JPH01274450A - Semiconductor integrated circuit - Google Patents
Semiconductor integrated circuitInfo
- Publication number
- JPH01274450A JPH01274450A JP63104739A JP10473988A JPH01274450A JP H01274450 A JPH01274450 A JP H01274450A JP 63104739 A JP63104739 A JP 63104739A JP 10473988 A JP10473988 A JP 10473988A JP H01274450 A JPH01274450 A JP H01274450A
- Authority
- JP
- Japan
- Prior art keywords
- diffusion layer
- substrate potential
- type diffused
- layer forming
- type diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 8
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000009792 diffusion process Methods 0.000 claims description 36
- 230000015572 biosynthetic process Effects 0.000 claims description 20
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 3
- 238000005452 bending Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、半導体集積回路に関し、特に電源線より基板
電位用コンタクトへの電位供給に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor integrated circuit, and particularly to supplying a potential from a power supply line to a contact for substrate potential.
第2図に従来例の平面図を示す、所定の配線ピッチ上に
P型拡散層形成領域21.22及び、N型拡散層形成領
域23.24の上にそれぞれ2本の多結晶シリコンから
なるゲートチャンネル25を設け、P型拡散層形成領域
21.22の間にはN型拡散層2A、N型拡散層形成領
域23.24の間にはP型拡散層2Bで囲みP型拡散層
形成領域21.22の中心を横切る電源線28と交差す
る部分にコンタクト27を置くことでP型拡散層形成領
域21.22の基板電位を供給し、Nを拡散層形成領域
23.24の中心を横切る電源線29とP型拡散層2B
と交差する部分にコンタクト26を置くことでN型拡散
層形成領域23゜24の基板電位を供給し0MO3型ト
ランジスタを構成していた。図には2つのCMOS単位
セルを示しである。なおP型又はN型拡散層形成領域と
いう語句は、ゲートチャンネル直下を除きそれぞれP型
又はN型拡散層からなるソース・ドレイン領域が設けら
れている素子領域の一部を表わすのに用いた。FIG. 2 shows a plan view of a conventional example, which consists of two polycrystalline silicon layers each on a P-type diffusion layer formation region 21.22 and an N-type diffusion layer formation region 23.24 on a predetermined wiring pitch. A gate channel 25 is provided, and an N-type diffusion layer 2A is formed between the P-type diffusion layer formation regions 21 and 22, and a P-type diffusion layer 2B is surrounded between the N-type diffusion layer formation regions 23 and 24 to form a P-type diffusion layer. By placing a contact 27 at a portion intersecting the power supply line 28 that crosses the center of the region 21.22, the substrate potential of the P-type diffusion layer formation region 21.22 is supplied, and N is supplied to the center of the diffusion layer formation region 23.24. Crossing power supply line 29 and P type diffusion layer 2B
By placing a contact 26 at the intersection with the N-type diffusion layer formation regions 23 and 24, a substrate potential of the N-type diffusion layer forming regions 23 and 24 was supplied, thereby forming an 0MO3 type transistor. The figure shows two CMOS unit cells. Note that the term "P-type or N-type diffusion layer forming region" is used to represent a part of the device region in which a source/drain region made of a P-type or N-type diffusion layer is provided, except for the region immediately below the gate channel.
上述した従来の半導体集積回路は、各電源線28.29
がそれぞれP型拡散層形成領域21゜22N型拡散層形
成領域23.24を横切っているので、2つのP型拡散
層形成領域21.22の間に基板電位用のコンタクト2
7を置くだけのスペースと2つのN型拡散層形成領域2
3.24の間に基板電位用のコンタクト26を置くだけ
のスペースを確保する為にLSIチップ面積が大きくな
るという欠点があった。In the conventional semiconductor integrated circuit described above, each power supply line 28, 29
crosses the P-type diffusion layer formation regions 21 and 22 and the N-type diffusion layer formation regions 23 and 24, respectively, so that a contact 2 for substrate potential is formed between the two P-type diffusion layer formation regions 21 and 22.
7 and two N-type diffusion layer formation regions 2
There was a drawback that the area of the LSI chip became large in order to secure enough space to place the contact 26 for the substrate potential between 3.24 and 3.24.
本発明の半導体集積回路は、所定の拡散層形成領域上の
垂直方向及び水平方向にそれぞれ2本のゲートチャンネ
ル及び電源線を配置した基本セルを有する半導体集積回
路において、前記拡散層形成領域及び前記ゲートチャン
ネルは、前記電源線が横切る部分でそれぞれ内側に屈曲
して設けられ、前記拡散層形成領域の屈曲部近傍に基本
電位用のコンタクトが設けられているというものである
。The semiconductor integrated circuit of the present invention is a semiconductor integrated circuit having a basic cell in which two gate channels and a power supply line are arranged vertically and horizontally on a predetermined diffusion layer formation region. The gate channel is bent inward at each portion crossed by the power supply line, and a contact for a basic potential is provided near the bent portion of the diffusion layer forming region.
第1図は本発明の一実施例の平面図を示す。 FIG. 1 shows a plan view of an embodiment of the invention.
