JPH04369822A - Equipment with turbulent air preventing attachment - Google Patents

Abstract

PURPOSE:To obtain equipment with a turbulent air preventing attachment with which swirling of air around the equipment, caused by the air stream flowing in the uniform direction in a clean room, is prevented and the yield of production is improved. CONSTITUTION:A drying machine 1 is provided with a turbulent air removing cap 3 on the upper part. The sides and the corners of the accute-angled drying machine 1 are rounded off, and the air stream 2 around the drying machine 1 in a clean room is made to flow smoothly.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to equipment used in a clean room that allows air to flow in a fixed direction.

0002

2. Description of the Related Art FIG. 2 is a front view schematically showing an example of a conventional dryer. In the figure, 1 is a dryer used in a clean room, and the sides and corners of this dryer 1 are approximately formed at right angles. 2 is the airflow in the clean room, and 2a is a vortex which is the turbulence of the airflow 2.

Next, the usage condition of the conventional dryer 1 in a clean room will be explained. In a clean room (not shown), air whose temperature and humidity have been adjusted is forced into the room from the ceiling, collected from the floor, and circulated (full-scale downflow system), which removes dust contained in this airflow. The dust is removed through a filter to improve the cleanliness of the room, and workers wear dust-proof clothing to maintain the cleanliness of the room. Dryer 1 is placed in a clean room,
In a photolithography process for semiconductor devices, a semiconductor device coated with a photoresist is stored, and the photoresist is prebaked. The prebaked semiconductor device is sent to an exposure process.

[0004] Here, the airflow 2 forcibly introduced from the ceiling of the clean room hits the dryer 1, flows along the wall surface of the dryer 1, and generates a vortex 2a at an acute angle portion. The vortex 2a of this airflow 2 suspends fine particles such as dust, and when semiconductor devices are put in and taken out of the dryer 1,
The fine particles adhere to the photoresist on the semiconductor element, and the fine particles attached to the photoresist cause defects in the exposure process.

[0005]

[Problems to be Solved by the Invention] As described above, since the sides and corners of the conventional dryer 1 are formed at acute angles, the airflow 2 flowing in a certain direction generates a vortex 2a around the dryer 1. There is a problem in that fine particles such as dust are suspended and adhere to semiconductor devices, reducing the yield of semiconductor devices.

[0006] This invention was made in order to solve the above-mentioned problems, and even when the device is used in an air current flowing in a fixed direction, it eliminates the vortex of the air current around the device and reduces the floating of fine particles such as dust. The aim is to obtain equipment that improves product yield.

[0007]

[Means for Solving the Problems] A device equipped with a turbulence prevention device according to the present invention is equipped with a turbulence prevention device that prevents turbulence generated at an acute angle portion of the device.

[0008]

[Operation] In this invention, the turbulence prevention device attached to the equipment smoothes the flow of air around the equipment, prevents the occurrence of turbulence at acute angle parts of the equipment, and reduces the suspension of fine particles.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Examples of the present invention will be described below with reference to the drawings. Example 1. FIG. 1 is a front view schematically showing an embodiment of the present invention, and in the figure, reference numeral 3 indicates a turbulence removing cap as a turbulence prevention device.

Next, the operation of the embodiment of the present invention shown in FIG. 1 will be explained. A turbulence removing cap 3 is attached to the dryer 1, and the sides and acute corners of the dryer 1 are rounded off. The airflow 2 hitting the dryer 1 installed in the clean room flows smoothly through the turbulence removal cap 3, thereby preventing the generation of vortices 2a around the dryer 1. In this way, in the above embodiment, the dryer 1
Since the generation of vortices 2a around the dryer 1 is prevented, the floating of fine particles such as dust can be reduced, and fine particles do not adhere to the semiconductor elements when they are taken in and out of the dryer 1, thereby increasing the yield in the photolithography process. can be greatly improved.

Example 2. In the first embodiment, the turbulence removal cap 3 is attached to the dryer 1 that pre-bakes the photoresist applied to the semiconductor element in the photolithography process, but in the second embodiment, the turbulence removal cap 3 is attached to the dryer 1 that pre-bakes the photoresist applied to the semiconductor element in the photolithography process. Turbulence removal cap 3 for type CVD equipment
The turbulence removal cap 3 prevents the generation of vortices 2a in the airflow 2, prevents the adhesion of fine particles such as dust to the semiconductor elements when loading and unloading the semiconductor elements into the CVD apparatus, and prevents the semiconductor elements from being attached. This reduces film defects in the thin film formed on top.

[0012] In each of the above embodiments, the dryer 1 is used as a device equipped with a turbulence prevention device used in a clean room.
Although the present invention is explained using a CVD apparatus and a CVD apparatus, the present invention is not limited thereto.

[0013]

As described above, according to the present invention, since the turbulence prevention device is attached to the device, even when the device is used in an airflow flowing in a certain direction, the vortex of the airflow around the device can be eliminated, and fine particles such as dust can be prevented. This has the effect of providing equipment that reduces floating and improves product yield.

[Brief explanation of drawings]

FIG. 1 is a front view schematically showing an embodiment of the present invention.

FIG. 2 is a front view schematically showing a conventional dryer.

[Explanation of symbols] 1 Dryer 2 Airflow 2a vortex

Claims (1)

[Claims] 1. A device used in a clean room where airflow flows in a fixed direction, characterized in that the device is equipped with a turbulence preventer to prevent turbulence occurring at an acute angle portion of the device. Turbulence prevention equipment used.