JPH0290A - Probe device for liquid-crystal display body and aligning method for liquid-crystal display body - Google Patents

Abstract

PURPOSE:To perform alignment promptly by equipping a liquid-crystal display body with a discriminating means capable to discriminate disagreement between the electrode of the liquid-crystal display body and a probe needle individually based on the respective images. CONSTITUTION:An identification mark is detected by the detectors 22 and 23 of a CCD camera detecting part 17 from light reflected by a large-scale liquid-crystal substrate LCD 10. Based on the detected signal of the identification mark, the relative positions of the electrode of the LCD 10 and the probe needle 13 are read in a position recognizing part 21, and the amount of moving for the LCD 10 necessary to correct the disagreement between the electrode thereof and the probe needle 13 is found. Next, based on the calculated amount of moving, a chuck is moved and the LCD 10 is aligned against the probe needle 13 so that the electrode of the LCD 10 agrees with the probe needle 13. Then, the disagreement between the electrode of the LCD 10 and the probe needle 13 is discriminated individually by the discriminating circuits 24 and 25 of the recognizing part 21, based on the respective images.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a liquid crystal display probe device and a liquid crystal display alignment method.

(Prior Art) Probe devices are described in Japanese Patent Application Laid-Open No. 62-3901, Japanese Patent Application Laid-open No. 62-55977, and the like. These probe devices are devices developed to inspect the electrical characteristics of individual device patterns formed on semiconductor wafers.

In recent years, large liquid crystal substrates (LiquidCr
ystal Display: Hereinafter abbreviated as LCD. ) is increasing, and there is a need to quickly and reliably test LCDs having a large number of circuits. This LCD circuit test is performed before the liquid crystal is poured into the glass container.

That is, a pair of glass substrates on which electrodes are formed are placed in parallel with each other via a spacer to form a container, a circuit test is performed on the glass container, and after the test is completed, liquid crystal is injected into the glass container.

In order to meet the needs for circuit testing of such large LCDs, we took a cue from probe equipment for semiconductor wafers and developed
A probe device for LCD has been developed and put into practical use.

In such an LSD probe device.

- Place the LCD on the rotatable main chuck provided on the top of the support base, contact each of the transparent electrodes with a probe needle, and apply electricity to the circuit via the probe needle to prevent disconnection. Inspect for presence. The purpose of this LCD test is to weed out defective devices at an intermediate stage and to feed back the test results to the previous process to improve product yield and reliability.

Such an LCD test system is basically an LCD probing machine (hereinafter referred to as LCD probe device).
It consists of two devices: a tester and a tester. The two are connected by a measuring line, and the probes of the probe card are brought into contact with the electrodes of the LCD, and test complete signals, fail signals, etc. are exchanged between the inspection section and the tester in response to the test start command of the test control line. It is designed to be exchanged.

By the way, in carrying out the test, it is important to bring each probe needle into accurate contact with each electrode of the LCD. Therefore, before the test, the L on the chuck
The CD must be accurately aligned with the probe needle of the probe card in advance. In this case, in a probe device for semiconductor wafers, metal electrodes (ponding pads) are formed on each device pattern of the semiconductor wafer. Therefore, the pad is irradiated with light and the light reflected by the pad is detected. However, the LCD
In a probe device, since the electrodes are made of a transparent material, they cannot be detected optically. Therefore, a target that can reflect light is marked at a suitable location on the LCD and light is irradiated onto it. to detect the LCD position. That is, two alignment marks are placed a predetermined distance apart from each other, and the positions of these marks are detected. Based on the detected two mark positions, L
Correct the LCD position so that the CD electrode overlaps the probe needle. An alignment device is used for such alignment between the LCD and the probe needle.

As shown in Fig. 18, the conventional alignment device for an LCD blowing machine includes a main chuck (hereinafter abbreviated as chuck) (2) for suctioning and holding the LCD, and a main chuck (2) that moves this chuck (2) in the XY and θ directions. stage(
(not shown), a light source (2) for irradiating light into the LCD on the chuck (1), and a reflected light (4) reflected on the LCD (1).
It has a sensor (2) for detecting a).

A conventional alignment device detects the position in the LCD,
The case of positioning the LCD based on this will be explained with reference to FIG. 19.

Place the CD (1) on the chuck ■ so that the center of the LCD (υ) is located at the center (0) of the sensor 0. Next, as shown in Figure 19(b), move the chuck ■ to the right. , position the first alignment mark (■) in the LCD at the center 0 of the sensor (■), project light onto the mark (■), and detect it with this reflected light sensor (■).Next, move the chuck (■) to the right. Move and position the second alignment mark (■) in the LCD at the center 0 of the sensor (2), project light onto the mark (toward), and detect this reflected light with the sensor (2).Marks (7, 8) After determining the current position in the LCD from the detection position, the XYθ stage moves the LCD along with the chuck ■, and the electrode of the LCDQ is placed
The positions are corrected so that they overlap each other in the Y plane. L
After correcting the CDω position, move the probe card in the Z direction to bring each probe needle into contact with each electrode of the LCDQ,
Perform electrical characteristics tests.

