JPH0414815U - - Google Patents
Info
- Publication number
- JPH0414815U JPH0414815U JP5686590U JP5686590U JPH0414815U JP H0414815 U JPH0414815 U JP H0414815U JP 5686590 U JP5686590 U JP 5686590U JP 5686590 U JP5686590 U JP 5686590U JP H0414815 U JPH0414815 U JP H0414815U
- Authority
- JP
- Japan
- Prior art keywords
- radial
- rotor shaft
- electromagnet
- displacement sensor
- frequency motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
第１図は本考案に係るターボ分子ポンプにおけ
る磁気軸受装置の縦断面図、第２図は第１図に示
す−線断面図、第３図ａはシールドの平面図
、第３図ｂは第３図ａに示すａ−ａ線断面図、第
４図は従来の磁気軸受装置の縦断面図、第４図は
第３図に示す−線断面図、第６図ないし第８
図は本考案の他の実施例を説明する説明図である
。
２……ロータ軸、３ａ〜３ｈ……ラジアル電磁
石、５ａ〜５ｂ……ラジアル方向用変位センサ、
７……制御回路、８ａ，８ｂ……シールド、９…
…高周波モータ。
FIG. 1 is a longitudinal cross-sectional view of the magnetic bearing device in a turbo-molecular pump according to the present invention, FIG. 2 is a cross-sectional view taken along the line shown in FIG. 1, FIG. 3a is a sectional view taken along line a-a, FIG. 4 is a longitudinal sectional view of a conventional magnetic bearing device, FIG. 4 is a sectional view taken along line - shown in FIG. 3, and FIGS.
The figure is an explanatory diagram illustrating another embodiment of the present invention. 2...Rotor shaft, 3a-3h...Radial electromagnet, 5a-5b...Displacement sensor for radial direction,
7...Control circuit, 8a, 8b...Shield, 9...
...High frequency motor.
補正 平２．９．２０
図面の簡単な説明を次のように補正する。
明細書中の図面の簡単な説明の欄記載の「第４
図は第３図に示す」を「第５図は第４図に示す」
と補正する。Amendment 9/20/1999 The brief description of the drawing is amended as follows. "4.
``The figure is shown in Figure 3'' to ``Figure 5 is shown in Figure 4.''
and correct it.
Claims (1)
を回転駆動させるための高周波モータと、 上記ロータ軸のラジアル方向に配設され、かつ
そのロータ軸を磁気浮上させるラジアル電磁石と
、 上記ラジアル電磁石に近接して設けられるとと
もに、上記ロータ軸がラジアル方向に変位した変
位量を検出するインダクタンス型のラジアル方向
用変位センサと、 上記ラジアル方向用変位センサからの変位量に
基づき上記ロータ軸を所定の位置で浮上保持する
よう上記電磁石を励磁する制御手段とを少なくと
も備えてなるターボ分子ポンプにおける磁気軸受
装置であつて、 上記ラジアル電磁石とラジアル方向用変位セン
サとの間、及び高周波モータとラジアル方向用変
位センサとの間のうち、少なくともいずれか一方
の間に介在されるとともに、上記ラジアル方向用
変位センサに係る上記ラジアル電磁石または高周
波モータの磁界及び電界を遮断可能なシールドを
設けたことを特徴とするターボ分子ポンプにおけ
る磁気軸受装置。[Claims for Utility Model Registration] A high-frequency motor disposed on the outer periphery of a rotor shaft for rotationally driving the rotor shaft, and a high-frequency motor disposed in the radial direction of the rotor shaft for magnetically levitating the rotor shaft. a radial electromagnet; an inductance-type radial displacement sensor that is provided close to the radial electromagnet and detects the amount of displacement of the rotor shaft in the radial direction; A magnetic bearing device for a turbo molecular pump, comprising at least a control means for exciting the electromagnet so as to levitate and hold the rotor shaft at a predetermined position based on the radial electromagnet and the radial direction displacement sensor, and a shield interposed between at least one of the high-frequency motor and the radial displacement sensor, and capable of blocking the magnetic field and electric field of the radial electromagnet or the high-frequency motor related to the radial displacement sensor. A magnetic bearing device for a turbo molecular pump, characterized in that it is provided with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5686590U JPH0414815U (en) | 1990-05-30 | 1990-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5686590U JPH0414815U (en) | 1990-05-30 | 1990-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0414815U true JPH0414815U (en) | 1992-02-06 |
