のピンを設け、他方に部品に、前記第1
の嵌合部と嵌合し、略円形に構成された第2の嵌合部
と、この第2の嵌合部と直交して形成され、前記第1の
突き当て面と対向する第2の突き当て面と、この第2の
突き当て面上もしくは第2の突き当て面の近傍面上で、
前記第1のピンに対応した位置に前記第1の嵌合部の中
心軸に対して略円周方向に第1のピンと圧入関係を持
ち、略半径方向にガタを持った長穴で構成されている第
1の圧入穴と、第2の突き当て面から所定距離L1だけ
離れた位置で、前記第2のピンに対応した位置に前記第
1の嵌合部の中心軸に対して、略円周方向に第2のピン
と圧入関係を持ち略半径方向にガタを持った長穴で構成
されている第2の圧入穴を設け、前記第1、第2のピン
が、それぞれ前記第1、第2の圧入穴に圧入されること
により2部品が結合するように構成し、前記2つのピン
の相対位置誤差を第2のピンの弾性倒れ変位もしくは第
2の圧入穴位置の弾性変位により吸収可能な量に前記所
定距離L1を設定したことにより、前記2つの部品の結
合時に、第1の嵌合部と第2の嵌合部が嵌合関係になる
ことで2つの部品の中心軸の同軸度を保証し、第1の突
き当て面と第2の突き当て面が当接することで2つの部
品の中心軸の相対倒れ精度を保証し、前記第2の突き当
て面から所定距離だけ離れた位置に設けた第2の圧入穴
に第2のピンを圧入し、この第2のピンの弾性倒れ変位
もしくは第2の圧入穴位置の弾性変位により、2つのピ
ンの相対位置精度の誤差を吸収するものである。
According to the present invention, one of two components to be press-fitted to each other has a first fitting portion formed in a substantially circular shape and orthogonal to the first fitting portion. Formed by the first
On the abutting surface, on the first abutting surface, or on a surface in the vicinity of the first abutting surface, in parallel with the first fitting portion,
Pin and second pin are provided, and the other part is provided with the first
And a second fitting portion which is fitted in the fitting portion and has a substantially circular shape, and a second fitting portion which is formed orthogonal to the second fitting portion and faces the first butting surface. On the abutting surface and the second abutting surface or a surface in the vicinity of the second abutting surface,
It is an elongated hole having a press-fitting relationship with the first pin in a substantially circumferential direction with respect to the central axis of the first fitting portion at a position corresponding to the first pin and having a play in a substantially radial direction. The first press-fitting hole and the second butting surface are separated from each other by a predetermined distance L1 at a position corresponding to the second pin with respect to the central axis of the first fitting portion. A second press-fitting hole having a long hole having a press-fitting relationship with the second pin in the circumferential direction and having a play in the substantially radial direction is provided, and the first and second pins are respectively provided with the first and second pins. The two parts are configured to be coupled by being press-fitted into the second press-fitting hole, and the relative position error of the two pins is absorbed by the elastic fall displacement of the second pin or the elastic displacement of the second press-fitting hole position. By setting the predetermined distance L1 to a possible amount, the first fitting can be achieved when the two parts are joined. The second fitting portion and the second fitting portion are in a mating relationship to ensure the coaxiality of the central axes of the two parts, and the first butting surface and the second butting surface contact each other to ensure that the two parts The relative tilt accuracy of the central axis is guaranteed, and the second pin is press-fitted into the second press-fitting hole provided at a position separated from the second abutting surface by a predetermined distance, and the second pin is elastically tilted and displaced. Alternatively, the elastic displacement of the second press-fitting hole position absorbs an error in relative positional accuracy of the two pins.

