JPH04298804A - Thin-film magnetic head for perpendicular magnetic recording and production thereof - Google Patents

Abstract

PURPOSE:To decrease the magnetic paths up to the intersection of the magnetic fluxes from a magnetic recording medium with windings for recording and reproducing and to improve the sensitivity at the time of reproducing by forming recording and reproducing coils in proximity with the magnetic recording medium. CONSTITUTION:The composite surface consisting of a soft magnetic block 1 for auxiliary magnetic poles, glass 3b and a ceramic plate 2 for a slider is formed with the track pitch between main magnetic poles at 100 microns from a conductive material, for example, copper, etc., electrically insulated and wound by an electric insulating thin film of silicon dioxide (SiO2) or alumina (Al2O3) which encloses the main magnetic poles 4a, 4b having 0.25mum thickness and 60mum track width at the center and is formed by sputtering. A protective block 6 consisting of zirconia which is the same material as the material of the ceramic plate for the slider is adhered to the surface formed with the main magnetic poles 4a, 4b and the recording and reproducing coils 5a, 5b. The block is then cut to core chips at a dotted line C-D. Since the recording and reproducing coils are formable in proximity to the magnetic recording medium in such a case, the magnetic paths are shortened and the high sensitivity is obtd. at the time of reproducing.

Description

DETAILED DESCRIPTION OF THE INVENTION A. Object of the Invention [Field of Industrial Application] The present invention relates to a thin film magnetic head for perpendicular magnetic recording used in various magnetic recording devices, and a method for manufacturing the same.

[Conventional technology]

When performing high-density magnetic recording, the so-called perpendicular magnetic recording method, which magnetizes in the thickness direction of the magnetic recording medium, is preferable to the so-called longitudinal recording method, which magnetizes along the direction of relative movement between the magnetic recording medium and the magnetic head. Known to be beneficial. This is because in the longitudinal recording method, the self-demagnetizing effect increases as the wavelength of the recording signal becomes shorter, whereas in the perpendicular magnetic recording method, the self-demagnetizing effect in the magnetic layer becomes smaller as the recording density increases. This is because of this.

Two main types of magnetic heads have been proposed for use in this perpendicular magnetic recording system. One is a ring-type magnetic head similar to the longitudinal recording method used in combination with a perpendicular magnetization film, that is, a single-layer magnetic recording medium consisting only of a magnetic recording layer, and the other is a ring type magnetic head with a high This is a main pole excitation type single pole magnetic head having an auxiliary pole and used in combination with a double layer magnetic recording medium having a magnetic film having a relative magnetic permeability characteristic. Of these two magnetic heads, when performing higher-density magnetic recording, the main pole excitation type single-pole magnetic head is more advantageous in terms of the steepness of the magnetic field perpendicular to the magnetic recording medium. The bulk type main pole excitation type single pole magnetic head shown in Figure 9 or the 10th
A thin film type magnetic head with main pole excitation shown in the figure is being considered.

[Problem to be solved by the invention]

Conventional main-pole-excited single-pole magnetic heads for perpendicular magnetic recording have a long magnetic path for the magnetic flux from the magnetic recording medium to interlink with the recording and reproducing windings. There is a problem that the magnetic flux from the recording medium is attenuated, making it impossible to obtain good sensitivity.Furthermore, when creating two tracks or more multi-tracks, it is difficult to install or form the recording/reproducing winding. Due to these structural problems, such as being disadvantageous in constructing a multi-track magnetic head, a multi-track main pole excitation type single pole magnetic head has not yet been proposed.

In order to solve the above-mentioned drawbacks, the present invention provides a main magnetic pole excitation system which has a so-called in-line multi-track structure in which a plurality of main magnetic poles for performing multiple recording and reproducing operations are arranged on the same surface, which has good reproducing sensitivity of the magnetic head. An object of the present invention is to provide a type of thin film magnetic head for perpendicular magnetic recording and a method for manufacturing the same.

