JPH0278983A - Magnetometer using superconducting quantum interference device - Google Patents

Abstract

PURPOSE:To reduce performance deterioration by using a superconducting quantum interference element for a magnetic measuring instrument, separating the cryostats of its element part and pickup coil, and coupling both cryostats by a superconducting cable. CONSTITUTION:An exciting coil 2 and the pickup coil part cryostat 52 are arranged on a body 1 to be measured, and the coil 2 and cryostat 52 are scanned in an X-Y-theta direction. The magnetic signal of a magnetic detection side pickup coil 93 is coupled with a SQUID element 91 through the superconducting cable 92 in a flexible tube 60 and measured by a SQUID controller 90. The cable 92 in the tube 60 is sheathed with a magnetic shield pipe 61 made of a superpconducting material to cut off external magnetic noises. Consequently, the cryostat 52 is reducible in size, so the scanning performance of magnetic inspection is excellent and a sensor part using the element 91 can be separated from a radioactivity source; and radiation resistance is improved and malfunction is reducible.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an apparatus for inspecting the deterioration of metal materials, and in particular has good scanning performance when using a superconducting quantum interference element and is radiation resistant. The present invention relates to a 1llll'l constant device suitable for.

[Conventional technology]

As a conventional example, there is a method described in Japanese Patent Laid-Open No. 168334/1983. Here, a superconducting quantum interference device (hereinafter simply referred to as a 5QUID device) pickup coil is housed in the same FlyOstara j.

[Problem to be Solved by the Invention] In the above-mentioned conventional technology, the 5QUID element and the pickup coil are housed in the same cryostat, which results in a large cryostat. Therefore, there is a problem that the scanning performance of the sensor using 5QUID is poor.

Also, in radiation environments such as nuclear reactor pressure vessels.

Another problem is that it is difficult to use the 5QUID element 4.

The object of the present invention is to provide a radiation-resistant 5
The purpose of the present invention is to provide a QUID magnetometer.

[Means to solve the problem]

Target 01 above is 5QIJ, a magnetometer using 5QUID.
This is achieved by separating the cryostat of the ID element section and the pickup coil section, and connecting the superconducting cable that connects both cryostats to a flexible tube or built into a multi-joint structure.

[Effect]

The cryostat of the 5QLIID element part and the pickup coil part of the magnetometer using 5QIJ In is divided,
By connecting both cryostats with a flexible tube with a built-in superconducting cable, the cryostat in the pickup coil part that is scanned can be made smaller, making it lighter and easier to scan every corner.

Furthermore, since the 5QLIID element part and the cryostat of the pickup coil part are separated, the 5QUID element part can be placed in a position away from the environment such as radiation, and the effect of improving radiation resistance performance can be obtained.

〔Example〕

Next, embodiments of the present invention will be described based on the drawings.

FIG. 1 shows an example of a system configuration for implementing a magnetometer using 5QUID according to the present invention.

In FIG. 1, reference numeral 1 denotes a measurement object such as equipment or piping used in an atomic couplant or the like. 2 is an excitation coil for exciting the object to be measured, and 3 is a magnetization controller for the excitation coil.

4 is a cooler for bringing the 5QUID sensor to operating temperature. 41 is a refrigerant. 7 is a scanning drive device of the inspection device. 8 is a drive control bag of the scanning drive device 7. 51 is the cryostat of the 5QUID element part,
52 is a cryostat of the pickup coil section. 60 is a 5QUID element cryostat 51
This is a flexible tube that connects the pick-up coil section 52 to the Riostat 1. 61 is a magnetically shielded pipe made of superconducting material. 90 is a 5QUID controller, and 91 is a 5QUID element. 92 is
A superconducting cable for coupling with the 5QUID element 91, and 93 is a pickup coil on the magnetic detection side.

An excitation coil 2 and a pick-up coil section 52 are arranged on the upper part of the measurement object 1.

The excitation coil 2 is controlled by an excitation controller 3. Excitation coil 2 and pickup coil section Rio Sta! - 52 is scanned by a scanning drive device 7 for scanning in the x-y-0 direction.

The scanning drive device 7 is controlled by a drive control device 8.

The magnetic signal of the magnetic detection side pickup coil 93 is transmitted through the superconducting cable 92 inside the flexible tube 60.
The signal is coupled to a 5QUID element 91 and measured by a 5QUID controller 90.