Family
ID=31581074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5686590U Pending JPH0414815U (en) | 1990-05-30 | 1990-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0414815U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59186188U (en) * | 1983-05-31 | 1984-12-11 | 日野自動車株式会社 | Bus body vibration isolator |
| JPS6073674U (en) * | 1983-10-27 | 1985-05-23 | 日野自動車株式会社 | bus body structure |
| JPH07269940A (en) * | 1994-03-30 | 1995-10-20 | Energy Support Corp | Hot water circulating and treating apparatus |
| JPH11324970A (en) * | 1998-05-13 | 1999-11-26 | Ebara Corp | Canned motor pump |
| WO2018193943A1 (en) * | 2017-04-18 | 2018-10-25 | エドワーズ株式会社 | Vacuum pump, and magnetic bearing unit and shaft provided in vacuum pump |
| JP2019056462A (en) * | 2017-09-22 | 2019-04-11 | 株式会社Ihi | Magnetic bearing and electric motor |
| JP2020026762A (en) * | 2018-08-10 | 2020-02-20 | 日本電産サンキョー株式会社 | Stator unit and vacuum pump |
| WO2021039478A1 (en) | 2019-08-23 | 2021-03-04 | エドワーズ株式会社 | Vacuum pump and electromagnet unit used for vacuum pump |
-
1990
- 1990-05-30 JP JP5686590U patent/JPH0414815U/ja active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59186188U (en) * | 1983-05-31 | 1984-12-11 | 日野自動車株式会社 | Bus body vibration isolator |
| JPS6073674U (en) * | 1983-10-27 | 1985-05-23 | 日野自動車株式会社 | bus body structure |
| JPH07269940A (en) * | 1994-03-30 | 1995-10-20 | Energy Support Corp | Hot water circulating and treating apparatus |
| JPH11324970A (en) * | 1998-05-13 | 1999-11-26 | Ebara Corp | Canned motor pump |
| EP3613988A4 (en) * | 2017-04-18 | 2020-12-23 | Edwards Japan Limited | Vacuum pump, and magnetic bearing unit and shaft provided in vacuum pump |
| WO2018193943A1 (en) * | 2017-04-18 | 2018-10-25 | エドワーズ株式会社 | Vacuum pump, and magnetic bearing unit and shaft provided in vacuum pump |
| JP2018178908A (en) * | 2017-04-18 | 2018-11-15 | エドワーズ株式会社 | Vacuum pump, magnetic bearing part arranged at vacuum pump and shaft |
| KR20190141138A (en) * | 2017-04-18 | 2019-12-23 | 에드워즈 가부시키가이샤 | Vacuum pump, magnetic bearing part and shaft provided in the vacuum pump |
| CN110621884A (en) * | 2017-04-18 | 2019-12-27 | 埃地沃兹日本有限公司 | Vacuum pump, magnetic bearing part equipped in vacuum pump and shaft lever |
| CN110621884B (en) * | 2017-04-18 | 2024-01-16 | 埃地沃兹日本有限公司 | Vacuum pump, magnetic bearing unit equipped in vacuum pump, and shaft |
| JP2019056462A (en) * | 2017-09-22 | 2019-04-11 | 株式会社Ihi | Magnetic bearing and electric motor |
| JP2020026762A (en) * | 2018-08-10 | 2020-02-20 | 日本電産サンキョー株式会社 | Stator unit and vacuum pump |
| WO2021039478A1 (en) | 2019-08-23 | 2021-03-04 | エドワーズ株式会社 | Vacuum pump and electromagnet unit used for vacuum pump |
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