(Problem to be Solved by the Invention) However, in the conventional probe device alignment device, since the glass container of the LCDQ is transparent, the irradiated light (a) is not totally reflected on the surface of the glass container. , as shown in Figure 18, part of the irradiated light) is LC
The light passes through the glass plate of DQ, is reflected on the back surface of the glass plate (on the chuck side), and the reflected light (4b) is detected by sensor (2). Therefore, the correct reflected light (4a) and incorrect reflected light (4b) are detected at the same time, and the LC
Since the position detection accuracy of the DQ is reduced, the LCD device cannot be accurately positioned with respect to the probe needle.

Further, in the conventional alignment device, the first mark (2) is detected first, and then the second mark (8) is detected, so that the position cannot be detected quickly. Furthermore, L.C.
DQ) is moved along with the chuck ■ by the distance from the first mark ■ to the second mark (8), so the LCDQ
It is necessary to provide the device with a space for moving the probe device, which has the disadvantage that the probe device becomes larger.

Further, Japanese Patent Application Laid-Open No. 58-210633 discloses a method in which a plurality of light emitting parts and light receiving elements are provided on both sides of a subject and the subject is aligned based on the difference in light intensity of the light receiving elements. .

However, with the above alignment method, the large LCD
The disadvantage of (2) is that a large amount of processing time is required to collect data at all peripheral edge positions.

An object of the present invention is to provide a liquid crystal display probe device that can reliably align an LCD with respect to a probe needle.

Another object of the present invention is to provide a liquid crystal display probe device that is compact as a whole by downsizing the alignment device.

A further object of the present invention is to provide a liquid crystal display alignment method that shortens the data acquisition time during one alignment and performs alignment in a short processing time.

[Structure of the invention]

(Means for Solving the Problems) The present invention includes an inspection unit that sends a test signal to a tester by bringing a probe needle into contact with an electrode of an LCD, and an L with an identification mark.
a chuck for holding the CD so as to face the probe needle; a means for projecting light onto the LCD held by the chuck;
A means for detecting the identification mark from the light reflected by the LCD, and an LCD necessary for reading the relative position of the LCD and the probe needle based on the detection signal of the identification mark and correcting the mismatch between the electrode of the LCD and the probe needle. and a means for moving the chuck based on the calculated movement amount and positioning the LCD with respect to the probe needle so that the probe needle coincides with the electrode of the LCD. The chuck has a surface for holding the LCD that easily absorbs light and is processed to reflect light in a crowded state, and the reflected light detection means has a plurality of surfaces configured to individually form images. The position recognizing means has a discriminating means for individually discriminating mismatch between the electrodes of the LCD and the probe needle based on the respective images.

(Effect) A discriminating means is provided that recognizes the positions of the electrodes of the liquid crystal display and the probe needle, and individually determines the amount of mismatched movement between the electrodes of the liquid crystal display and the probe needle. In this case, the amount of movement of the liquid crystal display relative to the probe needle can be reduced, and the apparatus can be made smaller.

Furthermore, since the amount of positional deviation of the liquid crystal display is determined at at least two locations on the liquid crystal display, the time required to collect data for one positioning can be shortened, and the positioning can be performed in a short processing time.

(First Embodiment) Hereinafter, one embodiment of the present invention apparatus and method applied to an LCD prober will be described with reference to the drawings.

An LCD prober for testing the LCD is installed on the floor via a vibration isolating member. A testing section having a probe needle is provided on the top of the LCD prober, and this testing section is electrically connected to a tester (not shown) via a measuring line (not shown).

First, as shown in Figure 1, the main parts of the LCD prober 0) include the loader section (11) for extracting and transporting the LCD (10) from the cassette, and the input of various command information to operate the LCD prober. keyboard (9)
a), an alignment device (12) for moving the L CD (10) in the xYO direction, and an aligned L CD (10);
An inspection part (14) for testing by bringing the probe needle (13) into contact with the electrode of the CD (10), and an L part when necessary.
It consists of a microscope (15) for checking the positioning state of the CD (10) by manual operation.

Pre-alignment group! (12) is the distance from the LCD receiving position to the center (1
4a). The alignment device 1i (12) includes a main chuck (hereinafter abbreviated as chuck) that holds the L CD (10),
It has an XYθ-stage that supports the chuck, means (not shown) for rotating the XYθ-stage in the X direction, Y direction, and θ, respectively, and means for detecting the position of the LCD.

Next, the chuck (16) of the alignment device W (12) will be briefly described with reference to FIGS. 2 and 3.