【0007】[0007]

【実施例】以下、本発明の実施例をレンズ鏡筒の固定に
適用した場合について説明する。図1は本発明の特徴を
最もよく表わしたレンズ鏡筒を光軸に平行に切断にした
断面図、図2は図1の固定部を図の右側から見た時の側
面図、図3は図1のレンズ鏡筒の分解斜視図、図4、図
5は要部の拡大断面図である。
The following is a description of the case where the embodiment of the present invention is applied to the fixing of the lens barrel. FIG. 1 is a cross-sectional view of a lens barrel, which best shows the features of the present invention, cut in parallel with the optical axis, FIG. 2 is a side view of the fixing portion of FIG. 1 seen from the right side of the drawing, and FIG. 1 is an exploded perspective view of the lens barrel of FIG. 1, and FIGS. 4 and 5 are enlarged cross-sectional views of a main part.

【0008】図1〜図5において、1はレンズ、2はレ
ンズ1を保持したレンズ鏡筒、3はレンズ鏡筒2を取付
ける固定部である。
1 to 5, 1 is a lens, 2 is a lens barrel holding the lens 1, and 3 is a fixing portion to which the lens barrel 2 is attached.

【0009】このレンズ鏡筒2にはレンズ1の光軸と同
軸に嵌合部2cが設けられ、この嵌合部2cと直交して
形成された突き当て面2dもしくは該突き当て面の近傍
面上に該嵌合部と平行して弾性体で構成されたピン2
a,2eと、このピン2a,2eと略平行にピン2bが
一体的に立てられている。
A fitting portion 2c is provided on the lens barrel 2 coaxially with the optical axis of the lens 1, and an abutting surface 2d formed orthogonal to the fitting portion 2c or a surface near the abutting surface. A pin 2 made of an elastic material in parallel with the fitting portion
A and 2e and a pin 2b are integrally erected substantially parallel to the pins 2a and 2e.

【0010】また、固定部3には、上記レンズ鏡筒2の
嵌合部2cと嵌合し該固定部に対するレンズ1の同軸度
を保障するための嵌合部3cと、この嵌合部3cと直交
し、かつ上記突き当て面2dと対向する突き当て面3e
が設けられている。またこの固定部3には図4に示すよ
うに、上記ピン2bが圧入する第1の圧入穴3dと上記
ピン2a,2eの先端部が圧入する第2の圧入穴3a,
3fとが設けられている。
Further, the fixing portion 3 is fitted with the fitting portion 2c of the lens barrel 2 to ensure the coaxiality of the lens 1 with respect to the fixing portion, and the fitting portion 3c. An abutting surface 3e which is orthogonal to the abutting surface 2d and faces the abutting surface 2d.
Is provided. Further, as shown in FIG. 4, a first press-fitting hole 3d into which the pin 2b is press-fitted and a second press-fitting hole 3a into which the tips of the pins 2a and 2e are press-fitted are inserted into the fixing portion 3.
3f are provided.

【0011】上記第1の圧入穴3dは突き当て面3eも
しくは該突き当て面の近傍面上に設けられており、図2
に示されているように、嵌合部3cの中心軸に対して略
円周方向にピン2bと圧入関係を持ち、略半径方向にガ
タを持った長穴で構成されている。また、上記第2の圧
入穴3a,3fは突き当て面3eから所定の距離K1を
隔てて設けられ、この距離L1の区間はガタ部3b,3
gが形成されている。そして、図2に示されているよう
に、嵌合部3cの中心軸に対して略円周方向にピン2
a,2eと圧入関係を持ち略半径方向にガタを持った長
穴で構成されている。
The first press-fitting hole 3d is provided on the abutting surface 3e or on the surface in the vicinity of the abutting surface, as shown in FIG.
As shown in FIG. 5, the pin 2b is press-fitted in a substantially circumferential direction with respect to the central axis of the fitting portion 3c, and is formed of an elongated hole having a play in a substantially radial direction. Further, the second press-fitting holes 3a and 3f are provided at a predetermined distance K1 from the abutting surface 3e, and the section of this distance L1 is the backlash portions 3b and 3f.
g is formed. Then, as shown in FIG. 2, the pin 2 is formed substantially in the circumferential direction with respect to the central axis of the fitting portion 3c.
It is composed of an elongated hole which has a press-fitting relationship with a and 2e and has a play in a substantially radial direction.

