[go: up one dir, main page]

JPH01234106A - Ultrasonic vibration core drilling machine - Google Patents

Ultrasonic vibration core drilling machine

Info

Publication number
JPH01234106A
JPH01234106A JP5839188A JP5839188A JPH01234106A JP H01234106 A JPH01234106 A JP H01234106A JP 5839188 A JP5839188 A JP 5839188A JP 5839188 A JP5839188 A JP 5839188A JP H01234106 A JPH01234106 A JP H01234106A
Authority
JP
Japan
Prior art keywords
drill shaft
ultrasonic
drill
drilling machine
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5839188A
Other languages
Japanese (ja)
Inventor
Yasuaki Fukuda
福田 恭彬
Hisao Ifukuro
衣袋 久生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Mining and Cement Co Ltd
Original Assignee
Mitsubishi Mining and Cement Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Mining and Cement Co Ltd filed Critical Mitsubishi Mining and Cement Co Ltd
Priority to JP5839188A priority Critical patent/JPH01234106A/en
Publication of JPH01234106A publication Critical patent/JPH01234106A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/02Driving main working members
    • B23Q5/027Driving main working members reciprocating members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Drilling And Boring (AREA)

Abstract

PURPOSE:To increase machining efficiency and to enable high-accuracy machining by assembling a rotary driving portion in a drill shaft, numerically controlling the three-dimensional movement of a work mounting portion, and detecting and analyzing the ultrasonic vibrate ion wave from of the drill shaft to control thrust. CONSTITUTION:A drill shaft side assembly comprises a main body 4 and a frame 3 for holding the main body, and a work side assembly comprises a rodless cylinder for moving a work in the directions of X-axis, Y-axis and Z-axis, wherein a three- dimensional numerical controlling device is assembled. Ultrasonic longitudinal or torsional vibration is applied to a drill shaft 7 by an ultrasonic vibrator 6, the drill shaft 7 is rotated by a motor comprising a rotor 8 and a stator 9, and low-frequency hydraulic longitudinal vibration is applied from a hydraulic servo 16 to a double-acting hydraulic cylinder 12. Further, the drill shaft 7 is provided with an ultrasonic vibration waveform detecting device, and the detected waveform is analyzed by an arithmetic circuit to control the hydraulic servo 16 in such a manner as to make a difference with the optimum waveform zero, so that axial thrust is controlled. A thrust control device can have a function superimposed on the hydraulic cylinder 12 of a low-frequency vibrator to be served for a double purpose.

Description

【発明の詳細な説明】 〔産業上の利用分野J 本発明は、超音波振動コアドリルボール盤に関し、さら
に詳しくは、セラミックスの穿孔加工を高精度、高能率
で行うために用いるダイヤモンドコアドリルボール盤に
関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field J] The present invention relates to an ultrasonic vibrating core drill drilling machine, and more particularly to a diamond core drilling machine used for drilling holes in ceramics with high accuracy and high efficiency.

[従来の技術] セラミックスに穿孔加工を施す場合に、レーザや放電加
工などの高密度エネルギー加工方法を用いるとセラミッ
クスの加工部近傍に微細なりラックを生ずる問題がある
[Prior Art] When drilling holes in ceramics, if a high-density energy processing method such as laser or electric discharge machining is used, there is a problem in that minute racks are generated near the processed portion of the ceramics.

このような問題を避ける加工方法として超音波を用いる
加工法が知られている。
A processing method using ultrasonic waves is known as a processing method that avoids such problems.

一般に超音波を利用する穿孔技術は古くから研究され、
実公昭37−15693には超音波ねじり振動ボール盤
が開示されている。
Generally speaking, drilling technology using ultrasound has been researched for a long time.
Japanese Utility Model Publication No. 37-15693 discloses an ultrasonic torsional vibration drilling machine.

また、超音波を利用してセラミックスを加工する技術と
して特開昭54−59678、特開昭51−10129
4などが知られている。
In addition, as a technology for processing ceramics using ultrasonic waves, JP-A-54-59678 and JP-A-51-10129
4 etc. are known.