The chuck (16) has a cylindrical shape, and a plurality of concentric grooves (16a) are open on the upper surface of the chuck.

These grooves (16a) are connected to the suction side of a vacuum pump (not shown), and the L CD (10) is connected to the chuck (
16) is designed to be vacuum-adsorbed on the top surface.

This chuck (16) is made of a metal material such as stainless steel, and its upper surface (that is, the mounting surface on which the LCD is mounted) is processed to have a low reflectance by electroless plating.

The thermoelectrolytic plating treatment of the chuck (16) was performed under the following conditions.

Aluminum blast #100 on the surface to be treated (top surface of the chuck)
Honing with #150, roughness [RzlO] ~ [13u
Finish to about 1 (L25m). As a chemical reducing agent for the plating solution, any of hypophosphites, borohydride compounds, or hydrazine compounds may be used.

The surface to be treated is immersed in such a plating solution and treated at a temperature of [906±2''] for about [60] minutes without applying electricity. As a result, a [nickel ] A metal layer is formed.

Next, an outline of the LCD position detection device will be explained using FIG. 4.

The finder of the CCD camera (17) is
) is provided so as to face the top surface of the There is a semi-transparent (18) between the CCD camera (17) and the chuck (16).
) is arranged, and the light source (19) provides lateral illumination (2).
0) is reflected downward by the semi-transparent mirror (18), and the chuck (1
6) The upper LCD (10) is irradiated with light. The irradiated light (20) is reflected by the L CD (10), and the reflected light (20a) is detected by the CCD camera (17).

Next, the alignment device of the first embodiment will be explained using FIG. 5.

The main part of the above alignment device is the CC as a detection part.
It is composed of a D camera (17) and a computer system (21) as a recognition control section. The CCD camera (17) incorporates a first image sensor (22) and a second image sensor (23) that are arranged symmetrically with the center (17a) as the origin. The imaging surfaces of these pair of image sensors (22, 23) face the surface of the LCD (10). Center (17a) of CCD camera (17)
) and the center (14a) of the inspection section (see FIG. 1) coincide with each other. In this case, the pre-alignment device (
(not shown) so that the center of the LCD (10) is located near the center (14a) of the inspection section.
10) is placed on the chuck (16) in advance.

The image pickup elements (22, 23) of the CCD camera (17) are connected to the input sides of the discrimination circuits (24, 25) of the computer system (21) as a recognition control section, respectively.

This discrimination circuit (24) compares the image signal input from the image sensor (22) with a predetermined threshold level. Similarly, the discrimination circuit (25)
The image signal inputted from the image sensor (23) is compared with a predetermined threshold level.

The output side of the discrimination circuit (24, 25) is connected to the CPU (25
) is connected to the input side of the CPU (25) is
It is equipped with RAM (26) and ROM (27). R
A M (26) has L CD (10) at initial setting.
Reference position data is stored in memory, and the stored data is called up by the CPU (25). Further, various calculation information is stored in advance in the ROM (27), and the stored information can be called up by the CPU (25). CPU (25)
The output side of the stage drive stepping motor (28
) and the chuck (16) are connected to the respective switches of the LCD vacuum suction device. Stepping motor (
The drive shaft 28) is connected to the pole screw (29a). A pole nut (29b) screwed onto the pole screw (29a) is fixed to the stage of the chuck (16). Further, drive shafts of two other stepping motors (not shown) are connected to the stage of the chuck (16), respectively. These two units and the above-mentioned motor (28) allow the stage of the chuck (16) to move in the two directions of XYθ, respectively.

A pair of square marks (30, 31) are formed at adjacent corners of the LCDQ, as shown in FIG. This mark (30, 31) is a 6 mark (30, 31) that is made by baking an alloy on the outer surface of the LCD.
are in a fixed positional relationship with respect to the transparent electrode of the LCD (10), and the electrode position is indirectly detected using these marks as a reference.

Next, L to be tested by the above LCD prober 0
The case of aligning CD (10) will be explained.

One L CD (1) is loaded from the cassette in the loader section (11).
0) is taken out, pre-aligned, and then transferred to the chuck (16) of the inspection section (14). The LCD (υ) is suctioned and fixed on the upper surface of the chuck (16).The XYθ-stage is moved to align its center (14a) with the center (17a) of the alignment device.

Next, while referring to FIGS. 7 to 9, the LCD (10)
The alignment will be explained below.

First, the first and second target marks (30, 31) of the LCD (10) are initialized. The stage on which the initially set L CD (10) is placed is stopped at the center (17a) position of the alignment device (12).