【0012】次に、上記構成による圧入時の保持につい
て説明する。レンズ鏡筒2の嵌合部2cを固定部3の嵌
合部3cに嵌合することにより、固定部3に対するレン
ズ鏡筒2の中心軸が一致する。
Next, a description will be given of the holding by the above-mentioned structure at the time of press fitting. By fitting the fitting portion 2c of the lens barrel 2 into the fitting portion 3c of the fixed portion 3, the central axes of the lens barrel 2 and the fixed portion 3 are aligned.

【0013】また、ピン2bが長穴である第1の圧入穴
3dに入ったとき、圧入されている部品がピン2bの根
元部分であるため、ピン2bが弾性体で構成されていよ
うといまいと、ピン2bが湾曲することはない。従っ
て、ピン2bと第2の圧入穴3dの位置関係で、固定部
3に対するレンズ鏡筒2の回転方向の位置は、一意に決
定される。
Further, when the pin 2b enters the first press-fitting hole 3d, which is an elongated hole, since the part press-fitted is the root portion of the pin 2b, it does not matter whether the pin 2b is made of an elastic body. Therefore, the pin 2b does not bend. Therefore, the position in the rotational direction of the lens barrel 2 with respect to the fixed portion 3 is uniquely determined by the positional relationship between the pin 2b and the second press-fitting hole 3d.

【0014】この時、第1の圧入穴3dは固定部3の中
心軸に対して直交する半径方向に長穴になっているた
め、この第1の圧入穴3dとピン2bの相対位置が製造
誤差の為、多少ずれていたとしても、前記嵌合部2cと
嵌合部3cの嵌合関係と競合して組立不良となることは
無い。
At this time, since the first press-fitting hole 3d is an elongated hole in the radial direction orthogonal to the central axis of the fixing portion 3, the relative position between the first press-fitting hole 3d and the pin 2b is manufactured. Due to an error, even if there is a slight deviation, there is no possibility of assembly failure due to competition with the fitting relationship between the fitting portion 2c and the fitting portion 3c.

【0015】上記の圧入時には、第2の圧入穴3aおよ
び3fにピン2aおよびピン2eが同様に圧入される。
この第2の圧入穴3aおよび3fは突き当て面3eから
所定の距離L1を隔てて設けられており、図5のよう
に、前記嵌合部2cと嵌合部3cおよび前記第2の圧入
穴3dとピン2bの2組によって決定される固定部3と
レンズ鏡筒2の相対位置関係に対して、第2の圧入穴3
aとピン2aおよび3fとピン2eの相対位置関係が製
造誤差の為に位置ずれΔを生じていたとしても、ピン2
a,2eの弾性倒れ変位もしくは圧入穴3a,3f位置
の弾性変位により前記位置ずれを吸収することが可能に
なっている。
At the time of press-fitting, the pins 2a and 2e are similarly press-fitted into the second press-fitting holes 3a and 3f.
The second press-fitting holes 3a and 3f are provided at a predetermined distance L1 from the abutting surface 3e, and as shown in FIG. 5, the fitting part 2c, the fitting part 3c, and the second press-fitting hole 3f. With respect to the relative positional relationship between the fixed portion 3 and the lens barrel 2 determined by the two sets of 3d and the pin 2b, the second press-fitting hole 3
Even if the relative positional relationship between a and the pins 2a and 3f and the pin 2e causes a positional deviation Δ due to a manufacturing error, the pin 2
The displacement can be absorbed by the elastic fall displacement of a and 2e or the elastic displacement of the press-fitting holes 3a and 3f.