〔発明が解決しようとする課題1 超音波を利用してセラミックスを加工する従来のセラミ
ックス加工装置は、加工能率が低く生産性に劣る問題が
あり、また高密度エネルギー加工法に比べると加工部に
生ずるマイクロクラックなどの欠陥は著しく少ないが、
加工縁に生ずるチッピングは未だ皆無とは言えない。
[Problem to be solved by the invention 1 Conventional ceramic processing equipment that processes ceramics using ultrasonic waves has the problem of low processing efficiency and inferior productivity, and compared to high-density energy processing methods, the processing part is Although there are significantly fewer defects such as microcracks,
It cannot be said that there is no chipping that occurs at the processed edges.

本発明はセラミックスの加工に超音波を利用する従来の
加工装置にさらに改善を加え、加工効率を飛躍的に増大
させると共に、加工部にマイクロクラックや欠陥を生ず
ることがな(、精度の高い加工を可能とした超音波振動
ダイヤモンドコアドリルボール盤を提供することを目的
とするものである。
The present invention further improves the conventional processing equipment that uses ultrasonic waves to process ceramics, dramatically increases processing efficiency, and eliminates microcracks and defects in the processed part (high precision processing). The purpose of this invention is to provide an ultrasonic vibration diamond core drill drilling machine that enables.

超音波振動ダイヤモンドコアドリルボール盤は、ドリル
にダイヤモンドコアを用い、ドリル軸またはワーク取付
軸またはその両者に超音波振動を付与したボール盤であ
る。
An ultrasonic vibration diamond core drill drilling machine is a drilling machine that uses a diamond core in the drill and applies ultrasonic vibration to the drill shaft, the workpiece mounting shaft, or both.

[課題を解決するための手段] 本発明は上記問題を解決するために、ドリル軸の回転駆
動部をドリル軸と同軸にドリル内に組み込んだ従来の超
音波振動コアドリルボール盤に。
[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention provides a conventional ultrasonic vibrating core drill drilling machine in which a rotary drive unit for the drill shaft is incorporated into the drill coaxially with the drill shaft.

次の技術手段を講じたことを特徴とする。It is characterized by taking the following technical measures.

(a)ワーク取付部を三次元移動可能に構成し、これを
制御する三次元数値計算制御機構を組み込むこと。
(a) The workpiece mounting portion is configured to be movable in three dimensions, and a three-dimensional numerical calculation control mechanism is incorporated to control this.

(b)  ドリル軸および/またはワーク取付軸に超音
波振動の波形検出装置を設け、この検出装置の検出波形
に応じてドリル軸のスラストを調節する閉ループ制御ス
ラスト調節装置を備えたこと。
(b) An ultrasonic vibration waveform detection device is provided on the drill shaft and/or the workpiece mounting shaft, and a closed-loop control thrust adjustment device is provided that adjusts the thrust of the drill shaft in accordance with the detected waveform of the detection device.

(c)前記スラスト調節装置と低周波縦振動を付与する
サーボモータとを兼用にしたこと。
(c) The thrust adjustment device and a servo motor that applies low frequency longitudinal vibration are used together.

(d)前記波形検出装置とスラスト調節装置がボイスコ
イルで構成されていること。
(d) The waveform detection device and the thrust adjustment device are composed of voice coils.

なお、超音波振動の周波数は19〜30kt−1zであ
る。
Note that the frequency of the ultrasonic vibration is 19 to 30 kt-1z.

【作用J 本発明のボール盤は、従来の超音波振動を用いる穿孔装
置にさらに改善を施したもので、ドリル軸に回転駆動部
を組み込んだので、ドリル軸の中心振れを最小限にする
ことができると共に、ドリル軸の軽量化、構造の簡易化
および精度向上に寄与する。
[Function J] The drilling machine of the present invention is an improved version of the conventional drilling device that uses ultrasonic vibration, and has a rotary drive unit built into the drill shaft, making it possible to minimize the center runout of the drill shaft. This also contributes to reducing the weight of the drill shaft, simplifying the structure, and improving accuracy.