At this stop position, the first image sensor (22) images the first target mark (30), and this image is displayed on both sides of the television. Similarly, the second image sensor (23)
The second target mark (31) of CD (to) is imaged and this image is displayed on the television screen. As shown in FIG. 9, the cross mark (33) provided on the lens of the first image sensor (22) and the first target mark (30) are initially aligned, and the lens of the second image sensor (23) The cross mark (34) provided on the target mark and the second target mark (31) are initially aligned. In this case, the center-to-center path glL between both cross marks (33, 34) is set to a constant distance. In this way, the reference position data in the initial setting is stored in RAM (26).

Next, the stage on which the L CD (10) to be actually tested is placed is transported to the center (17a) of the alignment device 1 (12). As shown in Figure 8,
While being transported, the first target mark (30) at r=CD (10) is imaged by the first imaging element (22), and the second target mark (31) is similarly captured by the second imaging element (23). ).

Next, the positions of the first and second target marks (30, 31) of the initial setting L CD (10) and the first and second target marks (30, 31) of the test implementation L CD (10) are determined. ) and the mutual relationship between them.

The first and second target marks (
30, 31) for the test execution LCD (1
0) first and second target marks (30, 31)
The position recognition can be performed by accessing the RAM (26) that stores the outputs of the mark discrimination circuits (24, 25) at each address.

The first and second target marks (30, 31) are stored in the storage area for the first and second target marks (30, 31) on the RAM (26).

L of these target marks (30, 31)! G-knowledge will be explained with reference to FIG.

The screen matrix is made up of grid-like pixels. Scanning starts from the first row of pixels to the last row of pixels, and the first and second target marks (3
0, 31) exists. 1st and 2nd
The nth line r where the target mark (30, 31) exists
After confirming lJ and memorizing that number, do the same thing as “
Search for the row address where "1" exists. Also, scan from the first column to the last column, check the nth row "1" where the first and second target marks (30, 31) exist, memorize the column number, and then do the same. Search for the column address where "1" exists.

In this way, the areas where the first and second target marks (30, 31) are present can be recognized from the binarized image data. In other words, the corner of the first target mark (3
5) (Point.) and the corner (36) (Point P) of the second target mark can be recognized.

If the positions of the first and second cross marks (33, 34) and the corners (35, 36) of the first and second target marks are known, the amount of positional deviation in the xY force direction and the θ direction can be calculated, respectively. It can be found by

Next, with reference to FIGS. 8 and 9, a method for calculating the amount of correction necessary to correct the deviation in the θ direction will be described.

First, as a precondition, the length of the line segment OP connecting the corners (35, 36) is a set value stored in advance in the ROM (27). Also, cross mark (33
, 34) is constant.If there is a deviation in 60 directions, the line segment OP and the line segment ST intersect with each other. Therefore, according to the following equation 0, the correction amount t in the θ direction
can be found.

t = tan-”((yz yz)/L) ・=
(1) Next, a method for determining the amount of correction of the XY components will be explained.

Let the coordinates of the center of rotation be (xnt y,), the cross mark position be (xc+yc), and (Xll yx) after rotation.
When the coordinates of are (X, 'e yt'), the following equations 0 and 2 hold true.

θ=tan-1[((yz-ya)/(xt-xo
)) -t]...■γ=J(x, -x.)20bl
yo)''-(3 In this case, θ represents the rotational deviation angle, and γ represents the distance from the rotation center to the cross mark.

Furthermore, the following formula (to) and formula 0 hold true.

lx'X6=γsinθ-K)'1'
)'lI=γcosθ ... ■Therefore, the cross mark position (*yc) and the coordinates (Xx't Y
1') mutual deviation amount X1. Y□ is 0 below.
It is determined by the formula and the formula 0.

x,=1. '! (=γsinθ10, -xc
-GVt =yt' Yc= Ycos O+y
o-y. -■Above deviation amount X1. The stage is moved in the XY force direction by Yl to align the glass container 2 with the probe needles, and then the probe needles are brought into contact with each of the electrodes of the glass container 2 to conduct a circuit test.

According to the above embodiment, the marks at two locations on the L CD (10) can be detected almost simultaneously, so the time required for alignment with the probe needle can be significantly shortened.

Further, according to the above embodiment, since the LC:D (10) can be aligned without moving from the fixed position, the space around the chuck (16) and the stage can be reduced, and the device can be The overall size can be reduced.

Further, according to the above embodiment, the LCD made of transparent glass (
Since the top surface of the chuck (16) on which the target mark (10) is placed is processed to have a low reflectance, most of the light that passes through the LCD (10) is absorbed by the chuck surface and the target mark (30) is placed on the chuck (16).
, 31) can be detected accurately.

Therefore, the alignment accuracy between the electrode of L CD (10) and the probe needle can be within the range of c±5]Im. In this case, the upper surface of the main chuck was coated with [Nilakelco] by electroless plating, but it is not limited to this, and the upper surface of the chuck can be made to have a low reflectance by coating with [chromium] or [fluorine]. Target marks can be detected with high precision.