【0016】上記説明したように、固定部3とレンズ鏡
筒2の固定に関連する嵌合部2cと嵌合部3c、第1の
圧入穴3d、第2の圧入穴3a,3fとピン2b,2
a,2eがそれぞれ競合して取付不良になることを防止
するため、2部品の圧入結合を安定、確実に行うことが
できる。
As described above, the fitting portion 2c and the fitting portion 3c related to the fixing of the fixing portion 3 and the lens barrel 2, the first press-fitting hole 3d, the second press-fitting holes 3a and 3f, and the pin 2b. , 2
Since a and 2e are prevented from competing with each other to cause mounting failure, press-fit connection of the two components can be performed stably and reliably.

【0017】また取り外し時には、各圧入穴3a,3
d,3fを貫通突出しているピン2a,2b,2eの先
端を加圧することで、容易にレンズ鏡筒2と固定部3を
分離させることが可能である。
At the time of removal, the press-fitting holes 3a, 3
By pressing the tips of the pins 2a, 2b, 2e protruding through d and 3f, the lens barrel 2 and the fixed portion 3 can be easily separated.

【0018】[0018]

【発明の効果】以上説明したように、本発明によれば、
2つの部品の圧入結合時に、一方の部品の嵌合部を他方
の部品の嵌合部に嵌合することで2つの部品の中心軸の
同軸度を保証し、両部品の突き当て面同士が当接するこ
とで2つの部品の中心軸の相対倒れ精度を保証し、一方
の部品の突き当て面から所定距離だけ離れた位置に設け
た圧入穴に他方の部品に設けたピンを圧入し、このピン
の弾性倒れ変位もしくは圧入穴位置の弾性変位により、
2つのピンの相対位置精度の誤差を吸収するように構成
したので、以下のような効果が得られる。 1.構造が単純で、良好な組立性が得られる。 2.ビス等が露出しないため、外観結合部にも使用でき
る。 3.結合時の位相関係を一意に決められる。 4.圧入穴とは別に嵌合部と突き当て部を持つため、取
付精度が良い。
As described above, according to the present invention,
When the two parts are press-fitted together, by fitting the fitting part of one part to the fitting part of the other part, the coaxiality of the central axes of the two parts is guaranteed, and the abutting surfaces of both parts are By abutting, the relative tilt accuracy of the central axes of the two parts is guaranteed, and the pin provided on the other part is press-fitted into the press-fitting hole provided at a position separated from the abutting surface of the one part by a predetermined distance. Depending on the elastic fall displacement of the pin or the elastic displacement of the press-fitting hole position,
Since it is configured to absorb the error in the relative position accuracy of the two pins, the following effects can be obtained. 1. The structure is simple and good assemblability can be obtained. 2. Since the screws etc. are not exposed, it can also be used for the external joint. 3. The phase relationship at the time of connection can be uniquely determined. 4. It has a fitting part and an abutting part separately from the press-fitting hole, so the mounting accuracy is good.

【図面の簡単な説明】[Brief description of drawings]

【図1】レンズ鏡筒を光軸に平行に縦断した断面図。FIG. 1 is a sectional view in which a lens barrel is longitudinally cut parallel to an optical axis.

【図2】図1の固定部を図の右側から見た図。FIG. 2 is a view of the fixing portion of FIG. 1 viewed from the right side of the drawing.

【図3】図1のレンズ鏡筒の分解斜視図。FIG. 3 is an exploded perspective view of the lens barrel of FIG.

【図4】圧入穴とピンとの関係を示す要部詳細図。FIG. 4 is a detailed view of essential parts showing the relationship between press-fitting holes and pins.

【図5】圧入穴とピンとの関係を示す要部詳細図。FIG. 5 is a detail view of a main portion showing the relationship between the press-fitting holes and the pins.