また、本発明のボール盤はワークの取付は部を三次元移
動可能に構成し、NG制御することによって、自動化加
工を行うことができ、−層の能率向上を図ることができ
る。
In addition, the drilling machine of the present invention is configured such that the mounting part of the workpiece can be moved three-dimensionally, and by controlling the workpiece by NG control, automated machining can be performed, and the efficiency of the -layer can be improved.

また、ドリル軸の超音波振動の波形を検出し、周波数分
析によって波形を解析し、この波形が予め設定した最適
波形に一致するようにドリル軸のスラストを調節するの
でチッピング等を生ずることなく最適な穿孔加工条件で
高能率の加工を行うことができるものである。
In addition, the waveform of the ultrasonic vibration of the drill shaft is detected, the waveform is analyzed by frequency analysis, and the thrust of the drill shaft is adjusted so that this waveform matches the preset optimal waveform, so it is optimal without causing chipping etc. It is possible to perform highly efficient drilling under suitable drilling conditions.

さらに、このスラスト調整装置を低周波縦振動を付与す
るサーボモータに兼用することによって、スラストのほ
かに低周波縦振動を付与することができ、加工性が向上
する。低周波としては50〜100Hzが適当である。
Furthermore, by using this thrust adjustment device as a servo motor that applies low frequency longitudinal vibration, it is possible to apply low frequency longitudinal vibration in addition to thrust, and workability is improved. A suitable low frequency is 50 to 100 Hz.

また一方、前記超音波波形検出装置とスラスト調節装置
をボイスコイルとすることができ、装置がコンパクトで
周波数範囲が広く高性能のものとなる。
On the other hand, the ultrasonic waveform detection device and the thrust adjustment device can be voice coils, and the device is compact and has a wide frequency range and high performance.

[実施例] 第2図(a)は本発明装置の実施例の全体を示す正面図
、第2図(b)はその側面図、第1図はその駆動側本体
の縦断面図である。
[Embodiment] FIG. 2(a) is a front view showing the entire embodiment of the apparatus of the present invention, FIG. 2(b) is a side view thereof, and FIG. 1 is a longitudinal sectional view of the drive side main body thereof.

実施例はダイヤモンドコアドリル2を備えたドリル軸側
アセンブリー1と、穿孔加工すべきセラミックスのワー
ク41を取り付けたワーク側アセンブリー40とから成
る。
The embodiment comprises a drill shaft assembly 1 with a diamond core drill 2 and a workpiece assembly 40 with a ceramic workpiece 41 to be drilled.

ドリル軸側アセンブリー1は本体4とこれを保持するフ
レーム3とから成っている。
The drill shaft assembly 1 consists of a main body 4 and a frame 3 that holds the main body 4.

ワーク側アセンブリー40はワーク41を取り付けるワ
ーク取付部と、ワーク41をx、y、z ’軸方向に移
動させるロッドレスシリンダ42および油圧シリンダ4
3を備え、油圧ユニット44を備えている。これらに三
次元NG装置を組み込むことにより、ワークの穿孔を自
動化することができる。
The workpiece side assembly 40 includes a workpiece mounting part to which a workpiece 41 is attached, a rodless cylinder 42 and a hydraulic cylinder 4 that move the workpiece 41 in the x, y, and z' axis directions.
3 and a hydraulic unit 44. By incorporating a three-dimensional NG device into these, drilling of the workpiece can be automated.

本体4は第1図に示すようにドリル軸7とドリル軸7を
回転自在に保持するケーシングlOとから成っている。
As shown in FIG. 1, the main body 4 consists of a drill shaft 7 and a casing 10 that rotatably holds the drill shaft 7.