The superconducting cable 92 inside the flexible tube 60 is
It is covered with a magnetic shield vibro 1 made of superconducting material and is shielded from external magnetic noise.

5 Cryostat 51 of QUID element section. Inside the pick-up coil flexible tube 60, there is a refrigerant 41 from the cooler 4.
is supplied, 5QUID 9 1, superconducting cable 9
2 and the pickup coil 93 are maintained at the operating temperature.

A detailed example of the flexible tube 60 is shown in FIGS. 3 and 4.

Fig. 3 shows a structure in which the liquid helium sending pipe and return pipe are separated, and Fig. 4 shows a structure in which the liquid helium sending pipe and return pipe are coaxial.

600 can be flexibly bent with an outer tube bellows. A super insulator 601 is located inside the outer pipe bellows 600 and has a heat insulating structure. 60
2 is an inner pipe bellows.

603 is a magnetic shielding film that operates at liquid nitrogen level and blocks external magnetic noise.

604 and 605 are liquid nitrogen return pipes and feed pipes. 606 is an internal insulation store that insulates liquid nitrogen and liquid helium. 607 and 608 are liquid helium return pipes and feed pipes. Liquid helium feed pipe 608
A superconducting cable 92 coated with a magnetic shield vibro 2 made of superconducting material is installed inside.

Further, FIG. 4 shows a liquid helium return pipe 607 and a feed pipe 608 having a coaxial structure.

By using this flexible tube, the cryostat in the pickup coil section can be easily scanned.

An example of the material and structure of the flexible tube will be explained with reference to the internal structure diagram of FIG. 12.

The outer pipe bellows 600 and the inner pipe bellows 602.

Bellows made of copper or stainless steel allow for flexible bending. super insulator 6
01 is for insulating the outer pipe bellows 600 and the inner pipe bellows 602, and is filled with a super insulator in a vacuum state. Inside the inner pipe bellows 602, there are a return pipe 604 and a feed pipe 605 for liquid nitrogen, and a layer 610 between the pipe and the vacuum bellows 613 is a layer filled with helium t1, which is maintained at the liquid nitrogen temperature. Inside the vacuum bellows 613, there is a vacuum insulation layer 611, inside which a liquid helium return pipe 607 and a feed pipe 609 are provided.
There is. The return pipe 604 and feed pipe 605 for liquid nitrogen and the return pipe 607 and feed pipe 609 for liquid helium can be bent with bellows made of copper or stainless steel.

According to this embodiment, the cryostat is 5QU1. Since the D-element city center pickup coil section is separated and connected with a flexible tube, the pickup coil section cryostat for measurement can be made smaller, the scanning performance is improved, and the local magnetic field state can be measured with high precision.

As another embodiment, FIG. 14 shows an embodiment in which a straight pipe and a flexible joint are combined instead of a flexible tube.

FIG. 14 is an example in which a straight pipe and a flexible joint are combined in place of the flexible tube in the embodiment shown in FIG. It has a multi-joint structure consisting of a straight pipe 63 into which a superconducting cable 92 is inserted and a flexible joint 62.

With this multi-joint structure, the cryostat 51 of the 5QUID element part and the fly Ostara 1~ of the pickup coil part
52 are connected to each other, and the cryostat 52 of the pickup coil section scans the surface of the measurement object 1 by the scanning drive device 7.

The structure of the straight pipe is shown in Figure 13. A vacuum insulation layer 611 is provided inside an outer tube 612 made of copper or stainless steel, and a liquid helium return pipe 607 and a feed pipe 609 are provided inside the vacuum insulation layer 611.
There is. A superconducting cable 92 is inserted into the feed pipe 609.

In this example as well, the cryostat can be separated into the 5QUID element part and the pickup coil part, which are connected by a multi-joint structure of straight pipes and flexible joints, so the pickup coil part cryostat for measurement can be made smaller and the scanning performance is improved. , the local magnetic field state can be determined with high precision.

Another example is shown in the 21st section. FIG. 2 shows an example in which the scanning drive device 7 is an articulated robot 7o.