構造としてはP型拡散層形成領域11上及びN型拡散層
形成領域13上に内側に屈曲した多結晶シリコンからな
るゲートチャンネル15を2本有し、P型拡散層形成領
域11.N型拡散層形成領域13をそれぞれ横切る電源
線18.19において電源線18の下のP型拡散層形成
領域11の両端の屈曲部の近傍には基板電位用のN型拡
散層IAとコンタクト17、電源線19の下のN型拡散
層形成領域13の両端の屈曲部の近傍には基板電位用の
P拡散Jti71Bとコンタクト16を置くことでCM
O8型O8セルを構成している。ソース・ドレイン領域
が内側に屈曲しているので、基板電位用のコンタクトを
配置するスペースをとることができ、集荷上が構造する
。The structure has two gate channels 15 made of polycrystalline silicon bent inward over the P-type diffusion layer formation region 11 and the N-type diffusion layer formation region 13, and the P-type diffusion layer formation region 11. In the power supply lines 18 and 19 that cross the N-type diffusion layer formation region 13, an N-type diffusion layer IA for substrate potential and a contact 17 are located near the bends at both ends of the P-type diffusion layer formation region 11 below the power supply line 18. , by placing P diffusion Jti 71B and contacts 16 for substrate potential near the bends at both ends of the N-type diffusion layer forming region 13 under the power supply line 19, CM
It constitutes an O8 type O8 cell. Since the source/drain regions are bent inward, a space can be taken for arranging contacts for substrate potential, and a structure is formed on the collection surface.
なお、この実施例はCMO3構造を有しているが、単一
チャンネルMOSトランジスタでも同様である。Although this embodiment has a CMO3 structure, a single channel MOS transistor may also be used.
以上説明したように本発明は、単位セルの拡散領域を内
側に屈曲した形状にし基板電位用のコンタクトを置ける
スペースを形成する事で、従来のよりも単位セル寸法が
小さく形成できる為、同じLSI面積で集積度を上げる
ことができる。As explained above, in the present invention, by bending the diffusion region of the unit cell inward to form a space in which a contact for substrate potential can be placed, the size of the unit cell can be made smaller than that of the conventional method. The degree of integration can be increased by area.
第1図は本発明の第1の実施例の平面図、第2図は従来
側の平面図である。
11.12,21.22・・・P型拡散層形成領域、1
.3,14,23.24・・・N型拡散層、15゜25
・・・ゲートチャンネル、16.17,26.27・・
・コンタクト、18,19,28.29・・・電源線、
LA、2A・・・N型拡散層(基板電位用)、1.2.
2B・・・P型拡散層(基板電位用)。FIG. 1 is a plan view of the first embodiment of the present invention, and FIG. 2 is a plan view of the conventional side. 11.12, 21.22... P-type diffusion layer formation region, 1
.. 3,14,23.24...N type diffusion layer, 15°25
...Gate channel, 16.17, 26.27...
・Contact, 18, 19, 28.29...power line,
LA, 2A...N-type diffusion layer (for substrate potential), 1.2.
2B...P-type diffusion layer (for substrate potential).
Claims (1)
れぞれ2本のゲートチャンネル及び電源線を配置した基
本セルを有する半導体集積回路において、前記拡散層形
成領域及び前記ゲートチャンネルは、前記電源線が横切
る部分でそれぞれ内側に屈曲して設けられ、前記拡散層
形成領域の屈曲部近傍に基板電位用のコンタクトが設け
られていることを特徴とする半導体集積回路。In a semiconductor integrated circuit having a basic cell in which two gate channels and two power lines are arranged vertically and horizontally on a predetermined diffusion layer formation region, the diffusion layer formation region and the gate channel are arranged so that the power supply line is 1. A semiconductor integrated circuit, wherein the semiconductor integrated circuit is bent inward at each crossing portion thereof, and a contact for substrate potential is provided near the bent portion of the diffusion layer forming region.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63104739A JPH01274450A (en) | 1988-04-26 | 1988-04-26 | Semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63104739A JPH01274450A (en) | 1988-04-26 | 1988-04-26 | Semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01274450A true JPH01274450A (en) | 1989-11-02 |
Family
ID=14388868
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63104739A Pending JPH01274450A (en) | 1988-04-26 | 1988-04-26 | Semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01274450A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02272760A (en) * | 1989-04-14 | 1990-11-07 | Nec Corp | Mos transistor |
US5808346A (en) * | 1996-07-18 | 1998-09-15 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device structure which provides individually controllable body-terminal voltage of MOS transistors |
US6399972B1 (en) * | 2000-03-13 | 2002-06-04 | Oki Electric Industry Co., Ltd. | Cell based integrated circuit and unit cell architecture therefor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5858741A (en) * | 1981-10-05 | 1983-04-07 | Nec Corp | Integrated circuit device |
JPS5866342A (en) * | 1981-10-16 | 1983-04-20 | Hitachi Ltd | Semiconductor integrated circuit device |
-
1988
- 1988-04-26 JP JP63104739A patent/JPH01274450A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5858741A (en) * | 1981-10-05 | 1983-04-07 | Nec Corp | Integrated circuit device |
JPS5866342A (en) * | 1981-10-16 | 1983-04-20 | Hitachi Ltd | Semiconductor integrated circuit device |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02272760A (en) * | 1989-04-14 | 1990-11-07 | Nec Corp | Mos transistor |
US5808346A (en) * | 1996-07-18 | 1998-09-15 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device structure which provides individually controllable body-terminal voltage of MOS transistors |
US6399972B1 (en) * | 2000-03-13 | 2002-06-04 | Oki Electric Industry Co., Ltd. | Cell based integrated circuit and unit cell architecture therefor |
US6905931B2 (en) | 2000-03-13 | 2005-06-14 | Oki Electric Industry Co., Ltd. | Cell based integrated circuit and unit cell architecture therefor |
US7422945B2 (en) | 2000-03-13 | 2008-09-09 | Oki Electric Industry Co., Ltd. | Cell based integrated circuit and unit cell architecture therefor |
US7704837B2 (en) | 2000-03-13 | 2010-04-27 | Oki Semiconductor Co., Ltd. | Cell based integrated circuit and unit cell architecture therefor |
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