ドリル軸7は先端にダイヤモンドコアドリル2を備え、
他端に超音波振動子6を備える。超音波振動子6はドリ
ル軸7に対して軸長手方向(縦)または軸回転方向(ね
じり)に超音波を付与する振動子の何れかを取り付ける
。超音波の周波数は19〜30KHzである。超音波振
動子6への電力はケーシングlO側に取り付けたスリッ
プリング20を介して供給される。
The drill shaft 7 is equipped with a diamond core drill 2 at its tip,
An ultrasonic transducer 6 is provided at the other end. The ultrasonic vibrator 6 is attached to the drill shaft 7 to either apply ultrasonic waves in the longitudinal direction (vertical) or in the rotational direction (torsion) of the shaft. The frequency of ultrasound is 19-30 KHz. Power to the ultrasonic transducer 6 is supplied via a slip ring 20 attached to the casing lO side.

またドリル軸7にはモータの回転子8を取り付けである
Further, a rotor 8 of a motor is attached to the drill shaft 7.

ケーシングlOは、アンギュラ−コンタクト球軸受け1
1を介してドリル軸7を保持すると共に、モータの固定
子9を内蔵し、かつドリル軸7に低周波振動を与える装
置として油圧シリンダ12およびピストン13を備えて
いる。ケーシングlOはボールスライドユニット141
3よび直線ガイドレール15を介してフレーム3内に前
後進自在に保持されている。
The casing lO is an angular contact ball bearing 1
A hydraulic cylinder 12 and a piston 13 are provided as devices for holding the drill shaft 7 via the drill shaft 1, incorporating a motor stator 9, and applying low frequency vibration to the drill shaft 7. Casing lO is ball slide unit 141
3 and a linear guide rail 15, it is held within the frame 3 so as to be movable back and forth.

低周波振動装置である油圧シリンダ12は復動型となっ
ており、油圧サーボ16からの油圧配管18.19によ
って圧力油を送り、ドリル軸7に低周波振動を与えると
共にケーシングIOを前後進させる。
The hydraulic cylinder 12, which is a low-frequency vibration device, is of a double-acting type, and sends pressure oil through hydraulic piping 18 and 19 from the hydraulic servo 16 to apply low-frequency vibration to the drill shaft 7 and move the casing IO back and forth. .

油圧サーボ16は油圧源ユニット17からの圧力油を受
けて作動する。
The hydraulic servo 16 operates upon receiving pressure oil from the hydraulic power source unit 17.

本体4の作動を説明すると、超音波振動子6によってド
リル軸7に超音波縦振動または超音波捩り振動を与え1
回転子8と固定子9とから成るモータによってドリル軸
7を回転する。一方、油圧サーボ16から復動油圧シリ
ンダ12に低周波油圧縦振動を付与する。
To explain the operation of the main body 4, the ultrasonic vibrator 6 applies ultrasonic longitudinal vibration or ultrasonic torsional vibration to the drill shaft 7.
A drill shaft 7 is rotated by a motor consisting of a rotor 8 and a stator 9. On the other hand, the hydraulic servo 16 applies low-frequency hydraulic longitudinal vibration to the double-acting hydraulic cylinder 12 .

ダイヤモンドコアドリル2はこれらの重畳された運動に
よってワーク41を穿孔する。
The diamond core drill 2 drills the workpiece 41 by these superimposed movements.

第3図は第1図の油圧サーボ16の代りに磁石21とコ
イル22とを組合わせたボイスコイルによって低周波縦
振動を付与するようにした実施例で、その他の構成は第
1図の実施例と同様である。第3図の装置は第1図の実
施例における油圧サーボに比し、高い周波数を付与する
ことが容易であり、周波数範囲を広域に変更することが
できる。また、往路と復路が対称でない波形の付与が容
易であるなどの特徴がある。
FIG. 3 shows an embodiment in which low-frequency longitudinal vibration is applied by a voice coil that is a combination of a magnet 21 and a coil 22 instead of the hydraulic servo 16 in FIG. 1, and the other configuration is the same as in FIG. 1. Similar to the example. The device shown in FIG. 3 can easily apply a higher frequency than the hydraulic servo in the embodiment shown in FIG. 1, and can change the frequency range over a wide range. Another feature is that it is easy to provide waveforms that are not symmetrical on the outbound and return trips.