In this embodiment, a pickup coil cryostat 52 is attached to the tip of an articulated robot 70 to scan the surface of the object 1 to be measured. The articulated robot 70 is controlled by a drive control device 80. The signal from the 5QUID controller 90 and the signal from the drive control bag @80 are taken into the arithmetic unit 10 and processed.

According to this embodiment, the multi-jointed robot can move the pick-up coil section!・Since the amount of scanning can be reduced in three dimensions, it is effective for inspecting devices with complex shapes.

Another embodiment is shown in FIG. FIG. 5 shows an example in which a 5QUID sensor system is built into an articulated robot 70.

In this embodiment, a pickup coil cryostat 52 is attached to the tip of an articulated robot 70, and a flexible tube 60 is housed in the arm of the articulated robot 70.

According to this embodiment, since the flexible tube and the like are housed in the arms of the articulated robot, it becomes easy to measure narrow parts of the object to be measured.

Another embodiment is shown in FIG. FIG. 6 is an example of the forced cooling method.

In this embodiment, the cooler 4 and the SOυID element part cryostat 1-51 are connected by a flexible tube 67, the cooler 4 and the pickup coil part cryostat 52 are connected by a flexible tube 66, and the 5QUID element part cryostat 51 and the pickup coil part The superconducting cables 1 to 52 are connected by a flexible tube 60 containing a superconducting cable.

This allows forced refrigerant circulation and improves the stability of the measurement system.

Another embodiment is shown in FIG. Figure 7 shows the flexible tube 60 and the pickup coil cryostat 5.
This is an example in which 2 has a joint structure that can be worn under the skin. The pickup coil 93 can be easily attached to the coupling part 68 which is detachable.
can be exchanged, making it possible to perform many illumination constant force methods with one system.

Another embodiment is shown in FIG. FIG. 8 shows a structure 69 in which both ends of the flexible tube 60 can be connected. Thereby, a plurality of flexible tubes 60 of required dimensions can be obtained by connecting a plurality of tubes.

FIGS. 9 and 10 show an arrangement in which the pickup coil section is provided with an excitation coil.

FIG. 9 shows the pickup coil section cryostat 52.
An excitation coil 2 is provided on the outside of the coil. A pick-up coil 93 detects a change in the magnetic field when the measurement object 1 is excited by the excitation coil 2 .

Figure 10 shows the pickup coil section cryostat 5.
2 is provided with an excitation coil 2 having a core. A pick-up coil 93 detects a change in the leakage magnetic field when the measurement object 1 is excited by the excitation coil 2.

These changes in the magnetic field correspond to changes in the physical properties of the measuring object 1,
By excitation, this tendency becomes more pronounced.

FIG. 11 is an example in which the present invention is applied to an atomic couplant.

The 5QUID section of the present invention is arranged in the upper L/-n 310 of the pool 330 of the reactor pressure vessel 300, and is connected to the pick-up coil sections 1 to 52 in the reactor pressure vessel 300 with a flexible tube 60. There is. The pickup coil cryostat 52 is attached to the articulated robots 1 to 7o. The reactor internal structures such as the upper grid plate 320 are measured by the articulated robot 7o. According to this embodiment, since the 5QUID main body can be placed in an area with little radiation, the stability of the system is improved and highly reliable 81g determination is possible.

〔Effect of the invention〕

In the invention of claim 1, a magnetometer using 5QUID is divided into a 5QUID element cryostat and a pickup coil cryostat, and both cryostats can be connected with a flexible tube, so that the pickup coil cryostat can be made smaller. The scanning performance of magnetic inspection is good, and the sensor part using 5QUID can be kept as far away from radiation light as possible, improving radiation resistance and minimizing malfunctions and performance deterioration caused by large amounts of radiation entering the 5QUID element. Can be reduced. or,
Since the pickup coil side and the 5QUID element side are connected with a superconducting material, even the direct current component of the magnetic field can be measured, resulting in the effect of even higher accuracy.

In the invention of claim 2, claim 1
In addition to the effects obtained by the invention described in section 1, the magnetic shield can block external magnetism that attempts to enter the superconducting cable, resulting in the effect that even more accurate measurements can be performed.

In the invention of claim 3, claim 1
In addition to the effects obtained by the invention in section 1, since the cryostat of the pickup coil can be scanned by the drive device, the effects of easy scanning and highly accurate scanning can be obtained.