B. Structure of the Invention [Means for Solving the Problems] The thin film magnetic head for perpendicular magnetic recording and the manufacturing method thereof according to the present invention provide a ceramic plate for a slider forming a sliding surface and a grooved ceramic plate for an auxiliary magnetic pole. A composite core block is made by filling the grooves of a soft magnetic block with glass and bonding the grooved surface with glass.The glass is perpendicular to the ceramic plate for the slider and in the longitudinal direction of the groove filled with glass in the soft magnetic block for the auxiliary magnetic pole. Cut along the buried surface, and attach the soft magnetic material for the auxiliary magnetic pole to the composite surface consisting of the soft magnetic material for the auxiliary magnetic pole, glass, and ceramics for the slider.One side is magnetically bonded to the soft magnetic material for the auxiliary magnetic pole, and the other side is the slider. A main magnetic pole made of a soft magnetic material that reaches the ceramic plate for use, and a recording/reproducing coil made of a conductive material wound around the main pole with electrically insulated joint surfaces with other materials are assembled by sputtering. A coil terminal that is formed of a thin film and has a protective block made of the same material as the ceramic plate for the slider on the surface on which the main magnetic pole and recording/reproducing coil are formed, facing the ceramic plate for the slider and the soft magnetic material for the auxiliary magnetic pole as an electrode terminal. A plurality of main magnetic poles are formed in the same row in the track width direction between the slider ceramic plate and the slider part of the protection block, which will serve as the sliding surface around the main magnetic pole end face, and from the spacing between adjacent main magnetic poles, It is characterized by a short distance from the main magnetic pole to the auxiliary magnetic pole, and the sliding surface is machined into a spherical surface.

That is, the present invention has the following steps: 1. A thin ceramic plate forming a sliding surface and a soft magnetic block for an auxiliary magnetic pole made of ferrite having a high relative magnetic permeability are glass-fused together, and a soft magnetic block for an auxiliary magnetic pole made of ferrite having a high relative permeability characteristic is bonded to the thin ceramic plate, and a soft magnetic block is bonded to the glass bonded surface perpendicular to the surface of the thin ceramic plate. After cutting in parallel planes and polishing, a plurality of main magnetic poles of soft magnetic thin films are formed, and silicon dioxide (SiO2) or alumina (Al2O3) is wrapped around the main magnetic pole and surrounded by silicon dioxide (SiO2) or alumina (Al2O3).
A thin film recording/reproducing coil made of a good electrical conductor is formed around the outer periphery of the main magnetic pole by electrically insulating it with a thin film such as The distance from the magnetic pole to the auxiliary magnetic pole is shortened, and the same ceramic as the slider surface is bonded and bonded to the main magnetic pole and the recording/reproducing coil forming surface in a stepped manner on the opposite surface to the sliding surface. 1. A thin film magnetic head for perpendicular magnetic recording, characterized in that the periphery of one or more main magnetic poles is formed in a stepped circular shape.

2. A thin ceramic plate forming the sliding surface and a soft magnetic block for the auxiliary magnetic pole made of ferrite with high relative magnetic permeability that has been processed with grooves are joined, and the grooves are filled with glass and heated to fuse the glass. to form a composite core block, cut the composite core block perpendicularly to the ceramic thin plate and along the glass embedded groove, polish the cut surface, and sputter or evaporate the polished surface on the slider surface and the soft magnetic surface for the auxiliary magnetic pole. Using technology, a main pole made of a soft magnetic material and a thin film made of ceramics such as silicon dioxide (SiO2) or alumina (Al2O3) for electrical insulation are formed around the main pole, and a recording material made of a good electrical conductor is formed on top of that. The lower end surface of the reproducing coil is formed close to the sliding surface, and ceramics of the same material as the slider surface thin plate is bonded and bonded to the main pole and recording/reproducing coil forming surface in a stepped manner on the surface opposite to the sliding surface. , a method for manufacturing a thin-film magnetic head for perpendicular magnetic recording, characterized in that the periphery of one or more main poles on the sliding surface is stepped.

[Effect]

A thin-film magnetic head for perpendicular magnetic recording and a method for manufacturing the same according to the present invention include glass-bonding a ceramic plate forming a sliding surface and a soft magnetic block with high relative permeability characteristics for an auxiliary magnetic pole, and placing a main magnetic pole on the bonded surface. and a recording/reproducing coil made of a thin film made of a conductive material formed around the main pole via an electrically insulating film made of ceramics, and electrically insulated by the electrically insulating film made of ceramics, and the ceramic plate forming the slider surface is made of a thin film. In addition, the recording/reproducing coil is formed close to the slider surface, so the magnetic flux from the recording signal of the magnetic recording medium is wrapped around the main pole and close to the sliding surface of the magnetic recording medium using thin film technology. Since this is a manufactured recording and reproducing coil, the magnetic path between the recording and reproducing coil and the magnetic flux created by the recording signal is shortened, improving reproduction sensitivity and improving thin film for inline multi-track perpendicular recording. Magnetic heads became possible.