Furthermore, in the above embodiment, the LCD (10) was aligned with the light source 1, for example, a fluorescent lamp, always turned on. Good too. In this case, L CD (10
) The fluorescent lamp can be turned on automatically only when the probe needle is brought into contact with the electrode, thereby making it possible to turn on the lamp more efficiently. In this automatic lighting system, for example,
It is desirable that the fluorescent lamp be turned on 3 seconds after the probe needle is brought into contact with the electrode of the L CD (10).

Next, another LCD position detection method will be described with reference to FIG.

In this deformation sequence, the edge (10a) of L CD (10) is first detected, and based on this, the edge (10a) of L CD (10) is detected.
10) Roughly adjust the position in the XYθ directions. Then, L.C.
The target mark (30, 31) of D (10) is detected, and this mark (30, 31) and the edge (10a) are detected.
), the position of L CD (10) is corrected based on the relative position with respect to L CD (10).

According to the above modification, the edge (1) of L CD (10)
0a) and the target mark (30, 31) could be kept within the range of ±50tIm.

Incidentally, in the case of a normal LCD (10), for example, an LCD for a liquid crystal television or an LCD for a digital watch, the alignment accuracy can be kept within a range of ±54, and the alignment time is about 10 to 15 seconds. could be shortened to.

(Second Embodiment) A pre-alignment device for an LCD prober according to another embodiment will be described with reference to FIG. 11. Descriptions of parts common to the above embodiment and this embodiment will be omitted. The main parts of the pre-alignment device (37) include a reflective sensor (38) and a sub-chuck θ rotation drive unit (39).
), CPU (40), and positioning section (41). The sensor (38) is a sub-chuck (41) of the prober.
It is provided so as to face the L CD (10) placed above. The sensor (38) transmits the light to the LCD (10
), and a light receiving element that receives light emitted from the LCD (10) and converts light to electricity.

The sensor (38) is connected to the input side of the CPU (40), converts the detected light into a digital signal, and sends it to the CPU (40).
It is designed to be input. The output side of the CPU (40) is connected to a sub-chuck θ rotation drive section (39) and a positioning section (42), respectively.

The drive shaft of the sub-chuck θ rotation drive unit (39) is connected to the base of the sub-chuck (41), so that the sub-chuck (41) rotates θ around the axis.

The positioning section (42) includes a sub-chuck Z-axis drive section (42).
a), a tweezers drive section (42b), and a Yllll drive section (42c). The output side of the drive unit (42b) is connected to the base of the sub-chuck (39), so that the sub-chuck (41) moves up and down on the Z-axis. Further, the output side of the drive unit (42b) is connected to the shaft of the running wheel (44) of the tweezers removal plate (43),
The stage plate (45) is configured to move along the X axis.

The sub-chuck (41) and the take-out plate (43) are placed on the stage plate (45). This stage (45
) is connected to the output side of the drive section (42c) of the positioning section (42), so that the entire stage plate (45) moves in the Y-axis direction.

Next, the configuration of the sensor (38) is shown in Figures 12 to 1.
This will be explained using Figure 6.

First, as shown in FIG. 12, the LCDs (10) are transported one by one to the home position (46) of the loader section (11). A sensor (38) is fixed to the member so as to face the surface of this L CD (10).

Furthermore, the L CD (10) at the home position (46)
The chuck (
16). After inspection, the LCD (10) is moved to the cassette (l) by the arm (47).
lb).

The sensor (38) has one light emitting part (38b) and a light receiving element (38c), and detects the position by reflecting light onto the LCD (10).

For example, as shown in Fig. 13, calculate the distance from the center of LCD (10) to the edge of the outer side,
10) to the position of the sensor (38).

Then, the sensor (38) is provided at a position where Ll>L. Therefore, when the L CD (10) is rotated to the right and left, the edge portion of the periphery of the L CD (10) transfers the amount of light emitted from the light emitting portion (38b) of the reflective sensor (38) to the edge portion. and reflect it to the light receiving element (3
8c), and the reflective sensor (38a) can detect the rotation angle value with respect to the edge portion.

As shown in FIG. 12(c), the reflective sensor (38a) is arranged at one location on the Y-axis at a distance from the home position (46).

This reflective sensor (38a) is moved to the home position (
46) may be provided at each location symmetrically on the Y axis, spaced apart by L1 distance.

In this case, when two sensors (38) are provided in series, the time required for rotation is shorter than that of a sensor system where one sensor is provided.

That is, L transported to the home position (46)
A CD (10) is placed on the take-out plate (48).

A θ rotation drive section (39) is provided so as to be raised by a ZM drive section (42a). When the drive part (39) rises, the sub chuck (4I) moves L CD (1
0) can be lifted from the take-out plate (74).

