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JPH0513642A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH0513642A
JPH0513642A JP3185304A JP18530491A JPH0513642A JP H0513642 A JPH0513642 A JP H0513642A JP 3185304 A JP3185304 A JP 3185304A JP 18530491 A JP18530491 A JP 18530491A JP H0513642 A JPH0513642 A JP H0513642A
Authority
JP
Japan
Prior art keywords
lead
resin
chip
semiconductor device
inner lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3185304A
Other languages
Japanese (ja)
Inventor
Ryuichi Sakano
竜一 坂野
Takeshi Yamauchi
剛 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3185304A priority Critical patent/JPH0513642A/en
Publication of JPH0513642A publication Critical patent/JPH0513642A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To narrow lead intervals and reduce the external dimensions of a package by connecting a bonding pad on a chip with an inner lead which has the bending part of a lead frame, by wire and resin-sealing them. CONSTITUTION:Wax material 10 is placed on a die pad 6, the die pad is heated to a high temperature so as to melt the wax material 10 and a chip 5 is placed on the wax material 10 so as to make the chip 5 adhered on the die pad 6. Then, a bonding pad on the chip 5 is wire-bonded with an inner lead 3a by wire 9. The bonding pad and the inner lead 3a are resin-sealed including the bending part 11 of the inner lead 3a and an external lead 2 is shaped. Therefore, the tensile strength of the lead from the resin exterior is maintained by the bending part 11 and the lead is prevented from being pulled out. Thus, the lead pitch is reduced and the external dimensions of a package are reduced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は半導体装置に関し、特
に樹脂封止型の半導体装置に用いられるリードフレーム
の構造の改良に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device, and more particularly to improvement of the structure of a lead frame used in a resin-sealed semiconductor device.

【0002】[0002]

【従来の技術】図5は従来の樹脂封止型半導体装置のリ
ードフレーム面を示す平面図であり、図6は図5に示す
C−C′線での断面図である。図において、5は半導体
チップ、8は該チップ5上のボンディングパッド、6は
上記チップ5がのっているダイパッドであり、チップ5
はロウ材10によりダイパッド6上に固定されている。
7はダイパッド6を支持する宙吊りリードである。1は
半導体装置を形成する樹脂、3bはインナーリードであ
り、上記樹脂1内部のリードフレームを示す。4はイン
ナーリード3b上に設けられたロックバーである。2は
リードで、上記樹脂1の外部に出ているリードフレーム
を示す。9はインナーリード3bとボンディングパッド
8を接続するワイヤである。L′はリード間隔を示す。
半導体装置を組み立てる場合、ダイパッド6にロウ材1
0をのせ、ダイパッド6を高温にしてロウ材10を溶融
させ、その状態でチップ5をロウ材10の上にのせてチ
ップ5とダイパッド6とを密着させる。次に、チップ5
上のボンディングパッド8とインナーリード3bとをワ
イヤ9によりワイヤボンドする。次に樹脂1で樹脂封止
し、外部のリード2を整形する。
2. Description of the Related Art FIG. 5 is a plan view showing a lead frame surface of a conventional resin-sealed semiconductor device, and FIG. 6 is a sectional view taken along line CC 'shown in FIG. In the figure, 5 is a semiconductor chip, 8 is a bonding pad on the chip 5, and 6 is a die pad on which the chip 5 is mounted.
Is fixed on the die pad 6 by the brazing material 10.
Reference numeral 7 is a suspended lead that supports the die pad 6. Reference numeral 1 denotes a resin forming a semiconductor device, 3b denotes an inner lead, which is a lead frame inside the resin 1. Reference numeral 4 is a lock bar provided on the inner lead 3b. Reference numeral 2 denotes a lead, which is a lead frame protruding outside the resin 1. A wire 9 connects the inner lead 3b and the bonding pad 8. L'indicates a lead interval.
When assembling a semiconductor device, the brazing material 1 is attached to the die pad 6.
0 is placed, the die pad 6 is heated to a high temperature to melt the brazing material 10, and in this state, the chip 5 is placed on the brazing material 10 to bring the chip 5 and the die pad 6 into close contact with each other. Next, tip 5
The upper bonding pad 8 and the inner lead 3b are wire-bonded with the wire 9. Next, resin 1 is resin-sealed and the external leads 2 are shaped.