In the invention of claim 4, claim 3
In addition to the effects obtained by the invention described in section 1, an effect can be obtained in that flexible scanning can be easily achieved due to the large degree of freedom of movement provided by the multi-jointed arm.

In the invention of claim 5, claim 1
In addition to the effects obtained by the invention in section 1, 5QUI can be achieved by cooling means.
Since the D element, superconducting cable, and pickup coil can be maintained at appropriate operating temperatures, measurement performance can be maintained stably and high accuracy can be maintained.

In the invention of claim 6, claim 3
In addition to the effects obtained by the invention in section 1, by housing the flexible tube and the cooling system within the drive device, it is possible to obtain the effect that the flexible tube and the cooling system can be easily handled during scanning.

In the invention of claim 7, claim 1
In addition to the effects obtained by the invention in section 1, the cooling path system between the cooler, both cryostats, and the inside of the flexible tube is connected to form a circulation path, so that the refrigerant is forced to circulate.
The effect is that the cooling function is improved and the measurement performance is further stabilized.

In the invention of claim 8, claim 1
In addition to the effects obtained by the invention in section 1, since the gap between the cryostat of the pickup coil and the flexible tube can be quickly removed, maintenance and replacement work can be easily performed.

In the invention of claim 9, claim 1
In addition to the effects obtained by the invention in section 1, the length can be adjusted appropriately by further connecting or disconnecting the flexible tube in the middle of the flexible tube, resulting in the effect of being able to flexibly respond to a total of 611 environments.

In the invention of claim 10, in addition to the effect obtained by the invention of claim 1, the cryostat of the pickup coil and the excitation coil of the measurement object can scan in the same manner in one operation, which reduces the measurement work. This has the effect of making it easier.

The invention set forth in claim 11 has, in addition to the effect obtained by the invention set forth in claim 1, an effect that is suitable for measuring the surface layer by concentrating excitation on the surface of the measuring object using the horseshoe-shaped excitation coil. is obtained.

In the invention set forth in claim 12, a magnetometer using 5QUID is divided into a 5QUID element cryostat and a pickup coil cryostat, and both taliostats can be connected by a straight pipe and a flexible joint, and the pick-up coil cryostat is Because it can be made small,
The scanning performance of magnetic inspection is good without relying on a flexible tube, and the sensor part using 5QUID can be kept as far away from radiation light as possible, improving radiation resistance and allowing more radiation to enter the SQU ID strand. Malfunctions and performance deterioration caused by this can be reduced as much as possible. In addition, since the pickup coil side and the 5QUTD-a:1- side are connected with a superconducting material, the direct current component of the magnetic field can also be measured, resulting in the effect of further increasing accuracy.

[Brief explanation of the drawing]

FIG. 1 is an overall view showing the entire system of an embodiment of the present invention, FIGS. 2 and 5 are overall views of the case where an articulated robot is used as the scanning drive device in the embodiment of the present invention, and FIG. 3 and FIG. 4 are diagrams showing the internal structure of the flexible tube used in the scanning drive device in the embodiment of the present invention, and FIG.
The figure is an overall view of a forced cooling device according to an embodiment of the present invention, FIG. 7 is an overall view of an embodiment of the present invention regarding a detachable structure of a flexible tube and a pickup coil cryostat, and FIG. 8 is an overall view of a flexible tube and a pickup coil. 9 to 10 are elevational views of the excitation coil in the embodiment of the present invention, and FIG. 11 shows the present invention as an atomic converter!・An overall view showing a cross-sectional view of an example of the inspection work of the embodiment applied to ・ FIG. 12 is a sectional view of a flexible tube in an embodiment of the present invention, and FIG. 13 is a sectional view of a straight pipe in an embodiment of the present invention. , FIG. 14 is an overall view showing the entire system of an embodiment of the multi-joint structure using straight pipes and flexible joints according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Measuring object, 2... Excitation coil, 3... Excitation controller, 4... Cooler, 41... Refrigerant, 7...
Scanning drive device, 8... Drive control device, 10... Arithmetic device, 51... 5 QUID element cryostat,
52...Pickup coil section cryostat, 6
0...Flexible tube, 61...Magnetic shield pipe, 62...Flexible joint, 63...Straight pipe, 66 and 67...Flexible tube, 68 and 69...Detachable joint, 70...・Articulated robot, 8
0...Multi-jointed robot 1-drive control device, 90...5
QUID controller, 91...5 QUID element, 9
2... Superconducting cable, 93... Pick-up coil, 300... Reactor pressure vessel, 310... Crane, 320... Upper grid plate, 330... Pool, 6
00... Outer pipe bellows, 601... Super insulator, 602 - Inner pipe bellows. 603...Magnetic shielding film, 604 and 605
...Liquid nitrogen return pipe and feed pipe, 606...Internal insulation layer, 607 and 608...Liquid helium return pipe and feed pipe, 609...Liquid helium feed pipe, 610...
Helium filled layer, 6.11... Vacuum layer, 612...
Outer tube, 613...vacuum bellows. Agent Patent attorney Katsuma Ogawa □゛′? \1''-゛\, Nini' Fig. 1 Fig. 2 Mouth a Fig. 3 Palm Fig. 4 #5 Eye 3θ Charu'' Broom Fig. 7 Fig. 8 Mouth No. 1 I m No. 12 Fig. 1353