In the θ rotation drive unit (39), a shaft (49) having a top surface for suctioning and fixing the L CD (10) is attached to a bearing (50), and a bearing housing is provided to surround this bearing (50). It is being This bearing (5
0) is erected and fixed on a horizontal board stand (51).

A pulley (52) for a timing belt is provided on the shaft (49) of the sub-chuck (41).
52), the timing belt (53) is connected to the pulse motor (5
4) It is suspended from the shaft.

Therefore, the sub-chuck (41) is rotated to a predetermined rotational position based on the drive signal from the CPU (40).

The CPU (40) calculates the positional deviation amount of L CD (10) from the rotation angle value in the left and right direction. For example, as shown in FIG. The sub chuck (41
) is suctioned and fixed to the L CD (10), and the reflective sensor (38) determines the point where the L CD (10) intersects with the edge of the periphery. Angle θ1 is calculated from this point.

Next, rotate it counterclockwise and similarly find the point where it intersects with the edge portion B of the periphery of the L CD (10). The angle θ2° is calculated from this point.

Find the above angle (θ,°+02″), and find the point C that intersects this half-angle straight line and the center of the sub-chuck (41) (Xa
* yo ) is configured to issue a drive command signal so that the positioning means is driven so that the straight line connecting the Y-axis becomes the Y-axis line.

Similarly, in order to find the center of L CD (10) aligned in one direction, as shown in FIG. 16(d),
Move D (10) in the Y-axis direction, D (X3#
Find the position of Y3), then rotate this L CD (10) 90'' to obtain E(XttYt), F(X4w y4
) and G (Xz e Yz). Each distance g1. g,, a3. Find g,, x.

'1! +'12+subchi'' diameter is L CD (10)
There is a central position.

Once the center position is determined, the drive unit (42b,
42c), a drive command is issued from the CPU (40).

In this case, the rotational drive of L CD (10) may be performed simultaneously with the X-axis and Y-axis drive. This will further reduce the alignment time.

As shown in the figure, the sub chuck (41) of the θ rotation drive unit (39) is connected to the plate base (51) via the bearing housing.
) is fixed. LCD (1) on the take-out plate (48)
0) is fixed to the top surface (41a) of the sub-chuck (41).

A solenoid (56) is provided so as to move downward in parallel to the base plate (55) of the Z-axis drive unit (42a).

Further, a guide member (57) is provided near the solenoid (56).
) are provided in parallel and are configured to prevent rotation that occurs when the solenoid (56) moves up and down.

When the sub-chuck (41) is raised, the take-out plate (48)
) to the top surface (41a) of the sub-chuck (41).
(10) is exchanged, and the sub-chuck (41) becomes in a state where it can be rotated.

Also, when the sub chuck (41) is lowered, the LCD
(10) is delivered to and received by the take-out plate (48), and this take-out plate (48) is moved in the X-axis direction.

Further, the top surface (41a) of the sub-chuck (41) is provided with a suction (not shown) for suctioning and fixing the L CD (10), and the <ON
, adsorption is controlled by OFF operation.

Here, the solenoid (56) acts and the plate base (55)
The guide member (57) used to move up and down the solenoid (
56) and the piston (58).

A tweezers drive section (42b) is provided on the base plate (55) so as to be slidable horizontally in the X-axis direction.

Similarly, the above-mentioned driving section (39) is fixedly supported at the end of the base plate (55). Drive part(
A plate stand (51) is provided at the tip of the piston (58) of the piston (39) so as to hang down in parallel with the base plate (55), and the plate stand (55) follows the vertical movement of the piston (58). ) are configured to move up and down in parallel.

Further, at the end of the plate stand (51), a θ rotation drive unit (
39) is fixedly supported vertically, and the sub-chuck (41) is opened by a pulse motor (59).

Therefore, the sub-chuck (41) is connected to the drive section (42a).
By increasing L CD (10) by
The LCD (10) is configured to be rotatable.

As shown in FIG. 14, the tweezers drive section (42b
) is configured to be movable in the X-axis direction.

The tweezers drive section (42b) includes a take-out plate (48)
, a guide member (59), a timing belt (60), and a pulse motor (61).

The take-out plate (48) is provided so as to be able to slide horizontally on a guide member (59).

For example, W60ms with L CD (10) fixed by suction
+XL250nn
A 0mm x H30m aluminum block lock member (62) is fixedly supported.

This aluminum block member (62) has a guide member (5
9), two holes are drilled in the horizontal direction for sliding. A guide member (54) is inserted into this drilled hole, and both ends of this guide member (59) are attached to a support member (63).
) is the base plate (55) of the tweezers drive unit (42b).
It is erected and supported.

A hollow portion (64) is provided in the distal end (55) of the take-out plate (48) in an area where the sub-chuck (41) moves up and down, so that the up-down movement of the sub-chuck (41) is not obstructed. .

