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JPH04131649U - plasma spray gun - Google Patents

plasma spray gun

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Publication number
JPH04131649U
JPH04131649U JP4419891U JP4419891U JPH04131649U JP H04131649 U JPH04131649 U JP H04131649U JP 4419891 U JP4419891 U JP 4419891U JP 4419891 U JP4419891 U JP 4419891U JP H04131649 U JPH04131649 U JP H04131649U
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JP
Japan
Prior art keywords
plasma
anode
generation chamber
cathode
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP4419891U
Other languages
Japanese (ja)
Inventor
啓 納富
Original Assignee
三菱重工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 三菱重工業株式会社 filed Critical 三菱重工業株式会社
Priority to JP4419891U priority Critical patent/JPH04131649U/en
Publication of JPH04131649U publication Critical patent/JPH04131649U/en
Withdrawn legal-status Critical Current

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  • Coating By Spraying Or Casting (AREA)

Abstract

(57)【要約】 【目的】 プラズマ溶射粉体の粒子の加熱を効率よく行
うとともに粒子の加熱,加速を均一化する。 【構成】 先端にプラズマジェット噴口3を有するプラ
ズマ発生チャンバー2が設けられるとともに基部に絶縁
体4が接合された陽極1と、絶縁体4の軸線上に貫設さ
れ先端がプラズマ発生チャンバー2内に緩挿されるとと
もに軸線上に作動ガス及び溶射粉体供給路7が穿設され
た陰極5及び陰極電流導入部6と、絶縁体4の側部寄り
に先端がプラズマ発生チャンバー2に通ずるように穿設
された周囲ガス通路8とを具えている。
(57) [Summary] [Purpose] To efficiently heat the particles of plasma sprayed powder and to uniformize the heating and acceleration of the particles. [Structure] A plasma generation chamber 2 having a plasma jet nozzle 3 at the tip is provided, an anode 1 having an insulator 4 bonded to the base, and an anode 1 which is penetrated on the axis of the insulator 4 and whose tip is inside the plasma generation chamber 2. A cathode 5 and a cathode current introduction part 6 are loosely inserted and have a working gas and thermal spray powder supply passage 7 bored on the axis, and a hole is made near the side of the insulator 4 so that the tip communicates with the plasma generation chamber 2. and an ambient gas passage 8 provided therein.

Description

【考案の詳細な説明】[Detailed explanation of the idea]

【0001】0001

【産業上の利用分野】[Industrial application field]

本考案はプラズマ溶射ガンに関する。 The present invention relates to a plasma spray gun.

【0002】0002

【従来の技術】[Conventional technology]

陽極と陰極との間に電流を流して発生させたプラズマをジェットとして噴出さ せるとともに同ジェットに溶射粉体を供給して被加工物表面に溶射皮膜を形成す るプラズマ溶射ガンとしては、従来一般的なものとして図2縦断面図に示すもの が知られている。すなわち図2において、銅製の陽極21の軸線上にはプラズマ 発生チャンバー22が設けられ、その先端にプラズマジェット噴口23が開口さ れており、この陽極21の基部側には絶縁体24が固着されている。この絶縁体 24の軸線上に、先端にタングステン製の陰極25を取付けた陰極電流導入部2 6が貫設されて、陰極25がプラズマ発生チャンバー22内に挿入されている。 Plasma generated by passing an electric current between the anode and cathode is ejected as a jet. At the same time, spray powder is supplied to the same jet to form a spray coating on the surface of the workpiece. As a conventional plasma spray gun, the one shown in the vertical cross-sectional view of Figure 2 is a typical one. It has been known. In other words, in FIG. 2, there is plasma on the axis of the copper anode 21. A generation chamber 22 is provided, and a plasma jet nozzle 23 is opened at the tip thereof. An insulator 24 is fixed to the base side of the anode 21. this insulator On the axis of 24, there is a cathode current introducing section 2 with a tungsten cathode 25 attached to the tip. 6 is provided through the plasma generation chamber 22, and the cathode 25 is inserted into the plasma generation chamber 22.