【0003】この樹脂封止された状態において、インナ
ーリード3b上にはロックバー4があるので、樹脂1外
部からのリード引っ張り強度が保たれることとなり、リ
ード抜けを防止できる。
In this resin-sealed state, since the lock bar 4 is provided on the inner lead 3b, the lead pulling strength from the outside of the resin 1 is maintained, and the lead drop can be prevented.

【0004】[0004]

【発明が解決しようとする課題】従来の半導体装置は以
上のように構成されており、リード抜け防止のためにロ
ックバーを設けなければならず、ロックバーの分だけリ
ード間隔(図5に示す間隔L′)を広げなければならな
いので、リードピッチを狭くできず、このためパッケー
ジの外形寸法を小さくできないという問題点があった。
この発明は上記のような問題点を解消するためになされ
たもので、リード間隔が狭くでき、パッケージの外形寸
法を小さくすることのできる半導体装置を得ることを目
的とする。
The conventional semiconductor device is configured as described above, and the lock bar must be provided to prevent the lead from coming off, and the lead interval is the same as the lock bar (see FIG. 5). Since the space L ') must be widened, there is a problem that the lead pitch cannot be narrowed, and thus the external dimensions of the package cannot be reduced.
The present invention has been made to solve the above problems, and an object of the present invention is to obtain a semiconductor device in which a lead interval can be narrowed and a package outer dimension can be reduced.

【0005】[0005]

【課題を解決するための手段】この発明に係る半導体装
置は、リードフレームの樹脂封止内のインナーリードに
屈曲部分を有するものである。
A semiconductor device according to the present invention has a bent portion in an inner lead inside a resin encapsulation of a lead frame.

【0006】[0006]

【作用】この発明においては、樹脂封止内のインナーリ
ードに屈曲部分を有するので、リード抜けが防止でき、
従ってロックバーを必要としないため、リード間隔が狭
くできる。
In the present invention, since the inner lead in the resin encapsulation has the bent portion, the lead drop can be prevented,
Therefore, since the lock bar is not required, the lead interval can be narrowed.

【0007】[0007]

【実施例】図1はこの発明の一実施例による樹脂封止型
半導体装置のリードフレーム面を示す平面図であり、図
2は図1に示すA−A′線での断面図である。図におい
て、図5,図6と同一符号は同一又は相当部分を示し、
3aはインナーリードであり、樹脂1内部のリードフレ
ームを示す。11はインナーリード3aに設けられた屈
曲部である。Lはリード間隔を示す。
1 is a plan view showing a lead frame surface of a resin-sealed semiconductor device according to an embodiment of the present invention, and FIG. 2 is a sectional view taken along line AA 'shown in FIG. In the figure, the same reference numerals as those in FIGS. 5 and 6 denote the same or corresponding parts,
Reference numeral 3a denotes an inner lead, which is a lead frame inside the resin 1. Reference numeral 11 is a bent portion provided on the inner lead 3a. L indicates a lead interval.

【0008】図1,図2に示す半導体装置を組み立てる
場合、従来と同様に、まずダイパッド6にロウ材10を
のせ、ダイパッド6を高温にしてロウ材10を溶融さ
せ、その状態でチップ5をロウ材10の上にのせてチッ
プ5とダイパッド6とを密着させる。次に、チップ5上
のボンディングパッド8とインナーリード3aとをワイ
ヤ9によりワイヤボンドする。次にインナーリード3a
の屈曲部11を含め樹脂1により樹脂封止し、外部のリ
ード2を整形する。
When assembling the semiconductor device shown in FIGS. 1 and 2, as in the conventional case, first, the brazing material 10 is placed on the die pad 6, the die pad 6 is heated to a high temperature, and the brazing material 10 is melted. The chip 5 and the die pad 6 are placed in close contact with each other by being placed on the brazing material 10. Next, the bonding pad 8 on the chip 5 and the inner lead 3a are wire-bonded with the wire 9. Next, the inner lead 3a
The outer lead 2 is shaped by resin-sealing with the resin 1 including the bent portion 11.

【0009】このように本実施例では、インナーリード
3aに屈曲部11を有するので、樹脂封止された状態に
おいて、上記屈曲部11により樹脂外部からのリード引
っ張り強度を保つことができ、リード抜けを防止するこ
とができる。従ってロックバーを必要としないので、リ
ード間隔Lを広くする必要がなく、リードピッチを狭く
できるので、パッケージの外形寸法を小さくできる。
As described above, in this embodiment, since the inner lead 3a has the bent portion 11, the bent portion 11 can maintain the lead tensile strength from the outside of the resin in the resin-sealed state, and the lead can be pulled out. Can be prevented. Therefore, since the lock bar is not required, it is not necessary to widen the lead interval L and the lead pitch can be narrowed, so that the package outer dimension can be reduced.

