JPH0212613U

JPH0212613U -

Info

Publication number: JPH0212613U
Application number: JP8955988U
Authority: JP
Priority date: 1988-07-06
Filing date: 1988-07-06
Publication date: 1990-01-26

Description

[Brief explanation of the drawing]

第１図ないし第７図はこの考案の三次元測定機
の一実施例を示す図で、第１図は同三次元測定機
のブロツク図、第２図は補正手段での補正処理手
順を示すフローチヤート、第３図は移動方向処理
手段での処理手順を示すフローチヤート、第４図
は同三次元測定機の平面図、第５図は第４図の左
側面図、第６図は第５図の―線に沿う断面図
、第７図は同三次元測定機の動きを示す概略平面
図、第８図および第９図は従来の三次元測定機を
示す図で、第８図は三次元測定機の平面図、第９
図は第８図の左側面図である。３１……Ｘ軸方向ガイド部材、３２……Ｙ軸方
向ガイド部材、３３……Ｚ軸方向ガイド部材、３
４……Ｚ軸方向スライド部材、３５……測定セン
サ、３５ａ……接触子、４１……Ｘ軸用モータ（
駆動装置）、４２……Ｘ軸位置検出器（Ｘ軸移動
位置検出手段）、５０……Ｙ軸用モータ（駆動装
置）、５１……Ｙ軸位置検出器（Ｙ軸移動位置検
出手段）、５８……移動方向検知手段、５９……
補正手段、６０……演算手段。 Figures 1 to 7 are diagrams showing an embodiment of the three-dimensional measuring machine of this invention. Figure 1 is a block diagram of the same three-dimensional measuring machine, and Figure 2 shows the correction processing procedure by the correction means. Flowchart, FIG. 3 is a flowchart showing the processing procedure by the movement direction processing means, FIG. 4 is a plan view of the same three-dimensional measuring machine, FIG. 5 is a left side view of FIG. 4, and FIG. Figure 5 is a cross-sectional view taken along the line -, Figure 7 is a schematic plan view showing the movement of the same three-dimensional measuring machine, Figures 8 and 9 are diagrams showing conventional three-dimensional measuring machines, and Figure 8 is a diagram showing the movement of the three-dimensional measuring machine. Plan view of coordinate measuring machine, No. 9
The figure is a left side view of FIG. 31...X-axis direction guide member, 32...Y-axis direction guide member, 33...Z-axis direction guide member, 3
4... Z-axis sliding member, 35... measurement sensor, 35a... contact, 41... X-axis motor (
42...X-axis position detector (X-axis movement position detection means), 50...Y-axis motor (drive device), 51...Y-axis position detector (Y-axis movement position detection means), 58...Movement direction detection means, 59...
Correction means, 60... Calculation means.

Claims

[Claims for Utility Model Registration] A pair of parallel
An axial guide member is disposed in one direction (X-axis direction), and a Y-axis guide member is installed above both of the X-axis guide members so as to be movable in parallel in the X-axis direction,
A Z-axis direction guide member is slidably disposed along the extension direction (Y-axis direction) on the Y-axis direction guide member, and a Z-axis direction guide member is slidably disposed on the Z-axis direction guide member in the vertical direction (Z-axis direction). An axial slide member is provided, a measurement sensor is provided at the lower end of the Z-axis slide member for contacting the surface of the object to be measured to measure the surface shape, and the Y-axis guide member is further provided with a measurement sensor for measuring the surface shape of the object to be measured. direction, the Z-axis direction guide members are each driven in the Y-axis direction by a drive device, the measurement sensor is slid on the object to be measured, and one of the pair of X-axis direction guide members is used as a reference. , the moving distance in the X-axis direction of the Y-axis direction guide member in the X-axis direction guide member on the reference side is detected by the X-axis movement position detection means, and the Y-axis direction of the Z-axis direction guide member from the reference side is detected. The distance of movement in the direction is detected by the Y-axis movement position detection means, the distance of unevenness of the surface of the object to be measured in the Z-axis direction is detected by the measurement sensor, and the distance of movement in the X-axis and Y-axis directions,
The three-dimensional measuring machine detects the surface shape of the object to be measured by processing the unevenness distance by a calculation means, further comprising a moving direction detection means for detecting a moving direction of the Y-axis direction guide member in the X-axis direction. is provided, detects each inclination angle with respect to the X-axis guide member when the Y-axis guide member advances or retreats in the X-axis direction, and multiplies the inclination angle with respect to the moving direction by the Y-axis direction movement distance to determine the A correction means is provided for calculating an axis correction distance and adding the X-axis correction distance and the X-axis movement distance to calculate an actual X-axis movement distance, and the actual X-axis movement distance is calculated by the calculation. A three-dimensional measuring machine characterized by inputting information into a means.