【0003】 また絶縁体24の側部寄りには、先端がプラズマ発生チャンバー22の基部に 通ずるように作動ガス供給路27が穿設されており、一方陽極21の先端部寄り には、先端がプラズマ発生チャンバー2のプラズマジェット噴口23寄りにほぼ 直角に通ずるように溶射粉体供給路28が穿設されている。更に陽極21には冷 却水通路29が穿設されて、その冷却水入口部が陽極電流導入部30に形成され ており、陰極電流導入部26にも冷却水通路29と通じた冷却水通路31が穿設 されている。0003 Also, near the side of the insulator 24, the tip is attached to the base of the plasma generation chamber 22. A working gas supply passage 27 is bored so as to communicate with the anode 21. The tip is almost near the plasma jet nozzle 23 of the plasma generation chamber 2. A thermal spray powder supply path 28 is bored so as to communicate at right angles. Furthermore, the anode 21 is A cooling water passage 29 is bored, and its cooling water inlet is formed in the anode current introduction part 30. A cooling water passage 31 communicating with the cooling water passage 29 is also provided in the cathode current introducing portion 26. has been done.

【0004】 このようなプラズマ溶射ガンによりプラズマ溶射を行うにあたっては、まず陽 極21及び陰極25を冷却するために冷却水通路29,31に冷却水を流すとと もに、作動ガス供給路27からプラズマ発生チャンバー22へ、Arガス,He ガス,N2 ガス又はこれらの混合ガス等の作動ガスを流す。次に直流電源より陽 極21に正、陰極25に負の印加電圧を加え、続いて高周波電源より陽極21と 陰極25との間に高周波電圧を印加して両電極21,25間に火花放電を発生さ せる。When performing plasma spraying using such a plasma spray gun, first, cooling water is flowed through the cooling water passages 29 and 31 in order to cool the anode 21 and the cathode 25, and the plasma generation chamber is supplied from the working gas supply passage 27. A working gas such as Ar gas, He 2 gas, N 2 gas, or a mixture thereof is supplied to 22 . Next, a positive voltage is applied to the anode 21 and a negative voltage is applied to the cathode 25 from a DC power source, and then a high frequency voltage is applied between the anode 21 and the cathode 25 from a high frequency power source to generate a spark discharge between the electrodes 21 and 25. generate.

【0005】 この火花放電により、先に印加されている直流電源からの印加電圧によって陽 極21と陰極25との間にプラズマが発生し、プラズマ発生チャンバー22には 高温プラズマが充満し、プラズマジェット噴口23から高温高速のプラズマジェ ットとして噴出する。このとき電流を徐々に増してプラズマジェットが安定した のち、溶射粉体供給路28から溶射粉体を、プラズマジェット発生チャンバー2 2のプラズマジェット噴口23寄りへ供給する。プラズマジェットに供給された 溶射粉体の粒子は昇温され加速されて高温高速のプラズマジェットと一緒に噴出 する。[0005] This spark discharge causes a positive voltage to be generated by the applied voltage from the DC power supply that was previously applied. Plasma is generated between the pole 21 and the cathode 25, and the plasma generation chamber 22 contains Filled with high-temperature plasma, a high-temperature and high-speed plasma jet is emitted from the plasma jet nozzle 23. It erupts as a cut. At this time, the current was gradually increased to stabilize the plasma jet. Afterwards, the thermal spray powder is supplied from the thermal spray powder supply path 28 to the plasma jet generation chamber 2. 2 near the plasma jet nozzle 23. supplied to the plasma jet Thermal spray powder particles are heated and accelerated and ejected together with a high-temperature, high-speed plasma jet. do.

【0006】 しかしながら、このようなプラズマ溶射ガンにおいては、溶射粉体の供給がプ ラズマジェット噴口23の近くでかつ噴出方向に対しほぼ直交するので、供給さ れた溶射粉体の粒子の加熱の効率が悪い上に粒子が均一に加熱,加速されること がなく、プラズマジェット内に昇温,加速が不十分でエネルギの低い粒子が多数 存在することになり、従って溶射皮膜の緻密度,強度及び密着性が低下する。[0006] However, in such plasma spray guns, the supply of thermal spray powder is difficult. Because it is near the plasma jet nozzle 23 and almost perpendicular to the ejection direction, the supply In addition to the inefficiency of heating the sprayed powder particles, the particles are heated and accelerated uniformly. There are many particles with low energy in the plasma jet due to insufficient temperature rise and acceleration. Therefore, the density, strength and adhesion of the sprayed coating are reduced.

【0007】[0007]

【考案が解決しようとする課題】[Problem that the idea aims to solve]

本考案は、このような事情に鑑みて提案されたもので、溶射粉体の粒子の加熱 が効率よく行われるとともに粒子の加熱,加速が均一化され、またプラズマの発 生が安定化され、ひいては高品質の溶射皮膜を得ることができるプラズマ溶射ガ ンを提供することを目的とする。 The present invention was proposed in view of these circumstances, and it is carried out efficiently, the heating and acceleration of particles are made uniform, and plasma generation is improved. Plasma spray gas that stabilizes the raw material and allows you to obtain high quality thermal spray coatings. The purpose is to provide the following information.

