JPH02275788A - Part material covered with diamond - Google Patents

Abstract

PURPOSE:To improve adhesion of carbide-tipped base material with diamond film by providing diamond film formed with vapor phase synthetic method on the surface of sintered material obtained from tungsten carbide and carbide or nitride of Si or Bi. CONSTITUTION:A diamond film formed with vapor phase synthetic method is provided on the surface of a sintered material obtained from (A) tungsten carbide and (B) carbide or nitride of silicon or boron to afford the subject part material covered with diamond. The sintered material used as the above mentioned base material is a ceramic-based carbide-tipped material not containing single metal such as Co, Ni or Fe or alloy and so, thermal expansion coefficient is small. Then residual thermal shrinkage stress is sufficiently small and diffusion of carbon is not occurred. Therefore, a diamond film having high performance is formed on the surface of a base material as the abovementioned and said diamond film is expected to be stably held on the base material with hardly exfoliating.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a diamond-coated member, and furthermore,
L, < K relates to a diamond-coated member having a diamond film with excellent adhesion on the surface of a sintered body, which is a ceramic carbide base material made of a specific component.

[Prior art and the problem to be solved by the invention] Conventionally, tools such as cutting tools, polishing tools, and dies that require high hardness and wear resistance have been made of cemented carbide sintered diamond, single crystal diamond, etc. ing.

Among these tools, diamond tools are particularly prized because of their outstanding hardness and wear resistance.

Conventionally, diamond tools have been used in which sintered diamond or single-crystal diamond is attached to the surface of a base material made of cemented carbide or highly hard fully curved material by brazing or the like.

On the other hand, in recent years, research has been conducted on the production method of depositing and forming a diamond film on the surface of a base material made of cemented carbide or high-hardness metal using vapor phase diamond synthesis technology such as CVD or PVD. Attempts have been made to apply the resulting diamond-coated members to the above-mentioned uses.

By the way, since diamond is the hardest substance, the diamond film formed on the surface of a base material such as cemented carbide is
It is thought that it can be effectively used as a coating material or a protective film to impart high hardness and wear resistance to the base material.

For example, if a diamond film is formed on the surface of a cemented carbide base material used for carbide tools such as cutting tools and polishing tools, even better carbide tools can be obtained.

However, the surface of the cemented carbide and the diamond film are
In general, the adhesion is poor, and it has not been possible to obtain a tool that can be used in practice.

Therefore, in order to improve the adhesion between the surface of the cemented carbide and the diamond film, a technique has been proposed in which an intermediate layer is formed between the surfaces of the cemented carbide and the diamond film.

For example, in Jikai IV (No. 5B-126972), an intermediate layer made of one or more selected from carbides, nitrides, borides, and oxides of Na, Va, and VTa group metals is first formed on the surface of a cemented carbide. A diamond film-coated cemented carbide is disclosed in which a diamond film is formed on L of the intermediate layer.

However, the method described in such publications uses a step-by-step film formation method of forming an intermediate layer and forming a diamond film, which makes the manufacturing process complicated, and also makes it difficult to improve adhesion. -L, it is difficult to say that the adhesion between the cemented carbide and the diamond film has been sufficiently maintained to a practical level.

On the other hand, a technique has also been proposed for improving the adhesion between a base material made of cemented carbide or the like and a diamond layer without forming an intermediate layer.

For example, JP-A-63-100182 discloses a diamond film-coated cemented carbide made by forming a diamond film on a tungsten carbide-based cemented carbide that contains a specific amount of Co and is made of tungsten carbide with a specific grain size. Are listed.

However, even in this publication, it cannot be said that the adhesion between the cemented carbide and the diamond film is at a sufficiently practical level.

In particular, when the amount of Co added increases, the coefficient of thermal expansion increases, and due to the diffusion of carbon into Co, it becomes difficult to form a good diamond film, the adhesion decreases, and it becomes difficult to maintain sufficient durability. I can't get it.