第4図は別の実施例の縦断面図を示し、第5図にその制
御システムのブロック図を示した。ドリル軸に超音波振
動の波形検出装置31を取付け、この波形検出装置31
の検出波形を演算回路32で解析し、予め設定されてい
る最適波形との差を見出し、この波形の歪が零となるよ
うに油圧サーボ16を制御して、ドリル軸7に与える軸
方向のスラストを調節する。このスラスト調節装置は、
低周波振動装置の油圧シリンダ12に機能を重畳させて
兼用することができる。このような制御システムの波形
検出装置31は、種類、型式を問わない。
FIG. 4 shows a longitudinal sectional view of another embodiment, and FIG. 5 shows a block diagram of its control system. An ultrasonic vibration waveform detection device 31 is attached to the drill shaft, and this waveform detection device 31
The arithmetic circuit 32 analyzes the detected waveform, finds the difference from the preset optimal waveform, and controls the hydraulic servo 16 so that the distortion of this waveform becomes zero, thereby adjusting the axial direction applied to the drill shaft 7. Adjust thrust. This thrust adjustment device is
The hydraulic cylinder 12 of the low frequency vibration device can be used for multiple functions by being superimposed on the hydraulic cylinder 12. The waveform detection device 31 of such a control system can be of any type or model.

第6図は本発明のさらに別の実施例の縦断面図を示すも
ので、低周波縦振動を与える機構としてコイル34とド
リル軸7のケーシングに取付けた磁性体材料35および
スプリング36を設けた電M1機械的な低周波振動発生
装置を備えたもので。
FIG. 6 shows a longitudinal sectional view of yet another embodiment of the present invention, in which a coil 34, a magnetic material 35 attached to the casing of the drill shaft 7, and a spring 36 are provided as a mechanism for imparting low frequency longitudinal vibration. Electric M1 is equipped with a mechanical low frequency vibration generator.

コイル34に低周波交番電流を流すことにより低周波縦
振動をドリル軸に付与する。この装置は周波数の変更や
加振力の大きさの調整が容易であり、スプリング36に
よる線形双作動の復元力を備えており、スプリング36
のばね常数を変更することによって振動の波形を調節す
ることができる。
By passing a low frequency alternating current through the coil 34, low frequency longitudinal vibration is applied to the drill shaft. This device is easy to change the frequency and adjust the magnitude of the excitation force, and is equipped with a linear double-acting restoring force by the spring 36.
The vibration waveform can be adjusted by changing the spring constant.

【発明のフカ果1 本発明によればセラミックスの加工能率が著しく向上し
、セラミックスを使用する分野のセラミックス製品の設
計自由度の増大、コスト低減に大きく寄与し、用途拡大
に極めて大きな影響を及ぼす。
[Results of the invention 1] According to the present invention, the processing efficiency of ceramics is significantly improved, and the degree of freedom in designing ceramic products in fields where ceramics are used is increased, greatly contributing to cost reduction, and having an extremely large impact on the expansion of applications. .

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例装置のドリル側アセンブリーの
縦断面図、第2図は実施例の全体側面断面図、第3図、
第4図、第5図はそれぞれ別の実施例のドリル側ナセン
ブリーの縦断面図、第6図はさらに別の実施例の縦断面
図である。 1・・・工具側アセンブリー、2・・・ダイヤモンドコ
アドリル、3・・・フレーム、4・・・本体、6・・・
超音波振動子、7・−ドリル軸、8・・・回転子、9・
・・固定子、10−・・ケーシング、11・・・軸受、
12・・・油圧シリンダ、13−・・ピストン、l 4
−・・スライドユニット、15−・・ガイドレール、1
6・・・油圧サーボ、17・・・油圧源ユニット、18
.19°°。 油圧配管、20・・・スリップリング、2l−1ia石
、22・・・コイル、31・・・波形検出装置、32・
・・演算回路、34・・・コイル、35・・・磁性体材
料、36−・・スプリング。
FIG. 1 is a longitudinal cross-sectional view of the drill side assembly of an apparatus according to an embodiment of the present invention, FIG. 2 is a side cross-sectional view of the entire embodiment, and FIG.
4 and 5 are longitudinal cross-sectional views of the drill-side assembly of different embodiments, and FIG. 6 is a longitudinal cross-sectional view of still another embodiment. 1... Tool side assembly, 2... Diamond core drill, 3... Frame, 4... Main body, 6...
Ultrasonic vibrator, 7--drill shaft, 8... rotor, 9-
...Stator, 10--Casing, 11--Bearing,
12... Hydraulic cylinder, 13-... Piston, l 4
-...Slide unit, 15-...Guide rail, 1
6... Hydraulic servo, 17... Hydraulic power source unit, 18
.. 19°°. Hydraulic piping, 20... Slip ring, 2l-1ia stone, 22... Coil, 31... Waveform detection device, 32.
...Arithmetic circuit, 34--Coil, 35--Magnetic material, 36--Spring.