Furthermore, the L of the tip (48a) of the take-out plate (48) is
A suction hole for sucking the L CD (10) is provided at the CD (10) delivery position, and this suction hole is connected to an external vacuum solenoid (not shown) to absorb the CPU (40).
) can be turned on and off based on the command.

Further, a protrusion is provided at the rear end of the take-out plate (48), and a timing belt is fixedly supported on this protrusion.
The timing belt is provided so as to be moved dependently as the timing belt moves in the linear direction. This timing belt is placed so as to be stretched around the pulley, and the guide member (
57).

A pulse motor (61) is linked to the pulley, and the pulse motor (61) is operated based on the command from the CPU (40).
59) to move the timing belt.

As shown in FIG. 15, the Y-axis drive unit (42c) moves along the column direction (Y-axis direction) of the cassettes (llb) arranged in parallel on the cassette (ttb) placement unit (64). A moving body (65) is provided movably.

The explanation will be given again by returning to FIG. 14. First, the loader section (11
) are fixedly supported parallel to each other along the mounting portion (64). A timing belt (67) is stretched around a pulley (68) on the side surface of the rail (66a, b).

A pulse motor (69) is linked to the - part of this pulley (68), and this pulse motor (69) is controlled by the CPU (
40) is movably arranged based on the command.

As shown in FIG.
) is fixedly supported. When the pulse motor (69) is rotated, the timing belt (62) is moved in the Y-axis direction along the mounting portion (64).

Note that a cylindrical shaft (69) is attached to the upper part of the movable body (65) so that the shaft is perpendicular.

The top surface (69a) of the cylindrical shaft (69) is provided horizontally, and the base plate (55) is fixedly supported on this top surface (69a) so as to be stacked horizontally.

Here, the cylindrical shaft (69) has a built-in structure that moves in the vertical direction of the - shaft. This vertical movement mechanism moves the L CD (10) up and down when taking out the L CD (10) from the cassette (llb).

Since all of the above-mentioned mechanical members are driven according to drive command signals from the CPU (40), the L CD (10)
It is configured so that it can be moved to any position.

Next, the operation of the second embodiment will be explained with reference to FIG. 17.

Based on the information input from the keyboard (9a), the Y-axis drive unit (42c) of the loader unit (11) operates to take out the L CD (10) from the cassette (llb) and move it to the home position (46). ). in this case.

After the taken out L CD (10) is transported to the home position (46), it is suctioned and fixed to the top surface (41a) of the sub-chuck (41) (step 70).

Next, the pulse motor of the sub chuck θ rotation drive unit (39) rotates the L CD according to a pre-stored program.
Rotate the sub-chuck (41) to the left to fix (10) by suction.

As shown in FIG. 16, IWA is memorized at the point where the peripheral edge of the LCD (10) crosses the reflective sensor (38). Similarly, the LCD (10) is rotated to the right according to a pre-stored program. and the 16th
As shown in Figure (c), 5 iB is stored at the point where the peripheral edge of the L CD (10) crosses the sensor (38). In this way, the angle between the two edge points is determined by rotating left and right (step 71).

Here, since the signal stored in the LCD (10) is a digital signal, the case where it is not reflected is defined as "H".

By determining the case where a reflection is detected as “K”, L
It is programmed to detect the edge position of the - side of CD (10) and rotate in the opposite direction.

Next, the CPU (40) performs angle adjustment calculations based on the information from the above points A and B.

As shown in No. 161iii1(a), this method of calculating the rotation angle value is such that θ, +02 is a total angle, and a deviation angle α6 from the half angle of this total angle is derived. The sub chuck (41) is rotated by α8 according to the command from the CPU (40), and the L
Correct the rotational deviation of CD (10) (step 72)
.

In this way, the circumferential line end direction of the L CD (10) can be aligned in a certain direction. In this state,
Next, in order to find the center (xl, yz) of the LCD (10) (7), first, as shown in FIG. 16(d), the pulse motor of the Y@ drive unit (42c) is (rji1 not shown) is rotated and moved as shown by the arrow, the entire sub-chuck (41) holding the L CD (10) by suction moves in the Y-axis direction, and the reflective sensor (38) Intersects the edge orthogonally so as to cross one of the four sides of L CD (10), and
(x3t ya) point is detected.

Next, the sub-chuck (41) is rotated 90 degrees.

Similarly, the positions of E (XxpYt), F CX4e y4) and G (x2°yt) are detected. In this way, data at four points of LCD (10) is acquired (step 73).

The 90' rotation at 22 is automatically rotated by one rotation according to a pre-stored program. In this way, the distance from the home position fi (3g) to the 0 point in the figure and the distances to E, F, and the 0 point are determined.

Based on the home position (38) stored in advance, calculate the amount of deviation between the center position (xo - YO) of the LCD (10) (7) and the position (X(1*Ya)) of the sub chuck') (4I). .