In addition, in Japanese Patent Publication No. 60-59086, 5iffN
A cutting tool is disclosed in which the surface of a ceramic base material made of 4 and/or SiC is coated with a diamond film having a thickness of 0.5 to 50 mm.

However, its machinability is not sufficient.

The present invention has been made to improve the situation mentioned above.

The purpose of the present invention is to improve the adhesion between the carbide base material and the diamond film, so that it can be used as a highly durable cutting tool, a wear-resistant material, a wear-resistant member, etc. The object of the present invention is to provide a diamond-coated member that can be used and has a long life.

[Means for Solving the Problems] As a result of extensive research in order to solve the problems described above, the inventors of the present invention discovered that the surface of a sintered body made of tungsten carbide and a specific total bending compound as a base material. The present inventors have discovered that a diamond-coated member formed by forming a diamond film using a vapor phase synthesis method has significantly superior adhesion between the diamond film and the base material, and has completed the present invention based on this knowledge.

That is, the first invention of the present application provides a sintered body formed by a vapor phase synthesis method on the surface of a sintered body obtained from (A) i&tankium chloride and (B) at least one type of carbide or nitride of silicon or boron. There is a diamond-coated member characterized by having a large number of diamonds.
t) at least one carbide or nitride of silicon or boron; (C) periodic table Ia, II aHa, IV
A vapor phase is applied to the surface of a sintered body obtained from at least one of carbides, oxides, nitrides, carbonitrides, carbonates, borides, or organic compounds of group a, Va, mb, IVb metals or rare earth elements. This is a diamond-coated member characterized by having a diamond film formed by a synthetic method.

In conventional cemented carbide with a diamond film, the reason why the adhesion between the cemented carbide and the diamond film is reduced is thought to be due to the presence of residual stress between them.

On the other hand, the reason why the diamond coated member of the present invention has excellent adhesion between the diamond film and the sintered body that is its base material is because it uses a sintered ceramic base material made of specific components. it is conceivable that.

In other words, carbide composite metal compound sintered bodies obtained by sintering tungsten carbide and carbides and nitrides of specific metals, or carbides, nitrides, oxides, carbonates, and carbonitrides of specific metals. This is probably because a carbide-based composite metal compound sintered body obtained by sintering a compound, a boride, or an organic compound is used.

The mechanism of why adhesion and durability with the diamond film are significantly improved by using a sintered body with a specific component as a base material is not necessarily clear at this stage, but the main reason is For example, the following may be considered.

That is, when a diamond film is formed on the surface of the sintered body by vapor phase synthesis, the diamond film is made of carbides newly generated on the surface of the sintered body and metal carbides existing near the surface of Y/Meso. Alternatively, it is lengthened so that it has a phase structure that is almost continuous with the carbide composition, etc.

Furthermore, since the sintered body is a composite sintered body made of two or more types of metal compounds, there are minute irregularities or surface pores on the surface, and the diamond film is formed by the fine diamond particles biting into the surface pores. It is formed. As a result, the sintered body bonds more firmly to the diamond film than conventional cemented carbide.

Moreover, the sintered body used as the base material in the present invention is Co, N
Since it is a ceramic cemented carbide that does not contain single metals or alloys such as i, Fe, etc., it has a smaller thermal expansion coefficient than conventional tungsten carbide-〇〇-based cemented carbide, and has sufficient residual thermal shrinkage stress. It becomes smaller and no carbon diffusion occurs.

Therefore, it is believed that in the present invention, a diamond film of high quality is formed on the surface of the base material, and the diamond film is not easily peeled off from the base material and is stably maintained.

The sintered body used in the present invention belongs to carbide-based cemented carbide (CE+ented carbide), and like conventional cemented carbide, it itself has high hardness and wear resistance. However, the diamond-coated member of the present invention has even higher hardness and wear resistance because a vapor-phase synthesized diamond film is firmly formed on the surface of the sintered body, which is such a superhard material. It is a cemented carbide member or material that has excellent surface properties such as, and has excellent durability.