【符号の説明】[Explanation of symbols]

2 レンズ鏡筒(一方の部品) 2a ピン 2b ピン 2c 嵌合部 2d 突き当て面 2e ピン 3 固定部(他方の部品) 3a 圧入穴 3c 嵌合部 3d 圧入穴 3e 突き当て面 3f 圧入穴 2 lens barrel (one part) 2a pin 2b pin 2c fitting part 2d abutting surface 2e pin 3 fixing part (other part) 3a press fitting hole 3c fitting part 3d press fitting hole 3e abutting surface 3f press fitting hole

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 圧入結合すべき2部品の、 一方の部品に、略円形に形成された第1の嵌合部、第1
の嵌合部と直交して形成された第1の突き当て面、第1
の突き当て面上もしくは第1の突き当て面の近傍面上
に、前記第1の嵌合部と平行に、第1のピン及び第2の
ピンを設け、 他方の部品に、前記第1の嵌合部と嵌合し、略円形に構
成された第2の嵌合部と、この第2の嵌合部と直交して
形成され、前記第1の突き当て面と対向する第2の突き
当て面と、この第2の突き当て面上もしくは第2の突き
当て面の近傍面上で、前記第1のピンに対応した位置に
前記第1の嵌合部の中心軸に対して略円周方向に第1の
ピンと圧入関係を持ち、略半径方向にガタを持った長穴
で構成されている第1の圧入穴と、 第2の突き当て面から所定距離L1だけ離れた位置で、
前記第2のピンに対応した位置に前記第1の嵌合部の中
心軸に対して、略円周方向に第2のピンと圧入関係を持
ち略半径方向にガタを持った長穴で構成されている第2
の圧入穴を設け、 前記第1、第2のピンが、それぞれ前記第1、第2の圧
入穴に圧入されることにより2部品が結合するように構
成し、 前記2つのピンの相対位置誤差を第2のピンの弾性倒れ
変位もしくは第2の圧入穴位置の弾性変位により吸収可
能な量に前記所定距離L1を設定したことを特徴とする
部品の結合構造。
1. A first fitting portion, which is formed into a substantially circular shape, is formed on one of the two parts to be press-fitted and joined together.
A first butting surface formed orthogonal to the fitting portion of
The first pin and the second pin are provided in parallel with the first fitting portion on the abutting surface of or in the vicinity of the first abutting surface, and the other part is provided with the first pin and the second pin. A second fitting portion that fits in the fitting portion and is configured in a substantially circular shape, and a second protrusion that is formed orthogonal to the second fitting portion and that faces the first butting surface. On the contact surface and on the second abutting surface or on the surface in the vicinity of the second abutting surface, a substantially circular shape is formed at a position corresponding to the first pin with respect to the central axis of the first fitting portion. A first press-fitting hole having a press-fitting relationship with the first pin in the circumferential direction and having a play in the substantially radial direction, and a position separated from the second abutting surface by a predetermined distance L1.
It is composed of an elongated hole at a position corresponding to the second pin with respect to the central axis of the first fitting portion in a press-fitting relationship with the second pin in a substantially circumferential direction and with a play in a substantially radial direction. The second
The first and second pins are press-fitted into the first and second press-fitting holes, respectively, so that two parts are coupled to each other, and a relative position error between the two pins is provided. The predetermined distance L1 is set to an amount that can be absorbed by the elastic tilt displacement of the second pin or the elastic displacement of the second press-fitting hole position.
JP9359892A 1992-03-19 1992-03-19 Joining structure for parts Pending JPH05263814A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9359892A JPH05263814A (en) 1992-03-19 1992-03-19 Joining structure for parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9359892A JPH05263814A (en) 1992-03-19 1992-03-19 Joining structure for parts

Publications (1)

Publication Number Publication Date
JPH05263814A true JPH05263814A (en) 1993-10-12

Family

ID=14086757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9359892A Pending JPH05263814A (en) 1992-03-19 1992-03-19 Joining structure for parts

Country Status (1)

Country Link
JP (1) JPH05263814A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006135254A (en) * 2004-11-09 2006-05-25 Nikon Corp Lens barrel support apparatus, exposure apparatus, and device manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006135254A (en) * 2004-11-09 2006-05-25 Nikon Corp Lens barrel support apparatus, exposure apparatus, and device manufacturing method

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