It is checked whether the amount of deviation is within a predetermined range (step 74).

If the amount of deviation exceeds a predetermined range, the center position of the LCD (10) is corrected again (step 75).

If the amount of deviation is within the predetermined range, the LCD (10) is rotated left and right again to find the angle between the two edge points (step 76).6 Next, the sub chuck (41) is rotated by α°. Rotate, L
Correct the rotational deviation of CD (10) (step 77)
.

As shown in FIG. 16(e), the final home position (46) position rll (Xa tyo) and L CD
(10) center (XO.

YO) so that they match. The pre-alignment of L CD (10) is completed up to step 77. after that.

The pre-aligned L CD (10) is connected to the rotating arm (
47) to have Chuck (16) give and receive. And L.C.
A probe needle is brought into contact with the electrode of D (10), and a predetermined circuit test is performed.

According to the second embodiment, the time required for pre-aligning the LCD can be significantly shortened.

Additionally, sensor life is significantly extended.

The effects of the LCD blowing machine according to the present invention will be further explained.

According to the LCD blobbing machine according to the present invention,
Since two alignment marks are detected separately and simultaneously, the LCD can be quickly aligned. Therefore, it is possible to quickly handle various test programs. Furthermore, since the LCD is aligned almost at a fixed position, the space around the chuck is smaller than in conventional devices, and the device can be made more compact.

Furthermore, since the LCD mounting surface of the chuck has a low reflectance, light transmitted through the LCD is substantially not reflected from the mounting surface. Therefore, the alignment mark can be detected with high precision, and the LCD can be accurately positioned with respect to the probe needle.

Further, when detecting and aligning the edges of the LCD, the time required to obtain edge position detection data can be significantly reduced, so that the large LCD can be aligned quickly.

[Brief explanation of the drawing]

Fig. 1 is an overall explanatory diagram for explaining an embodiment in which the device of the present invention is used in an LCD propper, and Fig. 2 is an illustration of the LCD shown in Fig. 1.
A cross-sectional explanatory diagram for explaining the main chuck of the prober, FIG. 3 is a plan view showing the LCD prober main chuck of FIG. 1 as seen from above, and FIG.
An explanatory diagram for explaining the state in which the LCD of the LCD prober shown in the figure is irradiated with light, FIG. 5 is a block explanatory diagram for explaining the alignment device of FIG. 1, and FIGS. 6, 7, and 8 are Fig. 1 is an explanatory diagram for explaining the detection principle of the alignment mark of the alignment device, and Fig. 9 is a schematic explanatory diagram showing the positional relationship between the cross mark of the COD camera and the alignment mark of the LCD in the alignment of Fig. 1. , FIG. 10 is an explanatory diagram of an LCD for explaining another alignment method shown in FIG. 1, and FIG. 11 is an explanation of an alignment device for explaining another embodiment in which the device of the present invention is used in an LCD prober. 12 is an explanatory diagram of the arrangement of the positioning device in the LCD prober of FIG. 11, FIG. 13 is an explanatory diagram of the tweezers structure of the LCD prober of FIG. An explanatory diagram of the conveying section for explaining the conveying structure for conveying the tweezers, FIG. 15 is the 11th
FIG. 16 is an explanatory diagram for explaining the detection principle of the alignment device in FIG. 11, and FIG. 17 is an illustration for explaining the operation of the alignment device in FIG. 11. Flowchart explanatory diagram. FIGS. 18 and 19 are explanatory diagrams for explaining a positioning device used in a conventional LCD prober. 9, LCD blower 11, loader section 13, probe needle 142, center 9a of inspection section, keyboard 10°12, alignment device 14, inspection section CD

Claims (2)

[Claims] (1) An inspection section that tests the liquid crystal display by bringing the probe needle into contact with the electrodes of the liquid crystal display; a support stand that holds the liquid crystal display so as to face the probe needle; a means for projecting light; a means for detecting the light reflected by the liquid crystal display; and a means for recognizing the relative position of the liquid crystal display and the probe needle based on the detection signal of the identification mark; Position recognition means for determining the amount of movement of the liquid crystal display necessary to correct mismatch with the probe needle, and moving the support base based on the calculated amount of movement so that the probe needle matches the electrode of the liquid crystal display. The reflected light detection means includes a plurality of image forming means configured to individually form images, and the position recognition means includes: 1. A liquid crystal display probe device comprising a discriminating means for individually discriminating mismatch between an electrode of a liquid crystal display and a probe needle based on each image. (2) Place the liquid crystal display on a support base, and measure the amount of positional deviation between the first reference point for position recognition of the liquid crystal display provided on the support base and the mark on the imaging system by at least two points. 1. A liquid crystal display probe method, characterized in that the amount of positional deviation is determined and corrected so that the amount of positional deviation becomes zero.