【0008】[0008]

【課題を解決するための手段】[Means to solve the problem]

そのために本考案は、先端にプラズマジェット噴口を有するプラズマ発生チャ ンバーが設けられるとともに基部に絶縁体が接合された陽極と、上記絶縁体の軸 線上に貫設され先端が上記プラズマ発生チャンバー内に緩挿されるとともに軸線 上に作動ガス及び溶射粉体供給路が穿設された陰極と、上記絶縁体の側部寄りに 先端が上記プラズマ発生チャンバーに通ずるように穿設された周囲ガス通路とを 具えたことを特徴とする。 To this end, the present invention has developed a plasma generation chamber with a plasma jet nozzle at the tip. An anode with an insulator bonded to the base and a shaft of the insulator. The tip is inserted into the plasma generation chamber and the axis line is inserted through the plasma generation chamber. A cathode with working gas and thermal spray powder supply passages perforated above, and a cathode near the side of the above insulator. and a surrounding gas passage bored so that its tip leads to the plasma generation chamber. It is characterized by the following.

【0009】[0009]

【作用】[Effect]

上述の構成により、溶射粉体の粒子の加熱が効率よく行われるとともに粒子の 加熱,加速が均一化され、またプラズマの発生が安定化され、ひいては高品質の 溶射皮膜を得ることができるプラズマ溶射ガンを得ることができる。 With the above configuration, the particles of thermal spray powder can be heated efficiently and the particles can be heated. Heating and acceleration are made uniform, plasma generation is stabilized, and high quality is achieved. A plasma spray gun capable of producing a sprayed coating can be obtained.

【0010】0010

【実施例】【Example】

本考案プラズマ溶射ガンの一実施例を図1縦断面図について説明すると、銅製 の陽極1の軸線上にはプラズマ発生チャンバー2が設けられ、その先端にプラズ マジェット噴口3が開口されており、この陽極1の基部側には絶縁体4が固着さ れている。この絶縁体4の軸線上に、先端にタングステン製の陰極5を取付けた 陰極電流導入部6が貫設されて、陰極5がプラズマ発生チャンバー2内に緩挿さ れるとともに、陰極5及び陰極電流導入部6の軸線上に作動ガス及び溶射粉体供 給路7が穿設されている。 An embodiment of the plasma spray gun of the present invention is explained with reference to FIG. 1, which is a vertical cross-sectional view. A plasma generation chamber 2 is provided on the axis of the anode 1, and a plasma is placed at the tip of the chamber 2. A Mudget nozzle 3 is opened, and an insulator 4 is fixed to the base side of the anode 1. It is. A tungsten cathode 5 is attached to the tip of the insulator 4 on its axis. A cathode current introduction part 6 is provided through the cathode 5 so that the cathode 5 is loosely inserted into the plasma generation chamber 2. At the same time, working gas and thermal spray powder supply are provided on the axis of the cathode 5 and the cathode current introduction part 6. A feed passage 7 is bored.

【0011】 また絶縁体4の側部寄りには、先端がプラズマ発生チャンバー2に通ずるよう に周囲ガス通路8が穿設されている。更に陽極1には冷却水通路9が穿設されて 、その冷却水入口部が陽極電流導入部10に形成されており、陰極電流導入部6 にも冷却水通路11が穿設されている。[0011] Also, near the side of the insulator 4, the tip is connected to the plasma generation chamber 2. An ambient gas passage 8 is bored in the area. Furthermore, a cooling water passage 9 is bored in the anode 1. , the cooling water inlet part is formed in the anode current introduction part 10 and the cathode current introduction part 6. A cooling water passage 11 is also provided.

【0012】 このようなプラズマ溶射ガンにおいて、プラズマ溶射を行うにあたり、まず陽 極1及び陰極5を冷却するために冷却水通路9,11に冷却水を流すとともに、 作動ガス及び溶射粉体供給路7からプラズマ発生チャンバー2へ、例えばArガ ス25 l/minの流量で作動ガスを流す。次に直流電源より陽極1に正、陰極5に 負の印加電圧を加え、続いて高周波電源より陽極1と陰極5との間に高周波電圧 を印加して両電極1,5間に火花放電を発生させる。0012 When performing plasma spraying with such a plasma spray gun, the first step is to In order to cool the electrode 1 and the cathode 5, cooling water is allowed to flow through the cooling water passages 9 and 11, and From the working gas and thermal spray powder supply path 7 to the plasma generation chamber 2, for example, an Ar gas Flow the working gas at a flow rate of 25 l/min. Next, from the DC power supply, the positive electrode is connected to the anode 1, and the negative electrode is connected to the negative electrode 5. A negative applied voltage is applied, and then a high frequency voltage is applied between the anode 1 and the cathode 5 from a high frequency power source. is applied to generate a spark discharge between both electrodes 1 and 5.