The present invention will be explained in more detail below.

In feature II of claims 1 and 2 of the present application, the sintered body used as the base material of the diamond film may be one that has already been formed as a member such as a cemented carbide tool or a wear-resistant member, and may partially It may be molded, or it may not be molded into a specific shape.

That is, the shape is not particularly limited and may be any shape.

In the invention of claims 1 and 2 of the present application, the sintered body is used as a base material for a diamond film formed by a vapor phase synthesis method.

There are no particular restrictions on the method for producing the sintered body, but it can usually be produced suitably in the following manner.

The sintered body in the invention of claim 1 of the present application is obtained by sintering tungsten carbide [component (A)] and at least one kind of carbide or nitride of silicon or boron [component (B)] as raw materials. You can get something by doing this.

Note that the obtained sintered body can be processed into a desired shape if necessary.

The sintered body in the invention of claim 2 of the present application is the above-mentioned (A) 6
minutes and the above CB) components and the periodic table Ia, Ila, ma, I
Using at least one type of carbide, oxide, nitride, carbonitride, carbonate, boride or organic compound [component (C)] of Va, Va, mb, IVb group metal or rare earth element as a raw material, It can be obtained by sintering.

In this case as well, the obtained sintered body can be processed into a desired shape, if necessary.

In the inventions of claims 1 and 2 of the present application, as the tungsten carbide used as the component (A), those used in conventional cemented carbide tools etc. can be used. However, X represents a positive real number other than 1. Normally, this X is a number larger than 1 or smaller than 1). It can be used to list elements, bonds, substitutions, or intrusions. Among these, WC is usually particularly preferably used.

Note that these may be used singly, in combination of two or more, or as a mixture, solid solution, composition, etc. of two or more.

The carbide or nitride of silicon or boron as the component (11) in claims 1 and 2 of the present application includes, for example, silicon carbide such as SiC, silicon nitride such as 5izN4, boron carbide such as B, C, etc. I can list many things. Among these, silicon carbide, silicon nitride, and boron carbide are preferable, especially 5iC
2SiYN, , B, C, etc. are preferable.

In addition, these may be used alone, two or more types may be used in combination, or two or more types may be used as a mixture, solid solution, composition, etc.

Periodic table Ia, IIa, ma, ■a, Va, mb, ■ used as the (C) component in the invention of claim 2 of the present application
Preferred specific examples of carbides, oxides, nitrides, carbonitrides, carbonates, borides or organic compounds of Group B metals, stacked group elements include, for example, Lit Coz, Nag Co
Carbonates of group Ia metals of the periodic table such as z, KCOi, etc. 1MgC
0z, carbonates of Ua group metals of the periodic table such as CaC01, M
Oxides of group IIa metals of the periodic table such as gO, oxides of metals of group ■a of the periodic table such as Y2O3, metal oxides of group IVaVa of the periodic table such as ZrO□, TiO2, IVaVa of the periodic table such as TiC, etc.
group metallization, metallization of group VaVa of the periodic table such as TiN and ZrN, carbide of group Va of the periodic table metal such as NbC and TaC, oxide of metal of group mb of the periodic table such as 203, A! LN
Nitride of periodic table group MB metal such as, periodic table I such as 5iOz
Vb group gold flexure compound, The, , Cet O3, Cen
2. Oxides of rare earth elements such as Erz 03, Dy203, Lax 0.3, carbonitrides such as Mg(CN)z, T1CN, borides of rare earth elements such as YBa, LaBg, Mg, A, Si, Examples include alkoxide compounds and alkyl compounds of S, Y, and lanthanide-based elements.

Among these, the periodic table II a, II [
carbides, oxides, or nitrides of group a, IVa, or mb metals, particularly preferred are Mg, Y, B, AM
, Ti, or Zr carbide, oxide, or nitride, more preferably YtOz, AntO-
1, Zrot, M gO and TiN.

Incidentally, these may be used alone, two or more of them may be used in combination, or two or more may be used as a mixture, solid solution, composition, etc.