Claims (1)

【特許請求の範囲】 1 ドリル軸の回転駆動装置をドリル軸と同軸にドリル
内に組み込んだ超音波振動コアドリルボール盤において
、ワーク取付部を三次元移動可能に構成し、これを制御
する三次元数値計算制御機構を組み込んだことを特徴と
する超音波振動コアドリルボール盤。 2 ドリル軸および/またはワーク取付軸に超音波振動
の波形検出装置を設け、該検出装置の検出波形に応じて
ドリル軸のスラストを調節するスラスト調節装置を備え
たことを特徴とする超音波振動コアドリルボール盤。 3 前記スラスト調節装置を低周波縦振動を付与するサ
ーボモータに兼用した請求項2記載の超音波振動コアド
リルボール盤。 4 前記超音波波形検出装置とスラスト調節装置がボイ
スコイルからなる請求項2記載の超音波振動コアドリル
ボール盤。
[Scope of Claims] 1. In an ultrasonic vibrating core drill drilling machine in which a rotational drive device for a drill shaft is built into the drill coaxially with the drill shaft, a workpiece mounting portion is configured to be movable in three dimensions, and a three-dimensional numerical value for controlling this is provided. An ultrasonic vibrating core drill drilling machine characterized by incorporating a calculation control mechanism. 2. An ultrasonic vibration characterized in that a drill shaft and/or a workpiece mounting shaft is provided with an ultrasonic vibration waveform detection device, and a thrust adjustment device that adjusts the thrust of the drill shaft according to the detected waveform of the detection device. Core drill drilling machine. 3. The ultrasonic vibrating core drill drilling machine according to claim 2, wherein the thrust adjustment device is also used as a servo motor that applies low frequency longitudinal vibration. 4. The ultrasonic vibrating core drill drilling machine according to claim 2, wherein the ultrasonic waveform detection device and the thrust adjustment device include a voice coil.
JP5839188A 1988-03-14 1988-03-14 Ultrasonic vibration core drilling machine Pending JPH01234106A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5839188A JPH01234106A (en) 1988-03-14 1988-03-14 Ultrasonic vibration core drilling machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5839188A JPH01234106A (en) 1988-03-14 1988-03-14 Ultrasonic vibration core drilling machine

Publications (1)

Publication Number Publication Date
JPH01234106A true JPH01234106A (en) 1989-09-19

Family

ID=13083047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5839188A Pending JPH01234106A (en) 1988-03-14 1988-03-14 Ultrasonic vibration core drilling machine

Country Status (1)

Country Link
JP (1) JPH01234106A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0580735U (en) * 1992-04-08 1993-11-02 精電舎電子工業株式会社 Ultrasonic processing equipment
AT410768B (en) * 2001-02-27 2003-07-25 Herwig Dr Mayer Fixture for rotary powered tools
WO2005049255A1 (en) * 2003-11-20 2005-06-02 Kazumasa Ohnishi Machining device
US20110268516A1 (en) * 2010-04-29 2011-11-03 Edison Welding Institute, Inc. Ultrasonic machining assembly for use with portable devices
JP2016078203A (en) * 2014-10-21 2016-05-16 株式会社東芝 Cut processing device and cut processing method
CN111515423A (en) * 2020-04-02 2020-08-11 上海工程技术大学 Longitudinal-torsional composite ultrasonic vibration drilling machine
US10864580B2 (en) * 2018-01-23 2020-12-15 Quantum Impact, LLC Method and apparatus for machining a workpiece