【0013】 この火花放電により、先に印加されている直流電源からの印加電圧によって陽 極1と陰極5との間にプラズマが発生し、プラズマ発生チャンバー2には高温プ ラズマが充満し、プラズマジェット噴口3から高温高速のプラズマジェットとし て噴出する。このとき電流を徐々に増して例えば700Aとし、次に周囲ガス通 路8から例えばH2 ガス1.5 l/min を流すと、電流,電圧は700A,38Vと なりプラズマジェットが安定する。[0013] Due to this spark discharge, plasma is generated between the anode 1 and the cathode 5 due to the applied voltage from the DC power source that was previously applied, and the plasma generation chamber 2 is filled with high-temperature plasma, and the plasma jet nozzle is 3, it is ejected as a high-temperature, high-velocity plasma jet. At this time, the current is gradually increased to, for example, 700 A, and then, for example, 1.5 l/min of H 2 gas is flowed from the surrounding gas passage 8, so that the current and voltage become 700 A and 38 V, and the plasma jet becomes stable.

【0014】 プラズマジェットが安定したのち、作動ガス及び溶射粉体供給路7からプラズ マ発生チャンバー2へ、溶射粉体例えば粒度分布10〜40μmのAl2O3 粉体を 、Arガス5 l/minをキャリアガスとして20g/min の流量で供給する。プラズ マに供給された溶射粉体は粒子は急速に昇温され加速されて高温高速のプラズマ ジェットと一緒に噴出する。このときプラズマに供給される溶射粉体はプラズマ ジェットの噴出方向と同一方向に供給されるため、粒子の加熱,加速が均一とな り、十分な緻密度,強度及び密着性を有する高品質の溶射皮膜が形成される。ま た溶射粉体はプラズマの中心部に供給されるので加熱の効率がよい。更に周囲ガ ス通路8から供給されるH2 ガスにより、陽極1と陰極5の距離が離れた部分で アーク点が形成されプラズマが安定するとともに、陰極5がH2 ガスにより冷却 されその寿命が長くなる。なおこのH2 ガスにより溶射粉体がプラズマの中心部 に寄せられるので、溶射粉体が陽極1内周面に付着してプラズマジェットの流れ を阻害することが防止できる。After the plasma jet has stabilized, thermal spray powder, such as Al 2 O 3 powder with a particle size distribution of 10 to 40 μm, is transferred from the working gas and thermal spray powder supply path 7 to the plasma generation chamber 2 at a rate of Ar gas of 5 l/min. is supplied as a carrier gas at a flow rate of 20 g/min. The particles of the thermal spray powder supplied to the plasma are rapidly heated and accelerated, and are ejected together with a high-temperature, high-velocity plasma jet. At this time, the sprayed powder supplied to the plasma is supplied in the same direction as the ejection direction of the plasma jet, so the particles are heated and accelerated uniformly, resulting in a high-quality sprayed coating with sufficient density, strength, and adhesion. is formed. Furthermore, since the thermal spray powder is supplied to the center of the plasma, heating efficiency is high. Furthermore, by the H 2 gas supplied from the surrounding gas passage 8, an arc point is formed at a distance between the anode 1 and the cathode 5, and the plasma is stabilized, and the cathode 5 is cooled by the H 2 gas, extending its life. Become. Since the H 2 gas brings the thermal spray powder to the center of the plasma, it is possible to prevent the thermal spray powder from adhering to the inner peripheral surface of the anode 1 and obstructing the flow of the plasma jet.

【0015】[0015]

【考案の効果】[Effect of the idea]