Further, the various compounds described above are not limited to pure ones, and may contain impurities within a range that does not interfere with the purpose of the present invention.

For example, the carbide such as WC may contain a trace amount of excess carbon, excess metal, oxide, etc., and the SiC may contain a small amount of TiC etc. In the invention, the ratio of component (A) and component (Il) used in the sintered body is as follows:
When the total of (8) component and (II) * is 100%), (13) component is usually 1 to 9
0% by weight, preferably 2 to 80% by weight, more preferably 3% by weight
It is within the range of ~70% heavy pickling.

If the proportion of this (R) component is less than 1% by weight, the sinterability and strength of the sintered body will be insufficient;
If it exceeds this, the hardness of the sintered body may not be sufficient.

In the invention of claim 2 of the present application, used in the sintered body
(C) The ratio of the components is (A) L&, min and (B
When the total of component ) and component (C) is 100% by weight, component (C) is usually 0.2 to 20% by weight, preferably 0.3 to 15% by weight, more preferably 0.5 to 15% by weight. 10
It is appropriate to keep it within the range of %.

By keeping the proportion of this component (C) within the above range, it is possible to have the effect of stabilizing the properties such as sinterability and strength, and to further improve the adhesion of the diamond film. .

In addition, 1. of this (C) component. If the amount exceeds 20% by weight, the hardness of the sintered body and thus of the diamond-coated member may not be as high as 1 minute.

The sintered body according to the invention of claims 1 and 2 of the present application can be used in the production of known carbide-based sintered cemented carbide materials, especially tungsten carbide-based sintered bodies, except that the predetermined components are used as raw materials. It can be manufactured using various methods.

That is, the +i7 sintered body is obtained by pulverizing each of the above-mentioned predetermined raw materials to an appropriate particle size as necessary, and then combining the predetermined -1,1,
If necessary, add an auxiliary binder [e.g., a substance whose main component is ethylene glycol, EVA (ethylene-vinyl acrylate), polyethylene methacrylate, adamantane, etc.], mix, press-form, and assemble as necessary. If necessary, it can be obtained by pre-sintering, then sintering, and processing if necessary.

In any case, each of the above-mentioned components used for this sintering can be used in the form of powder, fine powder, ultrafine particles, whiskers, or various other shapes, and the average particle size. Usually, fine particles or ultrafine particles of about 0.05 to 4.0 μm, preferably about 0.05 to 2.0 μm, whisker-like particles with an aspect ratio of about 20 to 200, etc. are preferably used. I have something to do.

The finer the particles of each of these components, the lower the strength of the sintered member, and those with an average particle size of less than 0.05 may be disadvantageous in terms of manufacturing method and cost.

The sintering temperature is usually 1.60 (1 to 2,200
The temperature is preferably within the range of 1,600 to 00°C.

The sintering time is usually 12 hours or more, preferably
It is appropriate to keep it within the range of about 12 to 24 hours.

According to the present invention, it is possible to obtain a sintered body to be used as a material as described above.

This sintered body can be obtained by shaping it into a desired shape during the sintering, or alternatively, after the sintering, it can be processed into a desired shape as necessary. It can be used as a base material for diamond-coated parts.

+ Ui The above-mentioned components constituting the sintered body may be in the form of a fine grain structure, a composite metal compound, a coarse grain structure, or a mixture thereof, as seen in ordinary sintered bodies. It is preferable that the material has a shape mainly consisting of a fine grain structure and a composite metal compound.

The diamond-coated member of the present invention is provided at 9J of the sintered body.
Tiases 1 to 1j are formed on the surface of the resin by vapor phase synthesis method. Moreover, this diamond film can be efficiently and easily formed to a uniform thickness.

By the way, even when vapor phase synthesis is applied to conventional WC-based cemented carbide substrates, the plasma does not concentrate uniformly and the thickness of the diamond film tends to be uneven. Made of ceramics),! When applying the vapor phase synthesis method to the 5 materials, there is a problem that the diamond film formation rate is slow.

