JPH0225424B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to heating and closing of a vapor deposition apparatus for vapor depositing metal vapor onto a substrate.

[Prior art]

The first crucible used in conventional vapor deposition equipment
The figure shows. In the figure, 1 is a crucible, 2 is a metal,
3 is a plurality of small holes, 4 is a metal vapor, 5 is a filament, 6 is a power source, 7 is a power source, 8 is a grid, 9 is a filament, 10 is a power source, 11 is a power source, 12 is an accelerating electrode, 13 is a substrate, 14 1 is a deposited film, 15 is a power source, 16 is a shield plate, and 17 is a vacuum container.

Next, the operation will be explained. In FIG. 1, the filament 5 is heated by a power source 6, and the crucible 1, which is bombarded with electrons, is heated by the voltage applied by a power source 7. The metal 2 in the crucible 1 evaporates and is injected into the vacuum through the small hole 3. The injected metal vapor 4 is ionized by collision with electrons by the filament 9, power source 10, and grid 8. The metal vapor 4 is accelerated by the accelerating electrode 12 and the power source 15, and impinges on the substrate 13 for vapor deposition. A membrane 14 is made. At this time, the crucible 1 becomes high in temperature and radiant heat is released to the surroundings.

For this reason, shield plates 16 for reflecting radiant heat are arranged on the side and bottom of the outer periphery of the crucible 1, and the accelerating electrode 12 is also used as a heat shield plate on the upper part. However, since the accelerating electrode 12 is located at a distance from the crucible 1, the opening through which the metal vapor 4 spreads is made large. Crucible for this purpose 1
Since the radiant heat from the injection surface reaches the substrate 13 through the opening and heats it, it is necessary to cool the substrate 13.

[Embodiments of the invention]

In order to eliminate the above-mentioned drawbacks, the present invention provides a heat insulating material with elongated rectangular holes as shown in FIG. is attached to the top surface to prevent radiant heat from directly reaching the board, reducing the thermal effect on the board.

In FIG. 2, 21 is a heat insulating material, and 22 is an elongated rectangular hole provided in the heat insulating material 21. In FIG. Others are the same as before.

The metal vapor ejected from the small hole 3 of the crucible 1 passes through the small hole 22, but the area of this hole is small and most of the radiant heat from the crucible 1 is shielded.

FIG. 4 shows another embodiment, in which the heat insulating material 23
The opening is formed by a plurality of conical holes 24 arranged in a bird's-leg shape and widening toward the top surface.
This allows the distance between the small holes of the crucible to be increased, making drilling easier. Furthermore, cracks due to thermal stress during vapor deposition are also reduced. In addition, hole 2
4 may be a cylindrical hole instead of a conical hole.

〔Effect of the invention〕

According to this invention, since most of the radiant heat from the crucible is blocked by the heat insulating material, the amount of heat reaching the substrate is extremely small, so that the influence of heat on the substrate can be reduced.

[Brief explanation of drawings]

Fig. 1 is a block diagram showing a conventional thin film forming apparatus, Fig. 2 is a block diagram showing an embodiment of the present invention, Fig. 3 is a perspective view showing the main parts of Fig. 2, and Fig. 4 is a block diagram showing the present invention. FIG. 3 is a perspective view showing another embodiment of the invention. In the figure, 1 is a crucible, 12 is an accelerating electrode, 1
3 is a substrate, 21 is a heat insulating material, and 22 is a hole. Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

[Claims] 1. Melting metal in a crucible at high temperature in a vacuum, injecting the vapor of the molten metal in the crucible into the vacuum through a plurality of small holes to ionize the ionized metal vapor. The crucible is further accelerated to collide with the substrate to form a thin film on the substrate, and the upper surface of the crucible is covered with a heat insulating material having an opening, and the small hole is communicated with the opening of the heat insulating material. A thin film forming apparatus characterized in that the thin film is arranged in an array. 2. The thin film forming apparatus according to claim 1, wherein the opening of the heat insulating material is rectangular and has a plurality of crucible small holes arranged therein. 3. The thin film forming apparatus according to claim 1, wherein the openings of the heat insulating material are arranged in a bird's-leg shape.