【0010】図3は本発明の他の実施例による半導体装
置のリードフレーム面の平面図であり、図4は図3に示
すB−B′線での断面図である。上記実施例では、ダイ
パッド沈めを行っていないものを示したが、本実施例は
ダイパッド沈めを行ったものに適用したものであり、こ
の場合チップ5上面のボンディングパッド8の部分とイ
ンナーリード3aの屈曲部より内側の部分を同一の高さ
としている。
FIG. 3 is a plan view of a lead frame surface of a semiconductor device according to another embodiment of the present invention, and FIG. 4 is a sectional view taken along line BB 'shown in FIG. In the above embodiment, the die pad is not submerged, but this embodiment is applied to the die pad submerged. In this case, the bonding pad 8 portion on the upper surface of the chip 5 and the inner lead 3a are not formed. The part inside the bent part has the same height.

【0011】[0011]

【発明の効果】以上のようにこの発明に係る半導体装置
によれば、樹脂封止内のインナーリードが屈曲部分を有
するので、リード抜けを防止することができ、従ってロ
ックバーを必要とせず、リード間隔を狭くでき、パッケ
ージの外形寸法を小さくできるという効果がある。
As described above, according to the semiconductor device of the present invention, since the inner lead in the resin encapsulation has the bent portion, it is possible to prevent the lead from coming off, and therefore, the lock bar is not required, There is an effect that the lead interval can be narrowed and the package outer dimension can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例による半導体装置のリード
フレーム面の平面図。
FIG. 1 is a plan view of a lead frame surface of a semiconductor device according to an embodiment of the present invention.

【図2】図1に示すA−A′線での断面図。FIG. 2 is a sectional view taken along the line AA ′ shown in FIG.

【図3】この発明の他の実施例による半導体装置のリー
ドフレーム面の平面図。
FIG. 3 is a plan view of a lead frame surface of a semiconductor device according to another embodiment of the present invention.

【図4】図3に示すB−B′線での断面図。FIG. 4 is a cross-sectional view taken along line BB ′ shown in FIG.

【図5】従来の半導体装置のリードフレーム面の平面
図。
FIG. 5 is a plan view of a lead frame surface of a conventional semiconductor device.

【図6】図5に示すC−C′線での断面図。6 is a cross-sectional view taken along the line CC ′ shown in FIG.

【符号の説明】[Explanation of symbols]

1 樹脂 2 リード 3a インナーリード 5 チップ 6 ダイパッド 7 宙吊りリード 8 ボンディングパッド 9 ワイヤ 10 ロウ材 11 屈曲部 1 resin 2 leads 3a Inner lead 5 chips 6 die pad 7 suspended leads 8 Bonding pad 9 wires 10 brazing material 11 Bend

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 チップをダイパッド上に固定し、該チッ
プ上のボンディングパッドとリードフレームの屈曲部分
を有するインナーリードとをワイヤにより接続し、樹脂
封止してなることを特徴とする半導体装置。
1. A semiconductor device comprising a chip fixed on a die pad, a bonding pad on the chip and an inner lead having a bent portion of a lead frame connected by a wire, and resin-sealed.
【請求項2】 請求項1記載の半導体装置において、 上記インナーリードの屈曲部分は階段状であることを特
徴とする半導体装置。
2. The semiconductor device according to claim 1, wherein the bent portion of the inner lead has a step shape.
JP3185304A 1991-06-28 1991-06-28 Semiconductor device Pending JPH0513642A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3185304A JPH0513642A (en) 1991-06-28 1991-06-28 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3185304A JPH0513642A (en) 1991-06-28 1991-06-28 Semiconductor device

Publications (1)

Publication Number Publication Date
JPH0513642A true JPH0513642A (en) 1993-01-22

Family

ID=16168519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3185304A Pending JPH0513642A (en) 1991-06-28 1991-06-28 Semiconductor device

Country Status (1)

Country Link
JP (1) JPH0513642A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015068565A1 (en) * 2013-11-08 2015-05-14 アイシン精機株式会社 Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015068565A1 (en) * 2013-11-08 2015-05-14 アイシン精機株式会社 Semiconductor device

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