In the diamond-coated member of the present invention, the thickness of the diamond film is strictly defined due to the difficulty in determining a clear interface between the diamond film and the sintered body as described in 4. If it is not possible to do so, it is appropriate to make the size usually about 0.1 to 100 m, preferably about 0.2 to 30 m.

If this diamond film is too thin, it may not be possible to sufficiently cover the surface of the sintered body.On the other hand, if the diamond film is too thick, the diamond film may be separated from the sintered body. .

In the present invention, when simply referring to diamond, it includes not only diamond but also diamond that partially contains diamond-like carbon and diamond-like carbon.

As the carbon source gas used in forming the diamond film, various commonly used carbon source gases can be used.

Examples of this carbon source gas include paraffinic hydrocarbons such as methaneethane, propane, and methane; ethylene;
Olefin hydrocarbons such as propylene and phthylene; Acetylene hydrocarbons such as acetylene and arylene; Diolefin hydrocarbons such as butadiene and allene; Alicyclic hydrocarbons such as cyclopropane, cyclomethane, cyclopentane, and cyclohexane; cyclobutane; Aromatic hydrocarbons such as Zhen, benzene, toluene, xylene, and naphthalene; ketones such as acetone, diethyl ketone, and benzophenone:
Alcohols such as methanol and ethanol: Other oxygen-containing hydrocarbons, amines such as 1-limethylamine and triethylamine: Other nitrogen-containing hydrocarbons, carbon dioxide gas, -carbon oxide carbon peroxide, and not alone Gasoline, etc., are Class 4 and Class 1 hazardous materials under the Fire Service Act, Class 2 petroleum, such as kerosene, turpentine, and turmeric oil, and Class 3, heavy oil, etc.
Petroleum oils, gear oil, cylinder oil, and other tertiary petroleum oils may also be used. It is also possible to use a mixture of the various carbon compounds mentioned above.

Among these, preferred are paraffinic hydrocarbons such as methane, ethane, and propane; alcohols such as ethanol and methanol; ketones such as acetone and benzophenone; amines such as trimethylamine and triethylamine; Carbon or a mixture thereof, particularly carbon oxide as a main component, is preferred.

In addition, these include active gases such as hydrogen, helium, and argon. It may be used in combination with an inert gas such as neon, xenon, or nitrogen.

When containing methane gas (CI+, ), it is preferable that the content of methane gas is less than 5 mol%.

Particularly preferred is -carbon oxide, -carbon oxide is 1 to 8 (
) When a diamond film is formed using a raw material gas with a high concentration of mol%, the reaction does not stop at the surface of the sintered body, but proceeds deeper, that is, in the surface layer where compounds such as carbides are present. This is because the adhesion between the sintered body and the diamond film can be further improved.

Moreover, when carbon monoxide is used as a suitable carbon source gas, it is preferable to combine carbon oxide and hydrogen gas. - The growth rate of the diamond film is faster with a raw material gas that is a combination of carbon oxide and hydrogen gas (for example, under the same conditions, it is 2 to 10 times faster than with a raw material gas that is a combination of methane and hydrogen gas). (The growth rate of a diamond thin film may be affected.)

! ) η - There are no particular restrictions on the carbon oxide; for example, sufficiently purified generator gas or water gas obtained by the hot reaction of coal, coke, etc. with air or this method gas can be used. .

The hydrogen gas is not particularly limited, and may be used, for example, in the gasification of petroleum, the transformation of natural gas, water gas, etc., the electrolysis of water,
It is possible to use sufficiently refined iron and ice obtained by reaction with air, complete gasification of coal, etc.

When using a mixed gas of hydrogen gas and carbon monoxide as a raw material gas, -the content of carbon oxide gas is usually 1 to 80
The raw material gas is prepared at a ratio of mol%, preferably 1 to 60 mol%, more preferably 2 to 60 mol%.