要するに本考案によれば、先端にプラズマジェット噴口を有するプラズマ発生 チャンバーが設けられるとともに基部に絶縁体が接合された陽極と、上記絶縁体 の軸線上に貫設され先端が上記プラズマ発生チャンバー内に緩挿されるとともに 軸線上に作動ガス及び溶射粉体供給路が穿設された陰極と、上記絶縁体の側部寄 りに先端が上記プラズマ発生チャンバーに通ずるように穿設された周囲ガス通路 とを具えたことにより、溶射粉体の粒子の加熱が効率よく行われるとともに粒子 の加熱,加速が均一化され、またプラズマの発生が安定化され、ひいては高品質 の溶射皮膜を得ることができるプラズマ溶射ガンを得るから、本考案は産業上極 めて有益なものである。 In short, according to the present invention, a plasma generator with a plasma jet nozzle at the tip An anode provided with a chamber and an insulator bonded to the base, and the insulator The plasma generator is installed on the axis of the plasma generating chamber, and its tip is loosely inserted into the plasma generation chamber. A cathode with working gas and thermal spray powder supply passages drilled on the axis, and a side portion of the insulator. a peripheral gas passage bored so that its tip leads to the plasma generation chamber; With this, the particles of thermal spray powder are heated efficiently and the particles are The heating and acceleration of the plasma are made uniform, and the generation of plasma is stabilized, resulting in high quality This invention is industrially superior because it provides a plasma spray gun that can obtain a sprayed coating of It is extremely useful.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本考案プラズマ溶射ガンの一実施例の縦断面図
である。
FIG. 1 is a longitudinal sectional view of an embodiment of the plasma spray gun of the present invention.

【図2】従来のプラズマ溶射ガンの縦断面図である。FIG. 2 is a longitudinal cross-sectional view of a conventional plasma spray gun.

【符号の説明】[Explanation of symbols]

1 陽極 2 プラズマ発生チャンバー 3 プラズマジェット噴口 4 絶縁体 5 陰極 6 陰極電流導入部 7 作動ガス及び溶射粉体供給路 8 周囲ガス通路 9 冷却水通路 10 陽極電流導入部 11 冷却水通路 1 Anode 2 Plasma generation chamber 3 Plasma jet nozzle 4 Insulator 5 Cathode 6 Cathode current introduction section 7 Working gas and thermal spray powder supply path 8 Surrounding gas passage 9 Cooling water passage 10 Anode current introduction section 11 Cooling water passage

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 先端にプラズマジェット噴口を有するプ
ラズマ発生チャンバーが設けられるとともに基部に絶縁
体が接合された陽極と、上記絶縁体の軸線上に貫設され
先端が上記プラズマ発生チャンバー内に緩挿されるとと
もに軸線上に作動ガス及び溶射粉体供給路が穿設された
陰極と、上記絶縁体の側部寄りに先端が上記プラズマ発
生チャンバーに通ずるように穿設された周囲ガス通路と
を具えたことを特徴とするプラズマ溶射ガン。
1. An anode comprising: a plasma generation chamber having a plasma jet nozzle at its tip; an anode having an insulator bonded to its base; a cathode having a working gas and thermal spray powder supply passage bored along its axis; and a peripheral gas passage bored near the side of the insulator so that its tip communicates with the plasma generation chamber. A plasma spray gun characterized by:
JP4419891U 1991-05-16 1991-05-16 plasma spray gun Withdrawn JPH04131649U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4419891U JPH04131649U (en) 1991-05-16 1991-05-16 plasma spray gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4419891U JPH04131649U (en) 1991-05-16 1991-05-16 plasma spray gun

Publications (1)

Publication Number Publication Date
JPH04131649U true JPH04131649U (en) 1992-12-03

Family

ID=31924390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4419891U Withdrawn JPH04131649U (en) 1991-05-16 1991-05-16 plasma spray gun

Country Status (1)

Country Link
JP (1) JPH04131649U (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09170060A (en) * 1995-09-28 1997-06-30 Sulzer Metco Irvine Inc Single-cathode plasma gun and anode attachment used therefor
JP2006002242A (en) * 2004-06-21 2006-01-05 Ofic Co Plasma spraying equipment
JP2008521170A (en) * 2004-11-16 2008-06-19 ハイパーサーム インコーポレイテッド Plasma arc torch with electrode with internal flow path
JP2009127079A (en) * 2007-11-22 2009-06-11 Densho Engineering Co Ltd Plasma processing vessel inner member and method for manufacturing the same
JP2018202361A (en) * 2017-06-08 2018-12-27 東京エレクトロン株式会社 Plasma spray head, plasma spray device and plasma spray method
JP2019199631A (en) * 2018-05-15 2019-11-21 東京エレクトロン株式会社 Thermal spraying device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09170060A (en) * 1995-09-28 1997-06-30 Sulzer Metco Irvine Inc Single-cathode plasma gun and anode attachment used therefor
JP2006002242A (en) * 2004-06-21 2006-01-05 Ofic Co Plasma spraying equipment
JP2008521170A (en) * 2004-11-16 2008-06-19 ハイパーサーム インコーポレイテッド Plasma arc torch with electrode with internal flow path
JP2009127079A (en) * 2007-11-22 2009-06-11 Densho Engineering Co Ltd Plasma processing vessel inner member and method for manufacturing the same
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