JPH0323484B2 - - Google Patents
Info
- Publication number
- JPH0323484B2 JPH0323484B2 JP3430282A JP3430282A JPH0323484B2 JP H0323484 B2 JPH0323484 B2 JP H0323484B2 JP 3430282 A JP3430282 A JP 3430282A JP 3430282 A JP3430282 A JP 3430282A JP H0323484 B2 JPH0323484 B2 JP H0323484B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- furnace
- based nitride
- nitriding
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0682—Preparation by direct nitridation of silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3430282A JPS58151311A (ja) | 1982-03-04 | 1982-03-04 | 珪素系窒化物の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3430282A JPS58151311A (ja) | 1982-03-04 | 1982-03-04 | 珪素系窒化物の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58151311A JPS58151311A (ja) | 1983-09-08 |
| JPH0323484B2 true JPH0323484B2 (pt) | 1991-03-29 |
Family
ID=12410355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3430282A Granted JPS58151311A (ja) | 1982-03-04 | 1982-03-04 | 珪素系窒化物の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58151311A (pt) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61236603A (ja) * | 1985-04-10 | 1986-10-21 | Nippon Cement Co Ltd | 非酸化物粉末の連続合成装置 |
| JPH06102524B2 (ja) * | 1990-01-31 | 1994-12-14 | 信越化学工業株式会社 | 窒化ケイ素粉末の製造方法 |
| CN101831603B (zh) * | 2010-05-24 | 2011-09-07 | 西峡县中嘉合金材料有限公司 | 氮化炉热能循环利用装置 |
-
1982
- 1982-03-04 JP JP3430282A patent/JPS58151311A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58151311A (ja) | 1983-09-08 |
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