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JPH0417333Y2 - - Google Patents

Info

Publication number
JPH0417333Y2
JPH0417333Y2 JP19350987U JP19350987U JPH0417333Y2 JP H0417333 Y2 JPH0417333 Y2 JP H0417333Y2 JP 19350987 U JP19350987 U JP 19350987U JP 19350987 U JP19350987 U JP 19350987U JP H0417333 Y2 JPH0417333 Y2 JP H0417333Y2
Authority
JP
Japan
Prior art keywords
pins
hole
shaft
push
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19350987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0199573U (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19350987U priority Critical patent/JPH0417333Y2/ja
Publication of JPH0199573U publication Critical patent/JPH0199573U/ja
Application granted granted Critical
Publication of JPH0417333Y2 publication Critical patent/JPH0417333Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Hand Tools For Fitting Together And Separating, Or Other Hand Tools (AREA)
JP19350987U 1987-12-22 1987-12-22 Expired JPH0417333Y2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19350987U JPH0417333Y2 (zh) 1987-12-22 1987-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19350987U JPH0417333Y2 (zh) 1987-12-22 1987-12-22

Publications (2)

Publication Number Publication Date
JPH0199573U JPH0199573U (zh) 1989-07-04
JPH0417333Y2 true JPH0417333Y2 (zh) 1992-04-17

Family

ID=31484295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19350987U Expired JPH0417333Y2 (zh) 1987-12-22 1987-12-22

Country Status (1)

Country Link
JP (1) JPH0417333Y2 (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7163380B2 (en) 2003-07-29 2007-01-16 Tokyo Electron Limited Control of fluid flow in the processing of an object with a fluid
US7255772B2 (en) 2000-07-26 2007-08-14 Tokyo Electron Limited High pressure processing chamber for semiconductor substrate
US7380984B2 (en) 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7387868B2 (en) 2002-03-04 2008-06-17 Tokyo Electron Limited Treatment of a dielectric layer using supercritical CO2
US7494107B2 (en) 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7121165B2 (en) * 2001-05-17 2006-10-17 Citizen Watch Co., Ltd. Tool for wristwatch

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7255772B2 (en) 2000-07-26 2007-08-14 Tokyo Electron Limited High pressure processing chamber for semiconductor substrate
US7387868B2 (en) 2002-03-04 2008-06-17 Tokyo Electron Limited Treatment of a dielectric layer using supercritical CO2
US7163380B2 (en) 2003-07-29 2007-01-16 Tokyo Electron Limited Control of fluid flow in the processing of an object with a fluid
US7380984B2 (en) 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7494107B2 (en) 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels

Also Published As

Publication number Publication date
JPH0199573U (zh) 1989-07-04

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