〔Example〕

A thin film magnetic head for perpendicular magnetic recording that forms two in-line tracks on the same surface will be described below as an embodiment of the present invention. Fig. 1 shows the grooved surfaces of a slider ceramic plate 2 made of zirconia or the like with excellent wear resistance and a soft magnetic block 1 for auxiliary magnetic poles made of grooved Ni-Zn ferrite with high relative permeability characteristics. are joined as shown in FIG. 1, and the glass rod 3 is inserted into the groove 1a.
The temperature is raised to .degree. C., and the surfaces of the slider ceramic plate 2 and the auxiliary magnetic pole soft magnetic block 1 are joined with glass 3a to form a composite core block shown in FIG. 2. Next, as shown in Fig. 3, this composite core block is attached to the slider ceramic plate 2.
Cut along the dotted line A-B through the groove in the direction of the groove filled with the glass 3a of the soft magnetic block 1 for auxiliary magnetic pole perpendicularly to
As shown in FIG. 4, cut the glass 3b to a desired thickness.
For example, polishing is performed leaving a thickness of 5 μm. Next, as shown in FIG. 5 and FIG. 6, which is a partially enlarged view of FIG. Magnetically connected to the soft magnetic block 1, the other is a slider ceramic plate 2 made of a Co-Zr-Nb amorphous thin film of soft magnetic material, thickness 0.25 μm, track width 60 μm.
The main magnetic poles 4a and 4b of the main magnetic poles 4a and 4b are wrapped around the main magnetic poles 4a and 4b, and silicon dioxide (SiO2
) or alumina (Al2O3) electrically insulating thin film 29, the recording/reproducing coils 5a, 5 are made of a conductive material such as copper and have a thickness of 2 μm and a width of 3 μm.
b are formed with a track pitch of 100 microns between the main magnetic poles by thin film technology such as sputtering, and as shown in FIG. 4b and the surface on which the recording/reproducing coils 5a and 5b are formed, and cut into core chips along the dotted line CD.

Finally, as shown in Figure 8, in order to improve the contact with the magnetic recording medium, the peripheral area of the main magnetic pole of the slider, which serves as the sliding surface, is divided into 100 microns, leaving 200 x 300 microns, for example, when the main magnetic poles 4a and 4b have two tracks. Micron step processing is performed, and the remaining main pole peripheral portion is processed into a spherical surface to complete a two-track main pole excitation type perpendicular magnetic recording thin film magnetic head.

At this time, the distance between the magnetic recording medium sliding surface and the auxiliary magnetic pole soft magnetic block is approximately 5 μm, and the distance between the recording/reproducing coil and the magnetic recording medium sliding surface is several μm.

Because it is a thin film magnetic head with the above structure, the magnetic path from the magnetic recording medium to the point where it interlinks with the recording and reproducing winding is shortened, and it is also an in-line two-track main pole excitation type. A thin film magnetic head for perpendicular recording with a single magnetic pole can be realized. In addition, as in the above embodiment, if a magnetic head having a similar structure in the track width direction is formed with a desired number of tracks of main poles in the same row, a main pole-excited single pole structure having a desired large number of tracks can be obtained. A thin-film magnetic head for perpendicular magnetic recording with in-line multi-track structure can be obtained.

C. Effects of the Invention [Effects of the Invention] The thin-film magnetic head for perpendicular magnetic recording and the manufacturing method thereof according to the present invention include a main magnetic pole using thin film technology by sputtering, and a thin film of SiO2 or alumina wrapped around the main magnetic pole. It is formed by forming an electrical insulating film and a recording/reproducing coil made of a thin film of conductive material, and since the recording/reproducing coil can be formed close to the magnetic recording medium, the magnetic flux from the magnetic recording medium is connected to the recording/reproducing winding. The magnetic path to linkage becomes shorter,
High sensitivity during playback. Furthermore, an in-line multi-track thin film magnetic head for perpendicular magnetic recording and a method for manufacturing the same have become possible.