Claims (1)

[Scope of Claims] 1. In a metal material deterioration inspection device that applies a magnetic field to a measurement object using an excitation coil or the like and detects deterioration of the measurement object from changes in magnetism generated in the measurement object, the A superconducting quantum interference element is used in the magnetic measurement device that detects the magnetic characteristics of saturation magnetism, residual magnetism, coercive force, and Barkhausen noise of the measuring object, and the cryostat of the superconducting quantum interference element part and the pickup coil part are separated, and both cryostat parts are separated. A magnetometer using a superconducting quantum interference device, characterized in that the two are connected by a superconducting cable surrounded by a flexible tube. 2. A magnetometer using a superconducting quantum interference element according to claim 1, characterized in that a superconducting cable having a magnetic shield made of a pipe made of a superconducting material is built into a flexible tube. 3. A magnetometer using a superconducting quantum interference element according to claim 1, characterized in that the magnetometer is equipped with a drive device capable of scanning a cryostat of a pickup coil within a measurement range. 4. Claim 3 provides a superconducting quantum interference device characterized by comprising an articulated robot equipped with an arm having a plurality of joints as a drive device for scanning a cryostat of a pickup coil within a measurement range. Magnetometer used. 5. A magnetometer using a superconducting quantum interference device according to claim 1, characterized in that it is provided with cooling means for the superconducting quantum interference device section, the pickup coil section, and the superconducting cable. 6. A magnetometer using a superconducting quantum interference element according to claim 3, characterized in that a cooling means for the flexible tube connected to the cryostat of the pickup coil and the superconducting cable is built into the drive device. 7. A magnetometer using a superconducting quantum interference device according to claim 1, characterized in that both cryostats and a cooler are connected by a flexible tube, and a coolant is forcedly circulated between the connections. 8. A superconductor according to claim 1, characterized in that the superconducting quantum interference element and the cryostat of the pickup coil section are connected by a flexible tube, and the cryostat of the pickup coil section and the flexible tube are made detachable. A magnetometer using a quantum interference element. 9. Claim 1 is characterized in that the flexible tube that connects the superconducting quantum interference element and the cryostat of the pickup coil portion is a plurality of split flexible tubes, and the connecting portion is structured to be detachable and connectable. A magnetometer using a superconducting quantum interference device. 10. A magnetometer using a superconducting quantum interference device according to claim 1, characterized in that the cryostat in the pickup coil section is equipped with an excitation coil that excites the object to be measured. 11. A magnetometer using a superconducting quantum interference element according to claim 1, characterized in that the cryostat in the pickup coil section is equipped with a horseshoe-shaped excitation coil for exciting the measuring object, and has a structure for measuring leakage magnetic flux. 12. In a metal material deterioration inspection device that applies a magnetic field to a measurement object using an excitation coil and detects deterioration of the measurement object from changes in magnetism generated in the measurement object, the saturation magnetism and residual magnetism of the measurement object are detected. A superconducting quantum interference device is used in the magnetic measurement device that detects the magnetic properties of magnetic properties such as coercive force and Barkhausen noise. A flux meter using a superconducting quantum interference device, characterized by connecting both cryostats with a multi-joint structure consisting of tubes and flexible joints.