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6044258A (en) * 1983-08-17 1985-03-09 Pilot Pen Co Ltd:The Vibrative tool machining device
JPS61241048A (en) * 1985-04-16 1986-10-27 Shimada Phys & Chem Ind Co Ltd Supervisory method for ultrasonic machining
JPS62162451A (en) * 1986-01-09 1987-07-18 Osaka Daiyamondo Kogyo Kk Ultrasonic grinding device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6044258A (en) * 1983-08-17 1985-03-09 Pilot Pen Co Ltd:The Vibrative tool machining device
JPS61241048A (en) * 1985-04-16 1986-10-27 Shimada Phys & Chem Ind Co Ltd Supervisory method for ultrasonic machining
JPS62162451A (en) * 1986-01-09 1987-07-18 Osaka Daiyamondo Kogyo Kk Ultrasonic grinding device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0580735U (en) * 1992-04-08 1993-11-02 精電舎電子工業株式会社 Ultrasonic processing equipment
AT410768B (en) * 2001-02-27 2003-07-25 Herwig Dr Mayer Fixture for rotary powered tools
WO2005049255A1 (en) * 2003-11-20 2005-06-02 Kazumasa Ohnishi Machining device
US20110268516A1 (en) * 2010-04-29 2011-11-03 Edison Welding Institute, Inc. Ultrasonic machining assembly for use with portable devices
US8905689B2 (en) * 2010-04-29 2014-12-09 Edison Welding Institute Ultrasonic machining assembly for use with portable devices
JP2016078203A (en) * 2014-10-21 2016-05-16 株式会社東芝 Cut processing device and cut processing method
US10864580B2 (en) * 2018-01-23 2020-12-15 Quantum Impact, LLC Method and apparatus for machining a workpiece
CN111515423A (en) * 2020-04-02 2020-08-11 上海工程技术大学 Longitudinal-torsional composite ultrasonic vibration drilling machine
CN111515423B (en) * 2020-04-02 2021-04-06 上海工程技术大学 Longitudinal-torsional composite ultrasonic vibration drilling machine

Similar Documents

Publication Publication Date Title
JPS6085846A (en) Machine tool
KR100971168B1 (en) 5-axis cutting machine
EP1305136B1 (en) Lens lathe with vibration cancelling arrangement
CN108972302B (en) Non-resonant vibration auxiliary polishing device and method
US20070222401A1 (en) Variable reluctance fast positioning system and methods
US20050223858A1 (en) Variable reluctance fast positioning system and methods
Gao et al. Development of a three-degree-of-freedom ultrasonic vibration tool holder for milling and drilling
CN109571159B (en) A kind of free abrasive micro ultrasonic processing device and feed adjustment method
Lin et al. Development of a non-resonant 3D elliptical vibration cutting apparatus for diamond turning
CN107378655A (en) Multidimensional rotary ultrasonic transforms into organisation of working and its processing method
JPH10118811A (en) Machining device
JPH01234106A (en) Ultrasonic vibration core drilling machine
CN105171926A (en) Vibration-assisted device of single-point diamond cutting tool
US9895782B2 (en) Linear drive for machining of an optical workpiece
CN209036263U (en) A non-resonant vibration-assisted polishing device
CN106112159A (en) The Electrolyzed Processing vibration feed device of a kind of Parameter adjustable and control method thereof
KR920006656B1 (en) Machine tools
JP2000117581A (en) Balancer
CN220944429U (en) Tool for grinding milling blade
US20040155558A1 (en) Tunable vibratory actuator
CN113523435B (en) Hard and brittle complex structure spindle-free multipole servo polishing device and polishing method
JPS63500362A (en) Machine Tools
JPH10166204A (en) Machining device
CN106541418A (en) End effector and industrial robot
CN206185479U (en) Direct drive pendulum pivoted combined movement and complex machining device