[Brief explanation of drawings]

FIG. 1 is a perspective view of a composite core block before glass fusion of the component assembly block according to the present invention. FIG. 2 is a perspective view of a glass-fused composite core block according to the present invention. FIG. 3 is a perspective view of a cut section of a composite core block forming a main pole forming surface according to the present invention. FIG. 4 is a perspective view of the cut surface of the composite core block according to the present invention after polishing. FIG. 5 is a perspective view of a composite core block according to the present invention in which a main magnetic pole, a recording/reproducing coil, and an electrical insulating film are formed as thin films on the polished surface. FIG. 6 is an enlarged front view showing the main magnetic pole, recording/reproducing coil, and electrical insulating film of the composite core block according to the present invention. FIG. 7 is a perspective view of a composite core block formed with a main magnetic pole and a recording/reproducing coil according to the present invention and a protective block adhered to the composite core block. FIG. 8 is a perspective view of a two-track thin film magnetic head for perpendicular magnetic recording in which the composite core block shown in FIG. 7 is cut into core chips and sliding surfaces are processed. FIG. 9 is a perspective view of a conventional bulk type main pole excitation type single pole head for perpendicular magnetic recording. FIG. 10 is a perspective view of a conventional main pole excitation type single pole thin film head for perpendicular magnetic recording. 1... Soft magnetic block for auxiliary magnetic pole, 1a... Groove, 2... Ceramic plate for slider, 3... Glass rod, 3a, 3b... Glass, 4a, 4b... Main magnetic pole, 5a, 5b... Coil for recording and reproducing, 6, 6a ...Protection block, 20a, 20b...Slider, 21...Main magnetic pole, 22a, 22b...Reinforcement glass, 23a, 23b...Reinforcement magnetic pole, 24...Winding wire, 25...Slider and thin film forming substrate, 26...Main magnetic pole, 27 ... Auxiliary magnetic pole, 28 ... Winding wire, 29 ... Electrical insulating thin film.

Claims (2)

[Claims] Claim 1: A thin ceramic plate forming a sliding surface and a soft magnetic block for an auxiliary magnetic pole made of ferrite having high relative magnetic permeability characteristics are glass-fused together, and a soft magnetic block for an auxiliary magnetic pole made of ferrite having a high relative magnetic permeability characteristic is bonded to a ceramic thin plate and a soft magnetic block made of ferrite having a high relative permeability characteristic is bonded to After cutting and polishing, a plurality of main magnetic poles of soft magnetic thin films are formed, and silicon dioxide (SiO2) or alumina (Al2O) is wrapped around the main magnetic pole.
3) A thin film recording/reproducing coil made of a good electrical conductor is formed around the outer periphery of the main magnetic pole by electrically insulating it with a thin film such as 3). The distance from the main magnetic pole to the auxiliary magnetic pole is made shorter, and the same ceramic as the slider surface is bonded and bonded to the main magnetic pole and the recording/reproducing coil forming surface in a stepped manner on the opposite surface to the sliding surface. 1. A thin film magnetic head for perpendicular magnetic recording, characterized in that the periphery of one or more main magnetic poles is formed into a stepped circular shape. 2. A thin ceramic plate forming a sliding surface and a soft magnetic block for an auxiliary magnetic pole made of grooved ferrite with high relative magnetic permeability characteristics are bonded together, glass is filled in the grooves and heated, and the glass is heated. The composite core block is fused to form a composite core block, the composite core block is cut perpendicularly to the ceramic thin plate and along the glass embedded groove, and the cut surface is polished, and the polished slider surface and soft magnetic material for the auxiliary magnetic pole made of ferrite are cut. The main pole is made of a soft magnetic material using sputtering or vapor deposition technology, and silicon dioxide (silicone dioxide) is coated around the main pole for electrical insulation.
A thin film made of ceramics such as SiO2) or alumina (Al2O3) is formed, and the lower end surface of a recording/reproducing coil made of a good electrical conductor is formed close to the sliding surface on the thin film.
Ceramics made of the same material as the slider thin plate is bonded to the main magnetic pole and the recording/reproducing coil forming surface in a stepped manner on the opposite surface to the sliding surface, and the periphery of one or more main magnetic poles on the sliding surface is stepped. 1. A method of manufacturing a thin film magnetic head for perpendicular magnetic recording, characterized in that the thin film magnetic head is formed with a magnetic head.