If the content of carbon monoxide gas in the mixed gas is less than 1 mol%, it may not be possible to obtain a sufficient diamond film velocity.On the other hand, if the carbon monoxide gas content is less than 80 mol% If it exceeds this, the purity of the diamond component in the deposited diamond film may decrease.

The source gas or the raw material gas containing it in the above) is
In an activated (excited) state, the diamond film is brought into contact and reacted with a predetermined surface of the sintered body, usually by flowing it together with a suitable carrier gas, to form a diamond film with desired properties.

As this carrier gas, the above-mentioned inert gases, if necessary, reactive gases such as hydrogen, or mixed gases thereof can be used. Additionally, this carrier gas may contain additive gases such as water inlet and oxygen, if desired.

In the present invention, the diamond film is formed by a known method, such as a CVD method, a PVD method, a PCVD method,
Alternatively, a combination of these can be achieved by using various tire mont film vapor phase synthesis methods.

Among these, 1. Normally, various thermal filament methods (thermal CVD methods) including EACVD methods, various direct current plasma CVD methods including mature plasma methods, various high frequency plasma CVD methods including thermal plasma methods, and ECR method. Alternatively, a microwave plasma CVD method including a right magnetic field method may be preferably used.

There are no particular restrictions on the reaction conditions for forming the diamond film, and reaction conditions commonly used in each of the vapor phase synthesis methods described in CTI can be applied.

For example, one reaction pressure is usually IO-6~+03To
rr, preferably within the range of 10-' to 10:ITorr. This reaction pressure is 1O-6
If it is lower than Torr, the formation rate of the diamond thin film may be slowed down. On the other hand, even if it is made higher than 10' Torr, no corresponding effect will be achieved.

The reaction temperature (the surface temperature of the sintered body described in iii. ZOO0C1 is preferably within the range of 500 to 1,100°C. If this temperature is lower than 300°C, the formation of a crystalline diamond film may be insufficient, while if it exceeds 1,200°C, the formed diamond film is likely to be etched.

The reaction time is preferably set appropriately depending on the formation rate of the Tiresen l-film so that the desired thickness of the diamond film is obtained.

As described above, the Yasen 1-Ya member of the present invention can be manufactured.

As mentioned above, the diamond-coated member of the present invention has significantly superior adhesion to the sintered body, especially diamond 11, compared to conventional diamond (thin) film-coated cemented carbide. .

You want book 3? ! Ming's diamond-coated parts are suitable for cutting tools such as hides and trills, polishing tools, dies, wire drawing dies, cutters, end mills, taps, gauges, bonding tools such as spatulas 1 to 1, and wear-resistant tools. , can be suitably used as mechanical parts, etc.

[Example] (Example 1) As a raw material for the sintered body, WC94 with a particle size of 1.2 μm was used
A mixture of 5iC5 tonnage% with particle size 0.6 m and ZrO, 1 weight h1% with particle size 0.5 gm was HIPed (Hot isostatic pressure sintering: pressurizing force 2,000 kg/cm2, pressurizing time Sintered for 24 hours at processing temperature 1.8110'C) JIS
A sintered body specified in the 5PGN 422 standard was manufactured.

This sintered body was used as a base material, and tire sensors 1 to shins having a thickness of about 2 m were formed on the surface thereof by a known microwave plasma CVD method under the following conditions.

Frequency e: 2.45 GHz Output 400 W Base material temperature: 900°C Time: 1 hour Pressure: 40 Torr Raw material mixed gas (CO7% by volume).

CO style i7 secm, H2W rate 93 sccm
Next, the thus obtained diamond-coated member was used as a cemented carbide tool to cut an aluminum alloy containing 8% Sl under the following conditions.

Work material: Cutting speed: Cutting time: Sending: Notch.

Additive I liquid Nialuminum alloy (AC4C-76) 800 m/sin; to sin; 0.1 am/rev; 0.25 am; water-based emulsion oil It was confirmed that the covering member had no wear on either the rake face or the flank face.

