JPH0260147A - Pellet pickup mechanism - Google Patents

Abstract

PURPOSE:To prevent the peeling-off of a multiplicity of pellets owing to vibration and to prevent pellets other than those desired from being sucked up by a method wherein a light beam capable of reducing adhesive force is concentrated on one pellet region only. CONSTITUTION:A ring moving section 8 is caused to horizontally move for a desired pellet 2 to travel to a location over the ultraviolet rays projecting port 5 of a fiber cable 4, and the pellet 2 is exposed to an ultraviolet beam originating in a light source 3. As the result, a UV tape 1 is hardened only in the region mounted with the pellet 2 for reduction in adhesive force, whereby adhesion force is reduced between the pellet 2 and the UV tape 1. Under the conditions, a vacuum adsorption collet 7 is caused to descend toward the pellet 2 with its adhesive force reduced, to suck it up. After this, the vacuum adsorption collet 7 is lifted and caused to move horizontally to a specified pellet accommodating section and the pellet 2 is released of vacuum suction, which completes the pickup and movement.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention involves separating a semiconductor wafer attached to a tape into individual pellets, then irradiating the tape with light to reduce its adhesive strength, and picking up the pellets. Regarding pellet pickup mus.

[Conventional technology]

Conventionally, in this type of pellet pickup mechanism used for pellet appearance sorting or die bonding, for example, after separating a semiconductor wafer attached to a UV tape into individual pellets, UV light covering the entire area of the semiconductor wafer is used.
After the tape was irradiated with ultraviolet light to reduce the adhesive strength between all pellets and the tape, it was attached to a pellet pickup mechanism to pick up individual pellets.

[Problem to be solved by the invention]

In the conventional pellet pickup mechanism described above, the adhesive force between all the pellets and the tape is reduced, so if the adhesive force is extremely reduced, it may cause vibrations when attaching the tape to the pellet pickup mechanism, or vibrations in the pellet pickup mechanism. There have been problems in that a large number of pellets come off due to vibrations during operation, or that when a vacuum suction collet adsorbs pellets from above the tape, other pellets than the desired pellets are adsorbed. Also,
If the adhesive force is increased to a certain extent to prevent the above problem from occurring, the pellet cannot be adsorbed by vacuum suction alone, and for example, as shown in FIG. While moving the fixing ring 6 in the lateral direction using the ring moving unit 8, the needle 12 is raised from the lower back side of the tape 1 by penetrating the tape 1 by the lifting mechanism 13, and the pellet 2 is moved to the vacuum suction collet 7 side. The drawback was that an auxiliary means for pushing up was required.

An object of the present invention is to provide a pellet pickup 1JI4 that solves the above problems.

[Differences between the invention and the prior art]

The present invention differs from the conventional bullet pickup mechanism described above in that it irradiates only a single bullet area of the bullet attached to the tape with a light beam that reduces the adhesive strength of the tape.

[Means to solve the problem]

In order to achieve the above object, the present invention provides a pellet pickup mechanism that divides a semiconductor wafer attached to a tape into individual pellets, irradiates the tape with a light beam to reduce its adhesive strength, and picks up the pellets from above the tape. In the present invention, a beam of light that reduces the adhesive force of the tape is concentrated and irradiated only on a single pellet region.

〔Example〕

Next, the present invention will be explained based on the drawings.

(Actual refusal case 1) FIG. 1 is a sectional view showing a first embodiment of the present invention.

1 is UV tape with Beret 2 attached, 3 is Beret 2
An ultraviolet light source 4 is used to harden the UV tape 1 pasted with UV tape 1 to reduce its adhesive strength, and 4 is a UV light source that applies ultraviolet light from UV light a3 to the single pellet 2 from the back side of the UV tape 11 with the pellet 2 pasted on it.
is attached to a fiber cable having an irradiation port 5 that guides and intensively irradiates only the area of the surface, 6 is a fixing ring that fixes the UV tape 1, and 7 is a fiber cable with a vacuum suction port on the lower end surface of the UV tape 1. a vacuum suction collet attached to move vertically and horizontally relative to the pellet 2 to move between a predetermined pellet accommodating portion and the position of the pellet 2 on the UV tape 1;
Reference numeral 8 denotes a ring moving section attached to move the UV tape 1 in the horizontal direction, and 9 is a mounting jig for attaching the fixed ring 6 to the ring moving section 8.

Next, the operation will be explained. First, move the ring moving part 8 horizontally to move the desired pellet 2 to the cable 4.
When the UV tape 1 is placed above the ultraviolet irradiation port 5 and irradiated with ultraviolet light from the light source 3, the UV tape 1 hardens only in the area of a single pellet 2, and the adhesive force with the pellet 2 decreases. .

In this state, the vacuum suction collet 7 is lowered and vacuum suctioned onto a specific pellet 2 where the adhesive strength of the tape has become low. After that, the vacuum suction collector 7 is raised by -L,
The pellet 2 is moved horizontally and carried to a predetermined pellet storage area, and the vacuum suction is released to complete the pick-up and transfer of the pellet 2.

(Example 2) FIG. 2 is a sectional view showing a second embodiment of the present invention.

10 is an optical system for the ultraviolet light source 3 provided with a mask with a window so as to hit only the region of a single pellet 2;
1 is a prism that bends the optical path at right angles so that the ultraviolet light from the optical system 10 is irradiated onto the UV tape 1 from the back side of the beam lens 2. This embodiment has the advantage that the pellet size can be easily changed by changing the mask.

〔Effect of the invention〕

As explained above, the present invention irradiates only a single bullet region with a beam of light that reduces the adhesive force between the bullet and the tape, and then pinpoints the bullet, which causes vibrations in the pickup mechanism. There is no fear that a large number of pellets will come off due to such factors, or that pellets other than the desired pellets will be attracted, and other auxiliary means can be installed to separate the pellets from the tape in order to attract them to the vacuum suction collet. It is unnecessary and has the effect of simplifying the structure.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing a first embodiment of the present invention, FIG. 2 is a sectional view showing a second embodiment of the present invention, and FIG. 3 is a sectional view not showing a conventional example. 1...UV tape 2...Bellet 3...
Ultraviolet light source 4...Fiber cable 5...Irradiation port a...Vacuum suction collet 9...Mounting jig 11...Prism 13...Uplifting mechanism 6...Fixing ring 8... Ring moving unit 10...Optical system 12...Needle patent applicant NEC Corporation Figure

Claims (1)

[Claims] (1) In a pellet pickup mechanism that separates a semiconductor wafer attached to a tape into individual pellets, irradiates the tape with light to reduce its adhesive strength, and then picks up the pellets from above the tape. A pellet pickup mechanism characterized by having a mechanism that concentrates and irradiates a light beam that reduces tape adhesive strength.