(Examples 2 to 6) [WC/5iC(
8% by weight of SiC powder, 2% by weight of SiC whiskers)],
[WC/S i, N, (In nail amount%) Ko, [
WC/84 C (10% by weight), [WC/
S i *Ni (5 weight%) / Y, , O, (2 weight %) and [WC/5iC (5 weight %) / T
A diamond-coated member was manufactured in the same manner as in Example 1, except that 1N (3-claw needle %)] was used, and a cutting test was conducted.

As a result, it was confirmed that there was no wear on the flanks or flanks of any of the diamond-coated members within the cutting time of 10 minutes.

(Examples 7 to I3, Comparative Examples 1 to 2) Sintered bodies were produced in the same manner as in Example 1, except that a mixture having the composition shown in Table 1 was used as the raw material for the sintered body.

Next, using this sintered body as a base material, the surface was coated with a thickness of about 12 mm by a known microwave plasma CVD method under the following conditions.
A gm diamond film was formed.

Frequency: 2.45 GHz Output: 400W Base material temperature: 1000 °C Time ° 5 hours Pressure: 400 Torr Raw material mixed gas (CO15% by volume): COD amount 15 sccm, H2M + Cl85 Next,
Using the thus obtained diamond-covered YQ member as a carbide mill, an aluminum alloy containing 12% by weight of Si was cut under the following conditions.

Work material Aluminum alloy (AC8A-76) Cutting speed: 50fl l/min; feed rate
0.1 mm/rev; Cutting depth: 0.25 ll1m; Diamond 11 from the above diamond-coated member is 2
The time required for milling (cutting time) was measured and the results are shown in Table 1.

In addition, in the diamond-coated YQ members of each example, the cutting edge was difficult to weld even when the diamond film was separated by 2q.

(Hereinafter, blank space) [Effects of the Invention] According to the present invention, since a sintered body made of specific components is used as a base material for coating a diamond film, the adhesion between the sintered body and the diamond film is significantly improved. 4. To provide a long-life diamond-coated member that can be used in cutting tools, carbide tools, wear-resistant tools, etc., and exhibits high strength and durability. .

! r-Continued Amendment Patent Applicant Idemitsu Petrochemical Co., Ltd. March 14, 1990,...? 'Mr. Commissioner of the Patent Office
1.11 Display of 73 items 1999 Special Patent Application No. 315935 2 Name of the invention Diamond-coated member 3 Person making the amendment Relationship to Js Patent applicant Address Chiyo, Tokyo [1 Shiratama-chome, Maru, H-ku] 1 Name: Idemitsu Petrochemical Co., Ltd. Representative: Mutsumi Mizugo 4 Agent address: 6th floor, 7th floor, Hinase Hill, 7-18-20 Nishi-Shinjuku, Shinjuku-ku, Tokyo Contents of amendment (1) Stated on page 13, line 6 of the statement・11 “
LiCo3. Naz CO: l l J as “Li2
Corrected to C0:l, Naz CO3,J.

(2) “More than 12 hours, preferably 12
~24 hours'' to [0.5 hours or more, preferably 0.5 hours
~24 hours”.

(3) [4] stated on page 29, line 8 of the specification-)
Correct 00T orr J to r 40T orr J.

(4) Table 1 described on page 3 of the specification shall be replaced with Table 1 of the attached sheet.

that's all

Claims (2)

[Claims] (1) A diamond film formed by a vapor phase synthesis method is provided on the surface of a sintered body obtained from (A) carbide tank tin and (B) at least one type of carbide or nitride of silicon or boron. diamond-coated parts. (2) (A) tungsten carbide; (B) at least one carbide or nitride of silicon or boron; and (C)
Periodic Table I a, IIa, IIIa, IVa, Va, IIIb, IVb
Diamond formed by vapor phase synthesis on the surface of a sintered body obtained from at least one of carbides, oxides, nitrides, carbonitrides, carbonates, borides, or organic compounds of group metals or rare earth elements. A diamond-coated member characterized by having a film.